CN101636031B - Ultraviolet irradiation device and lighting control method thereof - Google Patents

Ultraviolet irradiation device and lighting control method thereof Download PDF

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Publication number
CN101636031B
CN101636031B CN2009101646424A CN200910164642A CN101636031B CN 101636031 B CN101636031 B CN 101636031B CN 2009101646424 A CN2009101646424 A CN 2009101646424A CN 200910164642 A CN200910164642 A CN 200910164642A CN 101636031 B CN101636031 B CN 101636031B
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lamp
lighting
tag
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excimer
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CN101636031A (en
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中村雅规
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Ushio Denki KK
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Ushio Denki KK
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like

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  • Condensed Matter Physics & Semiconductors (AREA)
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  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
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  • Circuit Arrangement For Electric Light Sources In General (AREA)
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Abstract

The invention provides an ultraviolet irradiation device and a lighting control method thereof, and an ultraviolet irradiation device and a lighting control method thereof by using proper initial lighting power for lighting according to total lighting time of the light. The total lighting time accumulated of the light, and besides lighting history information, intrinsic electrical properties such as the rated value of initial voltage, rated value of initial frequency, rated value of stable voltage, rated value of stable frequency are recorded on IC tag Ia on the excimer lamp 1. When starting the device, a control part 4 reading the information from the IC tag Ia, and setting applied voltage, frequency etc., of initial lighting to light the lamp in initial time according to total lighting time and the intrinsic electrical properties of the lamp. After initial lighting, transiting to a stable lighting, and proceedinig fixed power control to the power applied on the lamp 1.

Description

The lighting control method thereof of ultraviolet lamp and ultraviolet lamp
Technical field
The invention relates to the ultraviolet lamp of clean etc. Excimer lamp of substrate in a kind of manufacturing process that is used in semiconductor substrate or crystal liquid substrate and the lighting control method thereof of this device, especially, the information that is arranged on the IC tag of Excimer lamp about a kind of foundation is controlled the ultraviolet lamp of ignition device and the lighting control method thereof of this device.
Background technology
Current, in the manufacturing process of semiconductor substrate or crystal liquid substrate, with the clean ultraviolet lamp with the vacuum ultraviolet Excimer lamp of irradiation that uses as purpose of these substrates.
Excimer lamp is for example to radiate the vacuum-ultraviolet light of xenon-133 gas as the wavelength 172nm of luminescent substance, and more excellent than Cooper-Hewitt lamp on the ability of cleaning.
Above-mentioned Excimer lamp is when latter stage in useful life, and then deteriorated along with the quartz glass that consists of luminous tube etc., vacuum ultraviolet activity reduces.So must more renew, but general being difficult to judges whether to reach latter stage in useful life from the outward appearance of Excimer lamp.
At this, motion has at each Excimer lamp IC tag is set, and in the total that this IC tag the is being stored Excimer lamp temporal information of lighting a lamp, makes and can manage the device (for example, with reference to patent documentation 1) that amounts to the time of lighting a lamp.
Figure 12 and Figure 13 are the profiles that the ultraviolet lamp of Excimer lamp is carried in expression.Figure 12 be expression with the profile of the plane sectility of the tubular axis that is parallel to Excimer lamp, Figure 13 is that expression is perpendicular to the profile of the plane sectility of the tubular axis of Excimer lamp.
Shown in figure, ultraviolet lamp is the metal-made housing 101 that inside has circulated inert gas.Below housing 101, be provided with irradiation window 101a, and in the side of housing 101, be provided with for the gas introduction port 101b that imports inert gas, and be used for discharging the gas discharge outlet 101c of inert gas.
In the inside of housing 101, dispose the branched Excimer lamp 100 that tubular axis becomes parallel mode alignment arrangements.Along Excimer lamp 100, the ultraviolet ray that will radiate from Excimer lamp 100 is towards the water guide tubular speculum 102 of object being treated direction reflection, and correspondence is arranged at each Excimer lamp 100.Each Excimer lamp 100 that is provided with speculum 102 is the cooling blocks 103 that for example inside are fixed in the aluminum of the water cooling tube 104 that circulating.
The two ends of the luminous tube 100a that Excimer lamp 100 consists of at the dielectric material by the transmission vacuum-ultraviolet light, be formed with respectively the sealing 100f that buries metal forming 100e underground, and it is inner at luminous tube 100a, coiled type internal electrode 100b is disposed on the tubular axis of luminous tube 100a, and with around the insulator 100d covering internal electrode 100b.In addition, the outer surface at luminous tube 100a disposes netted outer electrode 100c.
At each metal forming 100e, be connected with the outstanding outside lead 100g towards luminous tube 100a foreign side, and the 100g that externally goes between is connected with high voltage supply cable 120c, is provided with high-voltage feedback power terminal 120 in its end.
At housing 101 resin connector 110 is installed, and in this connector 110, is provided with antenna 140.In the end of high voltage supply cable 120c high-voltage feedback power terminal 120 is installed, and in the insulating base of high voltage supply terminal 120, is provided with IC tag 13 again.
Be inserted into above-mentioned connector 110 by the plug with high voltage supply terminal 120, conducting internal electrode 100b and high-frequency lighting power supply (not shown).Be directed to outer electrode 100, though not shown, similarly with the high-frequency lighting power turn-on.
In addition, Excimer lamp is except the structure that is shown in Figure 12 and Figure 13, and for example shown in the patent documentation 3, known have the cuboid type, or known shown in patent documentation 4 the dual pipe type is arranged, and also can use the Excimer lamp of this kind pattern.
Figure 14 is the figure of an example of the expression system configuration that will possess the ultraviolet lamp 10 that the Excimer lamp of above-mentioned IC tag lights a lamp.
Excimer lamp 100 is to possess IC tag 130, and when Excimer lamp 100 was installed, the 21b of IC tag R/W section of control part 21 read information as IC tag 130 by antenna 21c from IC tag 130, for example amounts to and lights a lamp the time.CPU21a is stored in storage part 21d with this information.
And, with 22 pairs of Excimer lamps 100 of high-frequency lighting power supply light a lamp during, have at any time the up-to-date temporal information of lighting a lamp to be added in the total that is stored in storage part 21d and light a lamp the time.
Arrive the time in useful life when this total time of lighting a lamp, then CPU21a sends light a lamp stop signal and the Excimer lamp 100 of turning off the light (with reference to the paragraph 0021,0022 of patent documentation 1) for high-frequency lighting power supply 22.
In addition, at patent documentation 1, also record with the illumination characteristic information that is documented in IC tag 130 and control Excimer lamp 100 (with reference to the paragraph 0023 of patent documentation 1).
In addition, as the light supply apparatus that uses IC tag, motion has by making the information such as the time of lighting a lamp that a plurality of light fixtures have or the number of times of lighting a lamp, and can supply the device (with reference to patent documentation 2) of the information of correct lamp.
Xenon light source is that brightness is not identical respectively, therefore record at patent documentation 2: the specification value of will delivering in advance is recorded in IC tag, and device side reads this delivery specification value and sets optimal lamp current value, makes with the lamp power supply and can control xenon light source (paragraph 0030,0031,0032 of patent documentation 2).
Patent documentation 1: TOHKEMY 2007-123069 communique
Patent documentation 2: TOHKEMY 2003-068478 communique
Patent documentation 3: TOHKEMY 2004-111326 communique
Patent documentation 4: TOHKEMY 2000-048772 communique
Summary of the invention
In order to begin the Excimer lamp of lighting a lamp, need to be than the stable also large electric power of lighting a lamp when lighting a lamp in the early stage.The electric power that should connect when lighting a lamp at this initial stage be because of the manufacture deviation of Excimer lamp different.
For example Excimer lamp is to use the glass component have such as the medium of quartz glass, and its thickness changes to some extent because of manufacture deviation, and because of the change of this thickness, necessary connection electric power was different when the initial stage lit a lamp.So, for Excimer lamp is lit a lamp, it is consistent that the connection electric power the when initial stage of Excimer lamp is lit a lamp and needing most of manufacture deviation are connected electric power, for the connection electric power minimum of manufacture deviation, become superfluous connection electric power, and cause shortening the result in lamp life-span.
That is, Excimer lamp is bad than lighting a lamp property under the cold state, and lighting a lamp property is according to lamp and deviation is very large in addition.So, when lighting a lamp in the early stage, for all lamps of lighting a lamp, must drop into excessive connection electric power, light a lamp forcibly.So, shown in Figure 15 (a), become excessive light when lighting a lamp in the early stage and carry out luminous situation.
Therefore, as described in patent documentation 2, the consideration setting of will delivering is recorded in IC tag in advance, and device side reads this delivery specification value and set the situation of suitable numerical value.
But Excimer lamp is to use high voltage and high-frequency when lighting a lamp, and is not to light a lamp such as patent documentation 2 described xenon-133 gas lamp streaming currents.In addition, got across through the inventor's wholwe-hearted effort, then Excimer lamp is process along with the time of lighting a lamp (total is lighted the time) as can be known, and this initial stage necessary electric power of lighting a lamp is different.
That is, the lamp total of lighting a lamp time initial stage of Excimer lamp of the 200 hours required electric power of lighting a lamp for example of lighting a lamp as can be known, the total of lighting a lamp with lamp is lit a lamp, and the time, for example initial stage of Excimer lamp of 1000 hours required electric power of lighting a lamp was different.
So have the IC tag of Excimer lamp, only set to be used for the electric power that the initial stage lights a lamp, and can't to light a lamp according to light a lamp suitable electric power initial stage of carrying out of not identical Excimer lamp of time of total.
In addition, also can consider to utilize the Excimer lamp of the data of IC tag to be installed on device, or be equipped with at other and install employed lamp.In this situation, also can not light a lamp with the connection electric power initial stage of carrying out of surplus, and expectation was lit a lamp with the suitable electric power initial stage of carrying out.
The present invention finishes in view of above-mentioned item, the objective of the invention is to be to provide the control method of a kind of ultraviolet lamp and this device, not identical lamp of time also can be lit a lamp with the electric power of lighting a lamp of suitable initial stage even the total of lamp is lit a lamp, in addition, even can't utilize the data of IC tag, or the situation of installing employed lamp at other is installed, also can light a lamp at the initial stage of carrying out with suitable electric power within the possible range.
In the present invention, be located at the IC tag of lamp, except the total of the aggregate-value of time of lighting a lamp of this lamp is lit a lamp the time, beyond the information of the historical information of lighting a lamp etc., also recording intrinsic electrical characteristics value on this lamps of starting voltage setting, initial frequency setting, burning voltage setting, stabilized frequency setting etc.
And, during starting device, read above-mentioned information from IC tag, and according to the total of the lamp intrinsic electrical characteristics value on time and this lamp of lighting a lamp, set the voltage that puts on lamp, frequency etc. when lighting a lamp in the early stage and the lamp initial stage of carrying out is lit a lamp.
Thus, consider the deviation of lamp, use through state, just can carry out the action of lighting a lamp of initial stage that each lamp was suitable for.So, shown in Figure 15 (b), can suppress superfluous light, and the light that can not send out excessive when shown in Figure 15 (a), lighting a lamp in the early stage.
That is, in the present invention, solve as follows above-mentioned problem.
(1) a kind of ultraviolet lamp has: the IC tag read/write unit that the information from the IC tag that is arranged at Excimer lamp is read and the information of giving IC tag is write; The power supply of lighting a lamp of powering to Excimer lamp: and the control part that lighting a lamp of Excimer lamp controlled, the ultraviolet lamp that the Excimer lamp with IC tag is installed is characterized as,
The control part of above-mentioned ultraviolet lamp has: identifying unit, when Excimer lamp is installed in this ultraviolet lamp, by carrying out by the access of above-mentioned IC tag read/write unit for IC tag, determine whether and can write from the IC tag reading information and to IC tag, or no readable information and have the actual operation of lighting a lamp of this ultraviolet lamp; The 1st setup unit, according to the information that is stored in above-mentioned IC tag, the setting initial stage condition of lighting a lamp; The 2nd setup unit according to the information that is stored in above-mentioned IC tag, is set the stable condition of lighting a lamp; Updating block upgrades the condition of lighting a lamp of above-mentioned initial stage according to the total time of lighting a lamp of this Excimer lamp and reaches the stable condition of lighting a lamp; Memory cell, the condition of lighting a lamp of the above-mentioned initial stage that storage is updated reaches the stable condition of lighting a lamp.
The control unit of lighting a lamp, carry out following operation:
Control part at above-mentioned ultraviolet lamp, the result of determination of above-mentioned identifying unit is for from the IC tag readable information and this ultraviolet lamp is unactual lights a lamp during operation, then according to the initial stage that is set by above-mentioned the 1st setup unit condition of lighting a lamp, this Excimer lamp initial stage of carrying out is lit a lamp, after lighting a lamp in the early stage, the stable condition of lighting a lamp that use is set by above-mentioned the 2nd setup unit transits to stable lighting a lamp with this Excimer lamp.
The result of determination of above-mentioned identifying unit is for from the IC tag readable information and have that this ultraviolet lamp is actual lights a lamp during operation, then according to the initial stage that the is stored in said memory cells condition of lighting a lamp, this Excimer lamp initial stage of carrying out is lit a lamp, after lighting a lamp in the early stage, use is stored in the stable condition of lighting a lamp of said memory cells, and this Excimer lamp is transitted to stable lighting a lamp.
The result of determination of above-mentioned identifying unit is from IC tag can't reading information the time, then by the initial stage as safety value of the prior defined condition of lighting a lamp, this Excimer lamp initial stage of carrying out is lit a lamp, after lighting a lamp in the early stage, use the stable condition of lighting a lamp as safety value of prior defined, this Excimer lamp is transitted to stable lighting a lamp.
(2) in above-mentioned (1), above-mentioned the 1st setup unit is according to the starting voltage setting and the initial frequency setting that are stored in above-mentioned IC tag, set starting voltage desired value and the initial stage frequency targets value of lighting a lamp, as the condition of lighting a lamp of above-mentioned initial stage, above-mentioned the 2nd setup unit is according to the burning voltage setting and the stabilized frequency setting that are stored in above-mentioned IC tag, set burning voltage desired value and stabilized frequency desired value, as the aforementioned stable condition of lighting a lamp.
Above-mentioned updating block is to light a lamp the time according to the total of this Excimer lamp, upgrades above-mentioned starting voltage desired value, initial stage light a lamp frequency targets value, burning voltage desired value and stabilized frequency desired value,
Said memory cells is to store light a lamp frequency targets value, burning voltage desired value and stabilized frequency desired value of the above-mentioned starting voltage desired value, the initial stage that are updated.
In addition, the above-mentioned control unit of lighting a lamp carries out following operation:
In the result of determination of above-mentioned identifying unit for from the IC tag readable information and this ultraviolet lamp is unactual lights a lamp during operation, according to the above-mentioned starting voltage desired value that is set by the 1st setup unit and the initial stage frequency targets value of lighting a lamp, this Excimer lamp initial stage of carrying out is lit a lamp, after lighting a lamp in the early stage, burning voltage desired value and stabilized frequency desired value that use is set by above-mentioned the 2nd setup unit transit to stable lighting a lamp with this Excimer lamp.
Result of determination at above-mentioned identifying unit is from the IC tag readable information, and have that this ultraviolet lamp is actual lights a lamp during operation, then according to the starting voltage desired value that is stored in said memory cells, the initial stage frequency targets value of lighting a lamp, this Excimer lamp initial stage of carrying out is lit a lamp, after lighting a lamp in the early stage, use is stored in burning voltage desired value and the stabilized frequency desired value of said memory cells, this Excimer lamp is transitted to stable lighting a lamp, the result of determination of above-mentioned identifying unit is from IC tag can't reading information the time, then by starting voltage safety value and the initial frequency safety value as the safety value that set in advance, this Excimer lamp initial stage of carrying out is lit a lamp, after lighting a lamp in the early stage, use burning voltage safety value and the stabilized frequency safety value as the safety value that set in advance, this Excimer lamp is transitted to stable lighting a lamp.
(3) a kind of lighting control method thereof of ultraviolet lamp, to possess: read/write the people unit from the information of the II C label of being located at Excimer lamp, and the lighting control method thereof of the ultraviolet lamp of the control part of lighting a lamp of control Excimer lamp, it is characterized by:
The control part of above-mentioned ultraviolet lamp, when Excimer lamp is installed in this ultraviolet lamp, above-mentioned Excimer lamp has IC tag, whether can read/writing information according to this IC tag differentiation, from the IC tag of this Excimer lamp can read/during writing information, then obtain the information that is stored in IC tag, according to from the obtained information of IC tag, differentiate the actual operation of lighting a lamp of this ultraviolet lamp have or not this Excimer lamp, carry out following (A) to the step of (C) according to above-mentioned differentiation result:
(A) from the IC tag readable information, and this ultraviolet lamp is unactual lights a lamp during operation, according to the information that is stored in above-mentioned IC tag, and the setting initial stage condition of lighting a lamp, and according to the initial stage that this is set condition of lighting a lamp, lit a lamp at this Excimer lamp initial stage of carrying out.
According to the information that is stored in above-mentioned IC tag, set the stable condition of lighting a lamp, the initial stage is used this stable condition of lighting a lamp that is set after lighting a lamp, and makes this Excimer lamp transit to stable lighting a lamp.
(B) from the IC tag readable information, and have that this ultraviolet lamp is actual lights a lamp during operation, according to the information relevant with this Excimer lamp that is stored in this ultraviolet lamp and/or be stored in the information of above-mentioned IC tag, the setting initial stage condition of lighting a lamp, according to this initial stage that is set condition of lighting a lamp, lit a lamp at this Excimer lamp initial stage of carrying out.
According to the information relevant with this Excimer lamp that is stored in this ultraviolet lamp and/or be stored in the information of above-mentioned IC tag, set the stable condition of lighting a lamp, initial stage is used this stable condition of lighting a lamp that is set after lighting a lamp, and makes this Excimer lamp transit to stable lighting a lamp.
(C) from IC tag can't reading information the time, the initial stage as safety value of the setting prior defined condition of lighting a lamp by the condition of lighting a lamp as this initial stage of this safety value, lights a lamp this Excimer lamp initial stage of carrying out.
Set the stable condition of lighting a lamp as safety value of prior defined, the initial stage is used the condition of should stable lighting a lamp as safety value after lighting a lamp, and makes this Excimer lamp transit to stable lighting a lamp.
