KR100824394B1 - 검사 지그 및 검사 장치 - Google Patents

검사 지그 및 검사 장치 Download PDF

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Publication number
KR100824394B1
KR100824394B1 KR1020050095610A KR20050095610A KR100824394B1 KR 100824394 B1 KR100824394 B1 KR 100824394B1 KR 1020050095610 A KR1020050095610 A KR 1020050095610A KR 20050095610 A KR20050095610 A KR 20050095610A KR 100824394 B1 KR100824394 B1 KR 100824394B1
Authority
KR
South Korea
Prior art keywords
rear end
probe
insertion hole
end side
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020050095610A
Other languages
English (en)
Korean (ko)
Other versions
KR20060111248A (ko
Inventor
겐지 쓰치하시
고지 오자와
미쓰히코 이토
가즈히코 모로즈미
신지 이이노
Original Assignee
가부시키가이샤 코요 테크노스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2005123162A external-priority patent/JP2005338065A/ja
Application filed by 가부시키가이샤 코요 테크노스 filed Critical 가부시키가이샤 코요 테크노스
Publication of KR20060111248A publication Critical patent/KR20060111248A/ko
Application granted granted Critical
Publication of KR100824394B1 publication Critical patent/KR100824394B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
KR1020050095610A 2005-04-21 2005-10-11 검사 지그 및 검사 장치 Expired - Fee Related KR100824394B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2005-00123162 2005-04-21
JP2005123162A JP2005338065A (ja) 2004-04-26 2005-04-21 検査冶具および検査装置

Publications (2)

Publication Number Publication Date
KR20060111248A KR20060111248A (ko) 2006-10-26
KR100824394B1 true KR100824394B1 (ko) 2008-04-22

Family

ID=37195047

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020050095610A Expired - Fee Related KR100824394B1 (ko) 2005-04-21 2005-10-11 검사 지그 및 검사 장치

Country Status (3)

Country Link
KR (1) KR100824394B1 (enExample)
CN (1) CN100535676C (enExample)
TW (1) TW200638046A (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3849948B1 (ja) * 2005-11-16 2006-11-22 日本電産リード株式会社 基板検査用治具及び検査用プローブ
JP5651333B2 (ja) * 2007-07-17 2015-01-14 日本発條株式会社 プローブユニット
JP2009036532A (ja) * 2007-07-31 2009-02-19 Koyo Technos:Kk 検査冶具および検査装置
KR101037974B1 (ko) * 2009-05-20 2011-05-30 주식회사 메디오션 프로브 지지체 및 그 제조방법
KR101459667B1 (ko) * 2013-07-22 2014-11-12 바이옵트로 주식회사 지그 장치
CN103983816A (zh) * 2014-05-15 2014-08-13 珠海市运泰利自动化设备有限公司 高精度测试模组
JP6537315B2 (ja) * 2015-03-23 2019-07-03 オルガン針株式会社 ワイヤープローブ用治具
KR101656047B1 (ko) * 2016-03-23 2016-09-09 주식회사 나노시스 기판 검사용 지그
US11293976B1 (en) * 2020-09-25 2022-04-05 Essai, Inc. Integrated circuit device test tooling with dual angle cavities
KR102649845B1 (ko) * 2023-11-29 2024-03-21 주식회사 나노시스 반도체 소자 테스터 지그

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0758169A (ja) * 1993-07-23 1995-03-03 Internatl Business Mach Corp <Ibm> バックリングビームテストプローブアセンブリ
JPH09274054A (ja) * 1996-04-08 1997-10-21 Furukawa Electric Co Ltd:The プローバー
KR20020020980A (ko) * 2000-09-13 2002-03-18 키타무라 이사오 기판 검사용 검사 지그 및 그 검사 지그를 구비한기판검사장치
KR20040093040A (ko) * 2003-04-25 2004-11-04 가부시키가이샤 요코오 Ｉｃ 소켓
KR20040093023A (ko) * 2003-04-25 2004-11-04 가부시키가이샤 요코오 검사용 동축 프로브 및 그것을 이용한 검사 유닛

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0758169A (ja) * 1993-07-23 1995-03-03 Internatl Business Mach Corp <Ibm> バックリングビームテストプローブアセンブリ
JPH09274054A (ja) * 1996-04-08 1997-10-21 Furukawa Electric Co Ltd:The プローバー
KR20020020980A (ko) * 2000-09-13 2002-03-18 키타무라 이사오 기판 검사용 검사 지그 및 그 검사 지그를 구비한기판검사장치
KR20040093040A (ko) * 2003-04-25 2004-11-04 가부시키가이샤 요코오 Ｉｃ 소켓
KR20040093023A (ko) * 2003-04-25 2004-11-04 가부시키가이샤 요코오 검사용 동축 프로브 및 그것을 이용한 검사 유닛

Also Published As

Publication number Publication date
KR20060111248A (ko) 2006-10-26
TW200638046A (en) 2006-11-01
CN1854744A (zh) 2006-11-01
CN100535676C (zh) 2009-09-02
TWI292826B (enExample) 2008-01-21

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