CN1518051A - Excimers lamp luminous device - Google Patents
Excimers lamp luminous device Download PDFInfo
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- CN1518051A CN1518051A CNA2003101237942A CN200310123794A CN1518051A CN 1518051 A CN1518051 A CN 1518051A CN A2003101237942 A CNA2003101237942 A CN A2003101237942A CN 200310123794 A CN200310123794 A CN 200310123794A CN 1518051 A CN1518051 A CN 1518051A
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- molecular lampbulb
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/56—One or more circuit elements structurally associated with the lamp
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Abstract
To maintain discharge start voltage of an excimer lamp at a constant level, and to uniform the light emission rate in terms of time and location. The excimer lamp light emitting device comprises an excimer lamp for emitting a vacuum ultraviolet light by discharging through a dielectric material, a power supply device for supplying a predetermined power to the excimer lamp, temperature control means for increasing/decreasing the temperature of the excimer lamp, and a control part for detecting the temperature of the excimer lamp and for maintaining the lamp at a predetermined target temperature. In order to maintain the discharge start voltage of the excimer lamp at an approximately constant level, the power supply device maintains the excimer lamp at a target temperature higher than room temperature approximately constantly through the control part, even before the excimer lamp is turned on.
Description
Technical field
The present invention relates to a kind of excimers lamp lighting device.Be particularly related to the discharge lamp that the ultraviolet light source used as photochemical reaction uses, form excimers, utilize the excimers lamp lighting device of the light that excimers thus radiate by the discharge that utilizes dielectric substance.
Background technology
The technology that invention is relevant has therewith, and for example the spy opens flat 2-7353 number, is wherein putting down in writing emitter, just the related content of excited quasi-molecular lampbulb.This emitter is filled the discharge gas that can form excimers in discharge vessel, (have another name called and be ozone generator discharge or silent discharge by dielectric barrier discharge.With reference to electricity can issue change decide new edition " the discharge handbook is put down into and is reprinted the 263rd page of the 7th printing distribution in June, 1) form excimers, export the light that excimers thus radiate.
The discharge vessel of this excited quasi-molecular lampbulb is a drum, the dielectric of at least a portion double as dielectric barrier discharge (dielectric barrier discharge) of discharge vessel, at least a portion in this dielectric has light transmission for the vacuum-ultraviolet light that is radiated by excimers (wavelength is the following light of 200nm).And then, be provided with mesh electrode in the outside of discharge vessel, as an electrode.
This excited quasi-molecular lampbulb has low-pressure mercury discharge lamp or the unexistent various advantages of high pressure arc discharge lamp in the past, for example, radiates the ultraviolet light of single wavelength etc. consumingly.
In addition, using the light-emitting device of excited quasi-molecular lampbulb also to open the 2002-168999 grade for example spy is disclosed.
And then the electric supply installation that excited quasi-molecular lampbulb is lighted is opened flat 10-97898 grade for example spy and is disclosed.
[patent documentation 1]
Te Kaiping 2-7353 number
[patent documentation 2]
The spy opens 2002-168999 number
[patent documentation 3]
Te Kaiping 10-97898 number
The brief configuration of excited quasi-molecular lampbulb shown in Fig. 3.Clamp plasma discharging space 2 in the excited quasi-molecular lampbulb 1 (being designated hereinafter simply as ' lamp '), the discharge vessel 5 of double as dielectric substance between electrode 3 and electrode 4.In the time will lighting lamp 1, apply to electrode 3 and electrode 4 by electric supply installation 6, for example, the high-frequency ac voltage of 10kHZ～200kHZ, 2kV～10kV.But, be different from common discharge lamp, because of dielectric substance being arranged at 3,4 at electrode, so electric current can be not directly from electrode stream to the plasma discharging space, but play a part capacitor as the discharge vessel 5 of dielectric substance.
Fig. 4 is for being expressed as excited quasi-molecular lampbulb to simulate the figure of load.Plasma discharging space 2 and dielectric substance (quartz glass) become each capacitor that is connected in series, and then, becoming the structure of the voltage stabilizing didoe that is being connected in parallel with plasma discharging space 2 pairing capacitors.
According to such structure, before the voltage stabilizing didoe conducting, the capacitance in plasma discharging space 2 plays a part control, and this electric capacity is charged.Then, when charging reached discharge inception voltage, voltage stabilizing didoe just can conducting and is had electric current to flow through.The electric current that flow through this moment can be suppressed by two electric capacity that are equivalent to dielectric substance, so can be controlled as the excited quasi-molecular lampbulb state, does not allow it be transformed into the state of arc discharge.
Excited quasi-molecular lampbulb just begins to light when reaching discharge inception voltage like this, but this discharge inception voltage roughly determines according to the pressure (P) and the arcing distance (L) in plasma discharging space.At this, the volumes of arcing distance (L) and discharge space etc. are lighted at lamp and are not changed in the process and be certain value and can estimate its value substantially, so it is very big to learn that above-mentioned discharge inception voltage is subjected to based on the influence of the change of the pressure (P) of the variations in temperature in plasma discharging space 2.
In other words, when the temperature in plasma discharging space 2 was high, the molecular weight in the space also can increase, and container internal pressure also can increase, its result, and discharge inception voltage can uprise.
In the middle of common use, the normal temperature state of plasma discharging space before light to the process of the time of lighting with the rising of temperature, so above-mentioned discharge inception voltage also changes thereupon.For this reason,, electric supply installation has been done excessive design, so that can tackle the high discharge inception voltage of expecting in advance in the past.
And then though excited quasi-molecular lampbulb is made of dielectric substances such as quartz glasss, transmission of ultraviolet rays will reduce known this dielectric substance when distorting if exist.In other words,, have and to export desired ultraviolet flux, or the local unbalanced problem on the position such as radiating light flux that reduces takes place because there is distortion in dielectric substance.
Summary of the invention
The problem that the present invention will solve is to keep the discharge inception voltage of excited quasi-molecular lampbulb and time, the locational homogenizing that realizes the radiating light flux consistently.
For addressing the above problem, excimers lamp lighting device of the present invention comprises: excited quasi-molecular lampbulb, the emitting ultraviolet light by the discharge that utilizes dielectric substance; Electric supply installation provides the electric power of regulation for this excited quasi-molecular lampbulb; Temperature adjustment device is used for the temperature of this excited quasi-molecular lampbulb of heating and cooling; And control part, the temperature that is used to detect excited quasi-molecular lampbulb is also kept the target temperature value of regulation simultaneously, it is characterized in that, for the discharge inception voltage that makes aforementioned excited quasi-molecular lampbulb roughly stable, aforementioned electric supply installation by aforementioned control part before light with the temperature constant of aforementioned excited quasi-molecular lampbulb maintain the target temperature that is higher than normal temperature.
According to this structure, excited quasi-molecular lampbulb just can be set the target temperature that is higher than normal temperature before light, and just can start with constant discharge inception voltage from the initial stage of lighting.
In addition, for the stable state ignition phase, can keep the temperature of excited quasi-molecular lampbulb by heater and cooling device consistently, thus with the pairing discharge inception voltage of target temperature be that object carries out circuit design, also just can prevent the excessive design of electric supply installation.
At this, keep the reason that is higher than normal temperature and be, if the temperature in plasma discharging space is low excessively, the hot electron that is present in the plasma discharging space will be lost its motor function, the result causes the cause that can not effectively discharge.In addition, also be because by can reduce the cause of the distortion that exists in the quartz glass that constitutes discharge vessel to heating of excited quasi-molecular lampbulb.
For this target temperature, the temperature of excited quasi-molecular lampbulb is meant the temperature of luminous tube outer surface, is set in 80 ℃～200 ℃ the scope, and is better in 100 ℃～160 ℃ scope.
This is because the temperature of discharge space has difficulty in the measurement as practical problem, so regulation is with the luminous tube material cause that replaces of the hull-skin temperature of quartz glass for example.
And this temperature range has been considered the degree that temperature rises in temperature that hot electron works and the discharge space, also is the temperature range that realistic meaning is arranged most that present inventors draw after through earnest investigation research.
In addition, above-mentioned target temperature be characterized as consistently maintain ± 20 ℃ of scopes in.This is the permission amplitude of temperature of the required control of regulation, also is the number range that draws after present inventors investigate in earnest.
