WO2008044305A1

WO2008044305A1 - Tray transfer apparatus and electronic component testing apparatus provided with the same

Info

Publication number: WO2008044305A1
Application number: PCT/JP2006/320401
Authority: WO
Inventors: Yuji Kaneko
Original assignee: Advantest Corporation
Priority date: 2006-10-12
Filing date: 2006-10-12
Publication date: 2008-04-17
Also published as: KR101104291B1; JPWO2008044305A1; TWI356908B; JP5022375B2; TW200834097A; KR20090086956A

Abstract

A tray transfer apparatus is provided with a stocker (210) for storing a customer tray (KST); a lifting apparatus (220) which holds the customer tray (KST) and vertically moves; and a tray transfer apparatus (230), which holds the customer tray (KST) and moves in a vertical direction and a horizontal direction, for transferring and receiving the customer tray (KST) between the stocker (210) and the lifting apparatus (220). The tray transfer apparatus (230) has a plurality of movable positions (M1, M2) in the vertical direction, at which the tray transfer apparatus (230) can shift along the horizontal direction.

Description

Specification

Tray transfer device and electronic component testing apparatus including the same

Technical field

[0001] The present invention relates to an IC device by electrically contacting input / output terminals of various electronic components such as semiconductor integrated circuit elements (hereinafter also referred to as IC devices) to a contact portion of a test head. The present invention relates to an electronic component test apparatus to be tested, and more particularly to a tray transfer apparatus for transferring a tray that can accommodate an IC device, and an electronic component test apparatus including the tray transfer apparatus.

Background art

In the manufacturing process of electronic components such as IC devices, an electronic component testing apparatus is used to test the performance and function of an Ic device in a knocked state. A handler constituting the electronic component testing apparatus includes a storage unit, a loader unit, a chamber unit, and an unloader unit.

[0003] The handler loader section is circulated and transported in the electronic component testing apparatus from a tray (hereinafter referred to as a customer tray) for storing pre-test IC devices or test-tested IC devices. The IC device is reloaded onto the tray (hereinafter referred to as the test tray), and the test tray is loaded into the chamber.

[0004] Next, after applying high or low temperature heat stress to the IC device in the chamber portion of the handler, each IC device is brought into electrical contact with the contact portion of the test head, and the electronic component test apparatus main body (hereinafter referred to as the main part) , Called Tester).

[0005] Next, the test tray loaded with the tested IC device is carried out to the unloader section with the force of the chamber section, and the IC device is mounted on the customer tray according to the test result in the unloader section. Sorting into categories such as non-defective products and defective products is performed.

[0006] The storage unit of the handler supplies the customer tray storing the IC device before the test to the loader unit, and accepts the customer tray in which the IC devices after the test are classified and stored from the unloader unit.

[0007] The storage unit stores a plurality of customer trays in a stacked state, and lifts and lowers the lifting force that can hold and move the customer train and move up and down. A tray transfer device that is movable in the vertical and horizontal directions to pass the customer tray to and from the force.

In this conventional storage unit, when the lifting device is lowered while the tray transfer device is located directly below the lifting device, the lifting device and the tray transfer device interfere with each other. The lifting device can only be lowered after retraction.

[0009] In addition, even when the tray transfer device moves horizontally while the lifting device is moving up and down, the lifting device and the tray transfer device may interfere with each other. Otherwise, the tray transfer device cannot be moved.

[0010] For the reasons described above, a lot of waiting time is generated in the tray transporting operation. In electronic component testing equipment that can increase the simultaneous measurement constant, such a waiting time may hinder throughput improvement.

Disclosure of the invention

An object of the present invention is to provide a tray transport apparatus capable of shortening the tray transport time and an electronic component testing apparatus including the same.

[0012] In order to achieve the above object, according to the present invention, there is provided a tray transport apparatus for transporting a first tray capable of accommodating an electronic device under test, which stores the first tray. Means, a holding means capable of holding the first tray and capable of moving along a first direction, and the first means between the storage means and the holding means. In order to deliver the tray, the first tray can be held and moved along the first direction and a second direction different from the first direction. And the transfer means has a plurality of movable positions in the first direction at which the transfer means can move along the second direction. A feeding device is provided (see claim 1).

In the present invention, the transfer means has a plurality of movable positions in the first direction in which the transfer means can move along the second direction. As a result, the transfer means and the holding means can move simultaneously without interfering with each other, so that the tray transport time can be shortened. [0014] In the above invention, although not particularly limited, the transfer means is in the second direction without interfering with the holding means in at least one movable position regardless of the position of the holding means. It is preferable to be movable (see claim 2).

[0015] Although not particularly limited in the above invention, the holding means is movable along the first direction between a first restricting position and a second prescribed position, The movable position includes a first movable position where the transfer means can move along the second direction between the first restricted position and the second defined position; and And a second movable position where the transfer means can move along the second direction between a second prescribed position and the storage means. (See claim 3).

[0016] Although not particularly limited in the above invention, a space through which the transfer means can pass is formed between the storage means and the holding means located at the second specified position. Preferably, the second movable position is provided in the space (see claim 4).

[0017] Although not particularly limited in the above invention, the transfer means is capable of holding the first tray and is capable of moving along the first direction independently of each other. Preferably, the holding means has a holding head, and the transfer means is capable of simultaneously moving the plurality of holding heads along the second direction (see claim 5).

[0018] Although not particularly limited in the above invention, the transfer means is capable of holding the first tray and independent of each other along the first direction and the second direction. It is preferable to have a plurality of movable holding heads (see claim 6).

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[0019] Although not particularly limited in the above invention, the transfer means is located at the first movable position V, the one holding head, and the second movable position, It is preferable that the other holding head can be simultaneously moved along the second direction (refer to claim 7).

[0020] Although not particularly limited in the above invention, the transfer means includes a plurality of the first toner. It is possible to hold a ray and move it simultaneously, and the holding means also includes a plurality of the first

It is preferable that one tray can be held and moved simultaneously (see claim 8).

[0021] In order to achieve the above object, according to the present invention, the input / output terminal of the electronic device under test is used for testing the electronic device under test by making electrical contact with the contact portion of the test head. There is provided an electronic component testing apparatus comprising any one of the above-described tray conveyance devices (see claim 9).

[0022] In the above invention, although not particularly limited, a loader unit for transferring the electronic device under test to the first tray and a second tray, and the electronic device under test carried in from the loader unit are A test part that is pressed against the contact part of the test head in a state where it is mounted on the second tray, and the tested electronic components that have been tested are transferred to the second tray carder and the first tray according to the test result. An unloader unit, wherein the tray transport device supplies the first tray in which the electronic device under test before testing is accommodated to the loader unit, and the electronic device under test after the test. Preferably, the second tray in which the second load is accommodated is also received by the unloader force (see claim 10).

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Brief Description of Drawings

FIG. 1 is a side view showing an entire electronic component testing apparatus according to an embodiment of the present invention.

FIG. 2 is a perspective view of the electronic device test apparatus shown in FIG.

FIG. 3 is a conceptual diagram showing a tray handling method in the electronic component testing apparatus of FIG.

FIG. 4 is a front view showing a storage portion of the electronic device test apparatus according to the embodiment of the present invention.

FIG. 5 is a side view showing a storage portion of the electronic component test apparatus according to the embodiment of the present invention.

FIG. 6 is an exploded perspective view showing an IC stocker used in the electronic component testing apparatus according to the embodiment of the present invention. FIG. 7 is a perspective view showing a customer tray used in the electronic component testing apparatus according to the embodiment of the present invention.

FIG. 8 is a front view showing a storage portion of an electronic component testing apparatus according to another embodiment of the present invention.

FIG. 9 is a front view showing a storage part of an electronic component test apparatus according to still another embodiment of the present invention.

FIG. 10 is an exploded perspective view showing a test tray used in the electronic component testing apparatus according to the embodiment of the present invention.

FIG. 11A is a schematic diagram (No. 1) illustrating a first example of a tray transport method by a tray transport device of the electronic component testing apparatus according to the embodiment of the present invention.

FIG. 11B is a schematic diagram (No. 2) showing the first example of the tray transport method by the tray transport device of the electronic device test apparatus according to the embodiment of the present invention.

FIG. 11C is a schematic diagram (No. 3) illustrating a first example of a tray transport method by the tray transport device of the electronic component test apparatus according to the embodiment of the present invention.

FIG. 11D is a schematic diagram (No. 4) illustrating a first example of a tray transport method by the tray transport device of the electronic component test apparatus according to the embodiment of the present invention.

FIG. 11E is a schematic diagram (No. 5) showing the first example of the tray transport method by the tray transport device of the electronic device test apparatus according to the embodiment of the present invention.

FIG. 11F is a schematic diagram (No. 6) illustrating a first example of a tray transport method by the tray transport device of the electronic device test apparatus according to the embodiment of the present invention.

[11G] FIG. 11G is a schematic diagram (No. 7) showing the first example of the tray carrying method by the tray carrying device of the electronic device testing apparatus according to the embodiment of the present invention.

[11H] FIG. 11H is a schematic diagram (No. 8) illustrating the first example of the tray transport method by the tray transport device of the electronic device test apparatus according to the embodiment of the present invention.

FIG. 111 is a schematic diagram (No. 9) showing the first example of the tray transport method by the tray transport device of the electronic device testing apparatus according to the embodiment of the present invention.

FIG. 11J is a schematic diagram (No. 10) showing the first example of the tray transport method by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention. FIG. 11K is a schematic view (No. 11) showing the first example of the tray transfer method by the tray transfer device of the electronic component testing apparatus according to the embodiment of the present invention.

FIG. 11L is a schematic diagram (No. 12) illustrating the first example of the tray transport method by the tray transport device of the electronic component testing device according to the embodiment of the present invention.

FIG. 12A is a schematic diagram (No. 1) showing a second example of a tray transport method by the tray transport device of the electronic component test apparatus according to the embodiment of the present invention.

FIG. 12B is a schematic diagram (No. 2) showing a second example of the tray transport method by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention.

FIG. 12C is a schematic diagram (No. 3) illustrating a second example of the tray transport method by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention.

FIG. 12D is a schematic diagram (No. 4) illustrating the second example of the tray transport method by the tray transport device of the electronic device test apparatus according to the embodiment of the present invention.

FIG. 12E is a schematic diagram (No. 5) illustrating the second example of the tray transport method by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention.

[12F] FIG. 12F is a schematic diagram (No. 6) showing a second example of the tray conveying method by the tray conveying device of the electronic component testing apparatus according to the embodiment of the present invention.

[12G] FIG. 12G is a schematic diagram (No. 7) illustrating a second example of the tray transport method by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention.

[12H] FIG. 12H is a schematic diagram (No. 8) illustrating the second example of the tray transport method by the tray transport device of the electronic component testing device according to the embodiment of the present invention.

FIG. 121 is a schematic diagram (No. 9) illustrating the second example of the tray transport method by the tray transport device of the electronic device testing apparatus according to the embodiment of the present invention.

