KR100923594B1 - 접지 부재 인테그리티 표시기를 갖춘 플라즈마 프로세싱챔버 및 그의 사용 방법 - Google Patents

접지 부재 인테그리티 표시기를 갖춘 플라즈마 프로세싱챔버 및 그의 사용 방법 Download PDF

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KR100923594B1
KR100923594B1 KR1020070106554A KR20070106554A KR100923594B1 KR 100923594 B1 KR100923594 B1 KR 100923594B1 KR 1020070106554 A KR1020070106554 A KR 1020070106554A KR 20070106554 A KR20070106554 A KR 20070106554A KR 100923594 B1 KR100923594 B1 KR 100923594B1
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South Korea
Prior art keywords
ground
substrate support
chamber body
sensor
substrate
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Expired - Fee Related
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English (en)
Korean (ko)
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KR20080045610A (ko
Inventor
존 엠. 화이트
칼 소렌센
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어플라이드 머티어리얼스, 인코포레이티드
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67069—Apparatus for fluid treatment for etching for drying etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4582—Rigid and flat substrates, e.g. plates or discs
    • C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
    • C23C16/4585—Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H01J11/20—Constructional details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Analytical Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)
KR1020070106554A 2006-11-20 2007-10-23 접지 부재 인테그리티 표시기를 갖춘 플라즈마 프로세싱챔버 및 그의 사용 방법 Expired - Fee Related KR100923594B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/561,463 2006-11-20
US11/561,463 US8004293B2 (en) 2006-11-20 2006-11-20 Plasma processing chamber with ground member integrity indicator and method for using the same

Publications (2)

Publication Number Publication Date
KR20080045610A KR20080045610A (ko) 2008-05-23
KR100923594B1 true KR100923594B1 (ko) 2009-10-23

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Family Applications (1)

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KR1020070106554A Expired - Fee Related KR100923594B1 (ko) 2006-11-20 2007-10-23 접지 부재 인테그리티 표시기를 갖춘 플라즈마 프로세싱챔버 및 그의 사용 방법

Country Status (5)

Country Link
US (1) US8004293B2 (enExample)
JP (1) JP5291848B2 (enExample)
KR (1) KR100923594B1 (enExample)
CN (1) CN101187013B (enExample)
TW (1) TWI389187B (enExample)

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KR20240076043A (ko) 2022-11-23 2024-05-30 심경식 기판처리설비의 단선 방지 장치

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KR101127757B1 (ko) * 2009-12-02 2012-03-23 주식회사 테스 서셉터 접지유닛, 이를 이용하여 서셉터 접지의 가변방법 및 이를 갖는 공정챔버
JP5852378B2 (ja) * 2011-09-13 2016-02-03 キヤノン株式会社 堆積膜形成方法および電子写真感光体の製造方法
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US9903739B2 (en) * 2015-06-11 2018-02-27 Tokyo Electron Limited Sensor chip for electrostatic capacitance measurement and measuring device having the same
KR102099660B1 (ko) * 2015-10-02 2020-04-14 주식회사 원익아이피에스 기판처리장치
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KR102399343B1 (ko) * 2017-05-29 2022-05-19 삼성디스플레이 주식회사 화학기상 증착장치
CN110730829A (zh) * 2017-06-01 2020-01-24 应用材料公司 延长在pecvd工艺腔室中接地带使用寿命
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Also Published As

Publication number Publication date
TWI389187B (zh) 2013-03-11
US8004293B2 (en) 2011-08-23
JP5291848B2 (ja) 2013-09-18
CN101187013A (zh) 2008-05-28
TW200832530A (en) 2008-08-01
US20080116876A1 (en) 2008-05-22
KR20080045610A (ko) 2008-05-23
JP2008156747A (ja) 2008-07-10
CN101187013B (zh) 2010-12-15

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