KR100959599B1 - 고주파 프로브 및 이를 이용한 고주파 프로브 카드 - Google Patents

고주파 프로브 및 이를 이용한 고주파 프로브 카드 Download PDF

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Publication number
KR100959599B1
KR100959599B1 KR1020080002054A KR20080002054A KR100959599B1 KR 100959599 B1 KR100959599 B1 KR 100959599B1 KR 1020080002054 A KR1020080002054 A KR 1020080002054A KR 20080002054 A KR20080002054 A KR 20080002054A KR 100959599 B1 KR100959599 B1 KR 100959599B1
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KR
South Korea
Prior art keywords
pin
metal
signal
probe
ground
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR1020080002054A
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English (en)
Korean (ko)
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KR20080065235A (ko
Inventor
웨이-쳉 쿠
치-하오 호
치아-타이 창
호-후이 린
치엔-호 린
Original Assignee
엠피아이 코포레이션
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Publication of KR20080065235A publication Critical patent/KR20080065235A/ko
Application granted granted Critical
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06772—High frequency probes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
KR1020080002054A 2007-01-08 2008-01-08 고주파 프로브 및 이를 이용한 고주파 프로브 카드 Expired - Fee Related KR100959599B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TW96100746 2007-01-08
TW096100746A TW200829922A (en) 2007-01-08 2007-01-08 High frequency probe

Publications (2)

Publication Number Publication Date
KR20080065235A KR20080065235A (ko) 2008-07-11
KR100959599B1 true KR100959599B1 (ko) 2010-05-27

Family

ID=39510088

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080002054A Expired - Fee Related KR100959599B1 (ko) 2007-01-08 2008-01-08 고주파 프로브 및 이를 이용한 고주파 프로브 카드

Country Status (7)

Country Link
US (2) US7791359B2 (https=)
JP (1) JP4759577B2 (https=)
KR (1) KR100959599B1 (https=)
DE (1) DE102008003534B4 (https=)
FR (1) FR2911190B1 (https=)
SG (1) SG144799A1 (https=)
TW (1) TW200829922A (https=)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7683645B2 (en) * 2006-07-06 2010-03-23 Mpi Corporation High-frequency probe card and transmission line for high-frequency probe card
TW200829922A (en) * 2007-01-08 2008-07-16 Microelectonics Technology Inc High frequency probe
TWI447397B (zh) * 2010-05-17 2014-08-01 Star Techn Inc 探針卡
TWI397695B (zh) * 2010-06-10 2013-06-01 Allstron Inc 用於積體電路測試之探測裝置
WO2012057799A1 (en) * 2010-10-29 2012-05-03 Advantest (Singapore) Pte Ltd Tester having an application specific electronics module, and systems and methods that incorporate or use same
TWI482975B (zh) * 2011-05-27 2015-05-01 Mpi Corp Spring-type micro-high-frequency probe
WO2013006771A2 (en) 2011-07-06 2013-01-10 Celadon Systems, Inc. Test systems with a probe apparatus and index mechanism
CN103930982B (zh) * 2011-07-06 2016-07-06 塞莱敦体系股份有限公司 具有探针卡的测试设备及连接器机构
TWI444625B (zh) * 2012-03-20 2014-07-11 Mpi Corp High frequency probe card
JP5748709B2 (ja) * 2012-06-05 2015-07-15 三菱電機株式会社 プローブカード
TWI471570B (zh) * 2012-12-26 2015-02-01 Mpi Corp High frequency probe card
TWI512300B (zh) * 2013-07-15 2015-12-11 Mpi Corp Cantilever high frequency probe card
TW201504631A (zh) * 2013-07-23 2015-02-01 Mpi Corp 光電元件檢測用之高頻探針卡
JP6118710B2 (ja) * 2013-10-30 2017-04-19 日本電子材料株式会社 プローブカード
TWI522623B (zh) * 2013-12-13 2016-02-21 Mpi Corp Probe module (1)
TWI506280B (zh) * 2013-12-13 2015-11-01 Mpi Corp Probe module (2)
CN109001500B (zh) * 2018-08-21 2024-01-02 淮阴师范学院 一种内嵌电感的射频器件测试探针
CN111721976B (zh) * 2019-03-18 2023-04-28 台湾中华精测科技股份有限公司 探针卡装置及其导电探针
KR102088205B1 (ko) * 2019-08-30 2020-03-16 주식회사 프로이천 디스플레이 패널 검사용 프로브 핀

