DE602005025276D1 - Herstellungsverfahren eines Tintenstrahlaufzeichnungskopfsubstrats und Herstellungsverfahren eines Aufzeichnungskopfes mit nach diesem Verfahren hergestelltem Substrat - Google Patents
Herstellungsverfahren eines Tintenstrahlaufzeichnungskopfsubstrats und Herstellungsverfahren eines Aufzeichnungskopfes mit nach diesem Verfahren hergestelltem SubstratInfo
- Publication number
- DE602005025276D1 DE602005025276D1 DE602005025276T DE602005025276T DE602005025276D1 DE 602005025276 D1 DE602005025276 D1 DE 602005025276D1 DE 602005025276 T DE602005025276 T DE 602005025276T DE 602005025276 T DE602005025276 T DE 602005025276T DE 602005025276 D1 DE602005025276 D1 DE 602005025276D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- recording head
- substrate
- ink jet
- jet recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title 2
- 239000000758 substrate Substances 0.000 title 2
- 238000000034 method Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J11/00—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
- B41J11/0095—Detecting means for copy material, e.g. for detecting or sensing presence of copy material or its leading or trailing end
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J13/00—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, specially adapted for supporting or handling copy material in short lengths, e.g. sheets
- B41J13/10—Sheet holders, retainers, movable guides, or stationary guides
- B41J13/103—Sheet holders, retainers, movable guides, or stationary guides for the sheet feeding section
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14088—Structure of heating means
- B41J2/14112—Resistive element
- B41J2/14129—Layer structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14475—Structure thereof only for on-demand ink jet heads characterised by nozzle shapes or number of orifices per chamber
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004137510 | 2004-05-06 | ||
JP2005106287A JP4537246B2 (ja) | 2004-05-06 | 2005-04-01 | インクジェット記録ヘッド用基体の製造方法及び該方法により製造された前記基体を用いた記録ヘッドの製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602005025276D1 true DE602005025276D1 (de) | 2011-01-27 |
Family
ID=34935955
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602005025276T Active DE602005025276D1 (de) | 2004-05-06 | 2005-04-29 | Herstellungsverfahren eines Tintenstrahlaufzeichnungskopfsubstrats und Herstellungsverfahren eines Aufzeichnungskopfes mit nach diesem Verfahren hergestelltem Substrat |
Country Status (6)
Country | Link |
---|---|
US (1) | US7452474B2 (de) |
EP (1) | EP1593515B1 (de) |
JP (1) | JP4537246B2 (de) |
KR (1) | KR100846348B1 (de) |
DE (1) | DE602005025276D1 (de) |
TW (1) | TWI274667B (de) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4522086B2 (ja) * | 2003-12-15 | 2010-08-11 | キヤノン株式会社 | 梁、梁の製造方法、梁を備えたインクジェット記録ヘッド、および該インクジェット記録ヘッドの製造方法 |
EP1768848B1 (de) * | 2004-06-28 | 2010-07-21 | Canon Kabushiki Kaisha | Verfahren zur herstellung eines flüssigkeitsausgabekopfs und unter verwendung dieses verfahrens erhaltener flüssigkeitsausgabekopf |
EP1768847B1 (de) * | 2004-06-28 | 2009-08-12 | Canon Kabushiki Kaisha | Verfahren zur herstellung eines flüssigkeitsabgabekopfs und unter verwendung dieses verfahrens erhaltener flüssigkeitsabgabekopf |
JP4137027B2 (ja) * | 2004-08-16 | 2008-08-20 | キヤノン株式会社 | インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド |
JP4182035B2 (ja) * | 2004-08-16 | 2008-11-19 | キヤノン株式会社 | インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド |
JP2006130868A (ja) * | 2004-11-09 | 2006-05-25 | Canon Inc | インクジェット記録ヘッド及びその製造方法 |
JP2006137030A (ja) * | 2004-11-10 | 2006-06-01 | Canon Inc | 液体吐出記録ヘッド及びその製造方法 |
JP4641440B2 (ja) * | 2005-03-23 | 2011-03-02 | キヤノン株式会社 | インクジェット記録ヘッドおよび該インクジェット記録ヘッドの製造方法 |
JP4766658B2 (ja) * | 2005-05-10 | 2011-09-07 | キヤノン株式会社 | 液体吐出ヘッドおよびその製造方法 |
US7637013B2 (en) * | 2005-08-23 | 2009-12-29 | Canon Kabushiki Kaisha | Method of manufacturing ink jet recording head |
US8438729B2 (en) * | 2006-03-09 | 2013-05-14 | Canon Kabushiki Kaisha | Method of producing liquid discharge head |
KR20080000421A (ko) * | 2006-06-27 | 2008-01-02 | 삼성전자주식회사 | 프린트 헤드 및 그 제조방법 |
JP4981491B2 (ja) * | 2007-03-15 | 2012-07-18 | キヤノン株式会社 | インクジェットヘッド製造方法及び貫通電極の製造方法 |