(4) in the step of (A) of above-mentioned (3), from the IC tag readable information, the not actual operation of lighting a lamp of this ultraviolet lamp, other devices are actual lights a lamp during operation and have, the light a lamp information of intrinsic electrical characteristics of time and this Excimer lamp of the total of then using expression to be stored in IC tag, carry out the setting initial stage condition of lighting a lamp, and set the stable condition of lighting a lamp.
(5) in above-mentioned (3), (4) (A), (B) in the step, according to the starting voltage setting that is stored in above-mentioned IC tag, initial frequency setting and/or the information relevant with this Excimer lamp that is stored in this ultraviolet lamp, set starting voltage desired value and the initial stage frequency targets value of lighting a lamp, as the condition of lighting a lamp of above-mentioned initial stage, as the aforementioned stable condition of lighting a lamp, according to the burning voltage setting that is stored in above-mentioned IC tag, stabilized frequency setting and/or the information relevant with this Excimer lamp that is stored in this ultraviolet lamp, set burning voltage desired value and stabilized frequency desired value, in the step of above-mentioned (C), setting is as starting voltage safety value and the initial frequency safety value of safety value, as the condition of lighting a lamp of above-mentioned initial stage, as the aforementioned stable condition of lighting a lamp, set burning voltage safety value and the stabilized frequency safety value of the safety value of prior defined.
(6) in (A) of above-mentioned (5) and step (B), according to the information that is stored in above-mentioned IC tag and/or the information relevant with this Excimer lamp that is stored in this ultraviolet lamp, obtain as follows above-mentioned starting voltage desired value and the initial stage frequency targets value of lighting a lamp.
(a) obtain corresponding to the light a lamp starting voltage correction value of time of the total of this Excimer lamp.
(b) starting voltage correction value and starting voltage setting are carried out computing, and obtain the starting voltage desired value.
(c) obtain corresponding to initial stage of this starting voltage desired value of obtaining some modulation frequency correction value.
This some modulation frequency correction value and initial frequency setting are carried out computing at initial stage, and the initial stage of the obtaining frequency targets value of lighting a lamp.
(7) in (A) of above-mentioned (5) and step (B), according to the information that is stored in above-mentioned IC tag and/or the information relevant with this Excimer lamp that is stored in this ultraviolet lamp, obtain in such a way aforementioned stable voltage-target and stabilized frequency desired value.
(a) obtain corresponding to the light a lamp point of safes modulating voltage correction value of time of the total of this Excimer lamp.
(b) point of safes modulating voltage correction value and burning voltage setting are carried out computing, and obtain the burning voltage desired value.
(c) obtain point of safes modulation frequency correction value corresponding to this burning voltage desired value of obtaining.
This point of safes modulation frequency correction value and stabilized frequency setting are carried out computing, and obtain the stabilized frequency desired value.
(8) in above-mentioned (3) in (7), from the IC tag readable information and information can be write IC tag the time, above-mentioned control part is when turning off the light Excimer lamp, renewal is arranged at the total of the IC tag of this Excimer lamp and lights a lamp the time, and record the situation of using actual job (Japanese: real Performance) at this ultraviolet lamp, be used for identifying the information of above-mentioned Excimer lamp in the storage of this ultraviolet lamp, and the starting voltage desired value when next time lighting a lamp, the initial stage frequency targets value of lighting a lamp, burning voltage desired value and stabilized frequency desired value.
In the present invention, can obtain following effect.
(1) lights a lamp the time based on the total up to now of this lamp that is stored in the IC tag that is arranged on lamp, and the intrinsic electrical characteristics value of this lamp, lamp is lit a lamp, connect the situation in lamp when the initial stage that therefore is suppressed at lights a lamp power surplus, and can prevent from shortening the lamp life-span.
In addition, set in advance the electrical characteristics value that electric power is not input to the safety of lamp not superfluously, and can't be from the IC tag reading information time, by based on above-mentioned safe electrical characteristics value lamp being lit a lamp, even for example do not possess the lamp of IC tag, also can limit and connect electric power and lamp can be lit a lamp, and can prevent from shortening the lamp life-span.
(2) expression is had or not the data of the actual operation of lighting a lamp of this device be recorded in IC tag, and the electrical characteristics value that will be installed on the lamp of device is stored in the storage part of this device, thus, when lighting a lamp, judge from the record data of IC tag whether this lamp has the actual operation of lighting a lamp this device, actual lighting a lamp during operation arranged, then can obtain the data of initial stage when this lamp is lit a lamp from the storage part of this device.
So, being directed to each lamp, even the processing time in the time of can lighting a lamp at the shortening initial stage is the lamp that is installed in this device during for most, also starting device promptly.
Description of drawings
Fig. 1 is the figure of system configuration of the ultraviolet lamp of expression embodiments of the present invention;
Fig. 2 is the functional block diagram of the light supply apparatus of expression embodiments of the present invention;
Fig. 3 is the flow chart of summary of processing of control part of the ultraviolet lamp of expression embodiments of the present invention;
Fig. 4 is expression transits to the stable processing till moving of lighting a lamp of lamp from the starting of device flow chart (1);
Fig. 5 is expression transits to the stable processing till moving of lighting a lamp of lamp from the starting of device flow chart (2);
Fig. 6 is after expression is lit a lamp, until the flow chart that the renewal of the internal data between turning off the light is processed;
Fig. 7 is the flow chart that expression is turned off the light and processed;
Fig. 8 is the flow chart that the renewal of the data of expression when turning off the light is processed;
Fig. 9 is the figure of an example of expression voltage accuracy table;
Figure 10 is the figure of an example of expression frequency correction chart;
Figure 11 (a) and Figure 11 (b) are the figure of situation of the split pole of expression explanation Excimer lamp;
Figure 12 is the figure (with the profile of the plane sectility that is parallel to tubular axis) of the structure of the expression ultraviolet lamp that carries Excimer lamp;
Figure 13 is the figure (with the profile perpendicular to the plane sectility of tubular axis) of the formation of the expression ultraviolet lamp that carries Excimer lamp;
Figure 14 is the figure of system configuration of the ultraviolet lamp of the expression Excimer lamp that will possess IC tag;
Figure 15 (a) and Figure 15 (b) are the figure of the illumination change when lighting a lamp at the expression initial stage.
(main element symbol description)
1: lamp (Excimer lamp)
The 1a:IC label
2: the power supply of lighting a lamp
3: transformer
4: control part
4a: identifying unit
4b: the first setup unit
4c: the second setup unit
4d: updating block
4e: the control unit of lighting a lamp
4f: accumulativa timer
4g: the initial stage timer of lighting a lamp
4h: the timer of turning off the light
10: ultraviolet lamp
11：CPU
12:IC label R/W section
13: storage part
13a: memory (RAM)
13b: memory (ROM)
13c: memory (EEPROM)
14: antenna
The 16:A/D converter
The 17:D/A converter
Embodiment
Fig. 1 is the figure of system configuration of the ultraviolet lamp of expression one embodiment of the present invention.
Ultraviolet lamp 10 of the present invention has: have the Excimer lamp (hereinafter referred to as lamp) 1 that can input the IC tag 1a of recorded information with noncontact, be used for to the high-tension high-frequency lighting power supply 2 of lamp 1 supply high frequency, be arranged at the transformer 3 of the outlet side of high-frequency lighting power supply 2, and the control part of lighting a lamp 4 of control lamp 1.
Control part 4 comprises: the arithmetic processor (CPU) 11 of carrying out the calculation process of lighting a lamp of control lamp 1, storage part 13, and be used for and IC tag 1a between carry out the transmitting-receiving of data antenna 14, the IC tag R/W section 12 of the data transmit-receive between control and the IC tag 1a, A/D converter 16, and D/A converter 17.A/D converter 16 is the signal from high-frequency lighting power supply 2 is transformed into digital signal and sends to CPU 11, and D/A converter 17 is the digital signal conversion from CPU 11 to be become analog signal and send the tremendously high frequency power supply 2 of lighting a lamp.
Above-mentioned storage part 13 has: read-write volatile memory (RAM 13a), and read special-purpose nonvolatile memory (ROM 13b), and rewritable nonvolatile memory (EEPROM 13c), store formula or data.
At the ROM of storage part 13 13b, record voltage correction chart Tv or frequency correction chart Tf etc., this voltage correction chart Tv or frequency correction chart Tf are used for set basis and amount to the voltage-target of the time of lighting a lamp to the initial stage that lamp 1 is supplied with when lighting a lamp, or the initial frequency desired value etc.Record the voltage-target of initial stage when lighting a lamp, the information of initial frequency desired value etc. at EEPROM 13c.
Above-mentioned Excimer lamp 1 is the discharge gas that xenon-133 gas etc. is arranged such as inclosure, and penetrates the vacuum-ultraviolet light of wavelength 172nm.IC tag 1a is arranged at each lamp, records the intrinsic data of this lamp such as amounting to the time T s that lights a lamp.
