CN1763905A - Inspired quasi molecule lamp igniting device and igniting method - Google Patents
Inspired quasi molecule lamp igniting device and igniting method Download PDFInfo
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- CN1763905A CN1763905A CNA2005101181081A CN200510118108A CN1763905A CN 1763905 A CN1763905 A CN 1763905A CN A2005101181081 A CNA2005101181081 A CN A2005101181081A CN 200510118108 A CN200510118108 A CN 200510118108A CN 1763905 A CN1763905 A CN 1763905A
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
- H05B41/14—Circuit arrangements
- H05B41/24—Circuit arrangements in which the lamp is fed by high frequency ac, or with separate oscillator frequency
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
- H05B41/02—Details
- H05B41/04—Starting switches
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21K—NON-ELECTRIC LIGHT SOURCES USING LUMINESCENCE; LIGHT SOURCES USING ELECTROCHEMILUMINESCENCE; LIGHT SOURCES USING CHARGES OF COMBUSTIBLE MATERIAL; LIGHT SOURCES USING SEMICONDUCTOR DEVICES AS LIGHT-GENERATING ELEMENTS; LIGHT SOURCES NOT OTHERWISE PROVIDED FOR
- F21K2/00—Non-electric light sources using luminescence; Light sources using electrochemiluminescence
- F21K2/06—Non-electric light sources using luminescence; Light sources using electrochemiluminescence using chemiluminescence
- F21K2/08—Non-electric light sources using luminescence; Light sources using electrochemiluminescence using chemiluminescence activated by an electric field, i.e. electrochemiluminescence
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Abstract
The present invention provides an excimer lamp lighting device capable of irradiation treatment of uniform excimer light when lowering the voltage to be impressed on the excimer lamp by keeping frequencies of high-frequency power to be supplied to the excimer lamp from 1MHz to 1GHz, by shortening the time needed until discharge plasma is uniformly distributed in a whole discharging space. The excimer lamp lighting device is composed of an excimer lamp 7 having a discharging container, in which discharge gas generating excimer molecules by discharge is filled; a lighting circuit part 20; and a control part 10. The control part 10 controls the lighting circuit part 20 so as to supply a power higher than the stationary power supplied at stationary lighting of the excimer lamp 7 during the starting period of the excimer lamp, and supply the stationary power after the excimer lamp is moved into a stationary lighting state.
Description
Technical field
The present invention relates to a kind of excimers lamp light source device and excited quasi-molecular lampbulb ignition method, especially relate to a kind of excimers lamp light source device and excited quasi-molecular lampbulb ignition method with excited quasi-molecular lampbulb, above-mentioned excited quasi-molecular lampbulb is supplied with the high-frequency High frequency power of so-called 1MHz to 1GHz and is lit a lamp, form excimers by discharge, and emit the light that radiates from these excimers.
Background technology
In the prior art, can utilize excited quasi-molecular lampbulb and as utilizing a kind of of the vacuum-ultraviolet light radioactive source that has high efficiency radiological performance in the processing such as photochemically reactive sclerosis, dry-cleaning, sterilization, surfaction, optical cvd.As the representative of excited quasi-molecular lampbulb, the crowd knows be between the electrode of supply high frequency electric power, be situated between excimers such as dress inert gas generate gas and medium, and utilization via the excited quasi-molecular lampbulb of the discharge of this interelectrode medium.
Fig. 6 is the figure of an example that expression utilizes the surface cleaning device of excimers lamp light source device.In the figure, this surface cleaning device 100 for example disposes the light that is made of quartz glass and takes out window member 107 between lampshade 101 and process chamber 102.In lampshade 101, for example be provided with the cooling block portion 117 that constitutes by aluminium.Below this cooling block portion 117, it is semicircular a plurality of being provided with each section, is three slot part 117a in the figure.The length direction of these a plurality of slot part 117a is respectively the direction perpendicular to paper, approximately is arranged in parallel mutually.In these slot parts 117a, dispose cylindric excited quasi-molecular lampbulb 104 respectively with the external diameter that is fit to slot part 117a internal diameter.
Fig. 7 is the key diagram of the structure example of expression excited quasi-molecular lampbulb 104, and expression is along the section of tubular axis.
In excited quasi-molecular lampbulb 104, the cylindrical shape outboard tube 104a that coaxial shape ground configuration is made of media such as quartz glasss and for example constituting and cylindrical shape inside tube 104b that external diameter is littler than the internal diameter of outboard tube 104a by media such as quartz glasss.The both ends of outboard tube 104a and inside tube 104b are formed discharge vessel by hermetic seal.In the discharge space 118 in the airtight cylindric space that is made of outboard tube 104a and inside tube 104b, for example enclosing has xenon and as discharge gas.In the outside of outboard tube 104a, dispose the mesh-shape electrode 103a of aluminum, at the inner face of outboard tube 104b, dispose the round metal tubular electrode 103b of aluminum.
Between electrode 103a, 103b, from high-frequency and high-voltage power supply 105 supply high frequency electric power.In addition, in Fig. 6, high-frequency and high-voltage power supply 105 is connected with an excited quasi-molecular lampbulb 104, but in fact, is connected with high-frequency and high-voltage power supply 105 respectively in all excited quasi-molecular lampbulbs 104.
At this, the electrode 103 of being located at outboard tube 104a side is grounded.And, be located at the electrode 103b of inside tube 104b side and high-frequency and high-voltage power supply 105 and be connected the distolateral of electrode 103b.Below, this coupling part is called power supply 119.
When if high frequency voltage is fed into electrode 103a, 103b, then generate discharge plasma at discharge space 118, form the excimers of the discharge gas that is enclosed in discharge space 118, and radiating light from these excimers.When discharge gas is xenon, with regard to the vacuum-ultraviolet light of emission center wavelength 172nm.
