KR100820617B1 - 이중슬롯밸브, 이중슬롯밸브의 제조방법 및 이중슬롯밸브의 작동방법 - Google Patents

이중슬롯밸브, 이중슬롯밸브의 제조방법 및 이중슬롯밸브의 작동방법 Download PDF

Info

Publication number
KR100820617B1
KR100820617B1 KR1020010016597A KR20010016597A KR100820617B1 KR 100820617 B1 KR100820617 B1 KR 100820617B1 KR 1020010016597 A KR1020010016597 A KR 1020010016597A KR 20010016597 A KR20010016597 A KR 20010016597A KR 100820617 B1 KR100820617 B1 KR 100820617B1
Authority
KR
South Korea
Prior art keywords
door
slot
valve
actuator
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1020010016597A
Other languages
English (en)
Korean (ko)
Other versions
KR20010095110A (ko
Inventor
그레고리에이. 토마시
Original Assignee
램 리써치 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 램 리써치 코포레이션 filed Critical 램 리써치 코포레이션
Publication of KR20010095110A publication Critical patent/KR20010095110A/ko
Application granted granted Critical
Publication of KR100820617B1 publication Critical patent/KR100820617B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K43/00—Auxiliary closure means in valves, which in case of repair, e.g. rewashering, of the valve, can take over the function of the normal closure means; Devices for temporary replacement of parts of valves for the same purpose
    • F16K43/008—Auxiliary closure means in valves, which in case of repair, e.g. rewashering, of the valve, can take over the function of the normal closure means; Devices for temporary replacement of parts of valves for the same purpose the main valve having a back-seat position, e.g. to service the spindle sealing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
KR1020010016597A 2000-03-30 2001-03-29 이중슬롯밸브, 이중슬롯밸브의 제조방법 및 이중슬롯밸브의 작동방법 Expired - Lifetime KR100820617B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/541,069 US6913243B1 (en) 2000-03-30 2000-03-30 Unitary slot valve actuator with dual valves
US09/541,069 2000-03-30

Publications (2)

Publication Number Publication Date
KR20010095110A KR20010095110A (ko) 2001-11-03
KR100820617B1 true KR100820617B1 (ko) 2008-04-08

Family

ID=24158058

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020010016597A Expired - Lifetime KR100820617B1 (ko) 2000-03-30 2001-03-29 이중슬롯밸브, 이중슬롯밸브의 제조방법 및 이중슬롯밸브의 작동방법

Country Status (4)

Country Link
US (3) US6913243B1 (https=)
JP (1) JP4404500B2 (https=)
KR (1) KR100820617B1 (https=)
TW (1) TW496935B (https=)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101085241B1 (ko) * 2010-04-23 2011-11-21 주식회사 뉴파워 프라즈마 게이트밸브어셈블리와 이를 포함하는 기판처리시스템
KR101128877B1 (ko) * 2010-12-03 2012-03-26 위순임 기판처리시스템의 게이트밸브장치
KR20130055901A (ko) * 2011-11-21 2013-05-29 엘지디스플레이 주식회사 박막 증착장비용 밸브장치
KR20170141142A (ko) * 2016-06-14 2017-12-22 배트 홀딩 아게 흐름을 조절하고 유로를 차단하기 위한 진공 밸브
WO2020004868A1 (ko) * 2018-06-27 2020-01-02 (주) 엔피홀딩스 게이트 밸브 시스템

