SG169934A1 - Method for preparing sulfonium salt and sulfonium salt prepared by the same - Google Patents

Method for preparing sulfonium salt and sulfonium salt prepared by the same

Info

Publication number
SG169934A1
SG169934A1 SG201005862-6A SG2010058626A SG169934A1 SG 169934 A1 SG169934 A1 SG 169934A1 SG 2010058626 A SG2010058626 A SG 2010058626A SG 169934 A1 SG169934 A1 SG 169934A1
Authority
SG
Singapore
Prior art keywords
sulfonium salt
preparing
same
formula
prepared
Prior art date
Application number
SG201005862-6A
Other languages
English (en)
Inventor
Jung-Hoon Oh
Joon-Hee Han
Sang-Wook Park
Seung-Jae Lee
Sung-Bo Ko
Sung-Jun Yoon
Original Assignee
Korea Kumho Petrochem Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Korea Kumho Petrochem Co Ltd filed Critical Korea Kumho Petrochem Co Ltd
Publication of SG169934A1 publication Critical patent/SG169934A1/en

Links

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
SG201005862-6A 2009-10-01 2010-08-12 Method for preparing sulfonium salt and sulfonium salt prepared by the same SG169934A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020090094099A KR101115576B1 (ko) 2009-10-01 2009-10-01 술포니움 염의 제조 방법 및 이에 의하여 제조된 술포니움 염

Publications (1)

Publication Number Publication Date
SG169934A1 true SG169934A1 (en) 2011-04-29

Family

ID=43884198

Family Applications (1)

Application Number Title Priority Date Filing Date
SG201005862-6A SG169934A1 (en) 2009-10-01 2010-08-12 Method for preparing sulfonium salt and sulfonium salt prepared by the same

Country Status (5)

Country Link
JP (1) JP5351103B2 (zh)
KR (1) KR101115576B1 (zh)
CN (1) CN102030686B (zh)
SG (1) SG169934A1 (zh)
TW (1) TWI423952B (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108003033A (zh) * 2017-12-05 2018-05-08 常州大学 一种超级电容器用季铵盐的制备方法
CN114149349A (zh) * 2021-12-21 2022-03-08 江苏汉拓光学材料有限公司 一种光致产酸剂、光致产酸剂及其中间体的制备方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7304175B2 (en) * 2005-02-16 2007-12-04 Sumitomo Chemical Company, Limited Salt suitable for an acid generator and a chemically amplified resist composition containing the same
JP5070802B2 (ja) * 2005-10-28 2012-11-14 住友化学株式会社 化学増幅型レジスト組成物の酸発生剤用の塩
JP5226994B2 (ja) * 2006-09-11 2013-07-03 住友化学株式会社 化学増幅型レジスト組成物の酸発生剤の中間体
JP5033471B2 (ja) * 2007-05-09 2012-09-26 住友化学株式会社 有機化合物の結晶およびその製造方法
JP2008290980A (ja) * 2007-05-25 2008-12-04 Tokyo Ohka Kogyo Co Ltd 化合物、酸発生剤、レジスト組成物およびレジストパターン形成方法
JP5347349B2 (ja) * 2007-09-18 2013-11-20 セントラル硝子株式会社 ２−ブロモ−２，２−ジフルオロエタノール及び２−（アルキルカルボニルオキシ）−１，１−ジフルオロエタンスルホン酸塩類の製造方法
JP5681339B2 (ja) * 2007-10-02 2015-03-04 東京応化工業株式会社 化合物の製造方法
JP5399639B2 (ja) * 2008-02-18 2014-01-29 東京応化工業株式会社 レジスト組成物並びにレジストパターン形成方法
KR100940915B1 (ko) * 2008-03-13 2010-02-08 금호석유화학 주식회사 화학증폭형 레지스트 조성물용 산발생제
KR100973033B1 (ko) * 2008-05-21 2010-07-30 금호석유화학 주식회사 화학증폭형 레지스트 조성물용 산발생제
KR101054485B1 (ko) * 2008-09-23 2011-08-04 금호석유화학 주식회사 오늄염 화합물, 이를 포함하는 고분자 화합물, 상기 고분자화합물을 포함하는 화학증폭형 레지스트 조성물 및 상기 조성물을 이용한 패턴 형성 방법
KR100998503B1 (ko) * 2008-10-30 2010-12-07 금호석유화학 주식회사 방향족 환을 포함하는 산 발생제
JP5580632B2 (ja) * 2009-03-31 2014-08-27 住友化学株式会社 化学増幅型フォトレジスト組成物
JP5829795B2 (ja) * 2009-03-31 2015-12-09 住友化学株式会社 化学増幅型フォトレジスト組成物
JP5612883B2 (ja) * 2009-03-31 2014-10-22 住友化学株式会社 化学増幅型フォトレジスト組成物

Also Published As

Publication number Publication date
KR101115576B1 (ko) 2012-03-06
CN102030686B (zh) 2014-07-02
TWI423952B (zh) 2014-01-21
JP2011074061A (ja) 2011-04-14
CN102030686A (zh) 2011-04-27
JP5351103B2 (ja) 2013-11-27
TW201113247A (en) 2011-04-16
KR20110036431A (ko) 2011-04-07

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