KR101104291B1 - 트레이 반송장치 및 이를 구비한 전자부품 시험장치 - Google Patents

트레이 반송장치 및 이를 구비한 전자부품 시험장치 Download PDF

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Publication number
KR101104291B1
KR101104291B1 KR1020097008270A KR20097008270A KR101104291B1 KR 101104291 B1 KR101104291 B1 KR 101104291B1 KR 1020097008270 A KR1020097008270 A KR 1020097008270A KR 20097008270 A KR20097008270 A KR 20097008270A KR 101104291 B1 KR101104291 B1 KR 101104291B1
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KR
South Korea
Prior art keywords
tray
test
electronic component
hold
conveying
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KR1020097008270A
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English (en)
Korean (ko)
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KR20090086956A (ko
Inventor
유지 카네코
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가부시키가이샤 아드반테스트
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Publication of KR20090086956A publication Critical patent/KR20090086956A/ko
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
KR1020097008270A 2006-10-12 2006-10-12 트레이 반송장치 및 이를 구비한 전자부품 시험장치 Active KR101104291B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2006/320401 WO2008044305A1 (fr) 2006-10-12 2006-10-12 Appareil de transfert de plateau et appareil de test de composant électronique doté de cet appareil de transfert de plateau

Publications (2)

Publication Number Publication Date
KR20090086956A KR20090086956A (ko) 2009-08-14
KR101104291B1 true KR101104291B1 (ko) 2012-01-12

Family

ID=39282516

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020097008270A Active KR101104291B1 (ko) 2006-10-12 2006-10-12 트레이 반송장치 및 이를 구비한 전자부품 시험장치

Country Status (4)

Country Link
JP (1) JP5022375B2 (enExample)
KR (1) KR101104291B1 (enExample)
TW (1) TW200834097A (enExample)
WO (1) WO2008044305A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101040308B1 (ko) 2008-10-24 2011-06-10 세크론 주식회사 트레이 이송 장치
KR101334765B1 (ko) * 2012-04-18 2013-11-29 미래산업 주식회사 반도체 소자 핸들링 시스템
KR102231407B1 (ko) * 2014-11-07 2021-03-25 (주)테크윙 전자부품 분류 장비
KR102631908B1 (ko) * 2018-08-21 2024-01-31 (주)테크윙 핸들러 및 이를 포함하는 오토메이션 시스템
JP3227434U (ja) 2020-03-12 2020-08-27 株式会社アドバンテスト 電子部品ハンドリング装置及び電子部品試験装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100206644B1 (ko) * 1994-09-22 1999-07-01 오우라 히로시 반도체 디바이스의 자동검사장치 및 방법
KR19990083190A (ko) * 1998-04-14 1999-11-25 가부시키가이샤 어드밴티스트 트레이 이송 암 및 이를 사용한 트레이의 이재(移載) 장치, 집적 회로 시험 장치 및 트레이의 처리 방법
JP2005062090A (ja) 2003-08-19 2005-03-10 Renesas Technology Corp 半導体検査装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4041594B2 (ja) * 1998-09-02 2008-01-30 株式会社アドバンテスト 部品試験装置およびチャンバ入り口の開閉方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100206644B1 (ko) * 1994-09-22 1999-07-01 오우라 히로시 반도체 디바이스의 자동검사장치 및 방법
KR19990083190A (ko) * 1998-04-14 1999-11-25 가부시키가이샤 어드밴티스트 트레이 이송 암 및 이를 사용한 트레이의 이재(移載) 장치, 집적 회로 시험 장치 및 트레이의 처리 방법
JP2005062090A (ja) 2003-08-19 2005-03-10 Renesas Technology Corp 半導体検査装置

Also Published As

Publication number Publication date
TW200834097A (en) 2008-08-16
JP5022375B2 (ja) 2012-09-12
TWI356908B (enExample) 2012-01-21
WO2008044305A1 (fr) 2008-04-17
KR20090086956A (ko) 2009-08-14
JPWO2008044305A1 (ja) 2010-02-04

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