JPWO2008044305A1 - Tray transfer device and electronic component testing apparatus including the same - Google Patents

Abstract

The tray transfer device includes a stocker (210) that stores a customer tray (KST), a lifting device (220) that can hold the customer tray (KST) and that can move up and down, a stocker (210), and a lifting device (220). A tray transfer device (230) that holds the customer tray (KST) and is movable in the vertical and horizontal directions in order to deliver the customer tray (KST) to and from the tray. The device (230) has a plurality of movable positions (M1, M2) in the vertical direction where the tray transfer device (230) can move along the horizontal direction.

Description

  The present invention relates to an electronic component test in which an IC device is tested by electrically contacting input / output terminals of various electronic components (hereinafter also referred to as IC devices) such as semiconductor integrated circuit elements to a contact portion of a test head. The present invention relates to a tray transport device for transporting a tray capable of accommodating an IC device, and an electronic component test apparatus including the tray transport device.

    In the manufacturing process of an electronic component such as an IC device, an electronic component test apparatus is used to test the performance and function of the IC device in a packaged state. A handler constituting the electronic component test apparatus includes a storage unit, a loader unit, a chamber unit, and an unloader unit.

  The loader section of the handler stores a pre-test IC device or a tray (hereinafter referred to as a customer tray) for storing a tested IC device, which is circulated and conveyed in the electronic component testing apparatus ( Hereinafter, the IC device is transferred to the test tray, and the test tray is carried into the chamber portion.

  Next, after applying a high or low temperature heat stress to the IC device in the chamber portion of the handler, each IC device is brought into electrical contact with the contact portion of the test head, and an electronic component test apparatus body (hereinafter referred to as a tester (hereinafter referred to as a tester)). )) To perform the test.

  Next, the test tray on which the tested IC device is mounted is unloaded from the chamber section to the unloader section, and the IC device is placed on the customer tray according to the test result in the unloader section, so that a category such as a non-defective product or a defective product can be obtained. Sorting is done.

  The handler storage unit supplies the customer tray storing the IC device before the test to the loader unit, and accepts the customer tray in which the IC devices after the test are classified and stored from the unloader unit.

  The storage unit receives a customer tray between a stocker that stores a plurality of customer trays stacked, a lifting device that holds the customer tray and can be moved up and down, and the lifting device and the stocker. A tray transfer device that is movable in the vertical and horizontal directions for delivery.

  In this conventional storage unit, when the lifting device is lowered while the tray transfer device is located directly below the lifting device, the lifting device and the tray transfer device interfere with each other, so that the tray transfer device is retracted from directly below the lifting device. The lifting device can only be lowered after this.

  In addition, even when the tray transfer device moves horizontally while the lifting device is moving up and down, the lifting device and the tray transfer device may interfere with each other. The transfer device cannot be moved.

  For these reasons, a lot of waiting time is generated in the tray conveying work. In an electronic component testing apparatus in which the number of simultaneous measurements is increased, the presence of such a waiting time may hinder improvement in throughput.

  An object of this invention is to provide the tray conveyance apparatus which can shorten tray conveyance time, and an electronic component test apparatus provided with the same.

  In order to achieve the above object, according to the present invention, there is provided a tray transport apparatus for transporting a first tray capable of accommodating an electronic device under test, the storage means storing the first tray, A holding means capable of holding the first tray and moving along a first direction, and the delivery of the first tray between the storage means and the holding means In order to perform the above, a transfer means capable of holding the first tray and moving it along the first direction and a second direction different from the first direction, and The transporting means has a plurality of movable positions in the first direction where the transporting means can move along the second direction. Item 1).

  In the present invention, the transfer means has a plurality of movable positions in the first direction in which the transfer means can move along the second direction. As a result, the transfer means and the holding means can move simultaneously without interfering with each other, so that the tray transport time can be shortened.

  Although not particularly limited in the above invention, the transfer means can move in the second direction without interfering with the holding means at at least one movable position regardless of the position of the holding means. It is preferable to be characterized (refer to claim 2).

  Although not particularly limited in the above invention, the holding means is movable along the first direction between a first restricted position and a second defined position, and the plurality of movable positions. Is a first movable position where the transfer means can move along the second direction between the first restricted position and the second prescribed position, and the second prescribed position. And a second movable position where the transfer means can move along the second direction between the position and the storage means (refer to claim 3). ).

  Although not particularly limited in the above invention, a space through which the transfer means can pass is formed between the storage means and the holding means located at the second specified position, and the second means It is preferable that the movable position is provided in the space (see claim 4).

  Although not particularly limited in the above invention, the transfer means has a plurality of holding heads that can hold the first tray and can move along the first direction independently of each other. Preferably, the transfer means is capable of simultaneously moving the plurality of holding heads along the second direction (see claim 5).

  Although not particularly limited in the above invention, the transfer means can hold the first tray and can move independently along the first direction and the second direction. It is preferable to have a holding head (see claim 6).

  Although not particularly limited in the above invention, the transfer means includes the one holding head located at the first movable position and the other holding head located at the second movable position. Can be simultaneously moved along the second direction (refer to claim 7).

  Although not particularly limited in the above invention, the transfer means can hold and move the plurality of first trays simultaneously, and the holding means also holds the plurality of first trays. It is preferable that they can be moved simultaneously (refer to claim 8).

