KR100720264B1 - 엑시머 램프 발광장치 - Google Patents

엑시머 램프 발광장치 Download PDF

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Publication number
KR100720264B1
KR100720264B1 KR1020030089033A KR20030089033A KR100720264B1 KR 100720264 B1 KR100720264 B1 KR 100720264B1 KR 1020030089033 A KR1020030089033 A KR 1020030089033A KR 20030089033 A KR20030089033 A KR 20030089033A KR 100720264 B1 KR100720264 B1 KR 100720264B1
Authority
KR
South Korea
Prior art keywords
excimer lamp
temperature
discharge
light emitting
excimer
Prior art date
Application number
KR1020030089033A
Other languages
English (en)
Korean (ko)
Other versions
KR20040067810A (ko
Inventor
나카무라마사키
기요세마사히데
Original Assignee
우시오덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 우시오덴키 가부시키가이샤 filed Critical 우시오덴키 가부시키가이샤
Publication of KR20040067810A publication Critical patent/KR20040067810A/ko
Application granted granted Critical
Publication of KR100720264B1 publication Critical patent/KR100720264B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/56—One or more circuit elements structurally associated with the lamp

Landscapes

  • Circuit Arrangements For Discharge Lamps (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Cleaning In General (AREA)
KR1020030089033A 2003-01-17 2003-12-09 엑시머 램프 발광장치 KR100720264B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003009994A JP4093065B2 (ja) 2003-01-17 2003-01-17 エキシマランプ発光装置
JPJP-P-2003-00009994 2003-01-17

Publications (2)

Publication Number Publication Date
KR20040067810A KR20040067810A (ko) 2004-07-30
KR100720264B1 true KR100720264B1 (ko) 2007-05-22

Family

ID=32899326

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020030089033A KR100720264B1 (ko) 2003-01-17 2003-12-09 엑시머 램프 발광장치

Country Status (4)

Country Link
JP (1) JP4093065B2 (ja)
KR (1) KR100720264B1 (ja)
CN (1) CN100409398C (ja)
TW (1) TWI256663B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101228756B1 (ko) 2008-07-23 2013-01-31 우시오덴키 가부시키가이샤 자외선 조사 장치 및 자외선 조사 장치의 점등 제어 방법

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005005258A (ja) * 2003-05-19 2005-01-06 Ushio Inc エキシマランプ発光装置
JP4586488B2 (ja) * 2004-10-20 2010-11-24 ウシオ電機株式会社 エキシマランプ点灯装置及びエキシマランプ点灯方法
JP4580246B2 (ja) * 2005-01-14 2010-11-10 ハリソン東芝ライティング株式会社 紫外光源点灯装置および紫外線照射装置
JP5293986B2 (ja) * 2005-07-29 2013-09-18 株式会社Ｇｓユアサ 紫外線ランプおよび紫外線照射装置
WO2007041192A2 (en) * 2005-09-30 2007-04-12 Energetiq Technology, Inc. Inductively-driven plasma light source
JP4400547B2 (ja) * 2005-10-28 2010-01-20 ウシオ電機株式会社 エキシマランプ及びエキシマランプを搭載した紫外線照射装置
JP5030010B2 (ja) * 2006-09-15 2012-09-19 岩崎電気株式会社 紫外線照射装置
JP4917993B2 (ja) * 2007-08-09 2012-04-18 ハリソン東芝ライティング株式会社 紫外線照射装置
JP4962256B2 (ja) * 2007-10-12 2012-06-27 ウシオ電機株式会社 エキシマランプ光照射装置
US20110148305A1 (en) * 2008-08-21 2011-06-23 Koninklijke Philips Electronics N.V. Dielectric barrier discharge lamp
TWI466735B (zh) * 2008-09-18 2015-01-01 Gs Yuasa Int Ltd 紫外線照射裝置
JP5648277B2 (ja) * 2009-11-25 2015-01-07 ウシオ電機株式会社 エキシマランプ装置
JP6428196B2 (ja) * 2014-11-25 2018-11-28 ウシオ電機株式会社 エキシマ放電ランプ装置
DE102015111284A1 (de) * 2015-07-13 2017-01-19 Heraeus Noblelight Gmbh Verfahren zum Betreiben einer Xenon-Excimer-Lampe und Lampensystem mit einer Excimer-Lampe
JP6951740B2 (ja) * 2017-09-11 2021-10-20 フェニックス電機株式会社 光源装置、それを備える照射装置、および光源装置の点灯方法
US10091865B1 (en) * 2017-11-13 2018-10-02 The Boeing Company Systems and methods for extending a lifespan of an excimer lamp
JP6748680B2 (ja) * 2018-08-31 2020-09-02 大電株式会社 照明装置
JP7315899B2 (ja) * 2019-12-25 2023-07-27 ウシオ電機株式会社 紫外線照射装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000249247A (ja) * 1998-12-28 2000-09-12 Toyota Motor Corp 電磁弁
JP2001217216A (ja) * 1999-11-25 2001-08-10 Hoya Schott Kk 紫外線照射方法及び装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3494684B2 (ja) * 1993-01-07 2004-02-09 富士写真フイルム株式会社 ランプ温度制御装置及びこれを用いたカラー感熱プリンタ
JP2001160376A (ja) * 1999-12-02 2001-06-12 Ushio Inc 誘電体バリア放電ランプ装置
JP3757790B2 (ja) * 2000-11-30 2006-03-22 ウシオ電機株式会社 誘電体バリア放電ランプを使った光源装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000249247A (ja) * 1998-12-28 2000-09-12 Toyota Motor Corp 電磁弁
JP2001217216A (ja) * 1999-11-25 2001-08-10 Hoya Schott Kk 紫外線照射方法及び装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101228756B1 (ko) 2008-07-23 2013-01-31 우시오덴키 가부시키가이샤 자외선 조사 장치 및 자외선 조사 장치의 점등 제어 방법

Also Published As

Publication number Publication date
KR20040067810A (ko) 2004-07-30
CN100409398C (zh) 2008-08-06
TWI256663B (en) 2006-06-11
TW200418079A (en) 2004-09-16
JP4093065B2 (ja) 2008-05-28
JP2004221017A (ja) 2004-08-05
CN1518051A (zh) 2004-08-04

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