[12J] FIG. 12J is a schematic diagram (No. 10) showing a second example of the tray conveying method by the tray conveying device of the electronic component testing apparatus according to the embodiment of the present invention.

FIG. 12K is a schematic diagram (No. 11) showing the second example of the tray transport method by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention.

FIG. 12L is a schematic diagram (No. 12) showing the second example of the tray carrying method by the tray carrying device of the electronic component testing apparatus according to the embodiment of the present invention. FIG. 12M is a schematic diagram (No. 13) showing the second example of the tray transport method by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention.

FIG. 12N is a schematic diagram (No. 14) showing the second example of the tray carrying method by the tray carrying device of the electronic component testing apparatus according to the embodiment of the present invention.

Explanation of symbols

[0024] 1 ... Handler

100 ··· Chamber section

200 ... storage

210 ··· Stocker

220 ... Lifting device

221 ··· Axial rail

222… Tape Nore

230 ··· Tray transfer device

231 ···· Axial rail

232 ... movable head

233mm, 233mm

234Α, 234Β ··· Holding head

235 ... Holding claw

300 ··· Loader

400 ... unloader

5 ... Test head

TST ... Test tray

KST ... Customer train

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a side view showing an entire electronic component testing apparatus according to an embodiment of the present invention, FIG. 2 is a perspective view of the electronic component testing apparatus of FIG. 1, and FIG. 3 is a tray in the electronic component testing apparatus of FIG. It is a conceptual diagram which shows the handling method of No .. FIG. 3 is a view for understanding the tray handling method in the electronic component testing apparatus according to the present embodiment. In practice, the members arranged side by side in the vertical direction are planarly shown. Some parts are shown. Therefore, its mechanical (three-dimensional) structure will be explained with reference to FIG.

[0028] The electronic device test apparatus according to the present embodiment tests (inspects) whether or not the IC device operates properly in a state where a high temperature or low temperature stress is applied to the IC device, and the test result is obtained. It is a device that classifies IC devices based on it, and consists of handler 1, test head 5 and tester 6. The IC device test using this electronic component test equipment is performed by replacing the IC device from the customer tray KST to the test tray TST.

For this reason, as shown in FIGS. 1 to 3, the handler 1 in this embodiment includes a storage unit 200 that stores a pre-test IC device and a customer tray KST loaded with a post-test IC device, The chamber unit 100 includes a loader unit 300 for transferring the IC device sent from the storage unit 200 to the test tray TST and feeding it to the chamber unit 100, and the test head 5 and testing the IC device in a state mounted on the test tray TST. The unloader unit 400 is configured to unload the tested IC devices from the chamber unit 100 and transfer them to the customer tray KST while sorting them.

[0030] The socket 50 provided in the test head 5 is connected to the tester 6 through the cable 7 shown in FIG. 1, and the IC device electrically connected to the socket 50 is connected to the tester 6 through the cable 7. Connect and test the IC device with the test signal from the tester 6 concerned. As shown in FIG. 1, a space 8 is provided in a part of the lower portion of the handler 1, and the test head 5 is replaceably disposed in the space 8, and a through-hole formed in the main base of the handler 1 is formed. It is possible to make electrical contact between the IC device and the socket 50 on the test head 5 via the connector. When changing the type of IC device, it is replaced with another test head having a socket suitable for the shape, number of pins, etc. of the IC device of that type.

[0031] Each part of the handler 1 will be described in detail below.

[0032] <Storage unit 200>

4 and 5 are a front view and a side view showing a storage portion of the electronic component test apparatus according to this embodiment, and FIG. 6 shows an IC stocker used for the electronic component test apparatus according to this embodiment. FIG. 7 is an exploded perspective view, and FIG. 7 is a perspective view showing a customer tray used in the electronic component testing apparatus according to the present embodiment.

As shown in FIGS. 4 and 5, the storage unit 200 includes a stock force 210 for storing the customer tray KST, a lifting device 220 that can hold the customer tray KST and can be lifted and lowered. In order to deliver the customer tray KST between the stocker 210 and the lifting device 220, a tray transfer device 230 that holds the customer tray KST and is movable in the vertical and horizontal directions is provided.

It should be noted that the stocker 210 in the present embodiment corresponds to an example of a storage unit in the present invention, the lifting device 220 in the present embodiment corresponds to an example of a holding unit in the present invention, and the tray transfer device 230 in the present embodiment. Corresponds to an example of the transfer means in the present invention.

[0035] As shown in FIGS. 2 to 4, the stocker 210 is equipped with pre-test IC devices and pre-test stock force 211 for storing the installed customer tray KST, and IC devices classified according to the test results. And tested stock force 212.

[0036] As shown in Fig. 6, each of the pre-test stock force 211 and the tested stock force 212 is a frame-like tray support frame 213 and the lower force of the tray support frame 213 also enters and moves upward and downward. And an elevator 214 that can be used. A plurality of customer trays KST are stacked on the tray support frame 213, and only the stacked customer trays KST are moved up and down by the elevator 214! /.

[0037] In the present embodiment, the customer train KST is a force in which 60 accommodating portions 91 for accommodating IC devices are arranged in 10 rows x 6 columns as shown in FIG. There are various arrangement variations depending on the variety.

[0038] Since the pre-test stock force 211 and the pre-test stock force 212 have the same structure, the number of each of the pre-test stock 211 and the test stock 212 is appropriately set as necessary. It can be done.

In the present embodiment, as shown in FIGS. 2 to 4, one stocker ST K-B is provided for the pre-test stock force 211. On the other hand, eight stockers STK-1, STK 2, ..., STK-8 are provided in the tested stock force 212, and are classified into a maximum of eight categories according to the test results. Can be stored. In other words, in addition to non-defective products and defective products, it can be classified into non-defective products that have a high operating speed, medium-speed products, low-speed products, or defective products that require retesting. It becomes.

[0040] Further, in the tested stock force 212, one empty tray stock force STK-E is provided between STK-4 and STK-5. The empty tray tray force STK-E is stacked with empty customer trays KST sent to the unloader section 400! /.

[0041] As shown in FIG. 4, the electronic component testing apparatus according to the present embodiment includes six lifting devices 220, which are opened in the loader unit 300 and opened in the main base 101! /, The two window portions 306 and the four window portions 406 opened to the main base 101 in the unloader portion 400 are arranged one by one in each of the six window portions in total.

As shown in FIG. 5, each elevating device 220 is provided with a Z-axis direction rail 221 provided so as to hang from the main base 101, and capable of elevating along the Z-axis direction rail 221. The table 222 can be moved up and down between the first specified position H and the second specified position H.

2

[0043] The first specified position H is an upper limit in the Z-axis direction of the table 222. When the table 222 is positioned at the first specified position H, the window portion 306 (or the window portion) formed in the main base 101 is used. Via 406), the customer train KST faces the loader unit 300 (or the unloader unit 400).

On the other hand, the second specified position H is the lower limit of the table 222 in the Z-axis direction.

2

With the table 222 positioned at the specified position H of the

2

Tamatre KST is delivered.

[0045] In this manner, the lifting device 220 moves the customer tray KST between the storage unit 200 and the loader unit 300 (or the unloader unit 400) by holding and lifting the customer tray KST on the table 222. It becomes possible to move!

As shown in FIGS. 4 and 5, the tray transfer device 230 includes an X-axis direction rail 231 provided along the X-axis direction between the main base 101 and the stock force 210, and the X-axis direction. A movable head 232 capable of moving along the X-axis direction on the rail 231, two Z-axis direction rails 233A and 233B provided on the movable head 232, and each Z-axis direction rail 233A and 233B Holding heads 234A and 234B provided on the upper side so as to be movable along the Z-axis direction. Each of the holding heads 234A and 234B can move independently along the Z-axis direction, and has an open / close-type gripping claw 235 on the lower side for gripping the customer tray KST. Yes. The two holding heads 234A and 234B cannot be moved independently in the horizontal direction because they are attached to one movable head 232 via Z-axis direction rails 2 33A and 233B. .

[0047] This tray transfer device 230 grips the customer tray KST from the lowered table 222 of the lifting device 220 and moves it to the stocker 210, or moves the customer tray KST from the stocker 210 to the table 222 of the lifting device 220. It is possible to make it.

As shown in FIGS. 4 and 5, the tray transfer device 230 in the present embodiment has two movable positions M in the Z-axis direction that can move the holding heads 234A and 234B in the horizontal direction. Have M. The first movable position M is the first movable position of the lifting device 220.

1 2 1

It is located between the restriction position H and the second restriction position H. In contrast, the second moveable

1 2

The active position M is located between the second restricting position H of the lifting device 220 and the stock force 210.

twenty two

The In the present embodiment, the stocker 210 and the table 22 located at the second specified position H

2

2 is formed with a space that allows the holding heads 234A and 234B of the tray transfer device 230A to pass therethrough.

[0049] In the present embodiment, both holding heads 234A and 234B are moved in the horizontal direction while being positioned on the first movable position M (or the second movable position M), or one of the holding heads 234A and 234B is moved in the horizontal direction.

2

The holding head 234A is positioned at the first movable position M (or the second movable position M).

1 2

And the other holding head 234B is moved to the second movable position M (or the first movable position).

2

Both holding heads 234A and 234B can be moved in the horizontal direction while being positioned at the position M).

[0050] Further, for example, while the elevating device 220 is moving up and down, the second movable position M

The first and second holding heads 234A and 234B can be moved horizontally on the pre-test stock force 211 and the test stock force 212, regardless of the position of the table 222 of the lifting device 220. Since the holding heads 234A and 234B can be moved in the horizontal direction, the tray transfer operation can be shortened. [0051] In the present invention, the number of holding heads is not limited to two, the number of movable positions is not limited to two, and three or more holding heads may be provided, or three or more. May be provided with a movable position.

FIG. 8 is a front view showing a tray transfer device of an electronic component testing apparatus according to another embodiment of the present invention. In another embodiment of the present invention, as shown in FIG. 8, two movable heads 232A, 232B that are movable independently of each other along the X-axis direction on the X-axis direction rail 231 of the tray transfer device 230. The holding heads 234A and 234B can be moved independently of each other along the X-axis direction in addition to the Z-axis direction.

FIG. 9 is a front view showing a tray transfer device of an electronic component test apparatus according to still another embodiment of the present invention. In yet another embodiment of the present invention, as shown in FIG. 9, each of the holding heads 234A and 234B of the tray transfer device 230 has three customer trays KST.

In addition, the table 222 of each lifting / lowering device 220 can hold two force stapling trays KST and KST. This allows tray transfer

twenty three

It is possible to reduce the number of times that the device 230 exchanges the customer train KST with the stock force 210.

[0054] Of the three customer trays KST held by the holding heads 234A and 234B,

1 to 3 The upper customer tray KST has IC devices discrete from the second customer tray KST.