Get back to Fig. 6, the light from the excited quasi-molecular lampbulb 104 that is disposed in the lampshade 101 is emitted for example by the mesh part of mesh-shape electrode 103a, takes out window member 107 and is fetched to process chamber 102 sides via light.
At this, each excited quasi-molecular lampbulb 104 cools off by heat exchange in cooling block portion 117.Corresponding to the condition of lighting a lamp of excited quasi-molecular lampbulb 104, can not shown space be set in cooling block portion 117, make this interior volume constitute cooling water capable of circulation.
Take out window member 107 facing surfaces with the light of cooling block portion 117, can be processed to for example mirror-like.By so processing, the light of being emitted by excited quasi-molecular lampbulb 104 arrives light taking-up window member 107 efficiently.
Object being treated 109 is configured on the sample stage 108 in process chamber 102.Object being treated 109 is liquid crystal display glass substrates for example.When glass substrate is used in the clean liquid crystal display of desire, for example, is full of by oxidative fluid in the process chamber.This oxidative fluid contains oxygen, and for example the mist of oxygen and nitrogen is used as oxidizing gas.That is, the gas supply mechanism 116a by the air of supplying high purity via the oxidative fluid introducing port 106a of a part of being located at process chamber 102, and makes high purity air be fed into process chamber 102 inside.
With the discharge gas of each excited quasi-molecular lampbulb 104 as xenon, the vacuum-ultraviolet light of the centre wavelength 172nm that radiates from excited quasi-molecular lampbulb 104 sides, take out window member 107 via light, be irradiated to object being treated 109 surfaces and the oxidative fluid (mist of oxygen and nitrogen) that is directed in the process chamber 102.Oxygen in the mist of oxygen and helium and vacuum-ultraviolet light react and produce oxygen radical.Organic impurities on this oxygen radical and the object being treated 109 (liquid crystal display glass substrate) reacts, generate hydrocarbon, carbon dioxide, water in process chamber 102, these are discharged from via the exhaust gear 116b that is connected to oxidative fluid outlet 106b from oxidative fluid outlet 106b.
At this, the 120th, controlling organization will be put modulating signal, the light-off signal passes out to high frequency voltage power supply 105, by connection, the disconnection (on, off) of control high-frequency and high-voltage power supply 105, control lighting a lamp, turning off the light of each excited quasi-molecular lampbulb 104.In addition, controlling organization 120 also can constitute, control gaseous feed mechanism 116a, exhaust gear 116b, and synthetically the rayed illumination or the machine regularly of the gas supply in the control and treatment chamber 102, exhaust, excited quasi-molecular lampbulb 104.
; when desiring to light a lamp excited quasi-molecular lampbulb; in the prior art; supply with High frequency power from high-frequency and high-voltage power supply 105, and be formed uniformly discharge plasma in the whole zone of the discharge space of excited quasi-molecular lampbulb and the stable state of lighting a lamp realizing stably keeping as several 10KHz frequencies of High frequency power.
But desiring with the frequency is the High frequency power of number 10KHz when lighting a lamp excited quasi-molecular lampbulb, as applying voltage and need the high high voltage of about 5kV, needs abundant countermeasure for the insulation of device etc.In this countermeasure, the problem that causes device maximization itself, expensiveization is arranged.
For corresponding to this problem, apply voltage as purpose when reducing stable lighting a lamp, make the method for several MHz just like the frequency of being put down in writing in the patent documentation 1 with the High frequency power that applied.At this moment, for example can stably light a lamp to apply the excited quasi-molecular lampbulb that voltage 5kV lights a lamp to apply about voltage 1kV.
Patent documentation 1: TOHKEMY 2000-331649 communique
Yet, when especially the excited quasi-molecular lampbulb of large-scale, high output being applied frequency and lights a lamp for the High frequency power of number MHz as can be known, can produce following new problem: after the supply high frequency electric power, discharge space make discharge plasma extend to equably excited quasi-molecular lampbulb integral body, promptly, discharge space integral body is when costing very much.This is the phenomenon of failing to confirm when lighting a lamp excited quasi-molecular lampbulb as the High frequency power to count 10KHz of prior art.
Fig. 8 is the figure that the result of this phenomenon is observed in the explanation of pattern ground in detail.The growth of discharge plasma is, when beginning to discharge near the power supply 119 of excited quasi-molecular lampbulb 104, the discharge plasma 200 that insulation breakdown produced generates successively from supplying with electric portion 119 sides (order of Fig. 8 (a) and (b), (c), (d)), and expands towards the tube axial direction of excited quasi-molecular lampbulb 104 at leisure.
The phenomenon that discharge plasma is expanded at leisure towards the tube axial direction of excited quasi-molecular lampbulb 104, especially, the total length of excited quasi-molecular lampbulb 104 is longer, or by higher to going into to the pressure of the inclosure gas of the discharge space 118 of excited quasi-molecular lampbulb 104, occurs more significantly.And following phenomenon occurs: the stable power when supplying to stable the lighting a lamp of excited quasi-molecular lampbulb 104 is lower, and then the growth of discharge plasma is more time-consuming, and by power supply, discharge plasma can't extend to excited quasi-molecular lampbulb 104 integral body; For example, shown in Fig. 8 (b), occur from power supply 119 towards tube axial direction can only about 3 one-tenths length the phenomenon of growth discharge plasma.
Carry out treatment with irradiation in this state, then can produce the processed unevenly problem of object being treated.Handle as if waiting until that discharge plasma grows up just to implement towards the tube axial direction of excited quasi-molecular lampbulb 104 fully, though then can avoid inhomogeneous processing, but time-consuming on handling, especially, on the production line of turning off the light that repeats to light a lamp, the problem that reduces output is greatly arranged.