  In order to achieve the above object, according to the present invention, an electronic component test used for testing the electronic device under test by bringing an input / output terminal of the electronic device under test into electrical contact with a contact portion of a test head. An electronic component test apparatus is provided, which is provided with any one of the above-described tray conveying apparatuses (see claim 9).

  Although not particularly limited in the above invention, a loader unit that reloads the electronic device under test from the first tray to the second tray, and the electronic device under test loaded from the loader unit is the second tray. A test unit that is pressed against the contact portion of the test head while being mounted on the unloader, and an unloader unit that reloads the tested electronic components from the second tray to the first tray according to the test result The tray transport device supplies the first tray in which the electronic device under test before the test is accommodated to the loader unit, and the electronic device under test after the test is accommodated therein. Preferably, the second tray is received from the unloader unit (see claim 10).

FIG. 1 is a side view showing an entire electronic component testing apparatus according to an embodiment of the present invention. FIG. 2 is a perspective view of the electronic component test apparatus of FIG. FIG. 3 is a conceptual diagram showing a tray handling method in the electronic component testing apparatus of FIG. FIG. 4 is a front view showing a storage unit of the electronic device test apparatus according to the embodiment of the present invention. FIG. 5 is a side view showing the storage unit of the electronic device test apparatus according to the embodiment of the present invention. FIG. 6 is an exploded perspective view showing an IC stocker used in the electronic component testing apparatus according to the embodiment of the present invention. FIG. 7 is a perspective view showing a customer tray used in the electronic component testing apparatus according to the embodiment of the present invention. FIG. 8 is a front view showing a storage unit of an electronic component testing apparatus according to another embodiment of the present invention. FIG. 9 is a front view showing a storage unit of an electronic component testing apparatus according to still another embodiment of the present invention. FIG. 10 is an exploded perspective view showing a test tray used in the electronic component testing apparatus according to the embodiment of the present invention. FIG. 11A is a schematic diagram (No. 1) illustrating a first example of a tray transport method by the tray transport device of the electronic component test apparatus according to the embodiment of the present invention. FIG. 11B is a schematic diagram (No. 2) illustrating a first example of a tray transport method by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention. FIG. 11C is a schematic diagram (part 3) illustrating a first example of a tray transport method by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention. FIG. 11D is a schematic diagram (part 4) illustrating a first example of a tray transport method by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention. FIG. 11E is a schematic diagram (No. 5) illustrating the first example of the tray transport method by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention. FIG. 11F is a schematic diagram (No. 6) illustrating a first example of a tray transport method performed by the tray transport device of the electronic component test apparatus according to the embodiment of the present invention. FIG. 11G is a schematic diagram (No. 7) illustrating a first example of a tray transport method by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention. FIG. 11H is a schematic diagram (No. 8) illustrating the first example of the tray conveying method by the tray conveying device of the electronic component testing apparatus according to the embodiment of the present invention. FIG. 11I is a schematic diagram (No. 9) illustrating the first example of the tray transport method by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention. FIG. 11J is a schematic diagram (No. 10) illustrating the first example of the tray transport method by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention. FIG. 11K is a schematic diagram (No. 11) illustrating a first example of a tray transport method by the tray transport device of the electronic component test apparatus according to the embodiment of the present invention. FIG. 11L is a schematic diagram (No. 12) illustrating a first example of a tray transport method performed by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention. FIG. 12A is a schematic diagram (No. 1) illustrating a second example of a tray transport method by the tray transport device of the electronic component test apparatus according to the embodiment of the present invention. FIG. 12B is a schematic diagram (part 2) illustrating a second example of the tray transport method by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention. FIG. 12C is a schematic diagram (part 3) illustrating a second example of the tray transport method by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention. FIG. 12D is a schematic diagram (part 4) illustrating a second example of the tray transport method by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention. FIG. 12E is a schematic diagram (No. 5) illustrating a second example of the tray transport method by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention. FIG. 12F is a schematic diagram (No. 6) illustrating a second example of the tray transport method performed by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention. FIG. 12G is a schematic diagram (No. 7) illustrating a second example of the tray transport method by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention. FIG. 12H is a schematic diagram (No. 8) illustrating the second example of the tray transport method performed by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention. FIG. 12I is a schematic diagram (No. 9) illustrating a second example of the tray transport method by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention. FIG. 12J is a schematic diagram (No. 10) illustrating the second example of the tray transport method by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention. FIG. 12K is a schematic diagram (No. 11) illustrating a second example of the tray transport method by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention. FIG. 12L is a schematic diagram (No. 12) illustrating the second example of the tray transport method performed by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention. FIG. 12M is a schematic diagram (No. 13) illustrating a second example of the tray transport method by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention. FIG. 12N is a schematic diagram (No. 14) illustrating a second example of the tray transport method by the tray transport device of the electronic component testing apparatus according to the embodiment of the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Handler 100 ... Chamber part 200 ... Storage part 210 ... Stocker 220 ... Lifting device 221 ... Z-axis direction rail 222 ... Table 230 ... Tray transfer device 231 ... X-axis direction rail 232 ... Movable head 233A, 233B ... Z-axis direction rail 234A, 234B ... Holding head 235 ... Holding claw 300 ... Loader unit 400 ... Unloader unit 5 ... Test head TST ... Test tray KST ... Customer tray

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  1 is a side view showing an entire electronic component testing apparatus according to an embodiment of the present invention, FIG. 2 is a perspective view of the electronic component testing apparatus of FIG. 1, and FIG. 3 is a tray handling operation in the electronic component testing apparatus of FIG. It is a conceptual diagram which shows a method.