1 2

An empty customer tray used as a cover to prevent Therefore, the holding heads 234A and 234B transfer three customer trays KST to the table 222.

After 1-3, remove only the top customer tray KST. In Fig. 9, the left holding head 234A shows the state in which the uppermost customer tray KST is removed. Incidentally, the removed empty customer tray KST is returned to the empty tray force STK-E.

[0055] In the present invention, the number of customer trays KST simultaneously held by the holding heads 234A, 234B of the tray transfer device 230 is not limited to three, and four or more customer trays KST can be held simultaneously. It is also good. Similarly, the number of customer trays KST simultaneously held by the tables 222 of the lifting devices 220 is not limited to two, and three or more customer trays KST may be simultaneously held.

[0056] <Loader unit 300> FIG. 10 is an exploded perspective view showing a test tray used in the electronic device testing apparatus according to the embodiment of the present invention.

[0057] The customer tray KST described above is provided with a tray transfer device 230 provided between the storage unit 200 and the main base 101. Lower force is also carried. In the loader section 300, the IC device loaded in the customer tray KST is transferred by the device transport device 310 to the pre-processor (^ 61 ") 305, where the mutual positional relationship of the IC devices is determined. Thereafter, the IC device transferred to the precursor 305 is reloaded onto the test tray TST stopped at the loader unit 300 by the device transport device 310.

[0058] As shown in FIG. 10, the test tray TST is provided with crosspieces 13 in parallel and equidistant on the rectangular frame 12, and on both sides of the crosspieces 13 and on the side 12a of the frame 12 facing the crosspieces 13. A plurality of mounting pieces 14 are formed so as to protrude at equal intervals. An insert receiving portion 15 is configured by the space between these bars 13 or between the bars 13 and the side 12a and the two mounting pieces 14.

[0059] Each insert receiving portion 15 is configured to receive one insert 16, and this insert 16 is attached to the two attachment pieces 14 in a floating state using fasteners 17. . For this purpose, attachment holes 19 for attaching the insert 16 to the attachment piece 14 are formed at both ends of the insert 16. As shown in FIG. 10, 64 of these inserts 16 are attached to one test tray TST and arranged in 4 rows and 16 columns.

Note that the inserts 16 have the same shape and the same dimensions, and an IC device is accommodated in each insert 16. The IC accommodating portion 18 of the insert 16 is determined according to the shape of the IC device to be accommodated, and is a rectangular recess in the example shown in FIG.

[0061] As shown in FIG. 2, the loader unit 300 includes a device transfer device 310 that reloads IC devices from the customer tray KST to the test tray TST. The device transport device 310 includes two Y-axis rails 311 installed on the main base 101 along the Y-axis direction, and a movable device capable of reciprocating along the Y-axis direction on the Y-axis direction rails 311. Arm 312 and movable arm 312 are supported by movable arm 312 so as to be movable along the X-axis direction. The moving head 313 is provided with suction pads (not shown) arranged in 2 rows and 8 columns downward. Each suction pad can be moved up and down by an actuator (not shown), and 16 IC devices can be transferred from the customer tray KST to the test tray TST at a time.

[0062] As shown in FIGS. 2 and 3, a precursor 305 is provided between the customer tray KST and the test tray TST. Although not shown in the drawing, the precursor 305 has a relatively deep recess, and the periphery of the recess is surrounded by an inclined surface. Therefore, the IC device mutual position relationship can be accurately determined by dropping the IC device to be transferred to the test tray TST onto the precursor 305 before moving it to the test tray TST. It is possible to accurately transfer devices to the test tray TST.

When the IC devices are stored in all the storage units 18 of the test tray TST, the test tray TST is carried into the chamber unit 100 by the tray transfer device 102.

[0064] On the other hand, when all the IC devices mounted on the customer tray KST are loaded onto the test tray TST, the empty customer tray KST is lowered by the lifting device 220, and this empty tray is transferred to the tray transfer device 230. Deliver. The tray transfer device 230 stores the empty tray in the empty tray force STK-E and stores the empty tray in the tested stock force 212 when it is fully loaded with the customer tray KST force C device of the tested stock force 212. Supply.

[0065] <Chamber part 100>

The above-described test tray TST is loaded into the chamber section 100 after IC devices are loaded by the loader section 300, and each IC device is tested in a state of being mounted on the test tray TST.

As shown in FIGS. 2 and 3, the chamber unit 100 includes a soak chamber 110 that applies a target high or low temperature stress to the IC device loaded on the test tray TST, and the soak chamber 110. The test chamber 120 that contacts the IC device in the state where thermal stress is applied with the test head 5 and the unsoak chamber 130 that also removes the thermal stress from the IC device force that has been tested are configured. .

[0067] The unsoak chamber 130 is thermally connected to the soak chamber 110 and the test chamber 120. In practice, it is preferable to insulate the area of the soak chamber 110 and test chamber 120 at a high or low temperature, and the unsoak chamber 130 is thermally insulated from these forces. Collectively called chamber part 100.

[0068] The soak chamber 110 is disposed so as to protrude above the test chamber 120. As conceptually shown in FIG. 3, a vertical transfer device is provided inside the soak chamber 110, and a plurality of test tray TST force vertical transfer devices are provided until the test chamber 120 is empty. Waiting while being supported. Mainly during this standby period — high or low temperature stress of about 55 to 150 ° C is applied to the IC device.

[0069] The test head 5 is disposed in the center of the test chamber 120, the test tray TST is carried above the test head 5, and the input / output terminals of the IC device are connected to the socket 50 of the test head 5. IC devices are tested by making electrical contact with the contact pins.