In addition, control part be characterized as along with excited quasi-molecular lampbulb through the time deterioration above-mentioned target temperature is and then changed.Excited quasi-molecular lampbulb enclose by the burn into of discharge vessel (thickness of dielectric substance), electrode the leakage of the gas in the discharge vessel etc. take place through the time deterioration, on this basis, the adjustable settings temperature, make discharge inception voltage not can along with through the time deterioration and changing.
Description of drawings
Fig. 1 is the overall diagram of excimers lamp lighting device involved in the present invention.
Fig. 2 is the excited quasi-molecular lampbulb diagrammatic sketch that the present invention relates to.
Fig. 3 is the figure that is used for excited quasi-molecular lampbulb is carried out general remark.
Fig. 4 is the figure that is used for excited quasi-molecular lampbulb is carried out general remark.
Fig. 5 is the block diagram of the control system of excimers lamp lighting device among expression the present invention.
Embodiment
Fig. 1 represents excimers lamp lighting device of the present invention.The inside of lighting device 10 is furnished with excited quasi-molecular lampbulb 1.Lighting device 10 is made of light gasing surface 11 and main body cabinet 12 and metal derby 13.The vacuum ultraviolet (VUV) light transmission that light gasing surface 11 can make self-stimulated Excimer lamp radiate, it is made of for example synthetic quartz glass.Main body cabinet 12 is made of for example stainless steel, forms gas introduction port 12a on its sidewall, then forms gas discharge outlet 12b on another sidewall.Gas introduction port 12a imports inert gases such as nitrogen thus, and discharges remaining oxygen and inert gas from outlet 12b.
There is the electric supply installation 20 that electric power is provided to excited quasi-molecular lampbulb 1 outside of lighting device 10, and each excited quasi-molecular lampbulb 1 is by electrical connections such as electric wires.In addition, the temperature sensor of temperature adjustment device 30, excited quasi-molecular lampbulb of excited quasi-molecular lampbulb described later and optical sensor etc. be equipped with in the inside of lighting device 10, and be furnished with control part in the outside of lighting device 10, be used to send and receive the signal of these temperature control equipments and each transducer.Moreover the configuration of electric supply installation 20 and control part 40 is not limited to the outside of lighting device 10, also can fit over the inside of lighting device 10, and electric supply installation 20 also can be made up of as cabinet and so on the identical object of physical property with control part 40.
The inner surface of metal derby 13 is formed with groove (concave part) 14.The big I of each groove 14 embeds half (semicircle) of excited quasi-molecular lampbulb 1 or the part that half is following just, and is identical with excited quasi-molecular lampbulb 1, stretches to perpendicular to the paper direction to form.In addition, in the metal derby 13 from each excited quasi-molecular lampbulb 1 by the through hole optical sensor of packing into.This optical sensor 15 can detect the radiating light from excited quasi-molecular lampbulb 1, and through hole is that for example diameter is that 10mm, length are the hole about 20mm.Between excited quasi-molecular lampbulb 1 and the groove 14, is furnished with speculum 16.The surface of speculum 16 is made up of the aluminium of light, and ultraviolet light, particularly vacuum-ultraviolet light are had high reflectance.
Heater 31 is the heater strip that is attached to speculum 16 outer surfaces, the outer surface of excited quasi-molecular lampbulb 1 can be warmed to according to this heater 31 in 80 ℃～200 ℃ the scope, in more preferably 100 ℃～160 ℃ the scope.And the back will be talked about, not only after the lighting of excited quasi-molecular lampbulb 1, and just can the target setting temperature before light.
Above-mentioned heater 31 is not limited to be attached to the heater strip of speculum outer surface, and can adopt a cutting apparatus that can heat excited quasi-molecular lampbulb 1.For example, can adopt in metal derby 13 structure of inserting infrared lamp, make structure or pool ear card element, air cooled heat sinks, the cooling that utilizes heat of gasification that warm water flows in same metal derby 13, use the structure such as absorption of ammonia.
Cooling device 32 is water cooling tube set in the metal derby 13, circulates cool metal piece 13 by cooling water in water cooling tube, cools off excited quasi-molecular lampbulb 1 by the cooling of metal derby 13 again.
This cooling device 32 is worked with above-mentioned heater 31, thereby can and be controlled to constant desired value with the temperature maintenance of excited quasi-molecular lampbulb 1.
