KR100864472B1 - 광학 모듈의 제조 방법 및 제조 장치 - Google Patents
광학 모듈의 제조 방법 및 제조 장치 Download PDFInfo
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- KR100864472B1 KR100864472B1 KR1020070017432A KR20070017432A KR100864472B1 KR 100864472 B1 KR100864472 B1 KR 100864472B1 KR 1020070017432 A KR1020070017432 A KR 1020070017432A KR 20070017432 A KR20070017432 A KR 20070017432A KR 100864472 B1 KR100864472 B1 KR 100864472B1
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- 230000003287 optical effect Effects 0.000 title claims abstract description 255
- 238000000034 method Methods 0.000 title description 25
- 239000000758 substrate Substances 0.000 claims abstract description 147
- 229910000679 solder Inorganic materials 0.000 claims abstract description 116
- 239000000463 material Substances 0.000 claims abstract description 113
- 238000004519 manufacturing process Methods 0.000 claims abstract description 61
- 238000005476 soldering Methods 0.000 claims abstract description 35
- 238000010438 heat treatment Methods 0.000 claims description 59
- 230000007246 mechanism Effects 0.000 claims description 21
- 239000011248 coating agent Substances 0.000 claims description 20
- 238000000576 coating method Methods 0.000 claims description 20
- 238000002844 melting Methods 0.000 claims description 16
- 230000008018 melting Effects 0.000 claims description 16
- 239000000523 sample Substances 0.000 claims description 11
- 238000003825 pressing Methods 0.000 claims description 4
- 239000000155 melt Substances 0.000 claims description 2
- 230000008569 process Effects 0.000 description 21
- 238000004140 cleaning Methods 0.000 description 13
- 238000001816 cooling Methods 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 5
- 238000001514 detection method Methods 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 5
- 230000004044 response Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- 238000005336 cracking Methods 0.000 description 2
- 230000000593 degrading effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/303—Surface mounted components, e.g. affixing before soldering, aligning means, spacing means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0203—Containers; Encapsulations, e.g. encapsulation of photodiodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3494—Heating methods for reflowing of solder
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
- H05K2201/09781—Dummy conductors, i.e. not used for normal transport of current; Dummy electrodes of components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10007—Types of components
- H05K2201/10121—Optical component, e.g. opto-electronic component
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
- H05K2201/10621—Components characterised by their electrical contacts
- H05K2201/10727—Leadless chip carrier [LCC], e.g. chip-modules for cards
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/01—Tools for processing; Objects used during processing
- H05K2203/0195—Tool for a process not provided for in H05K3/00, e.g. tool for handling objects using suction, for deforming objects, for applying local pressure
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/08—Treatments involving gases
- H05K2203/082—Suction, e.g. for holding solder balls or components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/11—Treatments characterised by their effect, e.g. heating, cooling, roughening
- H05K2203/111—Preheating, e.g. before soldering
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Optics & Photonics (AREA)
- Optical Couplings Of Light Guides (AREA)
- Light Receiving Elements (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Semiconductor Lasers (AREA)
Abstract
Description
Claims (10)
- 기판면에 복수의 단자 패드 및 복수의 착지 패드를 구비하는 기판에 대하여, 상기 단자 패드에 땜납 재료를 도포하는 도포 단계와,상기 착지 패드를 이용하여 광학 소자 패키지의 상면이 상기 기판면과 평행하게 되도록, 그리고 상기 광학 소자 패키지의 저면과 상기 기판면 사이에 간격이 형성되도록, 복수의 단자와 평탄한 상면을 갖는 광학 소자 패키지를 상기 기판상에 탑재하는 탑재 단계와,상기 탑재 단계와 동시에, 상기 단자 패드를 예비 가열하는 예비 가열 단계와,상기 땜납 재료를 용융시킨 후에 경화시켜 상기 단자 패드와 이에 대응하는 상기 광학 소자 패키지의 단자를 전기적으로 접속시키는 납땜 단계를 포함하는 것을 특징으로 하는 광학 모듈 제조 방법.
- 제1항에 있어서, 상기 탑재 단계는 위치 결정 헤드 기구에 의해 상기 광학 소자 패키지의 상면을 유지한 상태에서 상기 위치 결정 헤드 기구의 레그로 상기 착지 패드를 압박함으로써 상기 간격을 결정하고,상기 납땜 단계는, 상기 간격이 결정된 상태에서, 가열 헤드부의 가열된 아암을 상기 땜납 재료와 접촉시켜 상기 땜납 재료를 용융시키는 것을 특징으로 하는 광학 모듈 제조 방법.
