KR100869088B1 - 점착 척 장치 - Google Patents

점착 척 장치 Download PDF

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Publication number
KR100869088B1
KR100869088B1 KR1020067001279A KR20067001279A KR100869088B1 KR 100869088 B1 KR100869088 B1 KR 100869088B1 KR 1020067001279 A KR1020067001279 A KR 1020067001279A KR 20067001279 A KR20067001279 A KR 20067001279A KR 100869088 B1 KR100869088 B1 KR 100869088B1
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KR
South Korea
Prior art keywords
substrate
adhesive
adhesion
pressure
film
Prior art date
Application number
KR1020067001279A
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English (en)
Korean (ko)
Other versions
KR20060133942A (ko
Inventor
요시카즈 오타니
미치야 요코타
Original Assignee
신에츠 엔지니어링 가부시키가이샤
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Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=35125225&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=KR100869088(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by 신에츠 엔지니어링 가부시키가이샤 filed Critical 신에츠 엔지니어링 가부시키가이샤
Publication of KR20060133942A publication Critical patent/KR20060133942A/ko
Application granted granted Critical
Publication of KR100869088B1 publication Critical patent/KR100869088B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133354—Arrangements for aligning or assembling substrates
KR1020067001279A 2004-04-09 2005-04-08 점착 척 장치 KR100869088B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004115553 2004-04-09
JPJP-P-2004-00115553 2004-04-09

Publications (2)

Publication Number Publication Date
KR20060133942A KR20060133942A (ko) 2006-12-27
KR100869088B1 true KR100869088B1 (ko) 2008-11-18

Family

ID=35125225

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020067001279A KR100869088B1 (ko) 2004-04-09 2005-04-08 점착 척 장치

Country Status (5)

Country Link
JP (1) JP3882004B2 (ja)
KR (1) KR100869088B1 (ja)
CN (1) CN1777832B (ja)
TW (1) TW200606501A (ja)
WO (1) WO2005098522A1 (ja)

Families Citing this family (44)