Moreover, for cooling device 32, be not limited to device that liquid is flow through in metal derby 13, and it is all applicable to cool off a cutting apparatus of excited quasi-molecular lampbulb 1, for example, except the liquid of cooling water one class being used as the method for medium, can also adopt NH
3And gas such as HFC-134a (replace fluorine Lyons) is that the solids such as method, fin and dry ice of medium are the method for medium.In addition, for the position of cooling device, except being located at metal derby 13, also can be the structure that flows through the structure among excited quasi-molecular lampbulb 1 inside tube and flow through the space in the lighting device 10.
The temperature sensor 17 of all being furnished with the temperature that is used to detect excited quasi-molecular lampbulb 1 around each excited quasi-molecular lampbulb 1 separately.This temperature sensor 17 can detect the temperature of the luminous tube outer surface of excited quasi-molecular lampbulb 1, for example, posistor (P type semiconductor), resistance bulb, thermocouple, semiconductor temperature sensor, pure resistance, infrared temperature sensor all are fit to.
Moreover, temperature sensor 17 is not limited to above-mentioned posistor (P type semiconductor) and so on, and can adopt all can detect the method for the surface temperature of excited quasi-molecular lampbulb 1 exactly, for example, radiant heat method, can measure Yin Wendu and distortion-temperature conversion method, the pressure type round-about ways such as (expansion rate according to the gas of being enclosed, liquid are carried out temperature conversion) of the distortion of the glass that produces.Moreover temperature sensor 17 originally is to be used to detect the interior temperature of discharge space, but said temperature transducer 17 can detect the hull-skin temperature of discharge vessel and measure the discharge space temperature inside according to the scaled value of obtaining in advance.And then, think that temperature sensor 17 is not the device for detection luminous tube hull-skin temperature, but the idea of the device of the temperature of detection emitting space also is unquestionable.
The detection signal that temperature sensor 17 generates is sent to control part 40, compares with the target temperature that sets.And control part 40 just can send reinforcement heater 31 or weaken the signal of cooling device 32 when the temperature of the discharge space of judging excited quasi-molecular lampbulb 1 is lower than target temperature, adjusts heater 31 or cooling device 32; When the temperature of judging excited quasi-molecular lampbulb 1 is higher than target temperature, just can send the signal that weakens heater 31 or strengthen cooling device 32, adjust heater 31 or cooling device 32.
Like this, control part 40 can carry out reaction type control according to the driving from the detection signal and the temperature adjustment device 30 of temperature sensor 1, causes the temperature of the discharge space of excited quasi-molecular lampbulb 1 to approach desired value.
The invention is characterized in, before lighting excited quasi-molecular lampbulb 1, the temperature of excited quasi-molecular lampbulb 1 is set for the target temperature of the regulation that is higher than normal temperature, and electric supply installation 20 is obtained the information relevant with the state of temperature of excited quasi-molecular lampbulb 1 from control part 40 often.
Then, for example, when connecting the main power source of excimers lamp lighting device, before lighting excited quasi-molecular lampbulb 1, starting control part 40 and temperature adjustment device 30 are set to desired value to excited quasi-molecular lampbulb 1 earlier.
And, if control part 40 confirms that the temperature of excited quasi-molecular lampbulb 1 has reached aforesaid target temperature, send for electric supply installation 20 to light may signal, and electric supply installation 20 begins to carry out function of supplying power to excited quasi-molecular lampbulb 1 after receiving signal from control part 40 immediately.
Moreover, no matter be in the state of the main power source of connecting the excimers lamp lighting device, still be in the state of turning off excited quasi-molecular lampbulb 1, it is also passable to carry out work according to the temperature adjustment device 30 of control part 40, and it is also passable to quit work.
In a word, when lighting excited quasi-molecular lampbulb 1, only when electric supply installation 20 is received the signal that expression from control part 40 allows to light, make it luminous just can for excited quasi-molecular lampbulb 1 power supply.
The present invention has and comprises that these all are unexistent in excimers light-emitting device in the past from beginning that excited quasi-molecular lampbulb is warmed up to before excited quasi-molecular lampbulb is lighted and be higher than the temperature of normal temperature and keep the good advantage of this temperature.
That is, the temperature by making excited quasi-molecular lampbulb begins to warm to the temperature that is higher than normal temperature before the lighting of excited quasi-molecular lampbulb, had the effect of eliminating or reduce the distortion that contains in the quartz glass that constitutes discharge vessel.This distortion hinders ultraviolet passing through, if can be so that the method that quartz glass itself heats up is offset, transmission of ultraviolet rays also will improve.
Perhaps have in the excited quasi-molecular lampbulb in the past along with lighting with the intensification effect, in the rising of lighting time course middle-ultraviolet lamp transmissivity, but for the present invention, beginning from the initial stage of lighting just can be with high-transmission rate radiation ultraviolet ray.And the initial stage of lighting begins just can subdue distortion certainly, thereby can remove locational non-uniform phenomenon effectively.
Therefore, thus having the transmissivity that improves vacuum-ultraviolet light improves its power output, begins to radiate very high ultraviolet flux from the initial stage of lighting.In addition, when distortion has locationally when inhomogeneous, ultraviolet output also can be inhomogeneous, but in the present invention, and beginning just can radiate on amount and position from the initial stage of lighting does not all have uneven ultraviolet ray.
And then, the invention is characterized in, can keep a stationary temperature to heating of discharge vessel.Because can make discharge inception voltage keep steady state value like this, thus according to this temperature design electric supply installation, just can prevent the excessive design of corresponding too high discharge inception voltage, thus realize the miniaturization of electric supply installation.
In the outside of light gasing surface 11, closely count place about mm and be furnished with handled thing, for example, semiconductor wafer liquid crystal substrate etc.In addition, should see through light gasing surface 11 by the vacuum-ultraviolet light (wavelength is less than 200nm) that excited quasi-molecular lampbulb 1 radiates, carry out processing such as surfaction by the treatment with irradiation thing, but in the present invention, by ultraviolet ray to being present in the irradiation of the oxygen between light gasing surface 11 and handled thing, produce ozone and active oxygen,, can carry out the clean of substrate surface again according to these comprehensive functions.
Fig. 2 is the brief configuration of excited quasi-molecular lampbulb 1.(a) the whole cutaway view of expression, (b) the A-A cutaway view of expression (a).
The global shape of excited quasi-molecular lampbulb 1 is a cylindrical shape, and the synthetic quartz glass that material can also make ultraviolet light see through by by dielectric barrier discharge performance dielectric function the time constitutes.The outboard tube 51 and the inside tube 52 of discharge lamp 1 are arranged coaxial, so when having constituted dual cylindrical duct, be between outboard tube 51 and the outboard tube 52 by the sealing at two ends and formed discharge space 2.When inclosure formed excimers by dielectric barrier discharge in the discharge space 2, excimers were radiated the discharge gas of vacuum-ultraviolet light, for example xenon thus.If lift the example of individual data, the total length that promptly is discharge lamp 1 is that 800mm, external diameter are that the external diameter of 27mm, inside tube 52 is that the wall thickness of 16mm, outboard tube 51 and inside tube 52 is 1mm and lights with 400W.The outer surface of outboard tube 51 is provided with mesh electrode 3, and it is medial electrode 4 that the inside of inside tube 52 is provided with another electrode.The formation of mesh electrode 3 is very tight, has retractility on the whole, can make outboard tube 51 that good seal is arranged.Medial electrode 52 be designed on tubulose or the cross section some for breach roughly as C word shape, and be close to inside tube 52.Is furnished with aspirator in the discharge space 2 as required.Between mesh electrode 3, medial electrode 4, be connected with not shown AC power, form excimers at discharge space 2 thus, send ultraviolet light.When xenon is used with gas as discharge, can radiate the light that wavelength is 172nm.
Excited quasi-molecular lampbulb 1 is not limited to this form, if when discharging by dielectric substances such as quartz glasss, also can adopt other form.Especially, be not as shown in Figure 2 the double pipe shape but single tube shape shown in Figure 1, in addition, some electrodes are disposed in the discharge vessel, thus forms such as contact discharge gas can.
Fig. 5 represents to be used to control the block diagram of the temperature of excited quasi-molecular lampbulb.
Such the use temperature sensor 17 of the temperature of excited quasi-molecular lampbulb 1 shown in S1 among the figure measured.Be sent to the temperature-control circuit 41 of control part 40 from the signal S2 of temperature sensor 21.In temperature-control circuit 41,, the signal S3 that drives aforesaid heating, cooling is sent to temperature adjustment device 30 by target temperature T1 that relatively stipulates and the temperature T of having measured 0.Temperature adjustment device 30 controls to target temperature T1 to the temperature of excited quasi-molecular lampbulb 1 by heater 31, cooling device 31 as mentioned above like that.The FEEDBACK CONTROL that above-described expression is common.
Provide electric power that excited quasi-molecular lampbulb 1 is lighted by the power supply circuits in the electric supply installation 20 21.Then, as previously mentioned, send information S4 about the state of temperature of excited quasi-molecular lampbulb from the temperature-control circuit 41 of control part 40.
Connected the characteristic tester 22 that detects power supply circuits 21 in the electric supply installation 20.This is the device that detects the electrical characteristics of excited quasi-molecular lampbulb 1, for example, detects lighting magnitude of voltage and lighting current value of lamp, detects the phase difference of voltage-phase and current phase.The characteristic of excited quasi-molecular lampbulb if not through the time during deterioration, this phase difference can roughly become a steady state value, but because of have by the leakage of enclosing gas in being corroded of aforesaid discharge vessel (thickness of dielectric substance), electrode, the discharge vessel cause through the time deterioration, so also can change.
In addition, the change in electrical characteristics of characteristic tester 22 by excited quasi-molecular lampbulb detect through the time deterioration.Moreover the electrical characteristics of excited quasi-molecular lampbulb of this moment are being represented macroscopic properties, and are not influenced by variation in voltage or electric current change for the moment.
Characteristic tester 22 sends to the deterioration signal S5 of excited quasi-molecular lampbulb 1 the desired value computing circuit 42 of control part 40.This desired value computing circuit 42 receives the deterioration information of excited quasi-molecular lampbulbs 1, adjusts aforementioned target temperature, though make under the situation that can set deterioration also can the stable discharging starting voltage temperature.
In addition, the modification information of target temperature also sends to memory 43, so even when disconnecting the main power source of excimers lamp lighting device, also can keep the target temperature after changing of next time, the initial setting when rising.
Moreover, the mode that characteristic tester 22 detects the electrical characteristics of excited quasi-molecular lampbulbs is not limited to detect the method for the phase difference of the voltage-phase of lamp and current phase, can adopt and to detect a blanking method and the structure that discharge inception voltage changes, the method of the propradation of the magnitude of voltage when for example, also having detection to begin to discharge etc.
In addition, the data of relevant above-mentioned excited quasi-molecular lampbulb electrical characteristics are stored with the memory 43 of control part 40, and the deterioration evolution that becomes excited quasi-molecular lampbulb keeps.And, can dope by the storage data and to change and life-span of excited quasi-molecular lampbulb.
As mentioned above, excimers lamp lighting device of the present invention generally can be controlled to constant target temperature by the temperature detection of temperature sensor and the control of temperature-control circuit.And, detect electrical characteristics with characteristic tester in the time of temperature detection that can be by excited quasi-molecular lampbulb, detect the deterioration of sensu lato lamp, thereby have the function of adjusting temperature controlled target temperature according to this deterioration.
As mentioned above, the excimers lamp lighting device among the present invention has following feature.The first, be warmed up to the temperature that is higher than normal temperature by the preceding temperature of lighting excited quasi-molecular lampbulb, eliminate or reduce the effect of distortion contained in the quartz glass that constitutes discharge vessel.The second, by temperature maintenance one steady state value of heating of discharge vessel, can the stable discharging starting voltage, and according to this, design is fit to the electric supply installation of Current Temperatures, so that can prevent to tackle the excessive design of too high discharge inception voltage, realizes the miniaturization of electric supply installation.
Claims (7)
1. excimers lamp lighting device is made of following each parts: excited quasi-molecular lampbulb, come emitting ultraviolet light by the discharge that utilizes dielectric substance; Electric supply installation is supplied with the electric power of stipulating to excited quasi-molecular lampbulb; Temperature adjustment device is used for the temperature of heating and cooling excited quasi-molecular lampbulb; And control part, be used to detect the temperature of excited quasi-molecular lampbulb, and keep the target temperature of regulation, it is characterized in that,
Described electric supply installation by described control part before light the temperature constant of described excited quasi-molecular lampbulb maintain the temperature that is higher than normal temperature.
2. excimers lamp lighting device as claimed in claim 1 is characterized in that the temperature of described excited quasi-molecular lampbulb is the temperature of luminous tube outer surface, maintains within 80 ℃～200 ℃ scopes.
3. excimers lamp lighting device as claimed in claim 2 is characterized in that the temperature of described excited quasi-molecular lampbulb is the temperature of luminous tube outer surface, maintains within 100 ℃～160 ℃ scopes.
4. excimers lamp lighting device as claimed in claim 1 is characterized in that, maintain to the temperature constant of described excited quasi-molecular lampbulb ± 20 ℃ of scopes within.
5. excimers lamp lighting device as claimed in claim 1 is characterized in that, described temperature adjustment device is the heater strip that disposes on the outer surface of excited quasi-molecular lampbulb.
6. excimers lamp lighting device as claimed in claim 1 is characterized in that, described temperature adjustment device is the cooling water among the metal derby that keeps excited quasi-molecular lampbulb of flowing through.
7. excimers light-emitting device as claimed in claim 1 is characterized in that, described control part can make described target temperature be accompanied by described excimers through the time deterioration and changing.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003009994A JP4093065B2 (en) | 2003-01-17 | 2003-01-17 | Excimer lamp light emitting device |
| JP009994/2003 | 2003-01-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1518051A true CN1518051A (en) | 2004-08-04 |
| CN100409398C CN100409398C (en) | 2008-08-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2003101237942A Expired - Fee Related CN100409398C (en) | 2003-01-17 | 2003-12-17 | Excimers lamp luminous device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4093065B2 (en) |
| KR (1) | KR100720264B1 (en) |
| CN (1) | CN100409398C (en) |
| TW (1) | TWI256663B (en) |
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| CN109786207A (en) * | 2017-11-13 | 2019-05-21 | 波音公司 | Extend the system and method in the service life of excited quasi-molecular lampbulb |
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| JP3494684B2 (en) * | 1993-01-07 | 2004-02-09 | 富士写真フイルム株式会社 | Lamp temperature control device and color thermal printer using the same |
| JP3409760B2 (en) * | 1998-12-28 | 2003-05-26 | トヨタ自動車株式会社 | solenoid valve |
| JP2001217216A (en) * | 1999-11-25 | 2001-08-10 | Hoya Schott Kk | Method and device for ultraviolet-ray irradiation |
| JP2001160376A (en) * | 1999-12-02 | 2001-06-12 | Ushio Inc | Dielectric barrier discharge lamp apparatus |
| JP3757790B2 (en) * | 2000-11-30 | 2006-03-22 | ウシオ電機株式会社 | Light source device using dielectric barrier discharge lamp |
-
2003
- 2003-01-17 JP JP2003009994A patent/JP4093065B2/en not_active Expired - Fee Related
- 2003-11-18 TW TW092132318A patent/TWI256663B/en not_active IP Right Cessation
- 2003-12-09 KR KR1020030089033A patent/KR100720264B1/en not_active IP Right Cessation
- 2003-12-17 CN CNB2003101237942A patent/CN100409398C/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101031993B (en) * | 2005-07-29 | 2010-12-01 | 株式会社杰士汤浅 | UV lamp and UV irradiation unit |
| CN101364526B (en) * | 2007-08-09 | 2012-07-04 | 哈利盛东芝照明株式会社 | Ultraviolet irradiation device |
| CN109786207A (en) * | 2017-11-13 | 2019-05-21 | 波音公司 | Extend the system and method in the service life of excited quasi-molecular lampbulb |
| CN109786207B (en) * | 2017-11-13 | 2022-06-28 | 波音公司 | System and method for extending the life of an excimer lamp |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2004221017A (en) | 2004-08-05 |
| KR20040067810A (en) | 2004-07-30 |
| CN100409398C (en) | 2008-08-06 |
| JP4093065B2 (en) | 2008-05-28 |
| KR100720264B1 (en) | 2007-05-22 |
| TW200418079A (en) | 2004-09-16 |
| TWI256663B (en) | 2006-06-11 |
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