KR101104291B1 - 트레이 반송장치 및 이를 구비한 전자부품 시험장치 - Google Patents

트레이 반송장치 및 이를 구비한 전자부품 시험장치 Download PDF

Info

Publication number
KR101104291B1
KR101104291B1 KR1020097008270A KR20097008270A KR101104291B1 KR 101104291 B1 KR101104291 B1 KR 101104291B1 KR 1020097008270 A KR1020097008270 A KR 1020097008270A KR 20097008270 A KR20097008270 A KR 20097008270A KR 101104291 B1 KR101104291 B1 KR 101104291B1
Authority
KR
South Korea
Prior art keywords
tray
test
electronic component
hold
conveying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020097008270A
Other languages
English (en)
Korean (ko)
Other versions
KR20090086956A (ko
Inventor
유지 카네코
Original Assignee
가부시키가이샤 아드반테스트
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 아드반테스트 filed Critical 가부시키가이샤 아드반테스트
Publication of KR20090086956A publication Critical patent/KR20090086956A/ko
Application granted granted Critical
Publication of KR101104291B1 publication Critical patent/KR101104291B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
KR1020097008270A 2006-10-12 2006-10-12 트레이 반송장치 및 이를 구비한 전자부품 시험장치 Active KR101104291B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2006/320401 WO2008044305A1 (fr) 2006-10-12 2006-10-12 Appareil de transfert de plateau et appareil de test de composant électronique doté de cet appareil de transfert de plateau

Publications (2)

Publication Number Publication Date
KR20090086956A KR20090086956A (ko) 2009-08-14
KR101104291B1 true KR101104291B1 (ko) 2012-01-12

Family

ID=39282516

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020097008270A Active KR101104291B1 (ko) 2006-10-12 2006-10-12 트레이 반송장치 및 이를 구비한 전자부품 시험장치

Country Status (4)

Country Link
JP (1) JP5022375B2 (enExample)
KR (1) KR101104291B1 (enExample)
TW (1) TW200834097A (enExample)
WO (1) WO2008044305A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101040308B1 (ko) 2008-10-24 2011-06-10 세크론 주식회사 트레이 이송 장치
KR101334765B1 (ko) * 2012-04-18 2013-11-29 미래산업 주식회사 반도체 소자 핸들링 시스템
KR102231407B1 (ko) * 2014-11-07 2021-03-25 (주)테크윙 전자부품 분류 장비
KR102631908B1 (ko) * 2018-08-21 2024-01-31 (주)테크윙 핸들러 및 이를 포함하는 오토메이션 시스템
JP3227434U (ja) 2020-03-12 2020-08-27 株式会社アドバンテスト 電子部品ハンドリング装置及び電子部品試験装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100206644B1 (ko) * 1994-09-22 1999-07-01 오우라 히로시 반도체 디바이스의 자동검사장치 및 방법
KR19990083190A (ko) * 1998-04-14 1999-11-25 가부시키가이샤 어드밴티스트 트레이 이송 암 및 이를 사용한 트레이의 이재(移載) 장치, 집적 회로 시험 장치 및 트레이의 처리 방법
JP2005062090A (ja) 2003-08-19 2005-03-10 Renesas Technology Corp 半導体検査装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4041594B2 (ja) * 1998-09-02 2008-01-30 株式会社アドバンテスト 部品試験装置およびチャンバ入り口の開閉方法
AU2003241977A1 (en) * 2003-05-30 2005-01-21 Advantest Corporation Electronic component test instrument

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100206644B1 (ko) * 1994-09-22 1999-07-01 오우라 히로시 반도체 디바이스의 자동검사장치 및 방법
KR19990083190A (ko) * 1998-04-14 1999-11-25 가부시키가이샤 어드밴티스트 트레이 이송 암 및 이를 사용한 트레이의 이재(移載) 장치, 집적 회로 시험 장치 및 트레이의 처리 방법
JP2005062090A (ja) 2003-08-19 2005-03-10 Renesas Technology Corp 半導体検査装置