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4244555B2 (ja) * 2002-02-25 2009-03-25 東京エレクトロン株式会社 被処理体の支持機構
US8639365B2 (en) * 2003-11-10 2014-01-28 Brooks Automation, Inc. Methods and systems for controlling a semiconductor fabrication process
US10086511B2 (en) 2003-11-10 2018-10-02 Brooks Automation, Inc. Semiconductor manufacturing systems
US8639489B2 (en) * 2003-11-10 2014-01-28 Brooks Automation, Inc. Methods and systems for controlling a semiconductor fabrication process
US20070282480A1 (en) * 2003-11-10 2007-12-06 Pannese Patrick D Methods and systems for controlling a semiconductor fabrication process
KR100960030B1 (ko) * 2004-03-12 2010-05-28 배트 홀딩 아게 진공 게이트 밸브
JP5080169B2 (ja) * 2006-09-20 2012-11-21 バット ホールディング アーゲー 真空バルブ
RU2337262C1 (ru) * 2006-12-26 2008-10-27 Институт физики прочности и материаловедения Сибирское отделение Российской академии наук (ИФПМ СО РАН) Вакуумный щелевой клапан
KR101490454B1 (ko) * 2008-08-26 2015-02-09 주성엔지니어링(주) 슬롯밸브 어셈블리 및 그 작동 방법
TWI462208B (zh) * 2007-11-23 2014-11-21 Jusung Eng Co Ltd 槽閥組件及其操作方法
DE102007059039A1 (de) * 2007-12-06 2009-06-18 Vat Holding Ag Vakuumventil
US7750646B2 (en) 2008-01-10 2010-07-06 General Electric Company Detector for precursive detection of electrical arc
DE102008049353A1 (de) * 2008-09-29 2010-04-08 Vat Holding Ag Vakuumventil
US20100127201A1 (en) * 2008-11-21 2010-05-27 Applied Materials, Inc. Interlocking valve chamber and lid
DE102008061315B4 (de) * 2008-12-11 2012-11-15 Vat Holding Ag Aufhängung einer Ventilplatte an einer Ventilstange
US20110033318A1 (en) * 2009-08-05 2011-02-10 Ramirez Jr Emilio A Single Motor Multiple Pumps
KR100994761B1 (ko) 2009-10-16 2010-11-16 프리시스 주식회사 도어밸브
WO2011087190A1 (ko) * 2010-01-18 2011-07-21 프리시스 주식회사 도어밸브
TWI541465B (zh) * 2009-10-27 2016-07-11 Ｖａｔ控股股份有限公司 用於真空閥之封閉單元
TWI408766B (zh) * 2009-11-12 2013-09-11 日立全球先端科技股份有限公司 Vacuum processing device
WO2011153562A1 (de) 2010-06-09 2011-12-15 Vat Holding Ag Vakuumventil
JP5806827B2 (ja) * 2011-03-18 2015-11-10 東京エレクトロン株式会社 ゲートバルブ装置及び基板処理装置並びにその基板処理方法
US10023954B2 (en) * 2011-09-15 2018-07-17 Applied Materials, Inc. Slit valve apparatus, systems, and methods
KR101293590B1 (ko) * 2011-12-16 2013-08-13 주식회사 뉴파워 프라즈마 양방향 게이트 밸브 및 이를 구비한 기판 처리 시스템
US9151408B2 (en) 2012-02-07 2015-10-06 Lam Research Corporation Method of polishing a metal surface of a barrier door of a gate valve used in a semiconductor cluster tool architecture
US8960641B2 (en) * 2012-11-14 2015-02-24 Vat Holding Ag Vacuum valve
TWI656293B (zh) * 2014-04-25 2019-04-11 瑞士商Ｖａｔ控股股份有限公司 閥
SG11201706945XA (en) 2015-03-09 2017-09-28 Vat Holding Ag Vacuum valve
US11092245B2 (en) 2015-04-23 2021-08-17 General Plasma Inc. Chamber valve
KR101597818B1 (ko) * 2015-06-19 2016-02-25 주식회사 퓨젠 사각 게이트 진공밸브
KR101784839B1 (ko) * 2015-09-25 2017-11-06 프리시스 주식회사 양방향 게이트밸브
TWI705212B (zh) 2016-01-19 2020-09-21 瑞士商Ｖａｔ控股股份有限公司 用於對壁中開口進行真空密封的密封裝置
TWI740981B (zh) 2016-08-22 2021-10-01 瑞士商Ｖａｔ控股股份有限公司 真空閥
JP2019012670A (ja) * 2017-07-03 2019-01-24 日新イオン機器株式会社 弁体装置、弁体装置モジュール
JP7106866B2 (ja) * 2018-01-11 2022-07-27 Tdk株式会社 Ｅｆｅｍ及びｅｆｅｍのガス置換方法
US11749540B2 (en) 2020-08-21 2023-09-05 Applied Materials, Inc. Dual actuating tilting slit valve
JP7137385B2 (ja) * 2018-07-17 2022-09-14 株式会社荏原製作所 ゲートバルブ
DE102019001115A1 (de) * 2019-02-15 2020-08-20 Vat Holding Ag Torventil mit Kulissenführung
CN112119247B (zh) * 2019-05-07 2021-04-30 入江工研株式会社 闸阀
CN112530829A (zh) * 2019-09-18 2021-03-19 中微半导体设备(上海)股份有限公司 基片处理系统、阀板组件及其基片处理系统的工作方法
US11328943B2 (en) * 2020-04-03 2022-05-10 Applied Materials, Inc. Dual gate and single actuator system
CN119948282A (zh) * 2022-10-18 2025-05-06 Asml荷兰有限公司 用于真空室、例如衬底处理系统的真空室的狭缝阀组件
KR102574233B1 (ko) * 2023-03-14 2023-09-04 주식회사 에스알티 U motion 게이트밸브

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR950004427A (ko) * 1993-07-02 1995-02-18 이노우에 아키라 처리장치의 제어방법
KR19990056584A (ko) * 1997-12-29 1999-07-15 윤종용 반도체 제조용 반응가스 분석 시스템

Family Cites Families (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR851444A (fr) 1938-03-12 1940-01-09 Philips Nv Dispositif permettant de convertir des variations de pression en variations de capacité
GB851444A (en) 1956-06-05 1960-10-19 Commissariat Energie Atomique Improvements in or relating to vacuum control valves
US3789875A (en) * 1972-05-15 1974-02-05 Gray Tool Co Fluid pressure actuated valve operator
DE2634885C2 (de) * 1976-08-03 1985-10-31 Leybold-Heraeus GmbH, 5000 Köln Pendelschieber
US4157169A (en) * 1977-10-12 1979-06-05 Torr Vacuum Products Fluid operated gate valve for use with vacuum equipment
US4453699A (en) * 1980-07-23 1984-06-12 Michael P. Breston Gate and swing valve
US4355937A (en) * 1980-12-24 1982-10-26 International Business Machines Corporation Low shock transmissive antechamber seal mechanisms for vacuum chamber type semi-conductor wafer electron beam writing apparatus
US4340462A (en) * 1981-02-13 1982-07-20 Lam Research Corporation Adjustable electrode plasma processing chamber
US4483654A (en) * 1981-02-13 1984-11-20 Lam Research Corporation Workpiece transfer mechanism
US4593915A (en) * 1984-11-28 1986-06-10 Grove Valve And Regulator Co. Orifice plate seal ring
US4753417A (en) * 1985-01-28 1988-06-28 The Boc Group, Inc. Gate valve for vacuum processing apparatus
US4715921A (en) * 1986-10-24 1987-12-29 General Signal Corporation Quad processor
US4715764A (en) * 1986-04-28 1987-12-29 Varian Associates, Inc. Gate valve for wafer processing system
US4917556A (en) * 1986-04-28 1990-04-17 Varian Associates, Inc. Modular wafer transport and processing system
US4747577A (en) * 1986-07-23 1988-05-31 The Boc Group, Inc. Gate valve with magnetic closure for use with vacuum equipment
US4721282A (en) * 1986-12-16 1988-01-26 Lam Research Corporation Vacuum chamber gate valve
US5292393A (en) 1986-12-19 1994-03-08 Applied Materials, Inc. Multichamber integrated process system
EP0273226B1 (de) * 1986-12-22 1992-01-15 Siemens Aktiengesellschaft Transportbehälter mit austauschbarem, zweiteiligem Innenbehälter
DE3704505A1 (de) * 1987-02-13 1988-08-25 Leybold Ag Einlegegeraet fuer vakuumanlagen
US4795299A (en) * 1987-04-15 1989-01-03 Genus, Inc. Dial deposition and processing apparatus
JPS63312574A (ja) 1987-06-11 1988-12-21 Nippon Kentetsu Co Ltd 真空装置のゲ−トバルブ装置
JP2539447B2 (ja) * 1987-08-12 1996-10-02 株式会社日立製作所 枚葉キャリアによる生産方法
US5076205A (en) 1989-01-06 1991-12-31 General Signal Corporation Modular vapor processor system
US5002255A (en) 1989-03-03 1991-03-26 Irie Koken Kabushiki Kaisha Non-sliding gate valve for high vacuum use
US5120019A (en) * 1989-08-03 1992-06-09 Brooks Automation, Inc. Valve
JPH0478377A (ja) * 1990-07-20 1992-03-12 Tokyo Electron Ltd トグル式ゲート
DE4024973C2 (de) 1990-08-07 1994-11-03 Ibm Anordnung zum Lagern, Transportieren und Einschleusen von Substraten
JP2524270B2 (ja) 1990-10-04 1996-08-14 西武商事有限会社 仕切弁
US5697749A (en) 1992-07-17 1997-12-16 Tokyo Electron Kabushiki Kaisha Wafer processing apparatus
US5295522A (en) 1992-09-24 1994-03-22 International Business Machines Corporation Gas purge system for isolation enclosure for contamination sensitive items
JP3330686B2 (ja) 1993-07-12 2002-09-30 株式会社アルバック 無摺動ゲートバルブ
JP3394293B2 (ja) 1993-09-20 2003-04-07 株式会社日立製作所 試料の搬送方法および半導体装置の製造方法
US5383338A (en) * 1993-12-17 1995-01-24 Emerson Electric Co. In-line sight indicator
KR960002534A (ko) 1994-06-07 1996-01-26 이노우에 아키라 감압·상압 처리장치
DE19601541A1 (de) 1995-01-27 1996-08-01 Seiko Seiki Kk In einer Vakuumumgebung einsetzbares Vertikaltransfersystem sowie dazugehöriges Absperrventilsystem
US5789318A (en) * 1996-02-23 1998-08-04 Varian Associates, Inc. Use of titanium hydride in integrated circuit fabrication
US5667197A (en) * 1996-07-09 1997-09-16 Lam Research Corporation Vacuum chamber gate valve and method for making same
US5902088A (en) * 1996-11-18 1999-05-11 Applied Materials, Inc. Single loadlock chamber with wafer cooling function
US6312525B1 (en) 1997-07-11 2001-11-06 Applied Materials, Inc. Modular architecture for semiconductor wafer fabrication equipment
US6079693A (en) 1998-05-20 2000-06-27 Applied Komatsu Technology, Inc. Isolation valves
US6192827B1 (en) 1998-07-03 2001-02-27 Applied Materials, Inc. Double slit-valve doors for plasma processing
US6095741A (en) * 1999-03-29 2000-08-01 Lam Research Corporation Dual sided slot valve and method for implementing the same
US6390448B1 (en) * 2000-03-30 2002-05-21 Lam Research Corporation Single shaft dual cradle vacuum slot valve
JP3912604B2 (ja) * 2003-11-04 2007-05-09 入江工研株式会社 ゲート弁