JP5361231B2 (ja) * | 2008-03-26 | 2013-12-04 | キヤノン株式会社 | インクジェット記録ヘッド及び電子デバイス |
JP4656670B2 (ja) * | 2008-12-19 | 2011-03-23 | キヤノン株式会社 | 液体吐出ヘッド及び液体吐出ヘッドの製造方法 |
US8012773B2 (en) * | 2009-06-11 | 2011-09-06 | Canon Kabushiki Kaisha | Method for manufacturing liquid discharge head |
US8499453B2 (en) * | 2009-11-26 | 2013-08-06 | Canon Kabushiki Kaisha | Method of manufacturing liquid discharge head, and method of manufacturing discharge port member |
US8434229B2 (en) * | 2010-11-24 | 2013-05-07 | Canon Kabushiki Kaisha | Liquid ejection head manufacturing method |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US647769A (en) * | 1899-07-10 | 1900-04-17 | David Strawbridge | Condiment-holder. |
JPS60159062A (ja) | 1984-01-31 | 1985-08-20 | Canon Inc | 液体噴射記録ヘツド |
EP0490668B1 (de) | 1990-12-12 | 1996-10-16 | Canon Kabushiki Kaisha | Tintenstrahlaufzeichnung |
JPH06188108A (ja) * | 1992-12-21 | 1994-07-08 | Canon Inc | 薄膜抵抗器の製造方法、成膜装置用防着板及び成膜装置 |
US5636441A (en) * | 1995-03-16 | 1997-06-10 | Hewlett-Packard Company | Method of forming a heating element for a printhead |
JPH0911468A (ja) * | 1995-06-29 | 1997-01-14 | Canon Inc | インクジェット記録ヘッド用基体、インクジェット記録ヘッド、インクジェット記録装置および情報処理システム |
JPH11227210A (ja) | 1997-12-05 | 1999-08-24 | Canon Inc | 液体吐出ヘッド、該ヘッドの製造方法、ヘッドカートリッジおよび液体吐出装置 |
JP2000198199A (ja) | 1997-12-05 | 2000-07-18 | Canon Inc | 液体吐出ヘッドおよびヘッドカートリッジおよび液体吐出装置および液体吐出ヘッドの製造方法 |
US6142606A (en) | 1997-12-22 | 2000-11-07 | Canon Kabushiki Kaisha | Ink jet recording head, substrate for use of such head, ink jet cartridge, and ink jet recording apparatus |
JP2000177135A (ja) | 1998-10-08 | 2000-06-27 | Canon Inc | インクジェット記録ヘッド用基板、インクジェット記録ヘッドおよびその製造方法 |
US6357862B1 (en) * | 1998-10-08 | 2002-03-19 | Canon Kabushiki Kaisha | Substrate for ink jet recording head, ink jet recording head and method of manufacture therefor |
EP1000745A3 (de) | 1998-10-27 | 2001-01-24 | Canon Kabushiki Kaisha | Platine zur elektrothermischen Umwandlung, Tintenstrahldruckkopf und Tintenstrahlaufzeichnungsgerät mit derselben, und Verfahren zur Herstellung eines Tintenstrahldruckkopfes |
US6474769B1 (en) | 1999-06-04 | 2002-11-05 | Canon Kabushiki Kaisha | Liquid discharge head, liquid discharge apparatus and method for manufacturing liquid discharge head |
US6402302B1 (en) | 1999-06-04 | 2002-06-11 | Canon Kabushiki Kaisha | Liquid discharge head, manufacturing method thereof, and microelectromechanical device |
JP3592136B2 (ja) | 1999-06-04 | 2004-11-24 | キヤノン株式会社 | 液体吐出ヘッドおよびその製造方法と微小電気機械装置の製造方法 |
JP3647365B2 (ja) * | 1999-08-24 | 2005-05-11 | キヤノン株式会社 | 液体吐出ヘッド用基板ユニットおよびその製造方法ならびに液体吐出ヘッド,カートリッジおよび画像形成装置 |
JP3652185B2 (ja) | 1999-10-05 | 2005-05-25 | キヤノン株式会社 | 液体吐出装置 |
JP2001105599A (ja) | 1999-10-05 | 2001-04-17 | Canon Inc | 液体吐出ヘッド、液体吐出ヘッドの製造方法および液体吐出装置 |
KR20020025588A (ko) * | 2000-09-29 | 2002-04-04 | 윤종용 | 잉크젯 프린터 헤드 |
JP3970119B2 (ja) | 2002-07-19 | 2007-09-05 | キヤノン株式会社 | インクジェット記録ヘッドおよび該インクジェット記録ヘッドを用いた記録装置 |
JP2005125494A (ja) * | 2003-10-21 | 2005-05-19 | Fuji Xerox Co Ltd | インクジェット記録ヘッド及びインクジェット記録ヘッドの製造方法、並びにインクジェット記録装置。 |
JP4137027B2 (ja) | 2004-08-16 | 2008-08-20 | キヤノン株式会社 | インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド |
JP4182035B2 (ja) | 2004-08-16 | 2008-11-19 | キヤノン株式会社 | インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド |
-
2005
- 2005-04-01 JP JP2005106287A patent/JP4537246B2/ja not_active Expired - Fee Related
- 2005-04-25 TW TW094113137A patent/TWI274667B/zh not_active IP Right Cessation
- 2005-04-29 DE DE602005025276T patent/DE602005025276D1/de active Active
- 2005-04-29 EP EP05009443A patent/EP1593515B1/de not_active Expired - Fee Related
- 2005-05-02 US US11/118,404 patent/US7452474B2/en active Active
- 2005-05-04 KR KR1020050037551A patent/KR100846348B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR100846348B1 (ko) | 2008-07-15 |
JP2005343171A (ja) | 2005-12-15 |
EP1593515A2 (de) | 2005-11-09 |
EP1593515A3 (de) | 2006-09-06 |
JP4537246B2 (ja) | 2010-09-01 |
US20050248623A1 (en) | 2005-11-10 |
US7452474B2 (en) | 2008-11-18 |
TW200606023A (en) | 2006-02-16 |
KR20060045903A (ko) | 2006-05-17 |
EP1593515B1 (de) | 2010-12-15 |
TWI274667B (en) | 2007-03-01 |
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