- 제1항 또는 제2항에 있어서, 상기 단자 패드에는, 상기 도포 단계가 행해지기 전에 땜납 재료가 예비코팅되어 있는 것을 특징으로 하는 광학 모듈 제조 방법.
- 제1항 또는 제2항에 있어서, 상기 간격은 150 ㎛ 내지 200 ㎛의 범위인 것을 특징으로 하는 광학 모듈 제조 방법.
- 제1항 또는 제2항에 있어서, 상기 광학 소자 패키지는 CCD 또는 CMOS 소자를 포함하고,상기 탑재 단계는, 상기 광학 소자 패키지의 광축이 상기 기판면과 수직이 되도록 상기 광학 소자 패키지를 상기 기판상에 탑재하는 것을 특징으로 하는 광학 모듈 제조 방법.
- 기판면에 복수의 단자 패드 및 복수의 착지 패드를 포함하는 기판이 세팅되는 이동 가능한 스테이지 유닛과,상기 스테이지 유닛이 도포 위치로 이동되면, 상기 단자 패드에 땜납 재료를 도포하는 도포 장치와,상기 스테이지 유닛이 탑재 위치로 이동되면, 상기 착지 패드를 이용하여 광학 소자 패키지의 상면이 상기 기판면과 평행하게 되도록, 또한 상기 광학 소자 패키지의 저면과 상기 기판면 사이에 간격이 형성되도록, 복수의 단자와 평탄한 상면을 갖는 광학 소자 패키지를 상기 기판상에 탑재하는 탑재 장치와,상기 광학 소자 패키지를 상기 기판상에 탑재함과 동시에, 상기 단자 패드를 예비 가열하는 예비 가열 수단과,상기 땜납 재료를 용융시킨 후에 경화시켜 상기 단자 패드와 이에 대응하는 상기 광학 소자 패키지의 단자를 전기적으로 접속시키는 납땜 수단을 포함한 것을 특징으로 하는 광학 모듈 제조 장치.
- 제6항에 있어서, 상기 탑재 장치는 위치 결정 헤드 기구를 포함하고, 상기 위치 결정 헤드 기구에 의해 상기 광학 소자 패키지의 상면을 유지한 상태에서 상기 위치 결정 헤드 기구의 레그로 상기 착지 패드를 압박함으로써 상기 간격을 결정하며,상기 납땜 수단은 아암을 포함하고, 상기 간격이 결정된 상태에서 가열된 아암을 상기 땜납 재료와 접촉시켜 상기 땜납 재료를 용융시키는 것을 특징으로 하는 광학 모듈 제조 장치.
- 제6항 또는 제7항에 있어서, 상기 예비 가열 수단은, 상기 기판면의 반대쪽에서 상기 기판을 예비 가열하는 하부 히터부를 포함하는 것을 특징으로 하는 광학 모듈 제조 장치.
- 제6항 또는 제7항에 있어서, 상기 예비 가열 수단은, 상기 단자 패드의 상기 땜납 재료가 도포되어 있지 않은 부분과 접촉하여 예비 가열하는 가열 프로브를 포함하는 것을 특징으로 하는 광학 모듈 제조 장치.
- 제6항 또는 제7항에 있어서, 상기 광학 소자 패키지는 CCD 또는 CMOS 소자를 포함하고,상기 탑재 장치는, 상기 광학 소자 패키지의 광축이 상기 기판면과 수직이 되도록 상기 광학 소자 패키지를 상기 기판상에 탑재하는 것을 특징으로 하는 광학 모듈 제조 장치.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006291992A JP4810393B2 (ja) | 2006-10-27 | 2006-10-27 | 光モジュール製造方法及び製造装置 |
JPJP-P-2006-00291992 | 2006-10-27 |
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KR20080037998A KR20080037998A (ko) | 2008-05-02 |
KR100864472B1 true KR100864472B1 (ko) | 2008-10-22 |
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Country Status (5)
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US (1) | US7691662B2 (ko) |
JP (1) | JP4810393B2 (ko) |
KR (1) | KR100864472B1 (ko) |
CN (1) | CN101170895B (ko) |
TW (1) | TWI351238B (ko) |
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Publication number | Priority date | Publication date | Assignee | Title |
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US20050153271A1 (en) * | 2004-01-13 | 2005-07-14 | Wenrich Marshall S. | Organ preservation apparatus and methods |
JP5810153B2 (ja) | 2011-04-13 | 2015-11-11 | 株式会社フジクラ | 光モジュールの製造方法 |
JP2017040826A (ja) * | 2015-08-20 | 2017-02-23 | 株式会社フジクラ | 接着方法、光モジュールの製造方法、及び光モジュール |
JP7293697B2 (ja) * | 2019-02-06 | 2023-06-20 | 富士フイルムビジネスイノベーション株式会社 | 発光装置、光学装置および情報処理装置 |
CN110460427A (zh) * | 2019-03-08 | 2019-11-15 | 中国电子科技集团公司电子科学研究院 | 量子密钥分发相位编解码器、相应的编解码装置及系统 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06252520A (ja) * | 1993-03-01 | 1994-09-09 | Mitsubishi Electric Corp | 半導体装置等の実装用薄型基板 |
JPH10256309A (ja) | 1997-03-10 | 1998-09-25 | Matsushita Electric Ind Co Ltd | 半導体素子の実装方法 |
