TWI256663B - Excimer lamp light-emitting device - Google Patents

Excimer lamp light-emitting device

Info

Publication number
TWI256663B
TWI256663B TW092132318A TW92132318A TWI256663B TW I256663 B TWI256663 B TW I256663B TW 092132318 A TW092132318 A TW 092132318A TW 92132318 A TW92132318 A TW 92132318A TW I256663 B TWI256663 B TW I256663B
Authority
TW
Taiwan
Prior art keywords
excimer lamp
temperature
emitting device
lamp light
maintain
Prior art date
Application number
TW092132318A
Other languages
Chinese (zh)
Other versions
TW200418079A (en
Inventor
Masaki Nakamura
Masahide Kiyose
Original Assignee
Ushio Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Electric Inc filed Critical Ushio Electric Inc
Publication of TW200418079A publication Critical patent/TW200418079A/en
Application granted granted Critical
Publication of TWI256663B publication Critical patent/TWI256663B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/56—One or more circuit elements structurally associated with the lamp

Landscapes

  • Circuit Arrangements For Discharge Lamps (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Cleaning In General (AREA)

Abstract

The topic of this invention aims at keeping the initial discharge voltage of an excimer lamp in constant and get uniform illumination time and location. A excimer lamp device is composed by a excimer lamp that use medium material discharge to emit vacuum UV light, a power supply that provides the excimer lamp power, temperature adjustment means that heat and cool the excimer lamp, and a control part that inspects the temperature of the excimer lamp and keeps the defined target temperature. The power supply is used to maintain the initial discharge voltage of an excimer lamp almost the same. The control part is used to maintain the before discharging target temperature slightly higher than room temperature.
TW092132318A 2003-01-17 2003-11-18 Excimer lamp light-emitting device TWI256663B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003009994A JP4093065B2 (en) 2003-01-17 2003-01-17 Excimer lamp light emitting device

Publications (2)

Publication Number Publication Date
TW200418079A TW200418079A (en) 2004-09-16
TWI256663B true TWI256663B (en) 2006-06-11

Family

ID=32899326

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092132318A TWI256663B (en) 2003-01-17 2003-11-18 Excimer lamp light-emitting device

Country Status (4)

Country Link
JP (1) JP4093065B2 (en)
KR (1) KR100720264B1 (en)
CN (1) CN100409398C (en)
TW (1) TWI256663B (en)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005005258A (en) * 2003-05-19 2005-01-06 Ushio Inc Excimer lamp light emitting device
JP4586488B2 (en) * 2004-10-20 2010-11-24 ウシオ電機株式会社 Excimer lamp lighting device and excimer lamp lighting method
JP4580246B2 (en) * 2005-01-14 2010-11-10 ハリソン東芝ライティング株式会社 Ultraviolet light source lighting device and ultraviolet irradiation device
JP5293986B2 (en) * 2005-07-29 2013-09-18 株式会社Ｇｓユアサ UV lamp and UV irradiation device
WO2007041192A2 (en) * 2005-09-30 2007-04-12 Energetiq Technology, Inc. Inductively-driven plasma light source
JP4400547B2 (en) * 2005-10-28 2010-01-20 ウシオ電機株式会社 Excimer lamp and ultraviolet irradiation equipment equipped with excimer lamp
JP5030010B2 (en) * 2006-09-15 2012-09-19 岩崎電気株式会社 UV irradiation equipment
JP4917993B2 (en) * 2007-08-09 2012-04-18 ハリソン東芝ライティング株式会社 UV irradiation equipment
JP4962256B2 (en) * 2007-10-12 2012-06-27 ウシオ電機株式会社 Excimer lamp light irradiation device
JP5071289B2 (en) 2008-07-23 2012-11-14 ウシオ電機株式会社 Ultraviolet irradiation device and method for controlling lighting of ultraviolet irradiation device
US20110148305A1 (en) * 2008-08-21 2011-06-23 Koninklijke Philips Electronics N.V. Dielectric barrier discharge lamp
TWI466735B (en) * 2008-09-18 2015-01-01 Gs Yuasa Int Ltd Ultraviolet irradiation apparatus
JP5648277B2 (en) * 2009-11-25 2015-01-07 ウシオ電機株式会社 Excimer lamp device
JP6428196B2 (en) * 2014-11-25 2018-11-28 ウシオ電機株式会社 Excimer discharge lamp device
DE102015111284A1 (en) * 2015-07-13 2017-01-19 Heraeus Noblelight Gmbh Method for operating a xenon excimer lamp and lamp system with an excimer lamp
JP6951740B2 (en) * 2017-09-11 2021-10-20 フェニックス電機株式会社 Light source device, irradiation device equipped with it, and lighting method of light source device
US10091865B1 (en) * 2017-11-13 2018-10-02 The Boeing Company Systems and methods for extending a lifespan of an excimer lamp
JP6748680B2 (en) * 2018-08-31 2020-09-02 大電株式会社 Lighting equipment
JP7315899B2 (en) * 2019-12-25 2023-07-27 ウシオ電機株式会社 UV irradiation device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3494684B2 (en) * 1993-01-07 2004-02-09 富士写真フイルム株式会社 Lamp temperature control device and color thermal printer using the same
JP3409760B2 (en) * 1998-12-28 2003-05-26 トヨタ自動車株式会社 solenoid valve
JP2001217216A (en) * 1999-11-25 2001-08-10 Hoya Schott Kk Method and device for ultraviolet-ray irradiation
JP2001160376A (en) * 1999-12-02 2001-06-12 Ushio Inc Dielectric barrier discharge lamp apparatus
JP3757790B2 (en) * 2000-11-30 2006-03-22 ウシオ電機株式会社 Light source device using dielectric barrier discharge lamp

Also Published As

Publication number Publication date
KR100720264B1 (en) 2007-05-22
KR20040067810A (en) 2004-07-30
CN100409398C (en) 2008-08-06
TW200418079A (en) 2004-09-16
JP4093065B2 (en) 2008-05-28
JP2004221017A (en) 2004-08-05
CN1518051A (en) 2004-08-04

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees