KR100720630B1 - 전구체 조성물, 잉크젯 도포용 잉크, 강유전체 막의 제조 방법, 압전 소자, 반도체 장치, 압전 액튜에이터, 잉크젯식 기록 헤드, 및 잉크젯 프린터 - Google Patents
전구체 조성물, 잉크젯 도포용 잉크, 강유전체 막의 제조 방법, 압전 소자, 반도체 장치, 압전 액튜에이터, 잉크젯식 기록 헤드, 및 잉크젯 프린터 Download PDFInfo
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- KR100720630B1 KR100720630B1 KR20050128489A KR20050128489A KR100720630B1 KR 100720630 B1 KR100720630 B1 KR 100720630B1 KR 20050128489 A KR20050128489 A KR 20050128489A KR 20050128489 A KR20050128489 A KR 20050128489A KR 100720630 B1 KR100720630 B1 KR 100720630B1
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- precursor composition
- polycarboxylic acid
- alcohol
- ferroelectric
- precursor
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G33/00—Compounds of niobium
- C01G33/006—Compounds containing, besides niobium, two or more other elements, with the exception of oxygen or hydrogen
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G35/00—Compounds of tantalum
- C01G35/006—Compounds containing, besides tantalum, two or more other elements, with the exception of oxygen or hydrogen
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
- C04B35/49—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
- C04B35/491—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT
- C04B35/493—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT containing also other lead compounds
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/495—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
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Abstract
Description
용매 | 비점(℃) | 점도(CP) |
n-부탄올 | 118 | 2.5 |
2-(2메톡시에톡시)-에탄올 | 194 | 3.5 |
n-노닐알코올 | 213 | 14.3 |
Claims (28)
- 강유전체를 형성하기 위한 전구체를 포함하는 전구체 조성물로서,상기 강유전체는 화학식 AB1-xCxO3으로 표시되고, A 원소는 적어도 Pb를 포함하고, B 원소는 Zr, Ti, V, W, Hf 중 적어도 하나를 포함하고, C 원소는 Nb, Ta 중 적어도 하나를 포함하며,적어도 상기 B 원소 및 상기 C 원소를 포함하는 졸 겔 원료로서, 금속 알콕시드의 가수분해ㆍ축합물을 포함하는 졸 겔 원료와,폴리카르복실산 또는 폴리카르복실산에스테르와,적어도 제1의 알코올과 상기 제1의 알코올보다 비점 및 점도가 높은 제2의 알코올을 포함하는 유기 용매를 혼합하여 이루어지고,상기 폴리카르복실산 또는 상기 폴리카르복실산에스테르에서 유래하는 폴리카르복실산과 금속 알콕시드와의 에스테르화에 따른 에스테르 결합을 갖는 전구체를 포함하는 전구체 조성물.
- 제1항에 있어서,상기 B 원소가 Zr 및 Ti이고,상기 C 원소가 Nb인 전구체 조성물.
- 제1항에 있어서,상기 폴리카르복실산 또는 상기 폴리카르복실산에스테르가 2가의 카르복실산 또는 카르복실산에스테르인 전구체 조성물.
- 제3항에 있어서,상기 2가의 카르복실산에스테르가 숙신산에스테르, 말레산에스테르 및 말론산에스테르로부터 선택되는 적어도 1종 이상인 전구체 조성물.
- 제1항에 있어서,상기 폴리카르복실산에스테르의 분자량이 150 이하인 전구체 조성물.
- 제1항에 있어서,금속 카르복실산염을 더 포함하는 전구체 조성물.
- 제6항에 있어서,상기 금속 카르복실산염이 납의 카르복실산염인 전구체 조성물.
- 제6항에 있어서,상기 금속 카르복실산염이 니오브의 카르복실산염인 전구체 조성물.
- 제1항 내지 제8항 중 어느 한 항에 있어서,상기 Nb원료는, 상기 A 원소, 상기 B 원소, 상기 C 원소 전체에 대하여, 몰비 x로 0.05≤x<1로 되도록 포함되는 전구체 조성물.
- 제1항 내지 제8항 중 어느 한 항에 있어서,상기 Ta의 원료는, 상기 A 원소, 상기 B 원소, 상기 C 원소 전체에 대하여, 몰비 x로 0.05≤x<1로 되도록 포함되는 전구체 조성물.
- 제1항 내지 제8항 중 어느 한 항에 있어서,Si, 또는 Si 및 Ge를 포함하는 졸겔 원료를 더 포함하는 전구체 조성물.
- 제11항에 있어서,상기 Si, 또는 Si 및 Ge는 상기 A 원소, 상기 B 원소, 상기 C 원소 전체에 대하여, 몰비 x로 0.5~5 몰%의 비율로 포함되는 전구체 조성물.