Also Published As

Publication number Publication date
JP5022375B2 (ja) 2012-09-12
WO2008044305A1 (fr) 2008-04-17
KR20090086956A (ko) 2009-08-14
TWI356908B (enExample) 2012-01-21
TW200834097A (en) 2008-08-16
JPWO2008044305A1 (ja) 2010-02-04

Similar Documents

Publication Publication Date Title
US6248967B1 (en) IC testing apparatus
US6137303A (en) Integrated testing method and apparatus for semiconductor test operations processing
KR100301750B1 (ko) 반도체디바이스용트레이꺼내기장치및반도체디바이스용트레이수납장치
KR100815490B1 (ko) 전자부품 시험장치
JP4299383B2 (ja) Ｉｃ試験装置
JP4018254B2 (ja) 電子部品の試験方法
US6573739B1 (en) IC testing apparatus
WO1997005495A1 (fr) Testeur de dispositif a semi-conducteurs
JPWO1999001776A1 (ja) 半導体デバイス試験装置及びこの試験装置に使用されるテストトレイ
JPH11287842A (ja) Ｉｃ試験装置
JP4222442B2 (ja) 電子部品試験装置用インサート
KR101042655B1 (ko) 전자부품 이송방법 및 전자부품 핸들링 장치
JPH112657A (ja) 複合ｉｃ試験装置
KR101104291B1 (ko) 트레이 반송장치 및 이를 구비한 전자부품 시험장치
US20010052767A1 (en) Sorting control method of tested electric device
JPWO2008142752A1 (ja) トレイ格納装置及び電子部品試験装置
WO2009116165A1 (ja) トレイ搬送装置およびそれを備えた電子部品試験装置
KR20020021150A (ko) 전자부품기판의 시험장치
JP5282032B2 (ja) トレイ格納装置、電子部品試験装置及びトレイ格納方法
JP4306895B2 (ja) 電子部品試験装置
JP4180163B2 (ja) 電子部品試験装置用吸着装置
JPWO2009060515A1 (ja) 搬送装置および電子部品ハンドリング装置
JP3379077B2 (ja) Ｉｃ試験装置
KR101214808B1 (ko) 전자부품 이송과 적재장치 및 이를 구비한 전자부품 시험장치
JPH11326448A (ja) Ｉｃ試験装置

Legal Events

Date Code Title Description
A201 Request for examination
PA0105 International application

Patent event date: 20090423

Patent event code: PA01051R01D

Comment text: International Patent Application

PA0201 Request for examination
PG1501 Laying open of application
E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20101122

Patent event code: PE09021S01D

E90F Notification of reason for final refusal
PE0902 Notice of grounds for rejection

Comment text: Final Notice of Reason for Refusal

Patent event date: 20110905

Patent event code: PE09021S02D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20111128

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20120103

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20120104

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
FPAY Annual fee payment

Payment date: 20141230

Year of fee payment: 4

PR1001 Payment of annual fee

Payment date: 20141230

Start annual number: 4

End annual number: 4

FPAY Annual fee payment

Payment date: 20151230

Year of fee payment: 5

PR1001 Payment of annual fee

Payment date: 20151230

Start annual number: 5

End annual number: 5

FPAY Annual fee payment

Payment date: 20161226

Year of fee payment: 6

PR1001 Payment of annual fee

Payment date: 20161226

Start annual number: 6

End annual number: 6

FPAY Annual fee payment

Payment date: 20171226

Year of fee payment: 7

PR1001 Payment of annual fee

Payment date: 20171226

Start annual number: 7

End annual number: 7

FPAY Annual fee payment

Payment date: 20181226

Year of fee payment: 8

PR1001 Payment of annual fee

Payment date: 20181226

Start annual number: 8

End annual number: 8

PR1001 Payment of annual fee

Payment date: 20230102

Start annual number: 12

End annual number: 12

PR1001 Payment of annual fee

Payment date: 20241226

Start annual number: 14

End annual number: 14