Summary of the invention
The object of the present invention is to provide a kind of excimers lamp light source device and excited quasi-molecular lampbulb ignition method, with the frequency setting that is applied to the High frequency power of excited quasi-molecular lampbulb is than the high 1MHz to 1GHz of existing several 10KHz, and the voltage that applies when excited quasi-molecular lampbulb lit a lamp makes than existing when low, when even the excited quasi-molecular lampbulb that total length is long is lit a lamp, the space of discharge space that also can not be created in discharge plasma is inhomogeneous, and can shorten the time that discharge plasma is distributed to discharge space integral body equably, and, even in the mode of lighting a lamp of turning off the light that repeats to light a lamp, also can carry out the treatment with irradiation of uniform excimers light.
The present invention adopts following means in order to solve above-mentioned problem.
The 1st means are a kind of excimers lamp light source devices, comprising: excited quasi-molecular lampbulb, and the discharge gas that is generated excimers by discharge is filled in the discharge vessel; Lamp circuit portion, supplying with frequency to this excited quasi-molecular lampbulb is the High frequency power of 1MHz to 1GHz and the excited quasi-molecular lampbulb of lighting a lamp; And control part, it is characterized in that, above-mentioned control part is controlled above-mentioned lamp circuit portion, make excited quasi-molecular lampbulb during starts in the high electric power of stable power will be than stable the lighting a lamp that supply to excited quasi-molecular lampbulb the time supply to above-mentioned excited quasi-molecular lampbulb, and when excited quasi-molecular lampbulb be transferred to stablize the state of lighting a lamp after, stable power is supplied to excited quasi-molecular lampbulb.
The 2nd means are a kind of excimers lamp light source devices, it is characterized in that, in the 1st means, above-mentioned control part possesses the detection excited quasi-molecular lampbulb and is transferred to the stable testing agency of lighting a lamp of lighting a lamp, according to the signal of the testing agency of lighting a lamp from this, indication makes the electric power that supplies to excited quasi-molecular lampbulb high power conversions from than stable lighting a lamp the time become the command signal of stable power to send to above-mentioned lamp circuit portion.
The 3rd means are a kind of excimers lamp light source devices, it is characterized in that, in the 1st means, above-mentioned control part possesses the timing mechanism that starts excited quasi-molecular lampbulb and send signal behind certain hour, according to the signal from this timing mechanism, indication makes the electric power that supplies to excited quasi-molecular lampbulb high power conversions from than stable lighting a lamp the time become the command signal of stable power to send to above-mentioned lamp circuit portion.
The 4th means are a kind of excimers lamp light source devices, it is characterized in that, in the 3rd means, above-mentioned certain hour is configured to start excited quasi-molecular lampbulb, roughly consistent to the time that is transferred to till stable the lighting a lamp than the high electric power of stable power with supplying with.
The 5th means are a kind of excimers lamp light source devices, it is characterized in that, in arbitrary means of the 1st means to the 4 means, the inclosure pressure of above-mentioned discharge gas is more than or equal to 10kPa at normal temperatures.
The 6th means are a kind of excited quasi-molecular lampbulb ignition methods, with frequency is that the High frequency power of 1MHz to 1GHz supplies to excited quasi-molecular lampbulb and lights a lamp, above-mentioned excited quasi-molecular lampbulb is that the discharge gas that will be generated excimers by discharge is filled in the discharge vessel, it is characterized in that, above-mentioned excited quasi-molecular lampbulb during starts in the high electric power of stable power will be than stable the lighting a lamp that supply to excited quasi-molecular lampbulb the time supply to excited quasi-molecular lampbulb, after excited quasi-molecular lampbulb is transferred to the stable state of lighting a lamp, stable power is supplied to excited quasi-molecular lampbulb.
The effect of invention
According to excimers lamp light source device of the present invention, make the frequency of the High frequency power that supplies to excited quasi-molecular lampbulb become 1MHz to 1GHz, and the high electric power of stable power will be than stable the lighting a lamp that supply to excited quasi-molecular lampbulb the time supply to excited quasi-molecular lampbulb during starts in, therefore, become can shorten from the starting excited quasi-molecular lampbulb until discharge plasma fully extend to the whole zone of discharge space of excited quasi-molecular lampbulb till the needed time during starts.
Discharge plasma can be extended to quickly and evenly the tube axial direction of the discharge space of excited quasi-molecular lampbulb, therefore even when in the production line of turning off the light that can repeat to light a lamp, being suitable for excited quasi-molecular lampbulb of the present invention, also stable excimers light can be radiated at extensive region instantaneously.
Excited quasi-molecular lampbulb is transferred to after the stable state of lighting a lamp, and stable power is fed into excited quasi-molecular lampbulb, therefore in the stable situation that also can avoid applying superfluous electric power when lighting a lamp, the big inconvenience of heating quantitative change that also can avoid producing excited quasi-molecular lampbulb.
Under the situation that the discharge vessel of excited quasi-molecular lampbulb is made of quartz glass, also can avoid producing the ultraviolet ray distortion of the quartz glass due to the excimers light of desired intensity (ultraviolet light, vacuum-ultraviolet light) not or reduce the inconvenience of the excimers light transmission of quartz glass.
Be provided with and detect the testing agency of lighting a lamp that excited quasi-molecular lampbulb is transferred to the stable state of lighting a lamp, and the electric power that will be supplied to excited quasi-molecular lampbulb according to the detection signal of lighting a lamp of the testing agency of lighting a lamp from this high power conversions from than this stable lighting a lamp the time becomes stable power, therefore can carry out the power supply conversion to excited quasi-molecular lampbulb reliably.
