JPS63197335U - - Google Patents
Info
- Publication number
- JPS63197335U JPS63197335U JP8799687U JP8799687U JPS63197335U JP S63197335 U JPS63197335 U JP S63197335U JP 8799687 U JP8799687 U JP 8799687U JP 8799687 U JP8799687 U JP 8799687U JP S63197335 U JPS63197335 U JP S63197335U
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- collet
- suction hole
- semiconductor pellets
- hollow part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000008188 pellet Substances 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims 1
- 239000007779 soft material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Die Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8799687U JPS63197335U (zh) | 1987-06-05 | 1987-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8799687U JPS63197335U (zh) | 1987-06-05 | 1987-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63197335U true JPS63197335U (zh) | 1988-12-19 |
Family
ID=30945717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8799687U Pending JPS63197335U (zh) | 1987-06-05 | 1987-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63197335U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006046379A1 (ja) * | 2004-10-28 | 2006-05-04 | Shin-Etsu Engineering Co., Ltd. | 粘着チャック装置 |
-
1987
- 1987-06-05 JP JP8799687U patent/JPS63197335U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006046379A1 (ja) * | 2004-10-28 | 2006-05-04 | Shin-Etsu Engineering Co., Ltd. | 粘着チャック装置 |
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