DE602007001115D1 - Aktuatorvorrichtung, Flüssigkeitsstrahlkopf und Verfahren zur Herstellung der Aktuatorvorrichtung - Google Patents

Aktuatorvorrichtung, Flüssigkeitsstrahlkopf und Verfahren zur Herstellung der Aktuatorvorrichtung

Info

Publication number
DE602007001115D1
DE602007001115D1 DE200760001115 DE602007001115T DE602007001115D1 DE 602007001115 D1 DE602007001115 D1 DE 602007001115D1 DE 200760001115 DE200760001115 DE 200760001115 DE 602007001115 T DE602007001115 T DE 602007001115T DE 602007001115 D1 DE602007001115 D1 DE 602007001115D1
Authority
DE
Germany
Prior art keywords
actuator device
manufacturing
jet head
liquid jet
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE200760001115
Other languages
English (en)
Inventor
Xin-Shan Li
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of DE602007001115D1 publication Critical patent/DE602007001115D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/077—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition
    • H10N30/078—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition by sol-gel deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/079—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing using intermediate layers, e.g. for growth control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14419—Manifold
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
DE200760001115 2006-10-11 2007-10-09 Aktuatorvorrichtung, Flüssigkeitsstrahlkopf und Verfahren zur Herstellung der Aktuatorvorrichtung Active DE602007001115D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006278009A JP4296441B2 (ja) 2006-10-11 2006-10-11 アクチュエータ装置の製造方法

Publications (1)

Publication Number Publication Date
DE602007001115D1 true DE602007001115D1 (de) 2009-06-25

Family

ID=38917839

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200760001115 Active DE602007001115D1 (de) 2006-10-11 2007-10-09 Aktuatorvorrichtung, Flüssigkeitsstrahlkopf und Verfahren zur Herstellung der Aktuatorvorrichtung

Country Status (6)

Country Link
US (1) US7882607B2 (de)
EP (1) EP1911590B1 (de)
JP (1) JP4296441B2 (de)
KR (1) KR20080033099A (de)
CN (1) CN100592982C (de)
DE (1) DE602007001115D1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE517752T1 (de) * 2007-05-30 2011-08-15 Oce Tech Bv Piezoelektrischer aktuator und herstellungsverfahren dafür
JP5278654B2 (ja) * 2008-01-24 2013-09-04 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP5228952B2 (ja) * 2008-03-17 2013-07-03 セイコーエプソン株式会社 液体噴射ヘッドの製造方法
JP5126208B2 (ja) * 2009-11-30 2013-01-23 ブラザー工業株式会社 圧電アクチュエータ、液体吐出ヘッド、圧電アクチュエータの製造方法、及び液体吐出ヘッドの製造方法
JP5429482B2 (ja) * 2010-01-06 2014-02-26 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP5527527B2 (ja) * 2010-03-12 2014-06-18 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
EP2828082B1 (de) * 2012-07-25 2020-01-15 Hewlett-Packard Development Company, L.P. Piezoelektrischer aktuator und verfahren zur herstellung eines piezoelektrischen aktuators
JP6230290B2 (ja) * 2013-06-17 2017-11-15 キヤノン株式会社 液体吐出ヘッド用基板、液体吐出ヘッド、及び液体吐出ヘッド用基板の製造方法
JP5729507B2 (ja) * 2014-04-08 2015-06-03 セイコーエプソン株式会社 圧電素子及び超音波デバイス
US9755139B2 (en) 2014-06-30 2017-09-05 Texas Instruments Incorporated Piezoeletric wet etch process with reduced resist lifting and controlled undercut
JP6598032B2 (ja) * 2014-07-16 2019-10-30 アドバンストマテリアルテクノロジーズ株式会社 強誘電体セラミックス及びその製造方法
JP2017052254A (ja) * 2015-09-11 2017-03-16 セイコーエプソン株式会社 圧電デバイス、液体噴射ヘッド、液体噴射装置及び圧電デバイスの製造方法
EP3712974A4 (de) * 2017-11-13 2021-09-22 Advanced Material Technologies, Inc. Filmstruktur und verfahren zur herstellung davon
JP2022055756A (ja) * 2020-09-29 2022-04-08 セイコーエプソン株式会社 液体吐出ヘッド、液体吐出装置、アクチュエーター

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63136677A (ja) * 1986-11-28 1988-06-08 Fuji Electric Co Ltd 圧電セラミツクス薄板の製造方法
US5486495A (en) * 1994-12-23 1996-01-23 The United States Of America As Represented By The Secretary Of The Navy Germanate glass ceramic
JPH11204849A (ja) * 1998-01-20 1999-07-30 Ricoh Co Ltd 圧電アクチュエータ
KR100540644B1 (ko) * 1998-02-19 2006-02-28 삼성전자주식회사 마이크로 엑츄에이터 제조방법
JP2003110158A (ja) 2001-09-28 2003-04-11 Seiko Epson Corp 圧電体薄膜素子およびその製造方法、ならびにこれを用いたインクジェット記録ヘッド及びインクジェットプリンタ
JP4645024B2 (ja) 2003-11-28 2011-03-09 セイコーエプソン株式会社 アクチュエータ装置の製造方法
JP4380310B2 (ja) 2003-12-08 2009-12-09 セイコーエプソン株式会社 アクチュエータ装置及び液体噴射ヘッド並びに液体噴射装置
US7411339B2 (en) * 2003-11-28 2008-08-12 Seiko Epson Corporation Manufacturing method of actuator device and liquid jet apparatus provided with actuator device formed by manufacturing method of the same
JP4734831B2 (ja) 2004-02-13 2011-07-27 セイコーエプソン株式会社 アクチュエータ装置及び液体噴射ヘッド並びに液体噴射装置
JP4737375B2 (ja) 2004-03-11 2011-07-27 セイコーエプソン株式会社 アクチュエータ装置の製造方法及び液体噴射ヘッドの製造方法並びに液体噴射装置の製造方法
JP4858670B2 (ja) * 2004-12-20 2012-01-18 セイコーエプソン株式会社 アクチュエータ装置の製造方法及び液体噴射装置

Also Published As

Publication number Publication date
EP1911590B1 (de) 2009-05-13
JP4296441B2 (ja) 2009-07-15
JP2008098381A (ja) 2008-04-24
US20080088207A1 (en) 2008-04-17
CN100592982C (zh) 2010-03-03
KR20080033099A (ko) 2008-04-16
EP1911590A1 (de) 2008-04-16
CN101327683A (zh) 2008-12-24
US7882607B2 (en) 2011-02-08

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