Setting is just started excited quasi-molecular lampbulb is sent signal behind the process certain hour till discharge plasma is created on discharge space integral body equably timing mechanism after supply capability, and the electric power that will be supplied to excited quasi-molecular lampbulb according to the signal from this timing mechanism high power conversions from than this stable lighting a lamp the time becomes stable power, therefore can carry out the power supply conversion to excited quasi-molecular lampbulb reliably.
Therefore the frequency that supplies to the High frequency power of excited quasi-molecular lampbulb is made 1MHz to IGHZ, compare for the situation of the High frequency power of number 10KHz with supplying with frequency, can merge also that have can be with the existing effect that voltage makes low-voltage that applies to excited quasi-molecular lampbulb.
Description of drawings
Fig. 1 is the figure of structure of the excimers lamp light source device of expression the 1st execution mode invention.
Fig. 2 is the figure of the concrete structure example of expression excited quasi-molecular lampbulb.
Fig. 3 is the sequential chart of action of the excimers lamp light source device of expression the 1st execution mode invention.
Fig. 4 is the figure of structure of the excimers lamp light source device of expression the 2nd execution mode invention.
Fig. 5 is the sequential chart of action of the excimers lamp light source device of expression the 2nd execution mode invention.
Fig. 6 is the figure of an example that expression utilizes the surface cleaning device of excimers lamp light source device.
Fig. 7 is the figure of the concrete structure example of expression excited quasi-molecular lampbulb.
Fig. 8 illustrates in existing excited quasi-molecular lampbulb the figure of the process that discharge plasma is grown up.
Embodiment
At first, illustrate and reach as being expressed as follows the longitude and latitude of described each execution mode invention.The result of wholwe-hearted research such as inventor excimers lamp light source device, found that frequency supplied to the excited quasi-molecular lampbulb of large-scale, high output more than or equal to the High frequency power of 1MHz and when lighting a lamp, the electric power that supplies to excited quasi-molecular lampbulb is bigger, at discharge space discharge plasma being grown up does not exist the inhomogeneous of space, can shorten the time that is uniformly distributed into discharge space integral body.
Therefore, in the whole time that reliably generates discharge plasma equably of discharge space is the short time, do not supply to excited quasi-molecular lampbulb if the discharge plasma of discharge space that will be shown in the 8th (b) figure can not become the electric power of the state that generates unevenly, then found to avoid previous described problem.
Though this reason is unclear, can consider as described below.That is, the formed discharge part of discharge gas by in outboard tube 104a, the inside tube 104b of excited quasi-molecular lampbulb, electrode 103a, 103b, the discharge space 118 forms distributed constant circuit.So the current potential of electrode 103a is along with littler away from meeting towards tube axial direction from power supply 119.
When this trend becomes high frequency more than or equal to 1MHz in the frequency that is applied to the high-frequency and high-voltage between electrode 103a, the 103b, become remarkable.So it is apparent that the phenomenon that along tube axial direction discharge plasma is grown up successively from the position of approaching power supply 119 in discharge space also becomes.
Therefore, if increase supply capability to excited quasi-molecular lampbulb, even from power supply 119 towards tube axial direction away from the position, also can in discharge space 118, be enough to produce the electric power of abundance of insulation breakdown and the position of power supply 119 annexes and approximately side by side supply with.And, can consider that the time till discharge space integral body generates discharge plasma really equably can make the short time.
When the frequency that supplies to the High frequency power of excited quasi-molecular lampbulb is existing several 10KHz left and right sides, the current potential of electrode 103a along with from power supply 119 towards tube axial direction away from and the ratio that diminishes is less.So, when supplying with the electric power in order to the excited quasi-molecular lampbulb of lighting a lamp, may in instantaneous time, generate discharge plasma equably in discharge space 118 integral body.
, thus generally to the excited quasi-molecular lampbulb supply capability and when discharge space produced insulation breakdown and is formed with discharge plasma, the impedance discharge that forms the zone of discharge plasma was to reduce.So, in case be formed with discharge plasma, in order to the electric power of keeping discharge plasma, promptly, the stable power when supplying to stable the lighting a lamp of excited quasi-molecular lampbulb, the electric power that the electric power of being supplied with when producing discharge breakdown is low is just passable.
So, wait the knowledge of being found according to the inventor, time till discharge space integral body reliably and equably generates discharge plasma is the short time, the electric power that the discharge plasma of discharge space can not become the state that generates unevenly continues to supply to definitely excited quasi-molecular lampbulb, during stable lighting a lamp after discharge plasma is created on discharge space integral body equably, but excess supply electric power.
That is, when stable lighting a lamp, the electric power bigger than the stable power of keeping the discharge plasma required electric power supplies to excited quasi-molecular lampbulb.At this moment, the heating quantitative change of excited quasi-molecular lampbulb is big, and it is large-scale to make cooling structure become.The electric power of being supplied with is bigger than stable power, so the excimers light intensity is big when supplying with than stable power.So, when the discharge vessel of excited quasi-molecular lampbulb is made of quartz glass, also may produces the ultraviolet ray distortion of the quartz glass due to the excimers light of expectation strength (ultraviolet light, vacuum-ultraviolet light) not or reduce the inconvenience of the excimers light transmission of quartz glass.