  FIG. 3 is a view for understanding the tray handling method in the electronic component testing apparatus according to the present embodiment, and is a part in which the members arranged in the vertical direction are actually shown in a plan view. There is also. Therefore, the mechanical (three-dimensional) structure will be described with reference to FIG.

  The electronic component test apparatus according to the present embodiment tests (inspects) whether or not the IC device properly operates in a state where high temperature or low temperature stress is applied to the IC device, and the IC device is based on the test result. And is composed of a handler 1, a test head 5, and a tester 6. The test of the IC device by the electronic component test apparatus is performed by changing the IC device from the customer tray KST to the test tray TST.

  For this reason, as shown in FIGS. 1 to 3, the handler 1 in this embodiment includes a storage unit 200 that stores a pre-test IC device and a customer tray KST loaded with a test IC device, and a storage unit 200. A loader unit 300 for transferring an IC device to be sent onto the test tray TST and feeding it to the chamber unit 100, a chamber unit 100 for testing the IC device in a state of being mounted on the test tray TST, including the test head 5, The unloader unit 400 is configured to unload the IC device from the chamber unit 100 and transfer it to the customer tray KST while sorting.

  The socket 50 provided in the test head 5 is connected to the tester 6 through the cable 7 shown in FIG. 1, and the IC device electrically connected to the socket 50 is connected to the tester 6 through the cable 7. The IC device is tested by a test signal from the tester 6. As shown in FIG. 1, a space 8 is provided in a part of the lower portion of the handler 1. A test head 5 is replaceably disposed in the space 8, and a through hole formed in the main base of the handler 1. The IC device and the socket 50 on the test head 5 can be brought into electrical contact with each other. When changing the type of IC device, the test device is replaced with another test head having a socket suitable for the shape, number of pins, etc. of the IC device of that type.

  Hereinafter, each part of the handler 1 will be described in detail.

<Storage unit 200>
4 and 5 are a front view and a side view showing a storage unit of the electronic component testing apparatus according to the present embodiment, and FIG. 6 is an exploded perspective view showing an IC stocker used in the electronic component testing apparatus according to the present embodiment. 7 is a perspective view showing a customer tray used in the electronic component testing apparatus according to the present embodiment.

  As shown in FIGS. 4 and 5, the storage unit 200 includes a stocker 210 that stores the customer tray KST, a lifting device 220 that can hold the customer tray KST and can be lifted, and the stocker 210 and the lifting device. 220, a tray transfer device 230 that holds the customer tray KST and can move in the vertical direction and the horizontal direction in order to deliver the customer tray KST to and from 220.

  The stocker 210 in this embodiment corresponds to an example of a storage unit in the present invention, the lifting device 220 in this embodiment corresponds to an example of a holding unit in the present invention, and the tray transfer device 230 in this embodiment corresponds to the present invention. This corresponds to an example of the transfer means.

  As shown in FIGS. 2 to 4, the stocker 210 includes a pre-test stocker 211 that stores a pre-test IC device and a mounted customer tray KST, and a tested stocker that includes IC devices classified according to the test result. 212.

  As shown in FIG. 6, each of the pre-test stocker 211 and the tested stocker 212 is a frame-shaped tray support frame 213 and an elevator that can enter from the lower portion of the tray support frame 213 and move up and down. 214. A plurality of customer trays KST are stacked on the tray support frame 213, and only the stacked customer trays KST are moved up and down by the elevator 214.

  In the present embodiment, as shown in FIG. 7, in the customer tray KST, 60 accommodating portions 91 for accommodating IC devices are arranged in 10 rows × 6 columns. There are various sequence variations depending on the case.

  Since the pre-test stocker 211 and the tested stocker 212 have the same structure, the numbers of the pre-test stocker 211 and the tested stocker 212 can be appropriately set as required.

  In the present embodiment, as shown in FIGS. 2 to 4, one stocker STK-B is provided in the pre-test stocker 211. On the other hand, eight stockers STK-1, STK-2,..., STK-8 are provided in the tested stocker 212, and can be sorted and stored in up to eight categories according to the test results. ing. In other words, in addition to non-defective products and defective products, it is possible to sort non-defective products into high-speed, medium-speed, low-speed, or defective products that require retesting. It has become.

  In the tested stocker 212, one empty tray stocker STK-E is provided between STK-4 and STK-5. In this empty tray stocker STK-E, empty customer trays KST to be sent to the unloader unit 400 are stacked.

  As shown in FIG. 4, the electronic component testing apparatus according to the present embodiment includes six lifting devices 220, two window portions 306 opened in the main base 101 in the loader unit 300, and an unloader unit 400. In FIG. 5, one window is arranged in each of a total of six windows, including four windows 406 opening in the main base 101.

As shown in FIG. 5, each lifting device 220 includes a Z-axis direction rail 221 provided so as to hang from the main base 101, and a table 222 provided so as to be able to move up and down along the Z-axis direction rail 221. , it is composed of, the table 222 it is possible to lift between the first predetermined position H ₁ and the second defined position H _2.

The first specified position H ₁ is the upper limit of the table 222 in the Z-axis direction. When the table 222 is positioned at the _first specified position H ₁ , the window portion 306 (or window portion 406) formed in the main base 101. ), The customer tray KST faces the loader unit 300 (or the unloader unit 400).

In contrast, the second defined position H ₂ is the lower limit in the Z-axis direction of the table 222, in a state where the table 222 is positioned at the predetermined position of H ₂ the second, customer between the tray transfer apparatus 230 The tray KST is delivered.

  As described above, the lifting device 220 moves the customer tray KST between the storage unit 200 and the loader unit 300 (or the unloader unit 400) by holding and lifting the customer tray KST on the table 222. It is possible.

  4 and 5, the tray transfer device 230 includes an X-axis direction rail 231 provided along the X-axis direction between the main base 101 and the stocker 210, and the X-axis direction rail 231. A movable head 232 capable of moving along the X-axis direction, two Z-axis direction rails 233A and 233B provided on the movable head 232, and a Z-axis direction on each of the Z-axis direction rails 233A and 233B Holding heads 234A and 234B provided so as to be movable along the head. Each holding head 234A, 234B is movable independently of each other along the Z-axis direction, and has an openable / closable gripping claw 235 on the lower side for gripping the customer tray KST. Since the two holding heads 234A and 234B are attached to one movable head 232 via the Z-axis direction rails 233A and 233B, they cannot move independently in the horizontal direction.

  The tray transfer device 230 can grip the customer tray KST from the lowered table 222 of the lifting device 220 and move it to the stocker 210, or move the customer tray KST from the stocker 210 to the table 222 of the lifting device 220. It has become.

As shown in FIGS. 4 and 5, the tray transfer device 230 according to the present embodiment has two movable positions M ₁ and M ₂ in the Z-axis direction that can move the holding heads 234A and 234B in the horizontal direction. have. The first movable position M ₁ is located between the first restriction position H ₁ and the second restriction position H ₂ of the lifting device 220. On the other hand, the second movable position M ₂ is located between the second restriction position H ₂ of the lifting device 220 and the stocker 210. In the present embodiment, a space that allows the holding heads 234A and 234B of the tray transfer device 230A to pass through is formed between the stocker 210 and the table 222 located at the _second specified position H2. Yes.

In the present embodiment, both the holding heads 234A and 234B are moved in the horizontal direction in a state where they are positioned on the first movable position M ₁ (or the second movable position M ₂ ), or one holding head is used. 234A is positioned at the first movable position M ₁ (or the second movable position M ₂ ), and the other holding head 234B is moved to the second movable position M ₂ (or the first movable position M ₁ ). Both holding heads 234A and 234B can be moved in the horizontal direction while being positioned in the horizontal direction.

Further, for example, lifting while the device 220 is moved up and down, a second movable position _{M 2} in the first and second holding head 234A, before testing the moved horizontally 234B stocker 211 and post-test stocker 212 above Since the holding heads 234A and 234B can be moved along the horizontal direction regardless of the position of the table 222 of the lifting / lowering device 220, the tray transporting operation can be shortened. .

  In the present invention, the number of holding heads is not limited to two, the number of movable positions is not limited to two, and three or more holding heads may be provided, or three or more movable heads may be provided. A position may be provided.

  FIG. 8 is a front view showing a tray transport device of an electronic component testing apparatus according to another embodiment of the present invention. In another embodiment of the present invention, as shown in FIG. 8, two movable heads 232 </ b> A and 232 </ b> B that are movable independently of each other along the X-axis direction on the X-axis direction rail 231 of the tray transfer device 230. The holding heads 234A and 234B can move independently of each other along the X-axis direction in addition to the Z-axis direction.

FIG. 9 is a front view showing a tray transport device of an electronic component test apparatus according to still another embodiment of the present invention. In yet another embodiment of the present invention, as shown in FIG. 9, each holding head 234A, 234B of the tray transfer device 230 can simultaneously hold the three customer trays KST _1-3 . In addition, the table 222 of each lifting device 220 can hold _two customer trays KST ₂ and KST ₃ . Thereby, the number of times the tray transfer device 230 delivers the customer tray KST to and from the stocker 210 can be reduced.

Of the three customer trays KST ₁ to 3 held by the holding heads 234A and 234B, the uppermost customer tray KST ₁ prevents the IC devices from being separated from the _second customer tray KST _2. This is an empty customer tray used as a cover. Therefore, the holding heads 234A and 234B remove only the uppermost customer tray KST ₁ after transferring the three customer trays KST ₁ to ₃ to the table 222. Left holding head 234A indicates the condition of removing a customer tray KST ₁ the uppermost in Fig. Incidentally, the removed empty customer tray KST ₁ is returned to the empty tray stocker STK-E.

  In the present invention, the number of customer trays KST simultaneously held by the holding heads 234A and 234B of the tray transfer device 230 is not limited to three, and four or more customer trays KST may be held simultaneously. Similarly, the number of customer trays KST held simultaneously by the tables 222 of the lifting devices 220 is not limited to two, and three or more customer trays KST may be held simultaneously.

<Loader unit 300>
FIG. 10 is an exploded perspective view showing a test tray used in the electronic component testing apparatus according to the embodiment of the present invention.

