KR101094502B1 - 마스크 케이스, 마스크 카세트, 패턴 전사 방법, 표시장치의 제조 방법 및 포토마스크의 설치 방법 - Google Patents

마스크 케이스, 마스크 카세트, 패턴 전사 방법, 표시장치의 제조 방법 및 포토마스크의 설치 방법 Download PDF

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Publication number
KR101094502B1
KR101094502B1 KR1020070097765A KR20070097765A KR101094502B1 KR 101094502 B1 KR101094502 B1 KR 101094502B1 KR 1020070097765 A KR1020070097765 A KR 1020070097765A KR 20070097765 A KR20070097765 A KR 20070097765A KR 101094502 B1 KR101094502 B1 KR 101094502B1
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South Korea
Prior art keywords
mask
photomask
cassette
case
mask cassette
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KR1020070097765A
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English (en)
Korean (ko)
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KR20080029876A (ko
Inventor
가즈히사 이무라
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호야 가부시키가이샤
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Publication of KR20080029876A publication Critical patent/KR20080029876A/ko
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1906—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers specially adapted for containing masks, reticles or pellicles

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Library & Information Science (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
KR1020070097765A 2006-09-29 2007-09-28 마스크 케이스, 마스크 카세트, 패턴 전사 방법, 표시장치의 제조 방법 및 포토마스크의 설치 방법 Active KR101094502B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2006-00269609 2006-09-29
JP2006269609A JP4855885B2 (ja) 2006-09-29 2006-09-29 マスクケース、マスクカセット、パターン転写方法及び表示装置の製造方法

Publications (2)

Publication Number Publication Date
KR20080029876A KR20080029876A (ko) 2008-04-03
KR101094502B1 true KR101094502B1 (ko) 2011-12-19

Family

ID=39254845

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020070097765A Active KR101094502B1 (ko) 2006-09-29 2007-09-28 마스크 케이스, 마스크 카세트, 패턴 전사 방법, 표시장치의 제조 방법 및 포토마스크의 설치 방법

Country Status (4)

Country Link
JP (1) JP4855885B2 (https=)
KR (1) KR101094502B1 (https=)
CN (1) CN101152919B (https=)
TW (1) TW200821235A (https=)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5052106B2 (ja) * 2006-11-22 2012-10-17 旭化成イーマテリアルズ株式会社 ペリクルの収納方法
KR101121176B1 (ko) * 2008-04-23 2012-03-23 피엠씨글로벌 주식회사 포토마스크 케이스의 구조
JP5149207B2 (ja) * 2009-01-13 2013-02-20 株式会社荏原製作所 基板搭載装置
KR101067818B1 (ko) * 2009-08-14 2011-09-27 (주)아이콘 반도체 장비용 트레이 클램프 장치
JP2011203309A (ja) * 2010-03-24 2011-10-13 Shin-Etsu Chemical Co Ltd ペリクルの収納容器およびペリクル収納容器の搬送用台車
JP5586559B2 (ja) * 2011-10-28 2014-09-10 信越化学工業株式会社 ペリクル収容容器
KR101962505B1 (ko) * 2012-05-11 2019-03-26 가부시키가이샤 니콘 기판 케이스, 기판 운반 케이스, 케이스 커버, 기판 운반 시스템 및 기판 운반 방법
JP2014218328A (ja) * 2013-05-08 2014-11-20 新東エスプレシジョン株式会社 メタルマスクシート供給システム
KR102242065B1 (ko) * 2015-01-26 2021-04-19 가부시키가이샤 니콘 마스크 케이스, 보관 장치 및 방법, 반송 장치 및 방법, 그리고 노광 장치
TWI658532B (zh) * 2017-08-09 2019-05-01 明安國際企業股份有限公司 基板承置匣
US11104496B2 (en) * 2019-08-16 2021-08-31 Gudeng Precision Industrial Co., Ltd. Non-sealed reticle storage device
JP7503139B2 (ja) * 2019-12-24 2024-06-19 インテグリス・インコーポレーテッド ベースプレートを介した保持力を有するレチクルポッド
US11703754B2 (en) 2020-05-14 2023-07-18 Taiwan Semiconductor Manufacturing Company Ltd. Particle prevention method in reticle pod
TWI779505B (zh) * 2020-05-14 2022-10-01 台灣積體電路製造股份有限公司 光罩盒及防止光罩污染之方法
TWI760062B (zh) * 2020-05-14 2022-04-01 家登精密工業股份有限公司 提供有保持銷組件之光罩盒及固持光罩的方法
US11874596B2 (en) * 2020-09-30 2024-01-16 Gudeng Precision Industrial Co., Ltd Workpiece container system
JP7313498B1 (ja) 2022-02-18 2023-07-24 株式会社協同 フォトマスク収納ケース、及び、フォトマスク収納ケース用のフォトマスク用クッション部材
TWI853622B (zh) * 2023-06-28 2024-08-21 日商協同股份有限公司 光罩收納盒
CN119218546A (zh) * 2023-06-30 2024-12-31 株式会社协同 光掩模收纳盒

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5073829A (en) 1989-09-05 1991-12-17 Konica Corporation Cassette supply apparatus
US20020131850A1 (en) 2001-03-08 2002-09-19 Hyun-Suk Yang Reticle transfer system

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005032886A (ja) * 2003-07-10 2005-02-03 Nikon Corp マスクフレーム、露光方法及び露光装置
JP4581681B2 (ja) * 2004-12-27 2010-11-17 株式会社ニコン レチクル保護装置および露光装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5073829A (en) 1989-09-05 1991-12-17 Konica Corporation Cassette supply apparatus
US20020131850A1 (en) 2001-03-08 2002-09-19 Hyun-Suk Yang Reticle transfer system

Also Published As

Publication number Publication date
JP2008087811A (ja) 2008-04-17
CN101152919A (zh) 2008-04-02
TW200821235A (en) 2008-05-16
TWI356797B (https=) 2012-01-21
CN101152919B (zh) 2013-07-31
JP4855885B2 (ja) 2012-01-18
KR20080029876A (ko) 2008-04-03

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