Therefore, best, during after supply capability starting excited quasi-molecular lampbulb till discharge plasma is created on discharge space integral body equably, promptly, excited quasi-molecular lampbulb during starts in, time till plasma discharging reliably is created on discharge space integral body equably is the short time, and the electric power that the discharge plasma of discharge space can not become the state that generates unevenly supplies to excited quasi-molecular lampbulb, after discharge plasma is created on discharge space integral body equably, the electric power that supplies to excited quasi-molecular lampbulb is reduced to aforementioned stable electric power.By like this, when stable the lighting a lamp of excited quasi-molecular lampbulb, can obtain desired excimers light intensity.The caloric value of excited quasi-molecular lampbulb also can be suppressed at predetermined value.
Then, use Fig. 1 to Fig. 3 that first execution mode of the present invention is described.
Fig. 1 is the figure of structure of the excimers lamp light source device of expression present embodiment invention.
The excimers lamp light source device of present embodiment be by: excited quasi-molecular lampbulb 7, feed electrical power to excited quasi-molecular lampbulb lamp circuit portion 20, and the controlling organization of the action of control point circuit for lamp 20 be that control part 10 is constituted.At this, best, generally for of the impedance of match point circuit for lamp portion 20 with 7 of excited quasi-molecular lampbulbs, and the match circuit 6 that setting is made of capacitor, inductance between 7 of lamp circuit portion 20 and excited quasi-molecular lampbulbs.
The concrete structure example of excited quasi-molecular lampbulb 7 is shown in Fig. 2.This concrete structure example with before be shown in the identical of Fig. 7, so omit its detailed description.
Control part 10 is promptly detected the testing agency 8 and constituted according to the testing circuit 9 of lighting a lamp of exporting the detection signal of lighting a lamp from the light detecting signal of the testing agency 8 of lighting a lamp of lighting a lamp of state that is created on the discharge space 118 of excited quasi-molecular lampbulb shown in Figure 2 at discharge plasma equably by: some light switch circuit 1, the logical circuit 4 that carries out logic product calculation, the stable state of lighting a lamp that is used to detect excited quasi-molecular lampbulb 7.
The testing agency 8 of lighting a lamp for example is made of institutes such as photoelectricity two utmost points, can export light detecting signal when accepting the light time.As shown in Figure 2, if produce discharge, then except excimers light, also emit visible light, near infrared light at the discharge space 18 of excited quasi-molecular lampbulb 7.Therefore, it can be the excimers light wavelength that testing agency 8 is subjected to the light wavelength of light, also can be visible light, near-infrared light wavelength.
At first, as described in Figure 8, be created on the discharge plasma of the discharge space 118 of excited quasi-molecular lampbulb 7, grow up by a side of the power supply of supplying with from the electric power of lamp circuit portion 20 119.Fasten the pass of the easiness of the practical set of excited quasi-molecular lampbulb 7, the hot countermeasure of distribution etc., and the road 119 that powers as shown in Figure 2 mostly is located at an end side of excited quasi-molecular lampbulb 7.
Therefore, testing agency 8 is configured in the discharge plasma growth and the other end of accessibility excited quasi-molecular lampbulb 7 if will light a lamp, then the moment of detecting from the light of excited quasi-molecular lampbulb 7 in the testing agency 8 of lighting a lamp, can detect the situation that discharge plasma extends to discharge space 118 integral body.
As shown in the drawing, if two light of lighting a lamp testing agency 8 and can detect the two ends of excited quasi-molecular lampbulb 7 are set, then with the location independent ground that power supply road 119 is set, can detect the situation that discharge plasma fully extends to discharge space 118 whole zones.
At this, the frequency range of the high_frequency sine wave signal of sending from function generator 2 is 1MHz to 1GHz.Therefore the frequency range from the High frequency power of enlarger 5 outputs becomes 1MHz to 1GHz.
As discussed previously, in the High frequency power that is supplied in excimers lamp 7, when frequency during less than 1MHz, the voltage that then is applied to excited quasi-molecular lampbulb 7 becomes high voltage, and needs the abundant countermeasure for insulation such as device, and is more undesirable.
When said frequencies surpasses 1GHz, then the electric power transfer structure becomes large-scale.Therefore, best, the frequency range that is fed into the High frequency power of excited quasi-molecular lampbulb 7 in the practicality is 1MHz to 1GHz.
Then, use the sequential chart shown in Fig. 1,2,3, the action of the excimers lamp light source device of present embodiment invention is described.As shown in Figure 2, the testing agency 8 of lighting a lamp is provided with two (81,82) near the both ends of excited quasi-molecular lampbulb 7.
At first, from the some light switch circuit 1 of control part 10, the beginning of excited quasi-molecular lampbulb 7 light a lamp instruction, promptly, initiating signal is sent to the function generator 2 and the logical circuit 4 (S101) of lamp circuit portion 20.Function generator 2 receives initiating signal, and the high_frequency sine wave signal is sent to enlarger 5 (S102).The high_frequency sine wave signal that enlarger 5 receives from function generator 2, and output High frequency power (S103).The electric power that is output is supplied to excited quasi-molecular lampbulb 7 via match circuit 6.
At this, the electric power that amplifies and export by enlarger 5, its electric voltage frequency is 1MHz to 1GHz, in excited quasi-molecular lampbulb 7, is set at discharge plasma and reliably evenly and in short time grows up in the numerical value of discharge space 118 integral body.
Excited quasi-molecular lampbulb 7 is luminous, when the testing agency 81,82 of lighting a lamp detects the light of being emitted by excited quasi-molecular lampbulb 7, then by the testing agency 81,82 of lighting a lamp respectively light detecting signal is sent to the testing circuit 9 of lighting a lamp (S104, S105).Behind all signals that the testing circuit 9 of lighting a lamp receives from the testing agency 81,82 of lighting a lamp, the detection signal of will lighting a lamp is sent to logical circuit 4 (S106).Logical circuit 4 adopt from the initiating signal of a light switch circuit 1 with from the logic product of the detection signal of lighting a lamp of the testing circuit 9 of lighting a lamp gain control signal is sent to enlarger 5 (S107).Enlarger 5 changes magnification ratio according to the gain control signal that is received from the testing circuit 9 of lighting a lamp, and the High frequency power value exported of change (than the dotted line of the S103 zone on the right also).
