KR101060324B1 - 원통형의 플랫폼과 주사된 방사광 빔을 사용하여 광학마이크로구조를 제조하기 위한 시스템 및 방법 - Google Patents

원통형의 플랫폼과 주사된 방사광 빔을 사용하여 광학마이크로구조를 제조하기 위한 시스템 및 방법 Download PDF

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Publication number
KR101060324B1
KR101060324B1 KR1020067004896A KR20067004896A KR101060324B1 KR 101060324 B1 KR101060324 B1 KR 101060324B1 KR 1020067004896 A KR1020067004896 A KR 1020067004896A KR 20067004896 A KR20067004896 A KR 20067004896A KR 101060324 B1 KR101060324 B1 KR 101060324B1
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South Korea
Prior art keywords
sensitive layer
radiation
radiation sensitive
optical microstructure
radiation beam
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Expired - Lifetime
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KR1020067004896A
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English (en)
Korean (ko)
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KR20070012616A (ko
Inventor
토마스 에이. 라인하트
로버트 엘. 우드
로버트 피. 프리즈
Original Assignee
브라이트 뷰 테크놀로지즈 아이엔씨.
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0012—Arrays characterised by the manufacturing method
    • G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • B29D11/00278—Lenticular sheets
    • B29D11/00288—Lenticular sheets made by a rotating cylinder
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0012—Arrays characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0043—Inhomogeneous or irregular arrays, e.g. varying shape, size, height

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • Ophthalmology & Optometry (AREA)
  • Mechanical Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
KR1020067004896A 2003-09-11 2004-08-20 원통형의 플랫폼과 주사된 방사광 빔을 사용하여 광학마이크로구조를 제조하기 위한 시스템 및 방법 Expired - Lifetime KR101060324B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/661,916 US7190387B2 (en) 2003-09-11 2003-09-11 Systems for fabricating optical microstructures using a cylindrical platform and a rastered radiation beam
US10/661,916 2003-09-11
PCT/US2004/027208 WO2005036216A2 (en) 2003-09-11 2004-08-20 Systems and methods for fabricating optical microstructures using a cylindrical platform and a rastered radiation beam

Publications (2)

Publication Number Publication Date
KR20070012616A KR20070012616A (ko) 2007-01-26
KR101060324B1 true KR101060324B1 (ko) 2011-08-29

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KR1020067004896A Expired - Lifetime KR101060324B1 (ko) 2003-09-11 2004-08-20 원통형의 플랫폼과 주사된 방사광 빔을 사용하여 광학마이크로구조를 제조하기 위한 시스템 및 방법

Country Status (7)

Country Link
US (2) US7190387B2 (enExample)
EP (1) EP1664859B1 (enExample)
JP (1) JP4607881B2 (enExample)
KR (1) KR101060324B1 (enExample)
AT (1) ATE440298T1 (enExample)
DE (1) DE602004022682D1 (enExample)
WO (1) WO2005036216A2 (enExample)

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Also Published As

Publication number Publication date
JP2007507725A (ja) 2007-03-29
WO2005036216A2 (en) 2005-04-21
DE602004022682D1 (de) 2009-10-01
US20050058947A1 (en) 2005-03-17
JP4607881B2 (ja) 2011-01-05
ATE440298T1 (de) 2009-09-15
US7190387B2 (en) 2007-03-13
EP1664859A2 (en) 2006-06-07
WO2005036216A3 (en) 2005-07-28
EP1664859B1 (en) 2009-08-19
US7763417B2 (en) 2010-07-27
US20060275714A1 (en) 2006-12-07
KR20070012616A (ko) 2007-01-26

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