KR100997380B1 - 용량 검출형 센서 및 그 제조 방법 - Google Patents

용량 검출형 센서 및 그 제조 방법 Download PDF

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Publication number
KR100997380B1
KR100997380B1 KR1020020073847A KR20020073847A KR100997380B1 KR 100997380 B1 KR100997380 B1 KR 100997380B1 KR 1020020073847 A KR1020020073847 A KR 1020020073847A KR 20020073847 A KR20020073847 A KR 20020073847A KR 100997380 B1 KR100997380 B1 KR 100997380B1
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KR
South Korea
Prior art keywords
film
electrostatic discharge
discharge electrode
insulating film
interlayer insulating
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KR1020020073847A
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English (en)
Korean (ko)
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KR20030076184A (ko
Inventor
이또마사끼
오노데라히데오
이와모또시게루
Original Assignee
후지쯔 세미컨덕터 가부시키가이샤
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Publication of KR20030076184A publication Critical patent/KR20030076184A/ko
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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00—Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10—Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12—Fingerprints or palmprints
    • G06V40/13—Sensors therefor
    • G06V40/1329—Protecting the fingerprint sensor against damage caused by the finger
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00—Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10—Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12—Fingerprints or palmprints
    • G06V40/13—Sensors therefor
    • G06V40/1306—Sensors therefor non-optical, e.g. ultrasonic or capacitive sensing

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  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Multimedia (AREA)
  • Theoretical Computer Science (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Image Input (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Pressure Sensors (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
KR1020020073847A 2002-03-20 2002-11-26 용량 검출형 센서 및 그 제조 방법 KR100997380B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2002-00077937 2002-03-20
JP2002077937A JP3980387B2 (ja) 2002-03-20 2002-03-20 容量検出型センサ及びその製造方法

Publications (2)

Publication Number Publication Date
KR20030076184A KR20030076184A (ko) 2003-09-26
KR100997380B1 true KR100997380B1 (ko) 2010-11-30

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KR1020020073847A KR100997380B1 (ko) 2002-03-20 2002-11-26 용량 검출형 센서 및 그 제조 방법

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US (2) US7009410B2 (de)
EP (2) EP1347407B1 (de)
JP (1) JP3980387B2 (de)
KR (1) KR100997380B1 (de)
CN (1) CN1217186C (de)
DE (1) DE60232576D1 (de)
TW (1) TW555959B (de)

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TWI477400B (zh) * 2013-09-27 2015-03-21 Innolux Corp 具有類鑽碳膜的結構、指紋辨識器及其製造方法
CN104680126B (zh) 2014-11-24 2018-05-08 麦克思智慧资本股份有限公司 指纹识别装置及其制作方法
CN104681522B (zh) * 2015-02-28 2017-10-13 苏州科阳光电科技有限公司 低功耗指纹锁器件
CN104681486B (zh) * 2015-02-28 2017-10-27 苏州科阳光电科技有限公司 指纹锁芯片的制造工艺
TWI515665B (zh) 2015-03-25 2016-01-01 速博思股份有限公司 滑擦式生物辨識裝置
TWI553563B (zh) * 2015-05-25 2016-10-11 義隆電子股份有限公司 指紋辨識裝置
CN106203249A (zh) * 2015-05-25 2016-12-07 义隆电子股份有限公司 指纹辨识装置
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Also Published As

Publication number Publication date
CN1445537A (zh) 2003-10-01
EP1347407A2 (de) 2003-09-24
EP1944722B1 (de) 2011-10-26
US20030179001A1 (en) 2003-09-25
TW555959B (en) 2003-10-01
EP1944722A2 (de) 2008-07-16
US7364931B2 (en) 2008-04-29
EP1944722A3 (de) 2008-12-31
US20060099726A1 (en) 2006-05-11
EP1347407A3 (de) 2006-10-18
JP2003269906A (ja) 2003-09-25
KR20030076184A (ko) 2003-09-26
DE60232576D1 (de) 2009-07-23
US7009410B2 (en) 2006-03-07
CN1217186C (zh) 2005-08-31
EP1347407B1 (de) 2009-06-10
JP3980387B2 (ja) 2007-09-26

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