* Cited by examiner, † Cited by third party
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US8603288B2 (en) 2008-01-18 2013-12-10 Rockwell Collins, Inc. Planarization treatment of pressure sensitive adhesive for rigid-to-rigid substrate lamination
US8936057B2 (en) 2005-08-30 2015-01-20 Rockwell Collins, Inc. Substrate lamination system and method
US8691043B2 (en) 2005-08-30 2014-04-08 Rockwell Collins, Inc. Substrate lamination system and method
JP4671817B2 (ja) * 2005-09-08 2011-04-20 信越ポリマー株式会社 部品保持具
KR100898793B1 (ko) 2005-12-29 2009-05-20 엘지디스플레이 주식회사 액정표시소자용 기판 합착 장치
US7875501B2 (en) 2006-03-15 2011-01-25 Shin-Etsu Polymer Co., Ltd. Holding jig, semiconductor wafer grinding method, semiconductor wafer protecting structure and semiconductor wafer grinding method and semiconductor chip fabrication method using the structure
DE102006031434B4 (de) 2006-07-07 2019-11-14 Erich Thallner Handhabungsvorrichtung sowie Handhabungsverfahren für Wafer
JP4125776B1 (ja) * 2007-01-31 2008-07-30 信越エンジニアリング株式会社 粘着チャック装置
WO2008114337A1 (ja) * 2007-02-22 2008-09-25 Shin-Etsu Engineering Co., Ltd. 真空貼り合わせ方法及び真空貼り合わせ装置
WO2008136056A1 (ja) * 2007-04-24 2008-11-13 Hitachi, Ltd. プラズマディスプレイパネルの製造装置及び製造方法
JP5074125B2 (ja) * 2007-08-09 2012-11-14 リンテック株式会社 固定治具並びにワークの処理方法
KR100918614B1 (ko) * 2007-10-19 2009-09-25 (주)아폴로테크 기판척
US8245751B2 (en) 2007-11-07 2012-08-21 Advanced Display Process Engineering Co., Ltd. Substrate bonding apparatus
EP3135490B1 (en) * 2008-01-18 2018-08-22 Rockwell Collins, Inc. Substrate lamination apparatus
EP2253011B1 (en) 2008-03-14 2014-04-23 Dow Corning Corporation Method of forming a photovoltaic cell module
JP4958312B2 (ja) * 2008-08-11 2012-06-20 信越ポリマー株式会社 保持治具
JP2010126342A (ja) * 2008-12-01 2010-06-10 Advanced Display Process Engineering Co Ltd 基板チャック及びこれを有する基板合着装置
JP2010165883A (ja) * 2009-01-16 2010-07-29 Lintec Corp 半導体ウエハの搬送装置及び搬送方法
KR101066603B1 (ko) * 2009-01-20 2011-09-22 에이피시스템 주식회사 기판 지지 유닛 및 이를 구비하는 기판 접합 장치
EP2441096B1 (en) * 2009-06-08 2016-03-30 3S Swiss Solar Systems AG Method for producing a solar panel
KR101326016B1 (ko) * 2010-10-06 2013-11-07 엘아이지에이디피 주식회사 기판분리모듈 및 기판분리장치
KR101221034B1 (ko) * 2010-10-06 2013-01-21 엘아이지에이디피 주식회사 기판척 및 이를 이용한 기판처리장치
JP4785995B1 (ja) * 2011-02-28 2011-10-05 信越エンジニアリング株式会社 ワーク粘着チャック装置及びワーク貼り合わせ機
JP2012187679A (ja) * 2011-03-11 2012-10-04 Mitsubishi Heavy Ind Ltd チャック装置
KR101347546B1 (ko) * 2011-03-14 2014-01-03 엘아이지에이디피 주식회사 기판 척킹장치 및 이를 가지는 박막증착장비
JP4903906B1 (ja) * 2011-04-07 2012-03-28 信越エンジニアリング株式会社 ワーク粘着チャック装置及びワーク貼り合わせ機
KR101328886B1 (ko) * 2011-05-07 2013-11-13 주식회사 야스 링 모양 점착부를 이용한 기판 탈부착 장치
US8647727B1 (en) 2012-06-29 2014-02-11 Rockwell Colllins, Inc. Optical assembly with adhesive layers configured for diffusion
JP5422767B1 (ja) * 2013-05-09 2014-02-19 信越エンジニアリング株式会社 貼り合わせ分離方法及び分離装置
KR101585316B1 (ko) * 2014-01-29 2016-01-13 세메스 주식회사 다이 이젝팅 장치
JP6419635B2 (ja) * 2014-04-23 2018-11-07 株式会社アルバック 保持装置、真空処理装置
US9981460B1 (en) 2014-05-06 2018-05-29 Rockwell Collins, Inc. Systems and methods for substrate lamination
JP6398301B2 (ja) * 2014-05-09 2018-10-03 藤倉化成株式会社 吸着離脱装置
CN104637843B (zh) * 2015-02-02 2017-12-05 京东方科技集团股份有限公司 封装设备和封装方法
CN105572925B (zh) * 2016-01-04 2018-09-25 京东方科技集团股份有限公司 一种基板承载装置
WO2018074013A1 (ja) * 2016-10-17 2018-04-26 信越エンジニアリング株式会社 貼合デバイスの真空貼り合わせ装置
CN106910700B (zh) * 2017-03-09 2020-12-04 京东方科技集团股份有限公司 转印装置和电子器件的转印方法
CN207116403U (zh) * 2017-04-21 2018-03-16 厦门市三安光电科技有限公司 一种用于微元件转移的转置头
US10919237B2 (en) * 2017-05-26 2021-02-16 The Boeing Company Pick and place end effector
JP6733966B2 (ja) * 2018-07-09 2020-08-05 Ａｉメカテック株式会社 基板組立装置及び基板組立方法
US20220143838A1 (en) * 2019-02-28 2022-05-12 Nitto Denko Corporation Adherent device, transfer equipment using the same, and transfer method
KR102198179B1 (ko) * 2019-05-21 2021-01-04 (주) 아이엠텍 터치 패널용 기판 진공 합착 시스템 및 그 시스템을 이용하여 터치 패널용 기판 진공 합착 방법
KR102198180B1 (ko) * 2019-05-21 2021-01-04 (주) 아이엠텍 터치 패널 합착용 고무척
CN115072369A (zh) * 2022-06-28 2022-09-20 深圳市华星光电半导体显示技术有限公司 搬运组件及成膜装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01142532A (ja) * 1987-11-27 1989-06-05 Matsushita Electric Ind Co Ltd 液晶パネルの製造方法
JPH06265916A (ja) * 1993-03-12 1994-09-22 Sony Corp 液晶表示素子の製造方法及びその装置
JPH10240148A (ja) * 1997-02-27 1998-09-11 Nec Corp 異方性導電フィルム貼付方法及び装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01142532A (ja) * 1987-11-27 1989-06-05 Matsushita Electric Ind Co Ltd 液晶パネルの製造方法
JPH06265916A (ja) * 1993-03-12 1994-09-22 Sony Corp 液晶表示素子の製造方法及びその装置
JPH10240148A (ja) * 1997-02-27 1998-09-11 Nec Corp 異方性導電フィルム貼付方法及び装置

Also Published As

Publication number Publication date
TWI364576B (ja) 2012-05-21
TW200606501A (en) 2006-02-16
JP3882004B2 (ja) 2007-02-14
JPWO2005098522A1 (ja) 2007-08-16
WO2005098522A1 (ja) 2005-10-20
KR20060133942A (ko) 2006-12-27
CN1777832A (zh) 2006-05-24
CN1777832B (zh) 2010-05-05

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