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5264788A (en) 1992-06-12 1993-11-23 Cascade Microtech, Inc. Adjustable strap implemented return line for a probe station
JPH09218222A (ja) * 1996-02-08 1997-08-19 Advantest Corp プローブカード
KR100795909B1 (ko) 2006-12-12 2008-01-21 삼성전자주식회사 반도체 검사 장치의 프로브 카드
KR100806379B1 (ko) 2006-12-22 2008-02-27 세크론 주식회사 프로브 및 이를 포함하는 프로브 카드

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2918164B2 (ja) * 1989-01-10 1999-07-12 富士通株式会社 プローブカード
JPH048973U (https=) * 1990-05-14 1992-01-27
JPH0436239U (https=) * 1990-07-20 1992-03-26
US5382898A (en) 1992-09-21 1995-01-17 Cerprobe Corporation High density probe card for testing electrical circuits
US5594358A (en) * 1993-09-02 1997-01-14 Matsushita Electric Industrial Co., Ltd. Radio frequency probe and probe card including a signal needle and grounding needle coupled to a microstrip transmission line
CN1036945C (zh) 1994-03-15 1998-01-07 吉林大学 共面集成电路芯片微波探针
US6603322B1 (en) * 1996-12-12 2003-08-05 Ggb Industries, Inc. Probe card for high speed testing
JPH11108955A (ja) * 1997-09-30 1999-04-23 Mitsubishi Electric Corp ウエハプローバー
US6298312B1 (en) * 1998-07-22 2001-10-02 Taiwan Semiconductor Manufacturing Company, Ltd. Method of determining the tip angle of a probe card needle
JP2001091543A (ja) * 1999-09-27 2001-04-06 Hitachi Ltd 半導体検査装置
US6727716B1 (en) * 2002-12-16 2004-04-27 Newport Fab, Llc Probe card and probe needle for high frequency testing
JP2004309257A (ja) * 2003-04-04 2004-11-04 Micronics Japan Co Ltd プローブカード
CN2715341Y (zh) 2004-07-09 2005-08-03 威盛电子股份有限公司 探针卡
KR100711292B1 (ko) * 2005-04-14 2007-04-25 한국과학기술원 프로브 카드 및 그 제조방법
TWI279548B (en) * 2005-08-04 2007-04-21 Mjc Probe Inc High frequency cantilever type probe card
TWI274161B (en) * 2005-08-29 2007-02-21 Mjc Probe Inc Electrical contact device of probe card
US7683645B2 (en) * 2006-07-06 2010-03-23 Mpi Corporation High-frequency probe card and transmission line for high-frequency probe card
US7368928B2 (en) * 2006-08-29 2008-05-06 Mjc Probe Incorporation Vertical type high frequency probe card
TW200829922A (en) 2007-01-08 2008-07-16 Microelectonics Technology Inc High frequency probe
US7724009B2 (en) * 2007-02-09 2010-05-25 Mpi Corporation Method of making high-frequency probe, probe card using the high-frequency probe
US7595651B2 (en) * 2007-02-13 2009-09-29 Mpi Corporation Cantilever-type probe card for high frequency application
TWI367329B (en) * 2008-06-19 2012-07-01 King Yuan Electronics Co Ltd Probe card assembly

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5264788A (en) 1992-06-12 1993-11-23 Cascade Microtech, Inc. Adjustable strap implemented return line for a probe station
JPH09218222A (ja) * 1996-02-08 1997-08-19 Advantest Corp プローブカード
KR100795909B1 (ko) 2006-12-12 2008-01-21 삼성전자주식회사 반도체 검사 장치의 프로브 카드
KR100806379B1 (ko) 2006-12-22 2008-02-27 세크론 주식회사 프로브 및 이를 포함하는 프로브 카드

Also Published As

Publication number Publication date
FR2911190B1 (fr) 2014-08-08
US20080164900A1 (en) 2008-07-10
DE102008003534B4 (de) 2013-05-29
TWI322890B (https=) 2010-04-01
US8106673B2 (en) 2012-01-31
JP2008170441A (ja) 2008-07-24
SG144799A1 (en) 2008-08-28
JP4759577B2 (ja) 2011-08-31
TW200829922A (en) 2008-07-16
DE102008003534A1 (de) 2008-07-17
US7791359B2 (en) 2010-09-07
FR2911190A1 (fr) 2008-07-11
KR20080065235A (ko) 2008-07-11
US20100253378A1 (en) 2010-10-07

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