As described below, the CPU11 of control part 4 is that Excimer lamp is when being installed on this ultraviolet lamp 10, determine whether from IC tag 1a and can read/writing information, or judge when readable information at this ultraviolet lamp whether actual lighting a lamp during operation is arranged, in the time can carrying out read/write from the information of IC tag, according to the information that is recorded in IC tag 1a, the setting initial stage condition of lighting a lamp reaches the stable condition of lighting a lamp, and after according to this 1 initial stage of carrying out of Excimer lamp being lit a lamp, transit to stable lighting a lamp.In addition, in the time of can't be from IC tag 1a reading information, then by the condition of lighting a lamp as the initial stage of the safety value that sets in advance, the stable condition of lighting a lamp, with standard divide light a lamp in 1 initial stage of carrying out of lamp after, transit to stable lighting a lamp.
At this, synthetically represent employed various data in the present embodiment.These data are for example to be stored in to read special-purpose nonvolatile memory (ROM 13b), rewritable nonvolatile memory (EEPROM 13c), or be stored in as required and can read the memory (RAM 13a) that writes
In addition, these data storage positions are suitably to change, for example ROM can be set yet, and all data are stored in EEPROM, or also can be stored in advance other nonvolatile memory or disk, and when carrying out, be deployed in RAM, when finishing, be stored in nonvolatile memory or medium.
The total time T s that lights a lamp: the time accumulated value of lighting a lamp that is stored in the lamp of IC tag.
Intrinsic number (consecutive number): the number that individually is set in each Excimer lamp of manufacturing.
The historical information of lighting a lamp: the information that has or not the actual operation of lighting a lamp.
Device information: be mounted and the information of the device of lighting a lamp.
Starting voltage setting Vfk: before lamp delivery, set in advance and be stored in this lamp of IC tag intrinsic light a lamp that the initial stage lamp applies magnitude of voltage.
Initial frequency setting Ffk: before lamp delivery, set in advance and be stored in this lamp of IC tag intrinsic light a lamp that the initial stage lamp applies frequency.
Starting voltage desired value Vfm: by the correction value of voltage correction chart and starting voltage setting Vfk computing, in fact put on the initial stage of the lighting a lamp lamp voltage value of this lamp, or the lamp that sets by starting voltage safety value Vfs applies magnitude of voltage.
Initial frequency desired value Ffm: by the correction value of frequency correction chart and initial frequency setting Ffk computing, in fact put on the initial stage of the lighting a lamp modulation frequency of this lamp, or the lamp that sets by initial frequency safety value Frs applies frequency.
Burning voltage setting Vtk: the lamp when setting in advance and being stored in intrinsic stable the lighting a lamp of this lamp of IC tag before lamp delivery applies magnitude of voltage.
Stabilized frequency setting Ftk: the lamp when setting in advance and being stored in intrinsic stable the lighting a lamp of this lamp of IC tag before lamp delivery applies frequency.
Burning voltage desired value Vtm: by the correction value of voltage correction chart and burning voltage setting Vtk computing in fact put on stable the lighting a lamp of this lamp the time lamp apply magnitude of voltage, or the lamp of setting by burning voltage safety value Vts applies magnitude of voltage.Following, be also referred to as a modulating voltage.
Stabilized frequency desired value Ftm: the lamp that is set by correction value and the burning voltage desired value Vtm of frequency correction chart applies frequency, or the lamp of being set by stabilized frequency safety value Fts applies frequency.Following, be also referred to as a modulation frequency.
Starting voltage safety value Vfs: the initial stage of considering the safety of the lamp lamp of lighting a lamp applies magnitude of voltage (minimum in the voltage that puts on the lamp initial stage of lighting a lamp when considering manufacture deviation).
Initial frequency safety value Ffs: the initial stage of considering the safety of the lamp modulation frequency (minimum in the frequency that puts on the lamp initial stage of lighting a lamp when considering manufacture deviation) of lighting a lamp.
Burning voltage safety value Vts: apply magnitude of voltage (putting on when considering manufacture deviation minimum in voltage when lamp is stable lights a lamp) when considering stable the lighting a lamp of safety of lamp.
Stabilized frequency safety value Fts: the frequency when considering stable the lighting a lamp of safety of lamp (putting on when considering manufacture deviation minimum in frequency when lamp is stable lights a lamp).
Voltage correction chart Tv: the corresponding table that amounts to the time of lighting a lamp and correction value
Frequency correction chart Tf: lamp applies the corresponding table of magnitude of voltage and correction value.
Fig. 2 is the functional block diagram of the light supply apparatus of expression an embodiment of the invention, and the functional representation that the processing that will be carried out by the CPU11 at control part 4 realizes is as block diagram.
At the IC tag 1a that is located at lamp 1, amount to light a lamp time T s, intrinsic number (consecutive number), the historical information of lighting a lamp, device information, starting voltage setting Vfk, initial frequency setting Ffk, burning voltage setting Vtk and stabilized frequency setting Ftk as record above-mentionedly, IC tag R/W section 12 is as above-mentionedly via antenna 14, read the above-mentioned data that are recorded in above-mentioned IC tag 1a, be stored in storage part 13 as the IC tag data.
The identifying unit 4a of control part 4, that lamp 1 is when being installed in ultraviolet lamp, determine whether the read/write from IC tag that to carry out IC tag R/W section 12, or whether can carry out reading and having an actual operation etc. of lighting a lamp of this ultraviolet lamp of information.
At this, can consider following (a) to the example of (d) at the lamp 1 that is installed in ultraviolet lamp, and identifying unit 4a judges that the lamp 1 that is installed in device is the lamp of which kind, and give the control unit 4e that lights a lamp with result of determination.
(a) can't carry out lamp from the read/write of IC tag 1a
This situation is in the unserviceable situation of the data of IC tag 1a, and the data of IC tag 1a are to utilize.
In addition, when the read/write that can carry out from IC tag, following situation is arranged then.
(b) from the lamp of untapped new product
This situation for the historical information of lighting a lamp represents situation without the actual operation of lighting a lamp, is 0 and amount to the time T s that lights a lamp.The data that are stored in starting voltage setting Vfk, the initial frequency setting Ffk etc. of IC tag 1a are to use.
(c) be not used at this ultraviolet lamp, but the lamp of the actual operation of lighting a lamp is arranged
This situation, the history information table of lighting a lamp are shown with the actual operation of lighting a lamp, and device information is to be illustrated in the situation that this ultraviolet lamp is not used, and amounting to the time T s that lights a lamp is more than 0.
(d) lamp that is used at this ultraviolet lamp
This situation, the history information table of lighting a lamp are shown with the actual operation of lighting a lamp, and device information is illustrated in the situation that this ultraviolet lamp is used, and amounting to the time T s that lights a lamp is more than 0.In addition, the situation of this example, the data the when last time is used this lamp are stored in the storage part 13 in this ultraviolet lamp, and can read with the intrinsic number of lamp.
The 1st setup unit 4b is according to the information setting initial stage that the is stored in IC tag 1a condition of lighting a lamp, and the 2nd setup unit 4c is according to the stable condition of lighting a lamp of the information setting that is stored in IC tag 1a.
Namely, the 1st setup unit 4b, the voltage correction chart that sets according to the time etc. of being lit a lamp by total and the correction value and the starting voltage setting Vfk, the initial frequency setting Ffk that are recorded in IC tag 1a of frequency correction chart, set starting voltage desired value Vfm and initial frequency desired value Ffm, as the condition of lighting a lamp of above-mentioned initial stage.
In addition, the 2nd setup unit 4c, the voltage correction chart that sets according to the time etc. of being lit a lamp by total and the correction value and the burning voltage setting Vtk and the stabilized frequency setting Ftk that are recorded in IC tag 1a of frequency correction chart, set burning voltage desired value Vtm and stabilized frequency desired value Ftm, as the aforementioned stable condition of lighting a lamp.
In addition, have according to the total time of lighting a lamp of this Excimer lamp and upgrade the light a lamp updating block 4d of condition and the stable condition of lighting a lamp of above-mentioned initial stage, light a lamp condition and the stable condition of lighting a lamp of the above-mentioned initial stage that is updated is to be stored in memory cell 13.
That is, updating block 4d upgrades above-mentioned starting voltage desired value Vfm, initial frequency desired value Ffm, point of safes modulating voltage desired value Vtm and stabilized frequency desired value Ftm according to the total of the lamp 1 time T s that lights a lamp.
In addition, accumulativa timer 4f is the time that stored count lamp 1 is lit a lamp, and above-mentioned updating block 4d upgrades the total that is stored in storage part 13 and lights a lamp the time whenever reaching the fixed cumulative time.This total that is updated time T s that lights a lamp when being the action of arresting stop, is written to the IC tag 1a that is located at lamp 1.
The control unit 4e that lights a lamp is that the result of determination of identifying unit 4a is from IC tag 1a readable information, this ultraviolet lamp actual light a lamp [above-mentioned (b) during operation not, (c) example], according to the initial stage that is set by above-mentioned the 1st setup unit 4b condition of lighting a lamp, namely according to starting voltage desired value Vfm and initial frequency desired value Ffm, this Excimer lamp initial stage of carrying out is lit a lamp, after initial stage lights a lamp, the stable condition of lighting a lamp that use is set by above-mentioned the 2nd setup unit 4c, namely use burning voltage desired value Vtm and stabilized frequency desired value Ftm, make lamp 1 transit to stable lighting a lamp.
In addition, the result of determination of identifying unit 4a is from IC tag 1a readable information, this ultraviolet lamp actual light a lamp [example of above-mentioned (d)] during operation is arranged, according to the initial stage that is stored in memory cell 13 condition of lighting a lamp, namely according to starting voltage desired value Vfm and the initial stage frequency targets value Ffm that lights a lamp, 1 initial stage of carrying out of lamp is lit a lamp, after initial stage lights a lamp, use is stored in the stable condition of lighting a lamp of memory cell 13, namely use burning voltage desired value Vtm and stabilized frequency desired value Ftm, lamp 1 is transitted to stable lighting a lamp.
Have again, the result of determination of identifying unit 4a, for can't reading out data from IC tag 1a the time [example of above-mentioned (a)], with the initial stage as safety value of setting the in advance condition of lighting a lamp, be that initial stage safety value Vfs and initial frequency safety value Ffs light a lamp to 1 initial stage of carrying out of lamp as starting voltage desired value Vfm and initial frequency desired value Ffm, after initial stage lights a lamp, with the stable condition of lighting a lamp as safety value of setting in advance, namely, with set in advance as the burning voltage safety value Vts of safety value and stabilized frequency safety value Ft s as burning voltage desired value Vtm and stabilized frequency desired value Ftm, make lamp 1 transit to stable lighting a lamp.
The control unit 4e that lights a lamp is control high-frequency lighting power supply 2, and control is supplied in voltage, the frequency of lamp 1.That is, detect the voltage and the lamp current that are applied in lamp 1, and deliver to the control unit 4e that lights a lamp of control part 4 from the power supply 2 of lighting a lamp.In addition, the voltage, the electric current that detect at the power supply 2 of lighting a lamp are analog signals, and this analog signal is after being transformed into digital signal by the A/D converter as described above, is sent to the CPU11 of control part 4.
The control unit 4e that lights a lamp of control part 4 is when 1 initial stage of carrying out of lamp of lighting a lamp is lit a lamp, be that light a lamp at above-mentioned initial stage frequency targets value Ffm, voltage is that the voltage of above-mentioned starting voltage desired value Vfm puts on lamp 1 with frequency, and with the initial stage light a lamp that timer 4g sets during, make the action of lighting a lamp of 1 initial stage of carrying out of lamp.In addition, the frequency targets value Ffm that lights a lamp is about the taller 70kHz of frequency during than stable lighting a lamp the above-mentioned initial stage.
After the initial stage of lamp 1 lit a lamp, the control unit 4e that lights a lamp was as initial value, is aforementioned stable frequency targets value Ftm with frequency, and voltage to be the voltage of burning voltage desired value Vtm put on lamp 1, and transit to stable lighting a lamp.Frequency when in addition, beginning stable lighting a lamp is that frequency targets value Ftm is about 50kHz.
Light a lamp stable, carry out the fixing control of electric power.At this moment, at first, as initial value, and control frequency is so that be supplied in the electric power of lamp and become necessarily with voltage, frequency.
That is, the control unit 4e that lights a lamp calculates the electric power that is supplied in lamp from electric current according to voltage, electric current that high-frequency lighting power supply 2 transmits, and the electric power computing of calculating is become consistent with modulating voltage and the frequency of the target power that sets in advance.This modulating voltage and frequency are as voltage instruction, frequency instruction and be sent the power supply 2 of lighting a lamp.
The power supply 2 of lighting a lamp is according to this voltage instruction, frequency instruction driving voltage, the frequency of lamp 1 to be controlled.
Thus, the electric power that is supplied in lamp 1 is controlled so as to unanimously in target power, and lamp 1 is to light a lamp with the illumination according to target power.
In addition, the illumination of the vacuum-ultraviolet light that Excimer lamp 1 is emitted, be by various main causes along with the time through and reduce.As described below, reduce in order to revise this illumination, as required, also can make according to the total time of lighting a lamp of lamp the point of safes modulating voltage that increases lamp.
In addition, when turning off the light, make the timer 4h action of turning off the light, until turn off the light timer 4h till then during, the action of turning off the light as described below
In the ultraviolet lamp of present embodiment, as above-mentionedly according to being stored in electrical characteristics value and the cumulative time of IC tag, light a lamp condition, the stable condition of lighting a lamp of the initial stage of setting lamp, and lamp is lit a lamp, thereby connect in lamp, and can suppress the contracting lamp life-span. with suppressing power surplus when lighting a lamp in the early stage
In addition, for example do not possessing the lamp of IC tag, or have in the inconvenient lamp reading IC tag, the mode that electric power can not inputted superfluously, light a lamp condition and the stable condition of lighting a lamp of the initial stage as the connection electric power of safety value of being set in advance by restriction, lamp is lit a lamp, even therefore do not possess the lamp of IC tag, also can not shorten the lamp life-span.
In addition, judge the actual operation of lighting a lamp of this ultraviolet lamp, and actual lighting a lamp during operation arranged, then utilize the data that are stored in the device, the initial stage of carrying out lights a lamp, stable lighting a lamp, so needn't carry out again computing during starting device.So the initial stage of carrying out lights a lamp rapidly.
Below, the action that is directed to the light supply apparatus of present embodiment at length is illustrated by flow chart.
Fig. 3 is the flow chart of the processing of the control part of the ultraviolet lamp shown in presentation graphs 1, Fig. 2 roughly.In addition, Fig. 4 to Fig. 8 is the flow chart of each step S1 to S6 of presentation graphs 3 at length.
At first, utilize Fig. 3 that the summary that the control of the ultraviolet lamp shown in Fig. 1, Fig. 2 is processed is described.
When the starting ultraviolet lamp, then obtain initial stage data (step S1).That is, in the time of from the IC tag 1a reading out data of lamp 1, as required data are transferred to RAM 13a from ROM 13b, the EEPROM13c etc. of storage part 13.
Then, according to the data that read from above-mentioned IC tag 1a etc., as mentioned above, after 1 initial stage of lighting a lamp of lamp lit a lamp, transit to stable light a lamp (step S2).
When lamp 1 transits to stable lighting a lamp, afterwards, until the pass modulating signal of lamp becomes till the conducting, still keep lighting a lamp of lamp, at this time, light a lamp the time according to the total of lamp 1, upgrade the internal data (step S3) that is stored in above-mentioned storage part 13.
When lamp pass modulating signal becomes conducting, then carry out the action of turning off the light (step S4, S5) of lamp, and the Data Update of the IC tag when turning off the light, in addition, be stored in the data of RAM13a of storage part 13 after the storage (step S6) of EEPROM13c etc., end process.
Below, utilizing the flow chart of Fig. 4 to Fig. 8, the processing of control part that is directed to the ultraviolet lamp of present embodiment describes.
Fig. 4 and Fig. 5 are that expression is from starting device until transit to the stable processing of lighting a lamp till moving of lamp.
In Fig. 4, starting high-frequency lighting power supply 2 (step S11), each one (CPU11, IC tag R/W section 12, control part 4, antenna 14, storage part 13) that consists of control part 4 is energized and becomes holding state.At this moment, be stored in the data of ROM 13b, the EEPROM 13c etc. of storage part 13, be transferred to as required RAM 13a, so that device is initialised (step S1).Thus, control part 4 can be processed with the data that are stored in RAM 13a.
In addition, in the following description, even when data are transferred to RAM 13a, also there is the situation of the storage of specified data in the place when being stored in the device starting as required.
At step S12, control part 4 is via IC tag R/W section 12, the IC tag 1a that antenna 14 and Excimer lamp 1 are possessed believes all, and is controlled to the information that is recorded in IC tag 1a that can read, and the information that reads is stored in storage part 13 (RAM 13a).
At this, as the information that reads from IC tag 1a, as mentioned above, have to amount to the time T s that lights a lamp, intrinsic number (consecutive number), the historical information of lighting a lamp, device information, starting voltage setting Vfk, initial frequency setting Ftk, burning voltage setting Ftk etc.
In addition, as shown in figure 13 in same device, the situation that is provided with a plurality of Excimer lamps is also arranged, so said apparatus information is except device information, comprises that also expression is equipped with " raceway groove (channel) information " of position of the Excimer lamp of this device." raceway groove (channel) information " refers in the device of Figure 13 for example, Excimer lamp possesses 4, and the position that each Excimer lamp is configured is called " raceway groove ", and this raceway groove is called " raceway groove 1 " successively from the right, " raceway groove 2 " ..., for the information of each raceway groove of difference.
Control part 4 is to confirm whether can read the information that is recorded in IC tag 1a at above-mentioned steps S12 at step S13.When can read the information that is recorded in IC tag 1a, then be transferred to step S14, and when not reading, then be transferred to step S191.
In step S14, judge the actual operation of lighting a lamp (confirming new/old lamp position (bit)) that has or not Excimer lamp from " historical information of lighting a lamp " that be recorded in IC tag 1a.
At step S14, when being judged as do not have an Excimer lamp actual and lighting a lamp operation, then be transferred to step S15, and be judged as the actual operation of the lighting a lamp (Japanese: in the time of some lamp real Performance), then be transferred to step S16 of Excimer lamp.
In step S16, judged whether the actual operation of lighting a lamp of same device, do not have that same device is actual lights a lamp during operation, then be transferred to step S17, and actual lighting a lamp during operation arranged, then be transferred to step S18.
In addition, at this, have or not the actual operation of lighting a lamp from " historical information of lighting a lamp " judgement, but for example also can judge from " cumulative time " or " device information ".When for example judging with " cumulative time ", becoming when then " cumulative time " was 0 time does not have the actual operation of lighting a lamp, and " cumulative time " be to become beyond 0 time the time the actual operation of lighting a lamp is arranged.In addition, when judging with " device information ", becoming when then not having the storage of " device information " does not have the actual operation of lighting a lamp, and become when the storage of " device information " is arranged the actual operation of lighting a lamp is arranged.
Namely, control part 4 is to check " intrinsic number (consecutive number) " that reads from IC tag 1a, and be stored in " intrinsic number (consecutive number) " of the Excimer lamp 1 of the actual operation of lighting a lamp of having of storage part 13, thereby be directed to the Excimer lamp 1 that possesses this IC tag 1a, judge that the ultraviolet lamp that possesses this control part has or not the actual operation of lighting a lamp.
And then whether control part 4 is to judge " device information " that reads from IC tag 1a, be the information that is installed in the ultraviolet lamp of Excimer lamp 1.
At step S16, be judged as and have the actual operation of lighting a lamp of the ultraviolet lamp that possesses this control part 4, and " device information " then be transferred to step S18 when being consistent, and beyond this time, then be transferred to step S17.
Below, being divided into above-mentioned (a) to the situation of (d), the processing that is directed to the situation of each example is illustrated.
(a) being equipped with can not be from the situation of the lamp of IC tag 1a read/write.
This situation is to be transferred to step S191 from step 13.In step S191, (for example ROM 13b) reads starting voltage safety value Vfs, initial frequency safety value Ffs, burning voltage safety value Vts, stabilized frequency safety value Fts from storage part 13.
In addition, when reaching stable lighting a lamp when Excimer lamp 1 is lit a lamp in the early stage, if superfluous electric power is input to lamp, deteriorated danger is then arranged, and have starting voltage safety value Vfs, the initial frequency safety value Ffs, burning voltage safety value Vts, the stabilized frequency safety value Fts that consider safety to be stored in storage part 13 (for example ROM 13b).
In step S19, above-mentioned starting voltage safety value Vfs, initial frequency safety value Ffs are set respectively as starting voltage desired value Vfm, initial frequency desired value Ffm.
Then, at step S192, with aforementioned stable voltage security value Vts, stabilized frequency safety value Fts is set as burning voltage desired value Vtm, initial frequency desired value Ftm.
This starting voltage desired value Vfm, initial frequency desired value Ffm, burning voltage desired value Vtm, stabilized frequency desired value Ftm are stored in storage part 13 (for example RAM 13a).
After the processing of step S192, be transferred to Fig. 5.
(b) situation of the lamp of the new product that is not used is installed.
This situation is transferred to step S14, step S15 from step S13.In step S15, the starting voltage setting Vfk that will read from IC tag 1a, initial frequency setting Ffk is set as respectively starting voltage desired value Vfm, initial frequency desired value Ffm.
Afterwards, at step S151, will be set as burning voltage desired value Vtm, stabilized frequency desired value Ftm from aforementioned stable voltage setting Vtk, the stabilized frequency setting Ftk that IC tag 1a reads.
This starting voltage desired value Vfm, initial frequency desired value Ffm, burning voltage desired value Vtm, stabilized frequency desired value Ftm are stored in storage part 13 (for example RAM13a).
(c) be not used at this ultraviolet lamp, but the situation of the lamp of the actual operation of lighting a lamp is installed.This situation then is transferred to step S16, step S17 from step S14.
Excimer lamp 1 is to pull down from ultraviolet lamp 10.Therefore, by user's using method, then have and pull down the employed Excimer lamp 1 of the ultraviolet lamp that is called as A, and with the situation of this Excimer lamp 1 use at the ultraviolet lamp that is called as B.
This situation though at the IC tag 1a of Excimer lamp 1 the actual operation of lighting a lamp is arranged, is the actual operation of lighting a lamp of A device, and is not the actual operation of lighting a lamp of B device.
In order to judge this point, at " device information " of the IC tag 1a of Excimer lamp 1, only storing " device information " that be about to have the device before the actual operation of lighting a lamp.
Namely, at the IC tag 1a of the employed Excimer lamp 1 of the ultraviolet lamp that is called as A, if when the A device is lit a lamp, then " device information " of A device is stored, when the B device was lit a lamp, the information that then is suitable for the A device of " device information " was the information that is rewritten as the B device afterwards.
In step S16, at the ultraviolet lamp of the Excimer lamp 1 that the actual operation of lighting a lamp of tool is installed, use " device information " that be stored in IC tag 1a, judged before just using and light a lamp in having or not of same device.If when the lighting a lamp of same device, then be not transferred to step S17.
In step S17, process as follows.
Be shown in the 1st setup unit 4b of the control part 4 of above-mentioned Fig. 2, the 2nd setup unit 4c is to read corresponding to the light a lamp correction value of magnitude of voltage of time T s of the total that reads from IC tag 1a from the voltage correction chart that is stored in advance storage part 13 (ROM 13b).The configuration example that represents voltage correction chart Tv at Fig. 9.
Shown in figure, voltage correction chart Tv is login for light a lamp the time table of voltage correction value of (h) of the total of lamp, utilizes this correction value and lights a lamp the time according to total, revises starting voltage setting and burning voltage setting.
That is, the 1st setup unit 4b is to obtain the voltage correction value with reference to above-mentioned voltage correction chart Tv, and this voltage correction value of computing is obtained starting voltage desired value Vfm with the starting voltage setting Vtk that reads from IC tag 1a.
Then, the 1st setup unit 4c is to read frequency correction value corresponding to " magnitude of voltage " obtained through computing from the frequency correction chart Tf that is stored in advance storage part 13 (ROM 13b).The configuration example that represents frequency correction chart Tf at Figure 10.
Shown in figure, frequency correction chart Tf is the table of logining for the frequency correction value of magnitude of voltage (KV), and utilizes this correction value to revise initial frequency setting Ffk and stabilized frequency setting Ftk.
That is, the 1st setup unit 4b obtains the frequency correction value with reference to said frequencies table Tf, this frequency correction value of computing and initial frequency setting Ffk and obtain initial frequency desired value Ffm.
Above-mentioned starting voltage desired value Vfm, initial frequency desired value Ffm is to be set as the initial stage of lamp 1 electric power of lighting a lamp, and is stored in storage part 13.
The use numerical example is illustrated: " total is lit a lamp the time " of reading from IC tag 1a is " 300 " hour, when the starting voltage setting Vfk that reads from IC tag 1a has 8KV, then at step S17, read corresponding to the light a lamp correction value of magnitude of voltage of 300 hours time of total from the voltage correction chart Tv shown in the Fig. 9 that is stored in advance storage part 13, and " 1.010 " computing that will read is as starting voltage setting Vfk.That is, come computing to obtain as starting voltage desired value Vfm starting voltage setting " 8 " KV * " 1.010 "=" 8.08 " KV.
Then, read correction value corresponding to the frequency of " 8.08 " KV of the starting voltage desired value Vfmk that tries to achieve through computing from the frequency correction chart Tf shown in the Figure 10 that is stored in advance storage part 13, and with the frequency correction value " 1.05 " that reads " 50 " kHz with the initial frequency setting Ffk that reads from this IC tag 1a, computing becomes 50kHz * " 1.05 "=" 52.5 " KHz, the initial stage of the trying to achieve frequency targets value Ffm that lights a lamp.With " the starting voltage desired value Vfmk " that tries to achieve, " 8.08 " KV and " 52.5 " KHz are stored in storage part 13.
Then, try to achieve burning voltage desired value Vtm and the stabilized frequency desired value Ftm that the rear stable power that carries out of lighting a lamp is in the early stage lit a lamp used.
At step S171, the 2nd setup unit 4c of control part 4, to obtain and the total that reads from IC tag 1a voltage correction value corresponding to time T s of lighting a lamp from above-mentioned voltage correction chart Tv, this voltage correction value of computing and the burning voltage setting Vtk that reads from IC tag 1a are tried to achieve burning voltage desired value Vtm.After the burning voltage desired value Vtm, the 2nd setup unit 4c is the correction value that reads the frequency corresponding with the burning voltage desired value Vtm that tries to achieve through computing from said frequencies correction chart Tf, and this frequency correction value of computing is tried to achieve stabilized frequency desired value Ftm with the stabilized frequency setting Ftk that reads from IC tag 1a.The burning voltage desired value Vtm and the stabilized frequency desired value Ftm that try to achieve are stored in storage part 13.
(d) situation that still is mounted at the employed lamp of this ultraviolet lamp.This situation is transferred to step S16, step S18 from step S14.
Starting voltage desired value Vfm when intrinsic number (consecutive number), the initial stage of the Excimer lamp 1 when once lighting a lamp on storage part 13 storage work as described below, lights a lamp this Excimer lamp 1 last, and initial frequency desired value Ffm.In addition, with burning voltage desired value Vtm, stabilized frequency desired value Ftm begins stable lighting a lamp, and transits to after stable the lighting a lamp, and stores the stable some lamp voltage value when finishing and the frequency values of lighting a lamp of lighting a lamp.
So, in step S18, read the starting voltage desired value Vfm, the initial frequency desired value Ffm that are stored in storage part 13 (EEPROM 13c) and be stored in storage part 13 (RAM 13a).
In addition, at step S181, control part 4 is to read as above-mentioned some lamp voltage value of the data that are stored in storage part 13 (EEPROM 13c) and the frequency values of lighting a lamp, and as burning voltage desired value Vtm, stabilized frequency desired value Ftm, is stored in storage part (RAM 13a).
In addition, feature of the present invention relates to the control relevant with the Excimer lamp 1 with IC tag 1a, with the situation of the data of the IC tag 1a that can read at step S13, and can't the reading out data situation distinguish, and the situation of readable data is controlled according to these data.
As mentioned above, set starting voltage desired value Vfm and the initial frequency desired value Ffm of the Excimer lamp 1 that is installed in ultraviolet lamp at each step S15, S17, S18, S19.
Then, utilize Fig. 5, use above-mentioned starting voltage desired value Vfm and initial frequency desired value Ffm, and light a lamp the time from the total that IC tag 1a reads, the initial stage Excimer lamp 1 of lighting a lamp is illustrated for the processing of generally lighting a lamp afterwards.
At step S21, S22, the control unit 4e that lights a lamp of control part 4 is to set as the initial stage used desired value of Excimer lamp 1 of lighting a lamp being stored in the above-mentioned starting voltage desired value Vfm of storage part 13 and initial frequency desired value Ffm.
And then at step S23, the control unit 4e that lights a lamp is set in the initial stage timer 4g that lights a lamp with the initial stage time T O that lights a lamp.
Next, in step S24, to put modulating signal and export to high-frequency lighting power supply 2, meanwhile, at step S25, export the starting voltage desired value Vfm and the initial frequency desired value Ffm that set as desired value to high-frequency lighting power supply 2, high-frequency lighting power supply 2 is according to above-mentioned voltage and frequency, and the initial stage of beginning Excimer lamp 1 lights a lamp.
In addition, in step S26, with step S24 begin simultaneously countdown (subtracting calculation) at the initial stage that step S23 the sets timer 4g that lights a lamp.And then, at step S2, for accumulative total the lighting a lamp the time of lamp, the counting of the accumulativa timer 4f that begins to light a lamp.
At step S28, timer 4g stand-by period of lighting a lamp at initial stage arrives.During this period, starting voltage desired value Vfm and initial frequency desired value Ffm as desired value sets export high-frequency lighting power supply 2 to, and high-frequency lighting power supply 2 is with this voltage, the frequency Excimer lamp 1 that continues to light a lamp.As the time T O that lights a lamp through the initial stage, then be transferred to step S29.
At step S29, among the step S291, the control unit 4e that lights a lamp of control part 4 establishes as beginning stable desired value when lighting a lamp Excimer lamp 1 being stored in the aforementioned stable voltage-target Vtm of storage part 13 and stabilized frequency desired value Ftm.
And, at step S292, export burning voltage desired value Vtm and stabilized frequency desired value Ftm to high-frequency lighting power supply 2, and high-frequency lighting power supply 2 is the electric power control of beginning Excimer lamp 1.
The control unit 4e that lights a lamp begins after stable the lighting a lamp, calculate the electric power that is supplied in lamp from voltage, electric current that above-mentioned high-frequency lighting power supply 2 transmits, electric power through calculating (multiply by again the numerical value of power COS φ at the product of above-mentioned voltage, electric current), try to achieve a consensus in the frequency of the target power that sets in advance, send to the power supply 2 of lighting a lamp as frequency instruction.
In addition, when beginning stable lighting a lamp, then be applied in lamp 1 corresponding to the voltage of aforementioned stable voltage-target Vtm and control, but as described below, along with the total of the lamp time of lighting a lamp increases, the voltage that is applied in lamp is increased.
The power supply 2 of lighting a lamp is driving voltage, frequencies of controlling lamp 1 according to this voltage instruction, frequency instruction.Thus, the electric power that is supplied in lamp 1 is controlled so as to consistent with target power, and lamp 1 is to light a lamp according to the illumination of target power.
In addition, following, in stable lighting a lamp, voltage, the frequency that is applied in lamp is called " some modulating voltage ", " some modulation frequency ".
Fig. 6 expression is lit a lamp rear until the flow chart that the renewal of the internal data during till turning off the light is processed.
After lighting a lamp, in stable the lighting a lamp till turning off the light, updating block 4d shown in Fig. 2, it is the count value according to the accumulativa timer 4f that lights a lamp, the total of the upgrading lamp time T s that lights a lamp, and when stable lighting a lamp, the some modulating voltage that is applied in lamp is upgraded as described above, and according to the total time T s that lights a lamp the some modulating voltage of lamp is increased.
In addition, in the lighting a lamp of lamp, according to the total of the lamp time T s that lights a lamp, renewal is stored in starting voltage desired value Vfm and initial frequency desired value Ftm, the burning voltage desired value Vtm (some modulating voltage) and stabilized frequency desired value Ftm of storage part 13, and when beginning is lit a lamp next time, with this voltage that is updated, frequency, make this lamp initial stage of carrying out light a lamp, stablize and light a lamp.
Below, be illustrated for the processing of the flow chart of Fig. 6.
In Fig. 6, whether step S31 comes alarm lamp 1 in common lighting a lamp take not shown OPTICAL SENSORS, if then be transferred to step S311 in lighting a lamp, if not in lighting a lamp, and end process then.In step S311, the time that affirmation is counted with the accumulativa timer 4f (with reference to Fig. 2) that lights a lamp, whether process was fixed time, if fix time through institute, then was transferred to step S32.
At step S32, with the fix time of process add with the total time of lighting a lamp that is stored in storage part 13 and upgraded.For example use numerical value to be illustrated, then with above-mentioned " institute fix time " as 1 hour, and the total that is stored in storage part 13 was lit a lamp the time as 199 hours.At step S311, if confirm through 1 hour with accumulativa timer 4f, then at step S32,199 hours are added 1 hour and total was lit a lamp the time as 200 hours.
When the total time T s that lights a lamp is updated, then the correction value of the voltage accuracy table Tv shown in Fig. 9 has the possibility that is updated.
Thus, at step S33, whether investigation amounts to the time T s that lights a lamp according to increase must upgrade a modulating voltage.
For example, the light a lamp voltage correction value of time of investigation reference voltage accuracy table Tv and the total that is updated, the voltage correction value during whether with previous reference voltage accuracy table Tv [for example among the step S17 of Fig. 4 (or S171) or the S18 (or S181) with reference to the time the voltage correction value] not identical.
For example using numerical value to be illustrated, is 199 hours when the total time of lighting a lamp, and stipulated time when being 1 hour, then adds 1 hour stipulated time and becomes 200 hours in total 199 hours time of lighting a lamp.At this time, in the table shown in Fig. 9, amount to the correction value of the 199 hours time of lighting a lamp, the correction value that amounts to the 200 hours time of lighting a lamp all is " 1.005 " equally, does not therefore upgrade correction value.In addition, elapsed time again, amounting to the time of lighting a lamp becomes 201 hours, and then correction value is to become " 1.010 ", thereby becomes the renewal correction value is arranged, and must upgrade a some modulating voltage and have.
The result that the total time of lighting a lamp is added if the correction value of magnitude of voltage is not updated, then is transferred to step S41, if be updated, then is transferred to step S331.
When not upgrading the some modulating voltage, then be transferred to step S41, confirm to close modulating signal, and close modulating signal when disconnecting, get back to step S311.
In addition, when the point of renewal modulating voltage is arranged, then be transferred to step S331.
At step S331, with the correction value that is updated, carry out computing with the starting voltage setting Vfk of this lamp that is stored in storage part 13, by this operation result, upgrade the starting voltage desired value Vfm that is stored in storage part 13.
This starting voltage setting Vfk wants to read from storage part 13, and be set to starting voltage desired value Vfm (the step S18 of Fig. 4) when lighting a lamp this lamp next time.
Equally, in step S331, with the voltage correction value that is updated, and the burning voltage setting Vtk that is stored in this lamp of storage part 13 carries out computing, obtain according to the light a lamp some modulating voltage of time of the total of this moment, with this as new some modulating voltage.
The use numerical example describes, then burning voltage setting Vtk is 7KV, and with " by cumulative time of being added " corresponding correction value " 1.010 " when being " 201 hours ", try to achieve 7KV * 1.010=7.07KV by computing, with this 7.07KV, some modulating voltage as being updated is stored in storage part 13.
In step S34, to set desired value for as new some lamp voltage value at the magnitude of voltage that step S331 is stored in storage part 13, from the cumulative time by the some lamp voltage value before adding, be altered to new some lamp voltage value, and in the new some lamp voltage value of high frequency electric source output.
For example, during as the some modulating voltage that is updated, the some lamp voltage value is to be altered to 7.07KV (" voltage setting " 71V * " correction value " 1.010) with above-mentioned 7.07KV.Export 7.07KV at high-frequency lighting power supply 2 as new some lamp voltage value.
When a lamp voltage value is updated, the possibility that then has the frequency correction value of the frequency correction chart Tf shown in Figure 10 to be updated.
So, at step S36, read the frequency correction value corresponding with the some lamp voltage value that is updated from the frequency correction chart Tf shown in Figure 10, and investigate this frequency correction value whether with prior during with reference to frequency correction chart Tf the frequency correction value [for example the step S17 of Fig. 4 (or S171) or S18 (or S181) with reference to the time the frequency correction value] different.
