KR100948245B1 - 아산화규소, 이산화규소 및/또는 탄화규소의 평면 평행구조물의 제조방법, 이러한 방법으로 수득 가능한 평면평행 구조물 및 이의 용도 - Google Patents

아산화규소, 이산화규소 및/또는 탄화규소의 평면 평행구조물의 제조방법, 이러한 방법으로 수득 가능한 평면평행 구조물 및 이의 용도 Download PDF

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Publication number
KR100948245B1
KR100948245B1 KR1020047012847A KR20047012847A KR100948245B1 KR 100948245 B1 KR100948245 B1 KR 100948245B1 KR 1020047012847 A KR1020047012847 A KR 1020047012847A KR 20047012847 A KR20047012847 A KR 20047012847A KR 100948245 B1 KR100948245 B1 KR 100948245B1
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sio
layer
planar parallel
silicon
parallel
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KR20040091645A (ko
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바이네르트힐마르
뷔자르빠트리스
하인쯔뤼디거
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시바 홀딩 인크
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    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09CTREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C1/00Treatment of specific inorganic materials other than fibrous fillers; Preparation of carbon black
    • C09C1/0015Pigments exhibiting interference colours, e.g. transparent platelets of appropriate thinness or flaky substrates, e.g. mica, bearing appropriate thin transparent coatings
    • C09C1/0018Pigments exhibiting interference colours, e.g. transparent platelets of appropriate thinness or flaky substrates, e.g. mica, bearing appropriate thin transparent coatings uncoated and unlayered plate-like particles
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61KPREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K8/00Cosmetics or similar toiletry preparations
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09CTREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C1/00Treatment of specific inorganic materials other than fibrous fillers; Preparation of carbon black
    • C09C1/0015Pigments exhibiting interference colours, e.g. transparent platelets of appropriate thinness or flaky substrates, e.g. mica, bearing appropriate thin transparent coatings
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09CTREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C1/00Treatment of specific inorganic materials other than fibrous fillers; Preparation of carbon black
    • C09C1/0015Pigments exhibiting interference colours, e.g. transparent platelets of appropriate thinness or flaky substrates, e.g. mica, bearing appropriate thin transparent coatings
    • C09C1/0021Pigments exhibiting interference colours, e.g. transparent platelets of appropriate thinness or flaky substrates, e.g. mica, bearing appropriate thin transparent coatings comprising a core coated with only one layer having a high or low refractive index
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09CTREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C1/00Treatment of specific inorganic materials other than fibrous fillers; Preparation of carbon black
    • C09C1/0015Pigments exhibiting interference colours, e.g. transparent platelets of appropriate thinness or flaky substrates, e.g. mica, bearing appropriate thin transparent coatings
    • C09C1/0024Pigments exhibiting interference colours, e.g. transparent platelets of appropriate thinness or flaky substrates, e.g. mica, bearing appropriate thin transparent coatings comprising a stack of coating layers with alternating high and low refractive indices, wherein the first coating layer on the core surface has the high refractive index
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0005Separation of the coating from the substrate
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/024Deposition of sublayers, e.g. to promote adhesion of the coating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10Glass or silica
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/54Particles characterised by their aspect ratio, i.e. the ratio of sizes in the longest to the shortest dimension
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09CTREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C2200/00Compositional and structural details of pigments exhibiting interference colours
    • C09C2200/10Interference pigments characterized by the core material
    • C09C2200/1037Interference pigments characterized by the core material the core consisting of an inorganic suboxide or a mixture thereof, e.g. SiOx or TiOx
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09CTREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C2200/00Compositional and structural details of pigments exhibiting interference colours
    • C09C2200/30Interference pigments characterised by the thickness of the core or layers thereon or by the total thickness of the final pigment particle
    • C09C2200/301Thickness of the core
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09CTREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C2200/00Compositional and structural details of pigments exhibiting interference colours
    • C09C2200/30Interference pigments characterised by the thickness of the core or layers thereon or by the total thickness of the final pigment particle
    • C09C2200/302Thickness of a layer with high refractive material
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09CTREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C2220/00Methods of preparing the interference pigments
    • C09C2220/20PVD, CVD methods or coating in a gas-phase using a fluidized bed
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02TCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00Aeronautics or air transport
    • Y02T50/60Efficient propulsion technologies, e.g. for aircraft

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Epidemiology (AREA)
  • Birds (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Silicon Compounds (AREA)
  • Cosmetics (AREA)
  • Pigments, Carbon Blacks, Or Wood Stains (AREA)
  • Physical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Paints Or Removers (AREA)
KR1020047012847A 2002-02-18 2003-02-11 아산화규소, 이산화규소 및/또는 탄화규소의 평면 평행구조물의 제조방법, 이러한 방법으로 수득 가능한 평면평행 구조물 및 이의 용도 Expired - Fee Related KR100948245B1 (ko)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
DE10206820.8 2002-02-18
DE10206820 2002-02-18
DE10210743.2 2002-03-12
DE10210743 2002-03-12
DE10227229.8 2002-06-18
DE10227229 2002-06-18
EP02405649.1 2002-07-25
EP02405649 2002-07-25
PCT/EP2003/001323 WO2003068868A2 (en) 2002-02-18 2003-02-11 Method of producing plane-parallel structures of silicon suboxide, silicon dioxide and/or silicon carbide, plane-parallel structures obtainable by such methods, and the use thereof

