KR100924002B1 - 폴리머 발광 다이오드 디스플레이, 인쇄 회로 기판 등을 위한 산업용 미세 증착 장치 - Google Patents

폴리머 발광 다이오드 디스플레이, 인쇄 회로 기판 등을 위한 산업용 미세 증착 장치 Download PDF

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KR100924002B1
KR100924002B1 KR1020037015742A KR20037015742A KR100924002B1 KR 100924002 B1 KR100924002 B1 KR 100924002B1 KR 1020037015742 A KR1020037015742 A KR 1020037015742A KR 20037015742 A KR20037015742 A KR 20037015742A KR 100924002 B1 KR100924002 B1 KR 100924002B1
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South Korea
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substrate
head
nozzle
microdeposition
nozzle firing
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Korean (ko)
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KR20040037027A (ko
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찰스 오. 에드워드
데이비드 알베르탈리
하워드 월터 비엘리히
제임스 미들튼
스코트 알 브루너
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가부시키가이샤 아루박
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    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0266—Marks, test patterns or identification means
    • H05K1/0269—Marks, test patterns or identification means for visual or optical inspection
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09818—Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
    • H05K2201/09918—Optically detected marks used for aligning tool relative to the PCB, e.g. for mounting of components
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0008—Apparatus or processes for manufacturing printed circuits for aligning or positioning of tools relative to the circuit board

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  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
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  • Gripping On Spindles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)
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