[0070] The result of this test is stored in the storage device of the electronic component test apparatus at an address determined by the identification number assigned to the test tray TST and the IC device number assigned in the test tray TST. Is done.

[0071] Like the soak chamber 110, the unsoak chamber 130 is also arranged so as to protrude upward from the test chamber 120, and a vertical transfer device is provided as conceptually shown in FIG. In this unsoak chamber 130, when a high temperature is applied to the IC device in the soak chamber 110, the IC device is cooled to the room temperature by blowing air, and then the heat-removed IC device is carried out to the unloader unit 400. To do. On the other hand, when a low temperature is applied to the IC device in the soak chamber 110, the IC device is heated with warm air or a heater to return to a temperature at which condensation does not occur, and then the removed IC device is unloaded. Carry out to part 400.

[0072] In the upper part of the soak chamber 110, an inlet for carrying the test tray TST from the main base 101 is formed. Similarly, an outlet for carrying out the test tray TST to the main base 101 is formed in the upper part of the unsoak chamber 130. The main base 101 is provided with a tray transfer device 102 for taking the test tray TST in and out of the chamber portion 100 through these inlets and outlets. This tray conveyor 1 02 is composed of, for example, a rotating roller. The tray conveying device 102 returns the soak chamber 110 to the soak chamber 110 via the test tray TST force unloader unit 400 and the loader unit 300 carried out of the ann soak chamber 130.

[0073] <Unloader unit 400>

The unloader unit 400 reloads the IC device that has been tested with the test tray TST force carried to the unloader unit 400 into the customer tray KST according to the test result.

[0074] As shown in FIG. 2, the main base 101 in the unloader unit 400 is arranged so as to face the upper surface of the customer train KST force main base 101 carried from the storage unit 200 force to the unloader unit 400. Four window portions 406 are formed.

[0075] The unloader unit 400 includes a device transfer device 410 that transfers a tested IC device from the test tray TST to the customer tray KST. This device transport apparatus 410 is capable of reciprocating along the Y-axis direction on two Y-axis direction rails 411 constructed on the main base 101 along the Y-axis direction. Movable arm 412, movable head 413 supported by movable arm 412 so as to be movable along the X-axis direction, and 16 suction pads (not aligned) arranged in two rows and eight columns downward on movable head 413 As shown). Each suction pad can be moved up and down along the Z-axis by an actuator (not shown), and it is possible to transfer 16 IC devices to the customer tray KST as well as the test tray TST force at a time. And

[0076] As shown in FIGS. 4 and 5, an elevating device 220 for elevating and lowering the customer tray KST is provided below each window 406. Here, a tested IC device is installed. The loaded customer tray KST is loaded and lowered, and this full tray is transferred to the tray transfer device 230.

[0077] Incidentally, in this embodiment, although the maximum number of categories that can be sorted is eight, the unloader 400 has only four windows 406, so the unloader 400 has a maximum of four. Only customer train KST can be placed. Therefore, the categories that can be sorted in real time are limited to four categories. In general, good products are classified into three categories: high speed, medium speed, and low speed, and in addition to defective products, four categories are sufficient. For example, retesting is required. Like those that do A category that does not belong may occur in rare cases.

[0078] As described above, when an IC device classified into a category other than the category assigned to the four customer trays KST arranged in the window 406 of the unloader unit 400 is generated, one IC is generated from the unloader unit 400. The customer tray KST is returned to the storage unit 200, and instead, the customer tray KST assigned with the newly generated category is transferred to the unloader unit 400 to store the IC device. However, in this case, the sorting operation must be interrupted, and there is a problem when the throughput decreases. Therefore, in the present embodiment, a buffer unit 405 is provided between the test tray TST of the unloader unit 400 and the window unit 406, and an IC device of a category that rarely generates force is temporarily stored in the buffer unit 405. ing.

[0079] Further, in this embodiment, since the tray transfer device 230 and the lifting device 220 can move simultaneously without interfering with each other, the customer train is used to switch the category assigned to the window 406. Tray transport time can be shortened when replacing KST.

Next, a tray conveying method in the electronic component testing apparatus according to the embodiment of the present invention will be described.

FIG. 11A to FIG. 11L are schematic views (parts 1 to 12) showing a first example of the tray transport method in the present embodiment. First, referring to FIG. 11A to FIG. 11L, a fully loaded customer tray KST held by the first lifting device 220a on the leftmost side in the figure and positioned in the window 406.

An example will be described in which f is recovered to the tested stock force STK-2 and the empty customer tray KST is supplied from the empty tray stock force STK-E to the first window 406a. The following

e

In the explanation, the four lifting devices shown in FIGS. 11A to 12N are also referred to as the first to fourth lifting devices 220a to 220d in order from the left side force, and the two holding heads shown in FIG. The first and second holding heads 234A and 234B are referred to in order from the left side.

[0082] When a customer tray KST replacement request is issued and held by the first lifting device 220a, first, the first lifting device 220a starts to descend as shown in FIG. 11A. While the first elevating device 220a is descending, as shown in FIG. 11B, the first holding head 234A starts to rise and the second holding head 234B starts to descend. 1st lifting equipment The device 220a stops when it is lowered to the second restriction position H, and the first holding head 234A

2

Stop when you reach the movable position M of 1. Further, the second holding head 234B stops when it is lowered to the empty trust force STK-E, and holds the empty customer tray KST located at the uppermost stage.

e

Thus, in the present embodiment, the first lifting device 220a and the first and second holding heads 23

Since 4A and 234B are moved simultaneously, the tray transport time can be shortened.

