TW200638046A - Inspection jig and inspection equipment - Google Patents

Inspection jig and inspection equipment

Info

Publication number
TW200638046A
TW200638046A TW094135464A TW94135464A TW200638046A TW 200638046 A TW200638046 A TW 200638046A TW 094135464 A TW094135464 A TW 094135464A TW 94135464 A TW94135464 A TW 94135464A TW 200638046 A TW200638046 A TW 200638046A
Authority
TW
Taiwan
Prior art keywords
rear end
end side
probe
hole
inspection
Prior art date
Application number
TW094135464A
Other languages
English (en)
Chinese (zh)
Other versions
TWI292826B (enExample
Inventor
Kenji Dobashi
Koji Ozawa
Mitsuhiko Ito
Kazuhiko Morozumi
Shinji Iino
Original Assignee
Koyo Technos K K
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2005123162A external-priority patent/JP2005338065A/ja
Application filed by Koyo Technos K K filed Critical Koyo Technos K K
Publication of TW200638046A publication Critical patent/TW200638046A/zh
Application granted granted Critical
Publication of TWI292826B publication Critical patent/TWI292826B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
TW094135464A 2005-04-21 2005-10-12 Inspection jig and inspection equipment TW200638046A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005123162A JP2005338065A (ja) 2004-04-26 2005-04-21 検査冶具および検査装置

Publications (2)

Publication Number Publication Date
TW200638046A true TW200638046A (en) 2006-11-01
TWI292826B TWI292826B (enExample) 2008-01-21

Family

ID=37195047

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094135464A TW200638046A (en) 2005-04-21 2005-10-12 Inspection jig and inspection equipment

Country Status (3)

Country Link
KR (1) KR100824394B1 (enExample)
CN (1) CN100535676C (enExample)
TW (1) TW200638046A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI383163B (enExample) * 2007-07-31 2013-01-21
TWI394952B (zh) * 2007-07-17 2013-05-01 Nhk Spring Co Ltd 探針單元

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3849948B1 (ja) * 2005-11-16 2006-11-22 日本電産リード株式会社 基板検査用治具及び検査用プローブ
KR101037974B1 (ko) * 2009-05-20 2011-05-30 주식회사 메디오션 프로브 지지체 및 그 제조방법
KR101459667B1 (ko) * 2013-07-22 2014-11-12 바이옵트로 주식회사 지그 장치
CN103983816A (zh) * 2014-05-15 2014-08-13 珠海市运泰利自动化设备有限公司 高精度测试模组
JP6537315B2 (ja) * 2015-03-23 2019-07-03 オルガン針株式会社 ワイヤープローブ用治具
KR101656047B1 (ko) * 2016-03-23 2016-09-09 주식회사 나노시스 기판 검사용 지그
US11293976B1 (en) * 2020-09-25 2022-04-05 Essai, Inc. Integrated circuit device test tooling with dual angle cavities
KR102649845B1 (ko) * 2023-11-29 2024-03-21 주식회사 나노시스 반도체 소자 테스터 지그

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0635723B1 (en) * 1993-07-23 1999-09-29 International Business Machines Corporation Buckling beam test probe assembly
JPH09274054A (ja) * 1996-04-08 1997-10-21 Furukawa Electric Co Ltd:The プローバー
JP3505495B2 (ja) * 2000-09-13 2004-03-08 日本電産リード株式会社 基板検査用検査治具、該検査治具を備えた基板検査装置および基板検査用検査治具の組立方法
JP4242199B2 (ja) * 2003-04-25 2009-03-18 株式会社ヨコオ Ｉｃソケット
JP2004325306A (ja) * 2003-04-25 2004-11-18 Yokowo Co Ltd 検査用同軸プローブおよびそれを用いた検査ユニット

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI394952B (zh) * 2007-07-17 2013-05-01 Nhk Spring Co Ltd 探針單元
TWI383163B (enExample) * 2007-07-31 2013-01-21

Also Published As

Publication number Publication date
KR20060111248A (ko) 2006-10-26
KR100824394B1 (ko) 2008-04-22
CN1854744A (zh) 2006-11-01
CN100535676C (zh) 2009-09-02
TWI292826B (enExample) 2008-01-21

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees