KR100846348B1 - 잉크 젯 기록 헤드용 기판 제조 방법 및 이 방법으로제조된 기판을 이용한 기록 헤드 제조 방법 - Google Patents

잉크 젯 기록 헤드용 기판 제조 방법 및 이 방법으로제조된 기판을 이용한 기록 헤드 제조 방법 Download PDF

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Publication number
KR100846348B1
KR100846348B1 KR1020050037551A KR20050037551A KR100846348B1 KR 100846348 B1 KR100846348 B1 KR 100846348B1 KR 1020050037551 A KR1020050037551 A KR 1020050037551A KR 20050037551 A KR20050037551 A KR 20050037551A KR 100846348 B1 KR100846348 B1 KR 100846348B1
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South Korea
Prior art keywords
pair
electrode layers
forming
layer
etching
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Expired - Fee Related
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KR1020050037551A
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English (en)
Korean (ko)
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KR20060045903A (ko
Inventor
히로까즈 고무로
데루오 오자끼
슈지 고야마
고우스께 구보
마꼬또 데루이
가즈히로 하야까와
료지 간리
마사따까 가또
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캐논 가부시끼가이샤
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Publication of KR20060045903A publication Critical patent/KR20060045903A/ko
Application granted granted Critical
Publication of KR100846348B1 publication Critical patent/KR100846348B1/ko
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Expired - Fee Related legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J11/00Devices or arrangements  of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
    • B41J11/0095Detecting means for copy material, e.g. for detecting or sensing presence of copy material or its leading or trailing end
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J13/00Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, specially adapted for supporting or handling copy material in short lengths, e.g. sheets
    • B41J13/10Sheet holders, retainers, movable guides, or stationary guides
    • B41J13/103Sheet holders, retainers, movable guides, or stationary guides for the sheet feeding section
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14088Structure of heating means
    • B41J2/14112Resistive element
    • B41J2/14129Layer structure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1628Manufacturing processes etching dry etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1629Manufacturing processes etching wet etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1631Manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1637Manufacturing processes molding
    • B41J2/1639Manufacturing processes molding sacrificial molding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1642Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1646Manufacturing processes thin film formation thin film formation by sputtering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14475Structure thereof only for on-demand ink jet heads characterised by nozzle shapes or number of orifices per chamber

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
KR1020050037551A 2004-05-06 2005-05-04 잉크 젯 기록 헤드용 기판 제조 방법 및 이 방법으로제조된 기판을 이용한 기록 헤드 제조 방법 Expired - Fee Related KR100846348B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2004137510 2004-05-06
JPJP-P-2004-00137510 2004-05-06
JP2005106287A JP4537246B2 (ja) 2004-05-06 2005-04-01 インクジェット記録ヘッド用基体の製造方法及び該方法により製造された前記基体を用いた記録ヘッドの製造方法
JPJP-P-2005-00106287 2005-04-01

Publications (2)

Publication Number Publication Date
KR20060045903A KR20060045903A (ko) 2006-05-17
KR100846348B1 true KR100846348B1 (ko) 2008-07-15

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Family Applications (1)

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KR1020050037551A Expired - Fee Related KR100846348B1 (ko) 2004-05-06 2005-05-04 잉크 젯 기록 헤드용 기판 제조 방법 및 이 방법으로제조된 기판을 이용한 기록 헤드 제조 방법

Country Status (6)

Country Link
US (1) US7452474B2 (enExample)
EP (1) EP1593515B1 (enExample)
JP (1) JP4537246B2 (enExample)
KR (1) KR100846348B1 (enExample)
DE (1) DE602005025276D1 (enExample)
TW (1) TWI274667B (enExample)

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JP4522086B2 (ja) * 2003-12-15 2010-08-11 キヤノン株式会社 梁、梁の製造方法、梁を備えたインクジェット記録ヘッド、および該インクジェット記録ヘッドの製造方法
CN1968815B (zh) * 2004-06-28 2013-05-01 佳能株式会社 排液头制造方法,和使用该方法得到的排液头
US7629111B2 (en) * 2004-06-28 2009-12-08 Canon Kabushiki Kaisha Liquid discharge head manufacturing method, and liquid discharge head obtained using this method
JP4137027B2 (ja) * 2004-08-16 2008-08-20 キヤノン株式会社 インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド
JP4182035B2 (ja) * 2004-08-16 2008-11-19 キヤノン株式会社 インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド
JP2006130868A (ja) * 2004-11-09 2006-05-25 Canon Inc インクジェット記録ヘッド及びその製造方法
JP2006137030A (ja) * 2004-11-10 2006-06-01 Canon Inc 液体吐出記録ヘッド及びその製造方法
JP4641440B2 (ja) * 2005-03-23 2011-03-02 キヤノン株式会社 インクジェット記録ヘッドおよび該インクジェット記録ヘッドの製造方法
JP4766658B2 (ja) * 2005-05-10 2011-09-07 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
US7637013B2 (en) * 2005-08-23 2009-12-29 Canon Kabushiki Kaisha Method of manufacturing ink jet recording head
US8438729B2 (en) * 2006-03-09 2013-05-14 Canon Kabushiki Kaisha Method of producing liquid discharge head
KR20080000421A (ko) * 2006-06-27 2008-01-02 삼성전자주식회사 프린트 헤드 및 그 제조방법
JP4981491B2 (ja) * 2007-03-15 2012-07-18 キヤノン株式会社 インクジェットヘッド製造方法及び貫通電極の製造方法
JP5361231B2 (ja) * 2008-03-26 2013-12-04 キヤノン株式会社 インクジェット記録ヘッド及び電子デバイス
JP4656670B2 (ja) * 2008-12-19 2011-03-23 キヤノン株式会社 液体吐出ヘッド及び液体吐出ヘッドの製造方法
US8012773B2 (en) * 2009-06-11 2011-09-06 Canon Kabushiki Kaisha Method for manufacturing liquid discharge head
US8499453B2 (en) * 2009-11-26 2013-08-06 Canon Kabushiki Kaisha Method of manufacturing liquid discharge head, and method of manufacturing discharge port member
US8434229B2 (en) * 2010-11-24 2013-05-07 Canon Kabushiki Kaisha Liquid ejection head manufacturing method

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Also Published As

Publication number Publication date
JP2005343171A (ja) 2005-12-15
US7452474B2 (en) 2008-11-18
EP1593515A3 (en) 2006-09-06
EP1593515A2 (en) 2005-11-09
TW200606023A (en) 2006-02-16
JP4537246B2 (ja) 2010-09-01
DE602005025276D1 (de) 2011-01-27
KR20060045903A (ko) 2006-05-17
EP1593515B1 (en) 2010-12-15
TWI274667B (en) 2007-03-01
US20050248623A1 (en) 2005-11-10

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