Publications (2)

Publication Number Publication Date
KR20040091645A KR20040091645A (ko) 2004-10-28
KR100948245B1 true KR100948245B1 (ko) 2010-03-19

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Application Number Title Priority Date Filing Date
KR1020047012847A Expired - Fee Related KR100948245B1 (ko) 2002-02-18 2003-02-11 아산화규소, 이산화규소 및/또는 탄화규소의 평면 평행구조물의 제조방법, 이러한 방법으로 수득 가능한 평면평행 구조물 및 이의 용도
KR1020047020641A Expired - Fee Related KR100993133B1 (ko) 2002-02-18 2003-06-16 규소/산화규소의 평면 평행 구조물, 평면 평행 안료, 당해 안료를 포함하는 조성물 및 화장품 제제 또는 제형, 및 평면 평행 구조물의 제조방법

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020047020641A Expired - Fee Related KR100993133B1 (ko) 2002-02-18 2003-06-16 규소/산화규소의 평면 평행 구조물, 평면 평행 안료, 당해 안료를 포함하는 조성물 및 화장품 제제 또는 제형, 및 평면 평행 구조물의 제조방법

Country Status (9)

Country Link
US (1) US7256425B2 (enExample)
EP (1) EP1476508A2 (enExample)
JP (1) JP4476629B2 (enExample)
KR (2) KR100948245B1 (enExample)
CN (1) CN1633477A (enExample)
AU (1) AU2003206875A1 (enExample)
CA (1) CA2474640A1 (enExample)
MX (1) MXPA04007992A (enExample)
WO (1) WO2003068868A2 (enExample)

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US20080054270A1 (en) * 2006-09-05 2008-03-06 Yoshiyuki Suda Semiconductor memory device and the production method
CN100519822C (zh) * 2006-09-27 2009-07-29 宝山钢铁股份有限公司 有机预涂金属板上SiOx镀层的真空制备方法
DE102007059860A1 (de) * 2007-12-12 2009-06-18 Evonik Degussa Gmbh Schülpen aus pyrogen hergestelltem Siliziumdioxid
DE102008032781A1 (de) * 2008-07-11 2010-01-21 Klöckner Pentaplast GmbH & Co. KG Verpackungsfolie für Produktauthentifizierung, Authentifizierungsverfahren und -system
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JP6072787B2 (ja) * 2012-06-20 2017-02-01 日本碍子株式会社 断熱用多孔質板状フィラー、コーティング組成物、断熱膜、および断熱膜構造
JPWO2014157160A1 (ja) * 2013-03-29 2017-02-16 信越化学工業株式会社 酸化珪素の製造装置及び製造方法
WO2014185745A1 (ko) 2013-05-16 2014-11-20 주식회사 엘지화학 Sio 제조 장치 및 방법
WO2015035066A1 (en) 2013-09-04 2015-03-12 President And Fellows Of Harvard College Growing films via sequential liquid/vapor phases
WO2015076317A1 (ja) * 2013-11-19 2015-05-28 日本碍子株式会社 断熱膜、および断熱膜構造
JP6407887B2 (ja) 2013-11-26 2018-10-17 日本碍子株式会社 多孔質材料及び断熱膜
CA2835583A1 (fr) * 2013-11-28 2015-05-28 Hydro-Quebec Methode de preparation de siox nano-structure, et son utilisation comme anode de batterie lithium-ion
CN105870157B (zh) * 2016-05-30 2019-03-12 深圳市华星光电技术有限公司 用于打印成膜的凹槽结构及其制作方法
CN111453737B (zh) * 2019-01-22 2021-08-03 成都博达爱福科技有限公司 一种由mq硅树脂制备氧化亚硅的方法
CN112322191B (zh) * 2020-12-02 2021-06-29 徐州威聚电子材料有限公司 一种液体抛光蜡及其制备方法
CN116332193B (zh) * 2023-05-18 2024-07-05 深圳凝石材料科技有限公司 烧结硅氧负极材料的方法

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JP2005517620A (ja) 2005-06-16
US7256425B2 (en) 2007-08-14
KR20040091645A (ko) 2004-10-28
JP4476629B2 (ja) 2010-06-09
WO2003068868A3 (en) 2003-11-13
CN1633477A (zh) 2005-06-29
WO2003068868A2 (en) 2003-08-21
CA2474640A1 (en) 2003-08-21
MXPA04007992A (es) 2004-11-26
KR20050021983A (ko) 2005-03-07
EP1476508A2 (en) 2004-11-17
AU2003206875A1 (en) 2003-09-04
US20050161678A1 (en) 2005-07-28

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