KR100895468B1 - 점착 척 장치 - Google Patents

점착 척 장치 Download PDF

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Publication number
KR100895468B1
KR100895468B1 KR1020077003427A KR20077003427A KR100895468B1 KR 100895468 B1 KR100895468 B1 KR 100895468B1 KR 1020077003427 A KR1020077003427 A KR 1020077003427A KR 20077003427 A KR20077003427 A KR 20077003427A KR 100895468 B1 KR100895468 B1 KR 100895468B1
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KR
South Korea
Prior art keywords
substrate
adhesive
movable
pressure
movable membrane
Prior art date
Application number
KR1020077003427A
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English (en)
Korean (ko)
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KR20070069132A (ko
Inventor
미치야 요코타
요시카즈 오오타니
미츠쿠니 사카시타
Original Assignee
신에츠 엔지니어링 가부시키가이샤
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=36227625&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=KR100895468(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by 신에츠 엔지니어링 가부시키가이샤 filed Critical 신에츠 엔지니어링 가부시키가이샤
Publication of KR20070069132A publication Critical patent/KR20070069132A/ko
Application granted granted Critical
Publication of KR100895468B1 publication Critical patent/KR100895468B1/ko

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
  • Hooks, Suction Cups, And Attachment By Adhesive Means (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Screen Printers (AREA)
KR1020077003427A 2004-10-28 2005-09-28 점착 척 장치 KR100895468B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2004-00313999 2004-10-28
JP2004313999 2004-10-28

Publications (2)

Publication Number Publication Date
KR20070069132A KR20070069132A (ko) 2007-07-02
KR100895468B1 true KR100895468B1 (ko) 2009-05-06

Family

ID=36227625

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020077003427A KR100895468B1 (ko) 2004-10-28 2005-09-28 점착 척 장치

Country Status (5)

Country Link
JP (1) JP3917651B2 (zh)
KR (1) KR100895468B1 (zh)
CN (1) CN100447622C (zh)
TW (1) TW200628880A (zh)
WO (1) WO2006046379A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102338950A (zh) * 2010-07-15 2012-02-01 Ap系统股份有限公司 基板组装设备以及使用基板组装设备的基板处理方法

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4746003B2 (ja) * 2007-05-07 2011-08-10 リンテック株式会社 移載装置及び移載方法
KR100918614B1 (ko) * 2007-10-19 2009-09-25 (주)아폴로테크 기판척
KR100942304B1 (ko) * 2008-06-02 2010-02-16 주식회사 에이디피엔지니어링 기판척, 기판합착장치
US8245751B2 (en) * 2007-11-07 2012-08-21 Advanced Display Process Engineering Co., Ltd. Substrate bonding apparatus
KR100988897B1 (ko) * 2008-08-18 2010-10-20 주식회사 탑 엔지니어링 어레이 테스터용 옵틱척
KR100983605B1 (ko) * 2008-09-24 2010-09-24 에이피시스템 주식회사 기판 안착 유닛 및 이를 구비하는 기판 접합 장치
JP5507074B2 (ja) * 2008-11-18 2014-05-28 株式会社アルバック 基板の貼合わせ方法及び基板貼合わせ装置
JP4954968B2 (ja) * 2008-12-01 2012-06-20 アドヴァンスド・ディスプレイ・プロセス・エンジニアリング・コーポレーション・リミテッド 粘着チャック及びこれを有する基板合着装置
TWI398687B (zh) * 2009-10-23 2013-06-11 Au Optronics Corp 基板組合系統及基板組合方法
KR101221034B1 (ko) * 2010-10-06 2013-01-21 엘아이지에이디피 주식회사 기판척 및 이를 이용한 기판처리장치
CA2814374A1 (en) 2010-10-21 2012-06-14 University Of Massachusetts High capacity easy release extended use adhesive devices
JP4785995B1 (ja) * 2011-02-28 2011-10-05 信越エンジニアリング株式会社 ワーク粘着チャック装置及びワーク貼り合わせ機
JP4903906B1 (ja) * 2011-04-07 2012-03-28 信越エンジニアリング株式会社 ワーク粘着チャック装置及びワーク貼り合わせ機
CN104094000B (zh) * 2012-01-19 2016-09-28 马萨诸塞大学 双面及多面粘附装置
KR101991990B1 (ko) * 2012-12-25 2019-06-21 신에츠 엔지니어링 가부시키가이샤 액추에이터 및 점착 척 장치
JP2016510390A (ja) 2013-02-06 2016-04-07 ユニバーシテイ・オブ・マサチユセツツ 調節可能な角度を有する耐重量接着装置
WO2014152485A1 (en) 2013-03-14 2014-09-25 University Of Masssachusetts Devices for application and load bearing and method of using the same
JP2016518478A (ja) 2013-03-15 2016-06-23 ユニバーシテイ・オブ・マサチユセツツ 高能力剥離容易長期使用接着閉鎖デバイス
JP5811513B2 (ja) * 2014-03-27 2015-11-11 Toto株式会社 静電チャック
JP6419635B2 (ja) * 2014-04-23 2018-11-07 株式会社アルバック 保持装置、真空処理装置
KR101838681B1 (ko) * 2014-07-07 2018-03-14 에이피시스템 주식회사 지지척 및 기판 처리 장치

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990048958A (ko) * 1997-12-11 1999-07-05 김영환 식각 챔버용 유리기판 흡착 장치
KR20030077081A (ko) * 2002-03-25 2003-10-01 엘지.필립스 엘시디 주식회사 합착 장치 및 이를 이용한 액정표시장치의 제조 방법

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63197335U (zh) * 1987-06-05 1988-12-19
JPH05305592A (ja) * 1992-04-28 1993-11-19 Sony Corp 真空チャック
JPH09181156A (ja) * 1995-12-25 1997-07-11 Sony Corp 真空チャック
JPH11333774A (ja) * 1998-05-22 1999-12-07 Ricoh Co Ltd シート状ワーク吸着・移載ハンド
JP2000199911A (ja) * 1999-01-06 2000-07-18 Matsushita Electric Ind Co Ltd 液晶表示装置の製造方法および製造装置
JP3862065B2 (ja) * 2001-11-29 2006-12-27 信越半導体株式会社 ウェーハ研磨ヘッド
TWI266104B (en) * 2002-03-14 2006-11-11 Sharp Kk Manufacturing method of liquid crystal display apparatus and substrate assembling apparatus
JP2004268155A (ja) * 2003-03-05 2004-09-30 Tamagawa Machinery Co Ltd ガラス基板研磨ヘッド及びこれを用いた研磨装置、ガラス基板研磨方法、ガラス基板

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990048958A (ko) * 1997-12-11 1999-07-05 김영환 식각 챔버용 유리기판 흡착 장치
KR20030077081A (ko) * 2002-03-25 2003-10-01 엘지.필립스 엘시디 주식회사 합착 장치 및 이를 이용한 액정표시장치의 제조 방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102338950A (zh) * 2010-07-15 2012-02-01 Ap系统股份有限公司 基板组装设备以及使用基板组装设备的基板处理方法

Also Published As

Publication number Publication date
CN1985288A (zh) 2007-06-20
JP3917651B2 (ja) 2007-05-23
CN100447622C (zh) 2008-12-31
TWI376540B (zh) 2012-11-11
KR20070069132A (ko) 2007-07-02
TW200628880A (en) 2006-08-16
JPWO2006046379A1 (ja) 2008-08-07
WO2006046379A1 (ja) 2006-05-04

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