At this, the electric power that is output from enlarger 5 change magnification ratios, the stable power that when stable the lighting a lamp of excited quasi-molecular lampbulb 7, is supplied to.This stable power for example is configured to can obtain using the required excimers luminous intensity of light processor of excimers light.
Then, use above-mentioned excimers lamp light source device, the relevant comparative experiments result who applies electric power in during starts is described.In the structure of this employed excited quasi-molecular lampbulb with shown in Figure 2 identical.
In experiment,, enclose as the xenon 50kPa of discharge in the lamp of the external diameter 40mm that uses at outboard tube 104a, the length 25cm of tube axial direction with gas as excited quasi-molecular lampbulb.End at the electrode 103b of excited quasi-molecular lampbulb connects power supply 119, the required time of growth of the discharge plasma when measuring the change supply capability.At this, the frequency that supplies to the High frequency power of excited quasi-molecular lampbulb is set to 4MHz.
At first, supply capability to excited quasi-molecular lampbulb in making during starts is 200W, and discharge plasma is extended to when the power supply after the integral body is set at 100W in the discharge space 118, then extend to fully to discharge plasma from starting that the required time (during starts promptly) was 0.4 second till the discharge space 118 whole zones.Power supply is converted to after the 100W, and the state that extends to discharge space 118 whole zones is kept in discharge.That is, can keep the stable state of lighting a lamp that applies electric power 100W.
On the other hand, from when starting, with the electric power that supplies to excited quasi-molecular lampbulb as 100W one regularly, the time that discharge plasma is grown up till discharge space 118 whole zones needed for 3 seconds.Light a lamp after testing agency's expansion, the stable state of lighting a lamp is kept.
Promptly, excited quasi-molecular lampbulb during starts in, when the big electric power 200W of electric power 100W in the time of will be than stable lighting a lamp imposes on excited quasi-molecular lampbulb, with just the electric power of 100W is applied certain situation from starting and compares, confirmed really to lack discharge plasma time till discharge space 118 integral body from start to extending to.
So, excimers lamp light source device according to the present embodiment invention, to supply to the frequency of High frequency power of excited quasi-molecular lampbulb as 1MHz to 1GHz, and the high electric power of stable power will be than stable the lighting a lamp that supply to excited quasi-molecular lampbulb the time supply to excited quasi-molecular lampbulb during starts in, therefore, can shorten from the starting excited quasi-molecular lampbulb until discharge plasma fully extends to the time required till the whole zone of discharge space of excited quasi-molecular lampbulb during starts.
Can make discharge plasma extend to the tube axial direction of the discharge space of excited quasi-molecular lampbulb quickly and evenly, therefore, also has the advantage that instantaneous stable excimers light can be provided even when the production line of turning off the light of can repeating to light a lamp is suitable for excimers lamp light source device of the present invention.
Excited quasi-molecular lampbulb is transferred to after the stable state of lighting a lamp, and stable power is fed into excited quasi-molecular lampbulb, therefore in the stable situation that also can avoid applying superfluous electric power when lighting a lamp, the big inconvenience of heating quantitative change that also can avoid producing excited quasi-molecular lampbulb.
The discharge vessel of excited quasi-molecular lampbulb by the situation that quartz glass constituted under, also can avoid producing the ultraviolet ray distortion of the quartz glass due to the excimers light of expectation strength (ultraviolet light, vacuum-ultraviolet light) not or reduce the inconvenience of the excimers light transmission of quartz glass.
Especially, the testing agency of lighting a lamp that the testing agency 8 of lighting a lamp (81,82) detecting excited quasi-molecular lampbulb and be transferred to the stable state of lighting a lamp is set, constitutes by the testing circuit 9 of lighting a lamp, and, therefore can carry out conversion reliably to the supply capability of excited quasi-molecular lampbulb according to becoming stable power as the electric power that will be supplied to excited quasi-molecular lampbulb high power conversions from the time than stable lighting a lamp from the signal of this testing agency of lighting a lamp.
Be sealing into the inclosure pressure of the discharge gas (for example xenon) of the discharge space of excited quasi-molecular lampbulb, make more than or equal to 10kPa more satisfactory at normal temperatures.If less than 10kPa, then diminish by the excimers luminous intensity that excited quasi-molecular lampbulb took out, there is not practicality.
As mentioned above, if the inclosure pressure of the discharge gas of excited quasi-molecular lampbulb uprises, and is then above-mentioned during starts elongated, but the excited quasi-molecular lampbulb of the application of the invention, even the inclosure pressure of discharge gas also can shorten during starts at normal temperatures more than or equal to 10kPa.
The excimers lamp light source device of present embodiment invention, the frequency that supplies to the High frequency power of excited quasi-molecular lampbulb is made 1MHz to 1GHz, therefore be that the situation of counting the High frequency power of 10KHz is compared with supplying with frequency, also can merge to have and to apply the existing effect that voltage makes low-voltage.
Below, use Fig. 4 and Fig. 5 that the 2nd execution mode of the present invention is described.
Fig. 4 is the figure of structure of the excimers lamp light source device of expression present embodiment invention.
The excimers lamp light source device of present embodiment in the 1st execution mode of the present invention shown in Figure 1, replaces being included in the logical circuit 4 of control part 10, the testing agency 8 of lighting a lamp, the testing circuit 9 of lighting a lamp, and timing circuit 30 is set.Therefore other structures omit explanation corresponding to the structure of same-sign shown in Figure 1.
Timing circuit 30 is receiving the action that picks up counting in the initiating signal that a light switch circuit 1 is sent.After the scheduled time that timing is set in advance, finish timing, and gain control signal is sent to enlarger 5.
Then, use Fig. 4 and sequential chart shown in Figure 5, the action of the excimers lamp light source device of present embodiment invention is described.
At first, by the some light switch circuit 1 of control part 10, make excited quasi-molecular lampbulb 7 begin light a lamp instruction, promptly, initiating signal sends function generator 2 to lamp circuit portion 20, and timing circuit 30 (S111).Function generator 2 receives initiating signal, and the sine wave signal of high frequency is sent to enlarger 5 (S112).The high_frequency sine wave signal that enlarger 5 receives from function generator 2, and the electric power (S113) of output high frequency.The electric power of being exported is applied in to excited quasi-molecular lampbulb 7 via match circuit 6.
At this, by the electric power that enlarger 5 amplifies and exports, its electric voltage frequency is 1MHz to 1GHz, and in excited quasi-molecular lampbulb 7, is set to discharge plasma and reliably evenly and in short time grows up in the numerical value of discharge space 118 integral body.
On the other hand, timing circuit 30 is in the initiating signal that receives from a light switch circuit 1, and action picks up counting.After the scheduled time of timing decision in advance, gain control signal is passed out to enlarger 5 (S114).Enlarger 5 changes magnification ratio according to the gain control signal that receives from timing circuit 30, and changes the High frequency power value of being exported (field on dotted line the right of S113).
At this, the scheduled time that is set in the prior decision of timing circuit 30 is equivalent to, feed electrical power to excited quasi-molecular lampbulb and start discharge plasma after the excited quasi-molecular lampbulb be created on equably till the discharge space integral body during, promptly, time during starts of excited quasi-molecular lampbulb, for example be set at 0.5 second etc.
The electric power that is output from enlarger 5 change magnification ratios is the stable power of being supplied with when stable the lighting a lamp of excited quasi-molecular lampbulb 7.This stable power for example is configured to obtain the excimers luminous intensity required as the light processor that has used the excimers light.
So, even in the excimers lamp light source device of present embodiment invention, also can bring into play the same action effect of excimers lamp light source device with the invention of the 1st execution mode.
Especially, in the present embodiment, setting feed electrical power to discharge plasma after the excited quasi-molecular lampbulb be created on equably till the discharge space integral body through just sending the timing mechanism (timing circuit 30) of signal behind the certain hour, and become stable power according to the electric power that will supply to excited quasi-molecular lampbulb from the signal of this timing mechanism high power conversions from the time than stable lighting a lamp, therefore become the supply capability that can change reliably excited quasi-molecular lampbulb.
According to present embodiment, replace logical circuit 4, the testing agency 8 of the 1st execution mode, the testing circuit 9 of lighting a lamp, and timing circuit 30 is set, so the structure change is easy, device can be made miniaturization.
Even in the present embodiment, same with the 1st execution mode, be sealing into the inclosure pressure of the discharge gas (for example xenon) of the discharge space of excited quasi-molecular lampbulb, make more than or equal to 10kPa more satisfactory at normal temperatures.
In the above-described embodiments, the power supply 119 of high-frequency and high-voltage power supply 105 and electrode 103 is formed at an end of electrode, but is not defined to this, also can be located at long electrode central authorities etc.The advantage that is formed at an end of electrode is to form electrode easily, and the advantage of being located at electrode central authorities is that can to shorten the one-tenth of discharge plasma long-time.
In the present invention, as the discharge gas of excited quasi-molecular lampbulb, except enclosing xenon-133 gas, also can enclose other gases.Light from the single wavelength of excited quasi-molecular lampbulb radiation is determined by the inclosure gas in the discharge vessel, is the light that radiates wavelength 172nm during xenon (Xe); During argon gas (Ar) light of radiation wavelength 126nm; During krypton gas (Kr) light of radiation wavelength 146nm; During the mist of argon gas (Ar) and chlorine (Cl) is the light of radiation wavelength 175nm; During the mist of krypton gas (Kr) and iodine gas (I) is the light of radiation wavelength 191nm; During the mist of argon gas (Ar) and fluorine gas (F) is the light of radiation wavelength 193nm; During the mist of krypton gas (Kr) and iodine gas (I) is the light of radiation wavelength 207nm; During the mist of krypton gas (Kr) and chlorine (Cl) is the light of radiation wavelength 222nm.
Claims (6)
1, a kind of excimers lamp light source device, it comprises: excited quasi-molecular lampbulb, the discharge gas that is generated excimers by discharge is filled in the discharge vessel; Lamp circuit portion, supplying with frequency to this excited quasi-molecular lampbulb is the High frequency power of 1MHz to 1GHz and the excited quasi-molecular lampbulb of lighting a lamp; And control part, it is characterized in that,
Above-mentioned control part is controlled above-mentioned lamp circuit portion, make excited quasi-molecular lampbulb during starts in the high electric power of stable power will be than stable the lighting a lamp that supply to excited quasi-molecular lampbulb the time supply to above-mentioned excited quasi-molecular lampbulb, and stable power supplied to excited quasi-molecular lampbulb after stablizing the state of lighting a lamp when excited quasi-molecular lampbulb is transferred to.