  The customer tray KST described above is carried from the lower side of the main base 101 to the two window portions 306 of the loader unit 300 by the tray transfer device 230 provided between the storage unit 200 and the main base 101. In the loader unit 300, the IC device loaded on the customer tray KST is once transferred by the device transport apparatus 310 to a precursor 305, where the mutual positional relationship of the IC devices is corrected. Thereafter, the IC device transferred to the precursor 305 is reloaded on the test tray TST stopped by the loader unit 300 by the device transport apparatus 310.

  As shown in FIG. 10, the test tray TST has a plurality of attachments on both sides of the crosspiece 13 and on the side 12 a of the frame 12 facing the crosspiece 13. The pieces 14 are formed to protrude at equal intervals. An insert accommodating portion 15 is configured by the space between the rails 13 or between the rails 13 and the side 12 a and the two attachment pieces 14.

  Each insert accommodating portion 15 accommodates one insert 16, and this insert 16 is attached to two attachment pieces 14 in a floating state using fasteners 17. For this purpose, attachment holes 19 for attaching the insert 16 to the attachment piece 14 are formed at both ends of the insert 16. As shown in FIG. 10, 64 of these inserts 16 are attached to one test tray TST, and are arranged in 4 rows and 16 columns.

  The inserts 16 have the same shape and the same dimensions, and an IC device is accommodated in each insert 16. The IC accommodating portion 18 of the insert 16 is determined according to the shape of the IC device to be accommodated, and is a rectangular recess in the example shown in FIG.

  As shown in FIG. 2, the loader unit 300 includes a device transfer device 310 that transfers IC devices from the customer tray KST to the test tray TST. The device transporting device 310 includes two Y-axis direction rails 311 that are installed on the main base 101 along the Y-axis direction, and a movable arm that can reciprocate along the Y-axis direction on the Y-axis direction rail 311. 312, a movable head 313 that is supported by the movable arm 312 so as to be movable along the X-axis direction, and suction pads (not shown) arranged in two rows and eight columns downward on the movable head 313. Yes. Each suction pad can be moved up and down by an actuator (not shown), and 16 IC devices can be transferred from the customer tray KST to the test tray TST at a time.

  As shown in FIGS. 2 and 3, a precursor 305 is provided between the customer tray KST and the test tray TST. Although not shown, the precursor 305 has a relatively deep recess, and the periphery of the recess is surrounded by an inclined surface. Accordingly, since the IC device to be transferred from the customer tray KST to the test tray TST is once dropped into the precursor 305 before being moved to the test tray TST, the IC device mutual positional relationship can be accurately determined. Can be accurately transferred to the test tray TST.

  When the IC devices are accommodated in all the accommodating portions 18 of the test tray TST, the test tray TST is carried into the chamber portion 100 by the tray transfer device 102.

  On the other hand, when all of the IC devices mounted on the customer tray KST are reloaded onto the test tray TST, the lifting device 220 lowers the empty customer tray KST and delivers this empty tray to the tray transfer device 230. The tray transfer device 230 temporarily stores this empty tray in the empty tray stocker STK-E, and supplies the empty tray to the tested stocker 212 when the customer tray KST of the tested stocker 212 is full of IC devices.

<Chamber part 100>
The above-described test tray TST is loaded into the chamber unit 100 after the IC devices are loaded by the loader unit 300, and each IC device is tested in a state of being mounted on the test tray TST.

  As shown in FIGS. 2 and 3, the chamber unit 100 includes a soak chamber 110 that applies a target high-temperature or low-temperature heat stress to an IC device loaded on the test tray TST, and the soak chamber 110 has a heat stress. The test chamber 120 is configured to contact an IC device in a state where the voltage is applied to the test head 5, and the unsoak chamber 130 is configured to remove thermal stress from the IC device that has been tested.

  The unsoak chamber 130 is preferably thermally insulated from the soak chamber 110 and the test chamber 120. Actually, the region between the soak chamber 110 and the test chamber 120 is maintained at a high temperature or a low temperature, and the unsoak chamber is Although 130 is thermally insulated from these, these are collectively referred to as the chamber portion 100 for convenience.

  The soak chamber 110 is disposed so as to protrude above the test chamber 120. As conceptually shown in FIG. 3, a vertical transfer device is provided inside the soak chamber 110, and a plurality of test trays TST are provided in the vertical transfer device until the test chamber 120 is empty. Waiting while being supported. Mainly, high-temperature or low-temperature thermal stress of about −55 to 150 ° C. is applied to the IC device during this standby.

  The test head 5 is arranged at the center of the test chamber 120, the test tray TST is carried above the test head 5, and the input / output terminals of the IC device are used as contact pins of the socket 50 of the test head 5. The IC device is tested by making electrical contact.

  The result of this test is stored in the storage device of the electronic component testing apparatus at an address determined by the identification number assigned to the test tray TST and the IC device number assigned in the test tray TST.

  Similarly to the soak chamber 110, the unsoak chamber 130 is also arranged so as to protrude above the test chamber 120, and a vertical transfer device is provided as conceptually shown in FIG. In the unsoak chamber 130, when a high temperature is applied to the IC device in the soak chamber 110, the IC device is cooled to the room temperature by air blowing, and then the heat-removed IC device is carried out to the unloader unit 400. . On the other hand, when a low temperature is applied to the IC device in the soak chamber 110, the IC device is heated with warm air or a heater or the like to return to a temperature at which no dew condensation occurs, and then the IC device that has been subjected to heat removal is unloaded. Carry out to 400.