- 제1항 내지 제8항 중 어느 한 항에 기재된 전구체 조성물을 사용한 잉크젯 도포용 잉크.
- 제13항에 기재된 잉크젯 도포용 잉크를, 헤드로부터 토출하여 도전막 상에 도포한 후, 열 처리하는 것을 포함하는 강유전체 막의 제조 방법.
- 제14항에 있어서,상기 도전막이 백금계 금속을 포함하는 강유전체 막의 제조 방법.
- 제15항에 기재된 제조 방법을 사용하여 형성된 강유전체 막을 포함하는 압전 소자.
- 제15항에 기재된 제조 방법을 사용하여 형성된 강유전체 막을 포함하는 반도체 장치.
- 제16항에 기재된 압전 소자를 포함하는 압전 액튜에이터(actuator).
- 제18항에 기재된 압전 액튜에이터를 포함하는 잉크젯식 기록 헤드.
- 제19항에 기재된 잉크젯식 기록 헤드를 포함하는 잉크젯 프린터.
- 삭제
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US9024884B2 (en) * | 2003-09-02 | 2015-05-05 | Apple Inc. | Touch-sensitive electronic apparatus for media applications, and methods therefor |
JP4826744B2 (ja) * | 2006-01-19 | 2011-11-30 | セイコーエプソン株式会社 | 絶縁性ターゲット材料の製造方法 |
JP2009252786A (ja) * | 2008-04-01 | 2009-10-29 | Seiko Epson Corp | 酸化物原料溶液、酸化物膜、圧電素子、酸化物膜の形成方法および圧電素子の製造方法 |
JP5423414B2 (ja) | 2010-01-15 | 2014-02-19 | 株式会社リコー | 電気機械変換膜の製造方法、電気機械変換膜、電気機械変換膜群、電気機械変換素子の製造方法、電気機械変換素子、電気機械変換素子群、液体吐出ヘッド、液体吐出装置、画像形成装置 |
WO2011089748A1 (ja) | 2010-01-21 | 2011-07-28 | 株式会社ユーテック | Pbnzt強誘電体膜、ゾルゲル溶液、成膜方法及び強誘電体膜の製造方法 |
JP5526810B2 (ja) * | 2010-01-28 | 2014-06-18 | 株式会社リコー | ゾルゲル液、電気−機械変換素子、液体吐出ヘッド及びインクジェット記録装置 |
JP5772039B2 (ja) | 2011-02-15 | 2015-09-02 | 株式会社リコー | 電気機械変換膜の製造方法および電気機械変換素子の製造方法 |
JP6171372B2 (ja) * | 2013-02-06 | 2017-08-02 | 株式会社リコー | 電気機械変換膜の製造方法、電気機械変換素子の製造方法 |
JP6142586B2 (ja) * | 2013-03-11 | 2017-06-07 | 株式会社リコー | 圧電膜の製造方法、圧電素子の製造方法 |
JP6332738B2 (ja) | 2013-06-19 | 2018-05-30 | 株式会社リコー | アクチュエータ及びその製造方法、並びに、そのアクチュエータを備えた液滴吐出ヘッド、液滴吐出装置及び画像形成装置 |
TW201631065A (zh) * | 2014-12-17 | 2016-09-01 | 漢高股份有限及兩合公司 | 可印刷鐵電型墨水 |
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WO2004038733A1 (ja) * | 2002-10-24 | 2004-05-06 | Seiko Epson Corporation | 強誘電体膜、強誘電体キャパシタ、強誘電体メモリ、圧電素子、半導体素子、強誘電体膜の製造方法、及び強誘電体キャパシタの製造方法 |
KR20060046288A (ko) * | 2004-05-31 | 2006-05-17 | 세이코 엡슨 가부시키가이샤 | 전구체 조성물, 전구체 조성물의 제조 방법, 강유전체막의제조 방법, 압전 소자, 반도체 장치, 압전 액츄에이터,잉크제트식 기록 헤드, 및 잉크제트 프린터 |
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US7713348B2 (en) | 2010-05-11 |
TW200640705A (en) | 2006-12-01 |
EP1674593A3 (en) | 2007-03-14 |
US20060138382A1 (en) | 2006-06-29 |
CN1807346A (zh) | 2006-07-26 |
CN100390100C (zh) | 2008-05-28 |
JP4269172B2 (ja) | 2009-05-27 |
EP1674593A2 (en) | 2006-06-28 |
KR20060073503A (ko) | 2006-06-28 |
JP2006176385A (ja) | 2006-07-06 |
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