TW200834097A - Tray transfer apparatus and electronic component testing apparatus provided with the same - Google Patents

Tray transfer apparatus and electronic component testing apparatus provided with the same

Info

Publication number
TW200834097A
TW200834097A TW096134691A TW96134691A TW200834097A TW 200834097 A TW200834097 A TW 200834097A TW 096134691 A TW096134691 A TW 096134691A TW 96134691 A TW96134691 A TW 96134691A TW 200834097 A TW200834097 A TW 200834097A
Authority
TW
Taiwan
Prior art keywords
tray transfer
transfer apparatus
tray
same
electronic component
Prior art date
Application number
TW096134691A
Other languages
Chinese (zh)
Other versions
TWI356908B (en
Inventor
Yuji Kaneko
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Publication of TW200834097A publication Critical patent/TW200834097A/en
Application granted granted Critical
Publication of TWI356908B publication Critical patent/TWI356908B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks

Abstract

A tray transfer apparatus is provided with a stocker (210) for storing a customer tray (KST); a lifting apparatus (220) which holds the customer tray (KST) and vertically moves; and a tray transfer apparatus (230), which holds the customer tray (KST) and moves in a vertical direction and a horizontal direction, for transferring and receiving the customer tray (KST) between the stocker (210) and the lifting apparatus (220). The tray transfer apparatus (230) has a plurality of movable positions (M1, M2) in the vertical direction, at which the tray transfer apparatus (230) can shift along the horizontal direction.
TW096134691A 2006-10-12 2007-09-17 Tray transfer apparatus and electronic component testing apparatus provided with the same TW200834097A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2006/320401 WO2008044305A1 (en) 2006-10-12 2006-10-12 Tray transfer apparatus and electronic component testing apparatus provided with the same

Publications (2)

Publication Number Publication Date
TW200834097A true TW200834097A (en) 2008-08-16
TWI356908B TWI356908B (en) 2012-01-21

Family

ID=39282516

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096134691A TW200834097A (en) 2006-10-12 2007-09-17 Tray transfer apparatus and electronic component testing apparatus provided with the same

Country Status (4)

Country Link
JP (1) JP5022375B2 (en)
KR (1) KR101104291B1 (en)
TW (1) TW200834097A (en)
WO (1) WO2008044305A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113602768A (en) * 2018-08-21 2021-11-05 泰克元有限公司 Carrying machine

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101040308B1 (en) 2008-10-24 2011-06-10 세크론 주식회사 Apparatus for transferring trays
KR101334765B1 (en) * 2012-04-18 2013-11-29 미래산업 주식회사 Handling System for Semiconductor device
KR102231407B1 (en) * 2014-11-07 2021-03-25 (주)테크윙 Electric device sorting equipment
JP3227434U (en) 2020-03-12 2020-08-27 株式会社アドバンテスト Electronic component handling device and electronic component testing device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5788084A (en) * 1994-09-22 1998-08-04 Advantest Corporation Automatic testing system and method for semiconductor devices
JPH11297791A (en) * 1998-04-14 1999-10-29 Advantest Corp Tray transfer arm, transfer device for tray using the same, id test device and tray transfer method
JP4041594B2 (en) * 1998-09-02 2008-01-30 株式会社アドバンテスト Component testing apparatus and chamber opening / closing method
AU2003241977A1 (en) * 2003-05-30 2005-01-21 Advantest Corporation Electronic component test instrument
JP2005062090A (en) 2003-08-19 2005-03-10 Renesas Technology Corp Semiconductor testing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113602768A (en) * 2018-08-21 2021-11-05 泰克元有限公司 Carrying machine

Also Published As

Publication number Publication date
KR101104291B1 (en) 2012-01-12
JPWO2008044305A1 (en) 2010-02-04
TWI356908B (en) 2012-01-21
WO2008044305A1 (en) 2008-04-17
JP5022375B2 (en) 2012-09-12
KR20090086956A (en) 2009-08-14

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