  An inlet for carrying the test tray TST from the main base 101 is formed in the upper part of the soak chamber 110. Similarly, an outlet for carrying out the test tray TST to the main base 101 is formed in the upper part of the unsoak chamber 130. The main base 101 is provided with a tray transfer device 102 for taking the test tray TST out and in from the chamber unit 100 through the inlet and outlet. The tray transport device 102 is constituted by, for example, a rotating roller. The test tray TST carried out from the unsoak chamber 130 is returned to the soak chamber 110 via the unloader unit 400 and the loader unit 300 by the tray conveying device 102.

<Unloader unit 400>
The unloader unit 400 transfers the tested IC device from the test tray TST carried out to the unloader unit 400 to the customer tray KST according to the test result.

  As shown in FIG. 2, the main base 101 in the unloader section 400 has four window sections 406 arranged so that the customer tray KST carried from the storage section 200 to the unloader section 400 faces the upper surface of the main base 101. Is formed.

  The unloader unit 400 includes a device transport apparatus 410 that transfers a tested IC device from the test tray TST to the customer tray KST. The device transport apparatus 410 has two Y-axis direction rails 411 installed on the main base 101 along the Y-axis direction, and a movable device that can reciprocate on the Y-axis direction rails 411 along the Y-axis direction. An arm 412, a movable head 413 supported by the movable arm 412 so as to be movable along the X-axis direction, and 16 suction pads (not shown) arranged in two rows and eight columns downward on the movable head 413. It is equipped with. Each suction pad can be moved up and down along the Z-axis direction by an actuator (not shown), and 16 IC devices can be transferred from the test tray TST to the customer tray KST at a time. .

  As shown in FIGS. 4 and 5, an elevating device 220 for elevating and lowering the customer tray KST is provided below each window portion 406. Here, a tested IC device is loaded. The full customer tray KST is loaded and lowered, and the full tray is transferred to the tray transfer device 230.

  Incidentally, in the present embodiment, although the maximum number of categories that can be sorted is eight, since the unloader unit 400 has only four window portions 406, the unloader unit 400 has a maximum of four customer trays KST. Can only be placed. Therefore, the categories that can be sorted in real time are limited to four categories. Generally, good products are classified into three categories: high speed, medium speed, and low speed, and defective products are added to these four categories. For example, retesting is required. In some cases, categories that do not belong to these categories rarely occur.

  As described above, when an IC device classified into a category other than the category assigned to the four customer trays KST arranged in the window unit 406 of the unloader unit 400 is generated, one customer tray is generated from the unloader unit 400. Instead of returning the KST to the storage unit 200, the customer tray KST to which the newly generated category is assigned may be transferred to the unloader unit 400 to store the IC device. However, in this case, there is a problem that the sorting operation must be interrupted and the throughput is reduced. For this reason, in this embodiment, a buffer unit 405 is provided between the test tray TST of the unloader unit 400 and the window unit 406, and an IC device of a category that rarely occurs is temporarily stored in the buffer unit 405. ing.

  In this embodiment, since the tray transfer device 230 and the lifting device 220 can move simultaneously without interfering with each other, the customer tray KST is exchanged to switch the category assigned to the window 406. In addition, the tray conveyance time can be shortened.

  Next, a tray conveying method in the electronic component testing apparatus according to the embodiment of the present invention will be described.

11A to 11L are schematic views (Nos. 1 to 12) showing a first example of a tray conveying method according to the present embodiment. First, referring to FIG. 11A to FIG. 11L, a full customer tray KST _f held by the leftmost first elevating device 220a and positioned in the window 406 in the figure is set to the tested stocker STK-2. An example of collecting the empty customer tray KST _e from the empty tray stocker STK-E to the first window 406a will be described. In the following description, the four lifting devices shown in FIGS. 11A to 12N are referred to as first to fourth lifting devices 220a to 220d in order from the left side, and the two holding heads shown in FIG. Are referred to as first to second holding heads 234A and 234B in order.

When a request to replace the customer tray KST held in the first lifting device 220a is issued, first, the first lifting device 220a starts to descend as shown in FIG. 11A. While the first elevating device 220a is descending, as shown in FIG. 11B, the first holding head 234A starts to rise and the second holding head 234B starts to descend. The first lifting device 220a, once the second restricting position _{H 2} to lowered down, the first holding head 234A stops When first raised to the movable position _{M 1.} The second holding head 234B is stopped When lowered to empty tray stocker STK-E, to grip an empty customer tray KST _e which is located uppermost.

  Thus, in this embodiment, since the 1st raising / lowering apparatus 220a and 1st and 2nd holding head 234A, 234B are moved simultaneously, tray conveyance time can be shortened.

Next, as shown in FIG. 11C, After the second holding head 234B is raised to the second movable position _{H 2,} as shown in FIG. 11D, the first holding head 234A of the first lifting device 220a The first and second holding heads 234A move along the horizontal direction so as to be positioned above. At this time, as shown in the figure, the first holding head 234A is adapted to move in the horizontal direction in the first movable position M _1, the second holding head 234B in the second movable position M ₂ Move horizontally.

Next, as shown in FIG. 11E, the first holding head 234A is lowered to receive the full customer tray KST _f from the first lifting device 220a, and the second holding head 234B is movable first. to rise to the position _{M 1.} Here, in the present embodiment, since the first holding head 234A and the second holding head 234B are moved simultaneously, the tray conveyance time can be shortened. As shown in FIG. 11F, when the full customer tray KST _f is received from the first lifting / lowering device 220a, the first holding head 234A is also raised to the _first movable position M1.