JPH1126507A (ja) | 1997-06-27 | 1999-01-29 | Nec Corp | Bga型半導体パッケージ |
KR20030019474A (ko) * | 2000-07-04 | 2003-03-06 | 마츠시타 덴끼 산교 가부시키가이샤 | 범프 형성장치 및 방법 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3871015A (en) * | 1969-08-14 | 1975-03-11 | Ibm | Flip chip module with non-uniform connector joints |
JPS644095U (ko) | 1987-06-26 | 1989-01-11 | ||
US5564183A (en) * | 1992-09-30 | 1996-10-15 | Matsushita Electric Industrial Co., Ltd. | Producing system of printed circuit board and method therefor |
JPH0715131A (ja) * | 1993-06-22 | 1995-01-17 | Mitsubishi Electric Corp | 電子部品の実装方法 |
JPH0955565A (ja) | 1995-08-11 | 1997-02-25 | Kenwood Corp | プリント配線基板 |
JPH1070153A (ja) * | 1996-08-26 | 1998-03-10 | Hitachi Ltd | 電子部品の接続方法 |
JP3709036B2 (ja) * | 1997-01-30 | 2005-10-19 | 松下電器産業株式会社 | 弱耐熱性電子部品の実装方法 |
US6333483B1 (en) | 1997-04-04 | 2001-12-25 | Taiyo Yuden Co., Ltd. | Method of manufacturing circuit modules |
JPH1169240A (ja) * | 1997-08-26 | 1999-03-09 | Sanyo Electric Co Ltd | 固体撮像装置 |
JP2001223464A (ja) * | 2000-02-09 | 2001-08-17 | Sony Corp | 半田付け方法 |
DE10152408A1 (de) | 2000-10-25 | 2002-05-16 | Matsushita Electric Ind Co Ltd | System und Verfahren zur Bauteilmontage |
KR100443504B1 (ko) * | 2001-06-12 | 2004-08-09 | 주식회사 하이닉스반도체 | 볼 그리드 어레이 패키지 구조 및 그 제조방법 |
JP2003050341A (ja) * | 2001-08-06 | 2003-02-21 | Yamaha Corp | 光学部品複合体およびその製造方法 |
JP2006032622A (ja) * | 2004-07-15 | 2006-02-02 | Mitsubishi Electric Corp | リードレスパッケージの実装構造 |
JP4473072B2 (ja) | 2004-08-24 | 2010-06-02 | 三菱電機株式会社 | 電子部品の実装装置 |
-
2006
- 2006-10-27 JP JP2006291992A patent/JP4810393B2/ja not_active Expired - Fee Related
-
2007
- 2007-02-08 US US11/703,699 patent/US7691662B2/en not_active Expired - Fee Related
- 2007-02-09 TW TW096104832A patent/TWI351238B/zh not_active IP Right Cessation
- 2007-02-21 KR KR1020070017432A patent/KR100864472B1/ko not_active IP Right Cessation
- 2007-02-26 CN CN2007100787604A patent/CN101170895B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06252520A (ja) * | 1993-03-01 | 1994-09-09 | Mitsubishi Electric Corp | 半導体装置等の実装用薄型基板 |
JPH10256309A (ja) | 1997-03-10 | 1998-09-25 | Matsushita Electric Ind Co Ltd | 半導体素子の実装方法 |
JPH1126507A (ja) | 1997-06-27 | 1999-01-29 | Nec Corp | Bga型半導体パッケージ |
KR20030019474A (ko) * | 2000-07-04 | 2003-03-06 | 마츠시타 덴끼 산교 가부시키가이샤 | 범프 형성장치 및 방법 |
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KR20080037998A (ko) | 2008-05-02 |
CN101170895B (zh) | 2011-01-12 |
US20080102544A1 (en) | 2008-05-01 |
CN101170895A (zh) | 2008-04-30 |
TWI351238B (en) | 2011-10-21 |
TW200820849A (en) | 2008-05-01 |
JP4810393B2 (ja) | 2011-11-09 |
JP2008108992A (ja) | 2008-05-08 |
US7691662B2 (en) | 2010-04-06 |
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