Next, as shown in FIG. 11C, the second holding head 234B is moved to the second movable position H.

2 When lifted, as shown in FIG. 11D, the first and second holding heads 234A move along the horizontal direction so that the first holding head 234A is positioned above the first lifting device 220a. . At this time, as shown in the figure, the first holding head 234A moves in the horizontal direction at the first movable position M, and the second holding head 234B moves horizontally at the second movable position M. Move in the direction.

2

[0085] Next, as shown in FIG. 11E, the first holding head 234A is lowered to receive the full customer tray KST from the first lifting device 220a, and the second holding head 234B is the first holding head 234B. f

Ascend to moveable position M. Here, in this embodiment, since the first holding head 234A and the second holding head 234B are moved simultaneously, the tray transport time can be shortened. As shown in Figure 11F, load the full customer tray KST from the first lifting device 220a to f

Upon receipt, the first holding head 234A is also raised to the first movable position M.

Next, as shown in FIG. 11G, the first and second holding heads 234A, 234B are arranged such that the second holding head 234B is positioned above the first lifting device 220a. Moves horizontally at the movable position M. When the second holding head 234B is positioned above the first lifting device 220a, the first and second holding heads 234A and 234B start to descend as shown in FIG. 11H. The first holding head 234A moves down to the second movable position M.

2 Stop. Further, the second holding head 234B stops when it is lowered to the first lifting device 220a, and hands over the empty customer tray KST to the first lifting device 220a. Where real e

In the embodiment, since the first holding head 234A and the second holding head 234B are moved simultaneously, the tray conveyance time can be shortened.

[0087] Next, as shown in FIG. 111, the second holding head 234B moves to the first movable position M. Once raised, as shown in FIG. 11J, the first and second holding heads 234A, 234B move horizontally so that the first holding head 234A is positioned above the tested stock force STK-2. To do. At this time, as shown in the figure, the first holding head 234A moves in the horizontal direction at the second movable position M, and the second holding head 234B moves at the first movable position M.

2 Move to 1! And move horizontally.

[0088] When the first holding head 234A is positioned above the tested stock force STK-2, as shown in FIG. 11K, the first and second holding heads 234A and 234B are lowered and the first raising and lowering is performed. Device 220a is raised. When the first holding head 234A descends to the tested stock force STK-2, it stops and delivers the full customer tray KST to the tested stock force STK-2. F

The second holding head 234B stops when it is lowered to the second movable position M.

2

Thus, in this embodiment, the first lifting device 220a and the first and second holding heads 23

Next, as shown in FIG. 11L, the first holding head 234A moves to the second movable position M.

The first elevating device 220a rises to the first restricting position H as it rises at 2. In this state, an empty customer tray KST is held by the first lifting device 220a and the window e

It faces the unloader section 400 via the section 406, and the full customer tray KST f is stored in the tested stock force STK-2, thus completing a series of tray transport operations.

FIGS. 12A to 12N are schematic views (Nos. 1 to 14) showing a second example of the tray transport method in the present embodiment. Next, referring to FIGS. 12A to 12N, a fully loaded customer train KST held by the second lifting / lowering device 220b and positioned in the window 406!

An example in which the empty force stapling tray KST is supplied to the first window 406b from the empty tray stocking force STK-E while being collected in -2.

e

[0092] As shown in FIG. 12A, first, the second lifting device 220b starts to descend. While the second raising / lowering device 220b is descending, as shown in FIG. 12B, the second holding head 234B positioned above the empty tray stocks force STK-E also begins to descend. The second lifting device 220 b stops when it is lowered to the second restriction position H. The second holding device 234B is empty.

2

When the tray strike force STK— E is lowered, the empty customer tray KS located at the top Hold T

e

Thus, in the present embodiment, even if the first holding head 234A is located directly below the second lifting device 220b, the second lifting device 220b and the first holding head 234B The second lifting / lowering device 220b can be lowered without interference, and the second lifting / lowering device 220b and the second holding head 234B can be moved at the same time. It is out.

[0094] Incidentally, in the case of a conventional tray transport device that does not have the second movable position M, the first

2

2 holding head 234B receives empty customer tray KST from empty stocker tray STK-E

In addition, if the first and second holding heads 234A, 234B have not retracted the force directly below the second lifting device 220b, the second lifting device 220b cannot start to move down. This was a waiting time in the tray transfer work.

[0095] Next, as shown in FIG. 12C, the second holding head 234B moves to the second movable position M.

2 When lifted, as shown in FIG. 12D, the first and second holding heads 234A and 234B move in the horizontal direction so that the first holding head 234A comes off from directly below the second lifting device 220b. At this time, the first and second holding heads 234A and 234B both move in the horizontal direction at the second movable position M.

2

Next, as shown in FIG. 12E, when the first holding head 234A rises to the first movable position M, as shown in FIG. 12F, the first and second holding heads 234A, 234B Then, the first holding head 234A moves in the horizontal direction so as to be positioned above the second lifting device 220. At this time, as shown in the figure, the first holding head 234A moves horizontally at the first movable position M, and the second holding head 234B moves at the second movable position M.

1 2 Move horizontally.

Next, as shown in FIG. 12G, the first holding head 234A is lowered to receive the full customer tray KST from the second lifting device 220b, and the second holding head 234B is the first holding head 234B.

f

Ascend to moveable position M. Here, in this embodiment, since the first holding head 234A and the second holding head 234B are moved simultaneously, the tray transport time can be shortened. As shown in Figure 12H, the customer tray KST packed with the first holding head 234A

f When received from the second lifting device 220b, the first holding head 234A is also movable in the first position. Ascend to the active position.