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR950004427A (ko) * 1993-07-02 1995-02-18 이노우에 아키라 처리장치의 제어방법
KR19990056584A (ko) * 1997-12-29 1999-07-15 윤종용 반도체 제조용 반응가스 분석 시스템

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
공개특 1995-0004427호(1995.02.18)
공개특 1999-0056584호(1999.07.15)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101085241B1 (ko) * 2010-04-23 2011-11-21 주식회사 뉴파워 프라즈마 게이트밸브어셈블리와 이를 포함하는 기판처리시스템
KR101128877B1 (ko) * 2010-12-03 2012-03-26 위순임 기판처리시스템의 게이트밸브장치
KR20130055901A (ko) * 2011-11-21 2013-05-29 엘지디스플레이 주식회사 박막 증착장비용 밸브장치
KR101888433B1 (ko) 2011-11-21 2018-08-17 엘지디스플레이 주식회사 박막 증착장비용 밸브장치
KR20170141142A (ko) * 2016-06-14 2017-12-22 배트 홀딩 아게 흐름을 조절하고 유로를 차단하기 위한 진공 밸브
KR102291707B1 (ko) 2016-06-14 2021-08-23 배트 홀딩 아게 흐름을 조절하고 유로를 차단하기 위한 진공 밸브
WO2020004868A1 (ko) * 2018-06-27 2020-01-02 (주) 엔피홀딩스 게이트 밸브 시스템

Also Published As

Publication number Publication date
JP2002002952A (ja) 2002-01-09
US20050178993A1 (en) 2005-08-18
JP4404500B2 (ja) 2010-01-27
US6913243B1 (en) 2005-07-05
TW496935B (en) 2002-08-01
KR20010095110A (ko) 2001-11-03
US7128305B2 (en) 2006-10-31
US20050139799A1 (en) 2005-06-30
US7059583B2 (en) 2006-06-13

Similar Documents

Publication Publication Date Title
KR100820617B1 (ko) 이중슬롯밸브, 이중슬롯밸브의 제조방법 및 이중슬롯밸브의 작동방법
KR100783120B1 (ko) 양날개형 슬롯밸브 및 그 설치방법
US6390448B1 (en) Single shaft dual cradle vacuum slot valve
KR100732893B1 (ko) 처리모듈 분리능력을 갖춘 반도체처리 플랫폼구조
KR100736003B1 (ko) 차단밸브
KR101293590B1 (ko) 양방향 게이트 밸브 및 이를 구비한 기판 처리 시스템
US8366370B2 (en) Vacuum processing apparatus
US20050063798A1 (en) Interchangeable workpiece handling apparatus and associated tool for processing microfeature workpieces
KR100932120B1 (ko) 반도체 제조설비의 로커 도어 밸브
JPH0587258A (ja) ゲートバルブ
JPH11162395A (ja) 真空ロック室のゲート弁装置
KR20040006353A (ko) 반도체소자 제조설비의 카세트 로더장치 및 그 방법

Legal Events

Date Code Title Description
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

A201 Request for examination
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

FPAY Annual fee payment

Payment date: 20130322

Year of fee payment: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

FPAY Annual fee payment

Payment date: 20140324

Year of fee payment: 7

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 8

FPAY Annual fee payment

Payment date: 20160324

Year of fee payment: 9

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 9

FPAY Annual fee payment

Payment date: 20170328

Year of fee payment: 10

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 10

FPAY Annual fee payment

Payment date: 20180327

Year of fee payment: 11

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 11

FPAY Annual fee payment

Payment date: 20190322

Year of fee payment: 12

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 12

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 13

PC1801 Expiration of term

St.27 status event code: N-4-6-H10-H14-oth-PC1801

Not in force date: 20210330

Ip right cessation event data comment text: Termination Category : EXPIRATION_OF_DURATION

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000