KR100935134B1 - 천정주행차 시스템 - Google Patents

천정주행차 시스템 Download PDF

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Publication number
KR100935134B1
KR100935134B1 KR1020050047677A KR20050047677A KR100935134B1 KR 100935134 B1 KR100935134 B1 KR 100935134B1 KR 1020050047677 A KR1020050047677 A KR 1020050047677A KR 20050047677 A KR20050047677 A KR 20050047677A KR 100935134 B1 KR100935134 B1 KR 100935134B1
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KR
South Korea
Prior art keywords
ceiling
load port
buffer
cassette
ceiling buffer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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KR1020050047677A
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English (en)
Korean (ko)
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KR20060048165A (ko
Inventor
켄지 호시노
Original Assignee
무라타 기카이 가부시키가이샤
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=35432067&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=KR100935134(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by 무라타 기카이 가부시키가이샤 filed Critical 무라타 기카이 가부시키가이샤
Publication of KR20060048165A publication Critical patent/KR20060048165A/ko
Application granted granted Critical
Publication of KR100935134B1 publication Critical patent/KR100935134B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C17/00—Overhead travelling cranes comprising one or more substantially horizontal girders the ends of which are directly supported by wheels or rollers running on tracks carried by spaced supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
KR1020050047677A 2004-08-12 2005-06-03 천정주행차 시스템 Expired - Lifetime KR100935134B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2004-00235192 2004-08-12
JP2004235192A JP2006051886A (ja) 2004-08-12 2004-08-12 天井走行車システム

Publications (2)

Publication Number Publication Date
KR20060048165A KR20060048165A (ko) 2006-05-18
KR100935134B1 true KR100935134B1 (ko) 2010-01-06

Family

ID=35432067

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020050047677A Expired - Lifetime KR100935134B1 (ko) 2004-08-12 2005-06-03 천정주행차 시스템

Country Status (6)

Country Link
US (1) US7887278B2 (enExample)
EP (1) EP1626011B1 (enExample)
JP (1) JP2006051886A (enExample)
KR (1) KR100935134B1 (enExample)
DE (1) DE602005014423D1 (enExample)
TW (1) TW200606091A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101547323B1 (ko) 2013-02-18 2015-08-25 에버테크노 주식회사 오버헤드 호이스트 이송장치의 슬라이드 유닛

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US7578650B2 (en) * 2004-07-29 2009-08-25 Kla-Tencor Technologies Corporation Quick swap load port
JP4337683B2 (ja) * 2004-08-16 2009-09-30 村田機械株式会社 搬送システム
JP4296601B2 (ja) * 2005-01-20 2009-07-15 村田機械株式会社 搬送台車システム
JP4221603B2 (ja) * 2005-03-31 2009-02-12 村田機械株式会社 天井走行車システム
JP4720267B2 (ja) * 2005-04-14 2011-07-13 村田機械株式会社 天井走行車システム
JP2007191235A (ja) * 2006-01-17 2007-08-02 Murata Mach Ltd 天井走行車システム
JP4427755B2 (ja) * 2006-02-03 2010-03-10 村田機械株式会社 搬送システム
TWI405290B (zh) * 2006-05-11 2013-08-11 Brooks Automation Inc 容量縮小之裝載機、輸送機、裝載埠及緩衝系統
KR101841753B1 (ko) * 2006-08-18 2018-03-23 브룩스 오토메이션 인코퍼레이티드 용량이 축소된 캐리어, 이송, 로드 포트, 버퍼 시스템
JP4858018B2 (ja) * 2006-09-01 2012-01-18 ムラテックオートメーション株式会社 被搬送物保管システム
JP4378655B2 (ja) * 2007-03-07 2009-12-09 株式会社ダイフク 物品処理設備
US9033638B2 (en) * 2007-04-17 2015-05-19 International Business Machines Corporation OHT accessible high density stocker and method
JP4366663B2 (ja) * 2007-06-28 2009-11-18 村田機械株式会社 搬送台車システム
DE102007035839B4 (de) * 2007-07-31 2017-06-22 Globalfoundries Dresden Module One Limited Liability Company & Co. Kg Verfahren und System zum lokalen Aufbewahren von Substratbehältern in einem Deckentransportsystem zum Verbessern der Aufnahme/Abgabe-Kapazitäten von Prozessanlagen
JP5062485B2 (ja) * 2008-04-09 2012-10-31 株式会社ダイフク 物品搬送設備
KR101015225B1 (ko) * 2008-07-07 2011-02-18 세메스 주식회사 기판 처리장치 및 이의 기판 이송 방법
KR101077566B1 (ko) 2008-08-20 2011-10-28 세메스 주식회사 기판 처리장치 및 이의 기판 이송 방법
DE102008059711A1 (de) * 2008-11-29 2010-06-10 Eisenmann Anlagenbau Gmbh & Co. Kg Vorrichtung zum Umsetzen von Gegenständen sowie Förderanlagen mit einer solchen Vorrichtung
US9048274B2 (en) * 2008-12-08 2015-06-02 Taiwan Semiconductor Manufacturing Co., Ltd. Portable stocker and method of using same
KR101341403B1 (ko) * 2009-03-03 2013-12-13 무라다기카이가부시끼가이샤 반송 시스템
JP4807424B2 (ja) * 2009-03-17 2011-11-02 村田機械株式会社 天井搬送システムと物品の移載方法
US8483866B2 (en) * 2009-04-30 2013-07-09 Taiwan Semiconductor Manufacturing Co., Ltd. Automated materials handling system having multiple categories of overhead buffers
JP2011029550A (ja) * 2009-07-29 2011-02-10 Muratec Automation Co Ltd 搬送システム及びその設定方法
JP5633738B2 (ja) * 2010-09-27 2014-12-03 株式会社ダイフク 物品搬送設備
JP5636849B2 (ja) 2010-09-30 2014-12-10 村田機械株式会社 移載システム
JP5549757B2 (ja) * 2010-11-04 2014-07-16 村田機械株式会社 搬送システム
TWI440119B (zh) * 2010-11-08 2014-06-01 Inotera Memories Inc 具有多層式軌道結構之台車系統及其控制方法
JP5316907B2 (ja) * 2011-03-17 2013-10-16 株式会社ダイフク 物品搬送設備
US8540070B2 (en) * 2011-07-19 2013-09-24 Siemens Industry, Inc. Coil shift transfer car
JP5674041B2 (ja) * 2011-08-11 2015-02-18 株式会社ダイフク 物品搬送設備
JP5527619B2 (ja) * 2011-11-24 2014-06-18 株式会社ダイフク 天井設置型の物品搬送設備
CN102826316B (zh) * 2012-08-31 2015-06-17 深圳市华星光电技术有限公司 一种玻璃基板的仓储系统以及玻璃基板仓储方法
NO335839B1 (no) * 2012-12-10 2015-03-02 Jakob Hatteland Logistics As Robot for transport av lagringsbeholdere
US9630927B2 (en) * 2014-01-17 2017-04-25 Taiwan Semiconductor Manufacturing Company Limited Method and manufacturing system
EP3647229B1 (en) * 2017-06-30 2022-09-07 Murata Machinery, Ltd. Conveying system and conveying method
CN108689136A (zh) * 2018-06-13 2018-10-23 苏州海顺包装材料有限公司 传送装置及备料车间
JP7224725B2 (ja) * 2019-03-26 2023-02-20 株式会社ディスコ 搬送システム
JP7224728B2 (ja) * 2019-04-23 2023-02-20 株式会社ディスコ 搬送システム
US11658053B2 (en) 2019-10-21 2023-05-23 Globalfoundries U.S. Inc. Conversion plate for reticle pod storage and a reticle pod storage system
US11295973B2 (en) * 2020-02-11 2022-04-05 Taiwan Semiconductor Manufacturing Company, Ltd. Apparatus and method for automated wafer carrier handling
US11569108B2 (en) 2020-06-15 2023-01-31 Globalfoundries U.S. Inc. Reticle pod conversion plate for interfacing with a tool
KR102816212B1 (ko) * 2020-11-02 2025-06-09 삼성디스플레이 주식회사 적재부 및 그것을 포함하는 윈도우 제조 시스템
KR102611190B1 (ko) * 2021-12-30 2023-12-07 세메스 주식회사 제조 공장의 물류 시스템
JP2025009152A (ja) * 2023-07-07 2025-01-20 株式会社ディスコ 搬送車

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JP2004189018A (ja) * 2002-12-09 2004-07-08 Murata Mach Ltd 天井搬送車システム

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KR20010046460A (ko) * 1999-11-12 2001-06-15 윤종용 웨이퍼 캐리어 운반 시스템
JP2004189018A (ja) * 2002-12-09 2004-07-08 Murata Mach Ltd 天井搬送車システム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101547323B1 (ko) 2013-02-18 2015-08-25 에버테크노 주식회사 오버헤드 호이스트 이송장치의 슬라이드 유닛

Also Published As

Publication number Publication date
US20060051188A1 (en) 2006-03-09
JP2006051886A (ja) 2006-02-23
TWI296604B (enExample) 2008-05-11
EP1626011B1 (en) 2009-05-13
KR20060048165A (ko) 2006-05-18
EP1626011A3 (en) 2007-02-21
DE602005014423D1 (de) 2009-06-25
TW200606091A (en) 2006-02-16
US7887278B2 (en) 2011-02-15
EP1626011A2 (en) 2006-02-15

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