[0098] Next, as shown in FIG. 121, the first and second holding heads 234Β and 234Β are arranged so that the second holding head 234Β is positioned above the second lifting device 220b. Move horizontally at movable position M. When the second holding head 234B is positioned above the second lifting / lowering device 220b, the first and second holding heads 234A and 234B start to descend as shown in FIG. 12J. The first holding head 234A is lowered to the second movable position M.

2

Stop. The second holding head 234B stops when it is lowered to the second lifting device 220b, and hands over the empty customer tray KST to the second lifting device 220b. Where real e

Next, as shown in FIG. 12K, when the second holding head 234B rises to the first movable position M, as shown in FIG. 12L, the first and second holding heads 234A, 234B Then, the first holding head 234A is moved horizontally so that it is positioned above the tested stock force STK-2. At this time, as shown in the figure, the first holding head 234A moves in the horizontal direction at the second movable position M, and the second holding head 234B moves at the first movable position M.

2 Move to 1! And move horizontally.

[0100] When the first holding head 234A is positioned above the tested stock force STK-E, as shown in FIG. 12M, the first and second holding heads 234A and 234B are lowered and the second lifting and lowering is performed. Device 220b is raised. When the first holding head 234A descends to the tested stock force STK-2, it stops and delivers the full customer tray KST to the tested stock force STK-2. F

2

Thus, in the present embodiment, the first elevating device 220a and the first and second holding heads 23

[0102] Next, as shown in FIG. 12N, the first holding head 234A moves to the second movable position M.

At the same time, the second elevating device 220b is raised to the first restriction position H. In this state, an empty customer tray KST is held by the second lifting / lowering device 220b and the window e

Through the unit 406, the unloader unit 400 is faced, and the full customer tray KST f is stored in the tested stock force STK-E. [0103] As described above, in the present embodiment, the tray transfer device 230 has two movable positions M and M in the vertical direction that can move along the horizontal direction. G

1 2

The lay transfer device 230 and the lifting device 220 can move simultaneously without interfering with each other, and the tray transport time is shortened.

[0104] The embodiment described above is described for facilitating the understanding of the present invention, and is not described for limiting the present invention. Therefore, each element disclosed in the above embodiment includes all design changes and equivalents belonging to the technical scope of the present invention.

For example, a pitch changing mechanism such as a floating joint or a lock-and-free mechanism is provided between the holding heads 234A and 234B so that the pitch between the holding heads 234A and 234B can be changed. The holding heads 234A and 234B may be positioned relative to the lifting device 220 by contacting the lifting force 210 with the lifting force 220. Thus, the first holding head 234A and the second holding head 234B can simultaneously approach the lifting device 220 and the stocking force 210, and the tray transport time can be further shortened.

Claims

The scope of the claims

[1] A tray transport device for transporting a first tray capable of accommodating an electronic device under test,

Storage means for storing the first tray;

Holding means capable of holding the first tray and capable of moving along the first direction;

In order to transfer the first tray between the storage means and the holding means, the first tray is held and the second direction is different from the first direction and the first direction. Transportation means capable of moving along the direction of

The tray transport apparatus according to claim 1, wherein the transfer means has a plurality of movable positions in the first direction, in which the transfer means can move along the second direction.

[2] The transfer means is capable of moving in the second direction without interfering with the holding means at at least one movable position regardless of the position of the holding means. The tray transfer device according to claim 1.

[3] The holding means is movable along the first direction between a first restricted position and a second prescribed position,

The plurality of movable positions are:

A first movable position where the transfer means can move along the second direction between the first restricted position and the second defined position;

And a second movable position where the transfer means can move along the second direction between the second prescribed position and the storage means. The tray transfer device according to 1 or 2.

[4] A space through which the transfer means can pass is formed between the storage means and the holding means located at the second specified position,

4. The tray transport device according to claim 3, wherein the second movable position is provided in the space.

[5] The transfer means is capable of holding the first tray and is independent of each other. A plurality of holding heads movable along the first direction;

5. The tray transport device according to claim 1, wherein the transfer unit is capable of simultaneously moving the plurality of holding heads along the second direction.

[6] The transfer means has a plurality of holding heads capable of holding the first tray and movable independently of each other along the first direction and the second direction. The tray transport device according to any one of claims 1 to 4, wherein

[7] The transfer means may include the one holding head positioned at the first movable position and the other holding head positioned at the second movable position. The tray transfer device according to claim 5 or 6, wherein the tray transfer device can be moved simultaneously along the direction of.

[8] The transfer means is capable of holding and moving a plurality of the first trays simultaneously,

8. The tray transport device according to claim 1, wherein the holding unit is also capable of holding and moving a plurality of the first trays simultaneously.

[9] An electronic component testing apparatus used for testing the electronic device under test by bringing an input / output terminal of the electronic device under test into electrical contact with a contact portion of a test head, An electronic component test apparatus comprising the tray transfer device according to any one of the above.

[10] A loader unit for transferring the electronic device under test from the first tray to the second tray, and the electronic device under test loaded from the loader unit mounted on the second tray. A test part pressed against the contact part of the test head in a state;

An unloader section that reloads the tested electronic components from the second tray to the first tray according to a test result,

The tray transport device supplies the first tray in which the electronic device under test before the test is accommodated to the loader unit, and the second tray in which the electronic device under test after the test is accommodated. 10. The electronic component testing apparatus according to claim 9, wherein the unloader unit force is received.