Next, as shown in FIG. 11G, the first and second holding heads 234A and 234B are moved to the first movable position so that the second holding head 234B is located above the first lifting device 220a. It moves horizontally in the M _1. When the second holding head 234B is positioned above the first lifting device 220a, the first and second holding heads 234A and 234B start to descend as shown in FIG. 11H. The first holding head 234A stops when it is lowered to the _second movable position M2. Further, the second holding head 234B stops when it is lowered to the first lifting device 220a, and delivers an empty customer tray KST _e to the first lifting device 220a. Here, in the present embodiment, since the first holding head 234A and the second holding head 234B are moved simultaneously, the tray conveyance time can be shortened.

Next, as shown in FIG. 11I, When the second holding head 234B is raised to the movable position _{M 1} first, as shown in FIG. 11J, the first and second holding head 234A, 234B includes a first The one holding head 234A is moved in the horizontal direction so as to be positioned above the tested stocker STK-2. At this time, as shown in the figure, the first holding head 234A moves in the horizontal direction in the second movable position M _2, the second holding head 234B, in the first movable position M ₁ Move horizontally.

When the first holding head 234A is positioned above the tested stocker STK-2, as shown in FIG. 11K, the first and second holding heads 234A and 234B are lowered and the first lifting device 220a is raised. To do. When the first holding head 234A descends to the tested stocker STK-2, the first holding head 234A stops, and delivers the full customer tray KST _f to the tested stocker STK-2. The second holding head 234B stops when lowered to the _second movable position M2.

  Thus, in this embodiment, since the 1st raising / lowering apparatus 220a and 1st and 2nd holding head 234A, 234B are moved simultaneously, tray conveyance time can be shortened.

Then, as shown in FIG. 11L, a first holding head 234A is thereby raised to a second movable position _{M 2,} the first lifting device 220a increases to a first restricting position _{H 1.} In this state, an empty customer tray KST _e is held by the first lifting / lowering device 220a and faces the unloader unit 400 through the window 406, and a full customer tray KST _f is tested stocker STK−. 2, a series of tray transport operations are completed.

12A to 12N are schematic views (Nos. 1 to 14) showing a second example of the tray conveying method in the present embodiment. Next, referring to FIGS. 12A to 12N, the full customer tray KST _f held by the second lifting / lowering device 220b and positioned in the window 406 is collected in the tested stocker STK-2 and empty. An example in which an empty customer tray KST _e is supplied from the tray stocker STK-E to the first window 406b will be described.

As shown in FIG. 12A, first, the second elevating device 220b starts to descend. While the second lifting / lowering device 220b is being lowered, as shown in FIG. 12B, the second holding head 234B positioned above the empty tray stocker STK-E also starts to descend. The second lifting device 220b stops when lowered to the _second restriction position H2. Further, when the second holding device 234B is lowered to the empty tray stocker STK-E, the second holding device 234B holds the empty customer tray KST _e located at the uppermost stage.

  As described above, in the present embodiment, even when the first holding head 234A is located directly below the second lifting device 220b, the second lifting device 220b and the first holding head 234B do not interfere with each other. The second elevating device 220b can be lowered, and the second elevating device 220b and the second holding head 234B can be moved at the same time, so that the tray conveying time can be shortened.

Incidentally, in the case of the conventional tray transfer apparatus does not have the second movable position _{M 2} receives the empty customer tray KST _e second holding head 234B from the sky Sutokkatorei STK-E, further, the first And the second holding heads 234A, 234B cannot start the lowering of the second lifting / lowering device 220b unless the second holding heads 234A, 234B are retracted from directly below the second lifting / lowering device 220b. It was.

Next, as shown in FIG. 12C, After the second holding head 234B is raised to the second movable position _{M 2,} as shown in FIG. 12D, the first holding head 234A of the second lifting device 220b The first and second holding heads 234A and 234B move in the horizontal direction so as to be removed from directly below. At this time, the first and second holding heads 234A and 234B both move in the horizontal direction at the _second movable position M2.

Next, as shown in FIG. 12E, When first holding head 234A is raised to the movable position _{M 1} first, as shown in FIG. 12F, the first and second holding head 234A, 234B includes a first The one holding head 234 </ b> A moves in the horizontal direction so as to be positioned above the second lifting device 220. At this time, as shown in the figure, the first holding head 234A is horizontally moved at a first movable position M _1, the second holding head 234B is horizontally moved in a second movable position M ₂ To do.

Next, as shown in FIG. 12G, the first holding head 234A is lowered to receive the full customer tray KST _f from the second lifting / lowering device 220b, and the second holding head 234B is movable first. to rise to the position _{M 1.} Here, in the present embodiment, since the first holding head 234A and the second holding head 234B are moved simultaneously, the tray transport time can be shortened. As shown in FIG. 12H, when the customer tray KST _f full of the first holding head 234A is received from the second elevating device 220b, the first holding head 234A is also raised to the _first movable position M1. .

Next, as shown in FIG. 12I, the first and second holding heads 234A and 234B are moved to the first movable position so that the second holding head 234B is located above the second lifting device 220b. It moves horizontally in the M _1. When the second holding head 234B is positioned above the second lifting / lowering device 220b, the first and second holding heads 234A and 234B start to descend as shown in FIG. 12J. The first holding head 234A stops when it is lowered to the _second movable position M2. Further, the second holding head 234B stops when it is lowered to the second lifting device 220b, and hands over the empty customer tray KST _e to the second lifting device 220b. Here, in the present embodiment, since the first holding head 234A and the second holding head 234B are moved simultaneously, the tray conveyance time can be shortened.

Next, as shown in FIG. 12K, When the second holding head 234B is raised to the movable position _{M 1} first, as shown in FIG. 12L, the first and second holding head 234A, 234B includes a first The one holding head 234A is moved in the horizontal direction so as to be positioned above the tested stocker STK-2. At this time, as shown in the figure, the first holding head 234A moves in the horizontal direction in the second movable position M _2, the second holding head 234B, in the first movable position M ₁ Move horizontally.

When the first holding head 234A is positioned above the tested stocker STK-E, as shown in FIG. 12M, the first and second holding heads 234A and 234B are lowered and the second lifting device 220b is raised. To do. When the first holding head 234A descends to the tested stocker STK-2, the first holding head 234A stops, and delivers the full customer tray KST _f to the tested stocker STK-2. The second holding head 234B stops when lowered to the _second movable position M2.

  Thus, in this embodiment, since the 1st raising / lowering apparatus 220a and 1st and 2nd holding head 234A, 234B are moved simultaneously, tray conveyance time can be shortened.

Then, as shown in FIG. 12N, a first holding head 234A is thereby raised to a second movable position _{M 2,} the second lifting device 220b rises to a first restricting position _{H 1.} In this state, an empty customer tray KST _e is held by the second lifting / lowering device 220b and faces the unloader unit 400 through the window 406, and a full customer tray KST _f is tested stocker STK−. Since it is stored in E, a series of tray transport operations are completed.

As described above, in this embodiment, the tray transfer device 230 has two movable positions M ₁ and M ₂ in the vertical direction that can move along the horizontal direction. The apparatus 230 and the lifting / lowering apparatus 220 can move simultaneously without interfering with each other, thereby shortening the tray conveyance time.

  The embodiment described above is described for facilitating the understanding of the present invention, and is not described for limiting the present invention. Therefore, each element disclosed in the above embodiment is intended to include all design changes and equivalents belonging to the technical scope of the present invention.

  For example, a pitch changing mechanism such as a floating joint or a lock-and-free mechanism is provided between the holding heads 234A and 234B so that the pitch between the holding heads 234A and 234B can be changed. You may comprise so that each holding head 234A, 234B may be positioned with respect to the raising / lowering apparatus 220 or the stocker 210 by contacting the stocker 210. Thereby, the first holding head 234A and the second holding head 234B can simultaneously approach the lifting device 220 and the stocker 210, and the tray transport time can be further shortened.

Claims (10)

A tray transport device for transporting a first tray capable of accommodating an electronic device under test,
Storage means for storing the first tray;
Holding means capable of holding the first tray and moving along the first direction;
In order to deliver the first tray between the storage means and the holding means, the first tray is held and the second direction is different from the first direction and the first direction. A transfer means capable of moving along the direction of
The tray transfer device according to claim 1, wherein the transfer unit has a plurality of movable positions in the first direction in which the transfer unit can move along the second direction.   2. The transfer means can move in the second direction without interfering with the holding means at at least one of the movable positions regardless of the position of the holding means. Tray transport device. The holding means is movable along the first direction between a first restricting position and a second prescribed position,
The plurality of movable positions are:
A first movable position where the transfer means can move along the second direction between the first restricted position and the second prescribed position;
2. A second movable position in which the transfer means can move along the second direction between the second prescribed position and the storage means. Or the tray conveying apparatus of 2. A space through which the transfer means can pass is formed between the storage means and the holding means located at the second specified position,
The tray transport device according to claim 3, wherein the second movable position is provided in the space. The transfer means has a plurality of holding heads capable of holding the first tray and capable of moving along the first direction independently of each other;
The tray transfer device according to claim 1, wherein the transfer unit is capable of simultaneously moving the plurality of holding heads along the second direction.   The transfer means has a plurality of holding heads capable of holding the first tray and movable independently of each other along the first direction and the second direction. The tray conveyance apparatus in any one of Claims 1-4 to do.   The transfer means moves the one holding head located at the first movable position and the other holding head located at the second movable position in the second direction. The tray conveying device according to claim 5, wherein the tray conveying device can be simultaneously moved along the tray. The transfer means is capable of holding a plurality of the first trays and moving them simultaneously.
The tray conveying apparatus according to claim 1, wherein the holding unit is also capable of holding and moving a plurality of the first trays at the same time. An electronic component testing apparatus used for testing the electronic device under test by bringing an input / output terminal of the electronic device under test into electrical contact with a contact portion of a test head,
An electronic component test apparatus comprising the tray transfer apparatus according to claim 1. A loader unit for reloading the electronic device under test from the first tray to the second tray;
A test section for pressing the electronic device under test carried in from the loader section against the contact section of the test head while being mounted on the second tray;
An unloader unit that reloads the tested electronic components from the second tray to the first tray according to a test result,
The tray transport device supplies the first tray in which the electronic device under test before the test is accommodated to the loader unit, and the second tray in which the electronic device under test after the test is accommodated is The electronic component testing apparatus according to claim 9, wherein the electronic component testing apparatus is received from an unloader unit.

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