2, excimers lamp light source device as claimed in claim 1, it is characterized in that, above-mentioned control part possesses the detection excited quasi-molecular lampbulb and is transferred to the stable testing agency of lighting a lamp of lighting a lamp, according to the signal of the testing agency of lighting a lamp from this, indication makes the electric power that supplies to excited quasi-molecular lampbulb high power conversions from than stable lighting a lamp the time become the command signal of stable power to send to above-mentioned lamp circuit portion.
3, excimers lamp light source device as claimed in claim 1, it is characterized in that, above-mentioned control part possesses the timing mechanism that starts excited quasi-molecular lampbulb and send signal behind certain hour, according to the signal from this timing mechanism, indication makes the electric power that supplies to excited quasi-molecular lampbulb high power conversions from than stable lighting a lamp the time become the command signal of stable power to send to above-mentioned lamp circuit portion.
4, excimers lamp light source device as claimed in claim 3 is characterized in that, above-mentioned certain hour is configured to start excited quasi-molecular lampbulb, roughly consistent to the time that is transferred to till stable the lighting a lamp than the high electric power of stable power with supplying with.
As each described excimers lamp light source device in the claim 1 to 4, it is characterized in that 5, the inclosure pressure of above-mentioned discharge gas is more than or equal to 10kPa at normal temperatures.
6, a kind of excited quasi-molecular lampbulb ignition method, with frequency is that the High frequency power of 1MHz to 1GHz supplies to excited quasi-molecular lampbulb and lights a lamp, above-mentioned excited quasi-molecular lampbulb is that the discharge gas that will be generated excimers by discharge is filled in the discharge vessel, it is characterized in that
Above-mentioned excited quasi-molecular lampbulb during starts in the high electric power of stable power will be than stable the lighting a lamp that supply to excited quasi-molecular lampbulb the time supply to excited quasi-molecular lampbulb, after excited quasi-molecular lampbulb is transferred to the stable state of lighting a lamp, stable power is supplied to excited quasi-molecular lampbulb.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004305440A JP4586488B2 (en) | 2004-10-20 | 2004-10-20 | Excimer lamp lighting device and excimer lamp lighting method |
| JP305440/2004 | 2004-10-20 |
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| Publication Number | Publication Date |
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| CN1763905A true CN1763905A (en) | 2006-04-26 |
| CN1763905B CN1763905B (en) | 2010-05-05 |
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| CN2005101181081A Active CN1763905B (en) | 2004-10-20 | 2005-10-20 | Inspired quasi molecule lamp igniting device and igniting method |
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| Country | Link |
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| JP (1) | JP4586488B2 (en) |
| KR (1) | KR100911601B1 (en) |
| CN (1) | CN1763905B (en) |
| TW (1) | TW200614316A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101636031A (en) * | 2008-07-23 | 2010-01-27 | 优志旺电机株式会社 | Ultraviolet irradiation device and lighting control method thereof |
| CN102473585A (en) * | 2009-07-17 | 2012-05-23 | 优志旺电机株式会社 | Irradiation device |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP5795233B2 (en) * | 2011-10-14 | 2015-10-14 | 新電元工業株式会社 | Discharge lamp lighting device |
| KR102657557B1 (en) * | 2021-09-23 | 2024-04-15 | (주)선재하이테크 | Ionizer using excimer lamp |
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| JP3326968B2 (en) * | 1994-06-27 | 2002-09-24 | 松下電工株式会社 | Discharge lamp lighting device |
| JPH10223385A (en) * | 1997-02-07 | 1998-08-21 | Toshiba Lighting & Technol Corp | External electrode discharge lamp lighting system and luminaire |
| JP3521731B2 (en) * | 1998-02-13 | 2004-04-19 | ウシオ電機株式会社 | Dielectric barrier discharge lamp light source device |
| JP2001185089A (en) * | 1999-12-28 | 2001-07-06 | Quark Systems Co Ltd | Excimer irradiation device |
| EP1164820A4 (en) * | 1999-08-09 | 2004-05-12 | Ushio Electric Inc | Dielectric barrier discharge lamp apparatus |
| KR100857848B1 (en) * | 2002-05-17 | 2008-09-10 | 삼성전자주식회사 | Back light assembly, method for driving the same, and liquid crystal display having the same |
| JP2004087270A (en) * | 2002-08-26 | 2004-03-18 | Orc Mfg Co Ltd | Excimer lamp and excimer lamp device |
| JP4196649B2 (en) * | 2002-11-19 | 2008-12-17 | ウシオ電機株式会社 | Excimer light source device |
| JP4093065B2 (en) * | 2003-01-17 | 2008-05-28 | ウシオ電機株式会社 | Excimer lamp light emitting device |
-
2004
- 2004-10-20 JP JP2004305440A patent/JP4586488B2/en active Active
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- 2005-08-10 TW TW094127208A patent/TW200614316A/en unknown
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101636031A (en) * | 2008-07-23 | 2010-01-27 | 优志旺电机株式会社 | Ultraviolet irradiation device and lighting control method thereof |
| CN101636031B (en) * | 2008-07-23 | 2013-02-06 | 优志旺电机株式会社 | Ultraviolet irradiation device and lighting control method thereof |
| CN102473585A (en) * | 2009-07-17 | 2012-05-23 | 优志旺电机株式会社 | Irradiation device |
| CN102473585B (en) * | 2009-07-17 | 2016-05-18 | 优志旺电机株式会社 | Irradiation unit |
Also Published As
| Publication number | Publication date |
|---|---|
| KR100911601B1 (en) | 2009-08-07 |
| JP2006120392A (en) | 2006-05-11 |
| JP4586488B2 (en) | 2010-11-24 |
| TW200614316A (en) | 2006-05-01 |
| TWI354314B (en) | 2011-12-11 |
| CN1763905B (en) | 2010-05-05 |
| KR20060051653A (en) | 2006-05-19 |
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