KR101115576B1 - 술포니움 염의 제조 방법 및 이에 의하여 제조된 술포니움 염 - Google Patents

술포니움 염의 제조 방법 및 이에 의하여 제조된 술포니움 염 Download PDF

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Publication number
KR101115576B1
KR101115576B1 KR1020090094099A KR20090094099A KR101115576B1 KR 101115576 B1 KR101115576 B1 KR 101115576B1 KR 1020090094099 A KR1020090094099 A KR 1020090094099A KR 20090094099 A KR20090094099 A KR 20090094099A KR 101115576 B1 KR101115576 B1 KR 101115576B1
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KR
South Korea
Prior art keywords
group
alcohol
formula
reaction
sulfonium salt
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KR1020090094099A
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English (en)
Korean (ko)
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KR20110036431A (ko
Inventor
오정훈
한준희
박상욱
이승재
고성보
윤성준
Original Assignee
금호석유화학 주식회사
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Application filed by 금호석유화학 주식회사 filed Critical 금호석유화학 주식회사
Priority to KR1020090094099A priority Critical patent/KR101115576B1/ko
Priority to JP2010158829A priority patent/JP5351103B2/ja
Priority to SG201005862-6A priority patent/SG169934A1/en
Priority to TW099127770A priority patent/TWI423952B/zh
Priority to CN201010285269.0A priority patent/CN102030686B/zh
Publication of KR20110036431A publication Critical patent/KR20110036431A/ko
Application granted granted Critical
Publication of KR101115576B1 publication Critical patent/KR101115576B1/ko

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    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C303/00—Preparation of esters or amides of sulfuric acids; Preparation of sulfonic acids or of their esters, halides, anhydrides or amides
    • C07C303/32—Preparation of esters or amides of sulfuric acids; Preparation of sulfonic acids or of their esters, halides, anhydrides or amides of salts of sulfonic acids
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C309/00—Sulfonic acids; Halides, esters, or anhydrides thereof
    • C07C309/01—Sulfonic acids
    • C07C309/02—Sulfonic acids having sulfo groups bound to acyclic carbon atoms
    • C07C309/03—Sulfonic acids having sulfo groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton
    • C07C309/07—Sulfonic acids having sulfo groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton containing oxygen atoms bound to the carbon skeleton
    • C07C309/08—Sulfonic acids having sulfo groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton containing oxygen atoms bound to the carbon skeleton containing hydroxy groups bound to the carbon skeleton
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F1/00—Compounds containing elements of Groups 1 or 11 of the Periodic Table
    • C07F1/02—Lithium compounds

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
KR1020090094099A 2009-10-01 2009-10-01 술포니움 염의 제조 방법 및 이에 의하여 제조된 술포니움 염 KR101115576B1 (ko)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020090094099A KR101115576B1 (ko) 2009-10-01 2009-10-01 술포니움 염의 제조 방법 및 이에 의하여 제조된 술포니움 염
JP2010158829A JP5351103B2 (ja) 2009-10-01 2010-07-13 スルホニウム塩の製造方法およびそれによって製造されたスルホニウム塩
SG201005862-6A SG169934A1 (en) 2009-10-01 2010-08-12 Method for preparing sulfonium salt and sulfonium salt prepared by the same
TW099127770A TWI423952B (zh) 2009-10-01 2010-08-19 鋶鹽的製備方法及以該方法製備的鋶鹽
CN201010285269.0A CN102030686B (zh) 2009-10-01 2010-09-16 制备锍盐的方法及由此方法制备的锍盐

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020090094099A KR101115576B1 (ko) 2009-10-01 2009-10-01 술포니움 염의 제조 방법 및 이에 의하여 제조된 술포니움 염

Publications (2)

Publication Number Publication Date
KR20110036431A KR20110036431A (ko) 2011-04-07
KR101115576B1 true KR101115576B1 (ko) 2012-03-06

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020090094099A KR101115576B1 (ko) 2009-10-01 2009-10-01 술포니움 염의 제조 방법 및 이에 의하여 제조된 술포니움 염

Country Status (5)

Country Link
JP (1) JP5351103B2 (zh)
KR (1) KR101115576B1 (zh)
CN (1) CN102030686B (zh)
SG (1) SG169934A1 (zh)
TW (1) TWI423952B (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108003033A (zh) * 2017-12-05 2018-05-08 常州大学 一种超级电容器用季铵盐的制备方法
CN114149349A (zh) * 2021-12-21 2022-03-08 江苏汉拓光学材料有限公司 一种光致产酸剂、光致产酸剂及其中间体的制备方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7304175B2 (en) * 2005-02-16 2007-12-04 Sumitomo Chemical Company, Limited Salt suitable for an acid generator and a chemically amplified resist composition containing the same
JP5070802B2 (ja) * 2005-10-28 2012-11-14 住友化学株式会社 化学増幅型レジスト組成物の酸発生剤用の塩
JP5226994B2 (ja) * 2006-09-11 2013-07-03 住友化学株式会社 化学増幅型レジスト組成物の酸発生剤の中間体
JP5033471B2 (ja) * 2007-05-09 2012-09-26 住友化学株式会社 有機化合物の結晶およびその製造方法
JP2008290980A (ja) * 2007-05-25 2008-12-04 Tokyo Ohka Kogyo Co Ltd 化合物、酸発生剤、レジスト組成物およびレジストパターン形成方法
JP5347349B2 (ja) * 2007-09-18 2013-11-20 セントラル硝子株式会社 ２−ブロモ−２，２−ジフルオロエタノール及び２−（アルキルカルボニルオキシ）−１，１−ジフルオロエタンスルホン酸塩類の製造方法
JP5681339B2 (ja) * 2007-10-02 2015-03-04 東京応化工業株式会社 化合物の製造方法
JP5399639B2 (ja) * 2008-02-18 2014-01-29 東京応化工業株式会社 レジスト組成物並びにレジストパターン形成方法
KR100940915B1 (ko) * 2008-03-13 2010-02-08 금호석유화학 주식회사 화학증폭형 레지스트 조성물용 산발생제
KR100973033B1 (ko) * 2008-05-21 2010-07-30 금호석유화학 주식회사 화학증폭형 레지스트 조성물용 산발생제
KR101054485B1 (ko) * 2008-09-23 2011-08-04 금호석유화학 주식회사 오늄염 화합물, 이를 포함하는 고분자 화합물, 상기 고분자화합물을 포함하는 화학증폭형 레지스트 조성물 및 상기 조성물을 이용한 패턴 형성 방법
KR100998503B1 (ko) * 2008-10-30 2010-12-07 금호석유화학 주식회사 방향족 환을 포함하는 산 발생제
JP5829795B2 (ja) * 2009-03-31 2015-12-09 住友化学株式会社 化学増幅型フォトレジスト組成物
JP5612883B2 (ja) * 2009-03-31 2014-10-22 住友化学株式会社 化学増幅型フォトレジスト組成物
JP5580632B2 (ja) * 2009-03-31 2014-08-27 住友化学株式会社 化学増幅型フォトレジスト組成物

Also Published As

Publication number Publication date
TWI423952B (zh) 2014-01-21
JP5351103B2 (ja) 2013-11-27
TW201113247A (en) 2011-04-16
KR20110036431A (ko) 2011-04-07
CN102030686B (zh) 2014-07-02
JP2011074061A (ja) 2011-04-14
SG169934A1 (en) 2011-04-29
CN102030686A (zh) 2011-04-27

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