And the result that the some lamp voltage value is updated if the correction value of frequency values is not updated, then is transferred to step S41, then is transferred to step S37 if be updated.
In step S37, with the correction value of the frequency that is updated, carry out computing with the stabilized frequency setting Ftk of this lamp that is stored in storage part 13, and at step S371, will be stored in storage part 13 through the stabilized frequency desired value Ftm that this computing is tried to achieve.
This stabilized frequency desired value Ftm is when this lamp is lit a lamp next time, reads from storage part 13, is set to stabilized frequency desired value Ftm (the step S18 of Fig. 4).
At step S41, alarm lamp closes modulating signal, and lamp closes modulating signal when not being output (during conducting), because be during lamp is lit a lamp, so get back to step S311, repeats above-mentioned processing.Be output (disconnecting=be) when closing modulating signal, end process then, and carry out the following illustrated processing of turning off the light.
The processing of turning off the light that below is directed to lamp is illustrated, and is illustrated but at first be directed to the necessary reason of the step of turning off the light.
Excimer lamp is between pair of electrodes, via the discharge capacity of the medium of for example tool such as quartz glass (Japanese: discharge vessel), the luminous gas of excitatory this discharge capacity inside and to carry out quasi-molecule luminous.
In the untapped situation of Excimer lamp, and carry out the luminous initial stage of quasi-molecule when lighting a lamp, then discharge capacity is applied in for example high voltage of 8KV via electrode.
Shown in Figure 11 (a), be applied in high-tension discharge capacity 1b, because be to have medium, so split pole electric charge occurs on its surface, and it is luminous to use this electric charge to carry out quasi-molecule.
In Excimer lamp, also input high-frequency, so the split pole of discharge capacity 1b is that the high frequency that passes through to input changes.Particularly, split pole is disengaged or split pole can reverse.
Shown in Figure 11 (b), one side's electrode of Excimer lamp is to be applied with high potential when the crest part of high frequency, but when the trough part of high frequency, be the state (0KV) that the electrode with the opposing party similarly is grounded, the split pole of discharge capacity is to be disengaged.
In addition, when other light a lamp mode, because the electrode that is applied in a side reverses with the height of the voltage of the opposing party's electrode, the split pole of the discharge capacity when for example a side electrode side is high potential is that the split pole of the discharge capacity when being high potential from the opposing party's electrode side watches is reverse.The split pole of discharge capacity is also to occur when lighting a lamp stable.
When turning off the light this kind Excimer lamp, the high potential of inputting can be become 0KV immediately, and the high frequency that will side by side input can make 0KHz immediately, but high voltage and high frequency are made immediately at 0 o'clock, then when lamp is next time lit a lamp, have to become and do not light a lamp, or the lamp input becomes superfluous situation.
This problem is considered to be in lamp also the reason of discharge capacity split pole after turning off the light.Supposition in following its reason of expression.
After lamp was lit a lamp, if high voltage and the high frequency of inputting made 0 immediately, then the electric charge on discharge capacity surface was to be disengaged.Yet, just high voltage and high frequency have been made 0 before during for 6KV, the split pole of discharge capacity itself is the state when being maintained at 6KV.
The high voltage of Excimer lamp or high frequency when being transfused to are to consider that not discharge capacity is by the state of split pole.So, discharge capacity by the state of split pole under, when to Excimer lamp high input voltage and high frequency, then be subject to the impact of the split pole state of discharge capacity, have lamp input superfluous, or insufficient, and not lighting a lamp of lamp can occur, the situation of superfluous input.
Therefore, this case inventor, the actual discovery when lamp is turned off the light, if the voltage that the magnitude of voltage during the constant electric power control of input ratio also will be low, the taller frequency values of frequency values when the constant electric power of input ratio is controlled again, can suppress the split pole state of discharge capacity, and can solve next time light a lamp incomplete during lamp.
Be directed to the turn off the light processing of turning off the light of step of this kind, the flow chart by Fig. 7 is illustrated.
At step S501, when the pass modulating signal was transfused to, then the control unit 4e that lights a lamp of control part 4 read the reduction calculated value α from the some lamp voltage value that is stored in advance storage part 13.And computing is stored in some modulating voltage and the above-mentioned reduction calculated value α of storage part 13, and this operation result is stored in storage part 13 as closing lamp voltage value, and should close lamp voltage value and establish as desired value.
At step S502, the control unit 4e that lights a lamp reads the aggregate value β of the frequency values of lighting a lamp that is stored in advance storage part 13, computing is stored in light a lamp frequency numerical value and the above-mentioned addition calculated value+β of storage part 13, this operation result is stored in storage part 13 as the frequency values of turning off the light, and this frequency values of turning off the light is set as desired value.
At step S503, the control unit 4e that lights a lamp reads the time T 1 of turning off the light that is stored in advance storage part 13, and this time T 1 of turning off the light is set in the timer 4h (with reference to Fig. 2) that turns off the light.
At step S52, the control unit 4e that lights a lamp exports high-frequency lighting power supply 2 to set " some lamp voltage value-α " as desired value, in addition, side by side at step S53, " some modulation frequency+β " is exported to high-frequency lighting power supply 2.
High-frequency lighting power supply 2 is according to modulating voltage " is put lamp voltage value-α " and as " the some modulation frequency+β " that close modulation frequency, begin the action of turning off the light of Excimer lamp 1 as closing.
At step S54, with step S52 and step S53 side by side begin the to turn off the light countdown (subtracting calculation) of timer 4h.
Being input into the pass modulating voltage of Excimer lamp 1, is than the modulating voltage pass modulating voltage of low α only, and Excimer lamp 1 is that to be stopped quasi-molecule luminous.
At step S55, during " time T 1 of turning off the light ", will export high-frequency lighting power supply 2 to the pass modulation frequency as the pass lamp voltage value that desired value is set, Excimer lamp 1 continues to light a lamp, through turning off the light time T 1, time is up for timer 4h when turning off the light, and then is transferred to step S56.In addition, when time is up, the action of the timer 4h that finishes to turn off the light.
At step S56, the control unit 4e that lights a lamp of control part 4 finishes to export Excimer lamp 1 to from high-frequency lighting power supply 2, and the high-frequency lighting power supply is made as disconnection.
Fig. 8 is the flow chart that the Data Update of expression when turning off the light processed, and at this, upgrades the data of IC tag, and the data of more newly-installed storage part 13.
At step S62, the updating block 4d of control part 4 is that the total that the is stored in storage part time T s that lights a lamp is recorded in IC tag 1a.In addition, as device information, " device information " of Excimer lamp is installed, and in possessing the device of branched Excimer lamp, raceway groove (channel) information that this Excimer lamp is installed is recorded in IC tag 1a.
In addition, as required with IC tag 1a " historical information of lighting a lamp " new/old marker bit is set as conducting, storage has the situation of the actual operation of lighting a lamp.
At step S67, " starting voltage desired value Vfm " and " initial frequency desired value Ffm " when " intrinsic number (consecutive number) " of Excimer lamp 1 that is stored in the RAM 13a of storage part 13 lit a lamp with this 1 initial stage of carrying out of Excimer lamp that the total time of lighting a lamp according to Excimer lamp 1 is updated, and last " the some lamp voltage value " of constant electric power when controlling this Excimer lamp 1 and " some modulation frequency " (just turned off the light before lighting a lamp " some lamp voltage value " and " frequency values of lighting a lamp "), be stored in the EEPROM 13c of storage part 13 with " total is lit a lamp the time ", and disconnect the power supply of control part 4.
In addition, be stored in the above description, as the control parameter that lamp is lit a lamp, use " magnitude of voltage " and " frequency values ", but control the situation of " frequency values ", also can say the situation of control " current value ", therefore also can change the control frequency value, and make the control current value.
In addition, carry out electric power control, except the control frequency value, also can control the duty ratio of the voltage that puts on lamp.That is, as the light a lamp parameter of lamp of control of the present invention, " magnitude of voltage " and " frequency values " are arranged, also can make control " current value " and " duty ratio of voltage " etc.
In addition, in the above-described embodiment, " corrected parameter " of magnitude of voltage (Fig. 9) and " corrected parameter " of frequency values is when lighting a lamp at the use initial stage (Figure 10) and arbitrary during stable lighting a lamp is general, but also can use corrected parameter separately.Namely also can be divided into " the corrected parameter A " of initial stage when lighting a lamp, and " corrected parameter B " during stable lighting a lamp.

Claims (8)

1. ultraviolet lamp has:
The IC tag read/write unit that information from the IC tag that is arranged at Excimer lamp is read and the information of giving IC tag is write;
The power supply of lighting a lamp of powering to Excimer lamp; Reach the control part that lighting a lamp of Excimer lamp controlled, and the Excimer lamp with IC tag be installed, it is characterized by,
In above-mentioned IC tag, the total that records at least the Excimer lamp that possesses this IC tag light a lamp the time, represent this Excimer lamp intrinsic electrical characteristics information and represent that this ultraviolet lamp has or not the information of the actual operation of lighting a lamp,
The control part of above-mentioned ultraviolet lamp has:
Identifying unit, when Excimer lamp is installed in this ultraviolet lamp, by carrying out by the access of above-mentioned IC tag read/write unit for IC tag, determine whether and can write from the IC tag reading information and to IC tag, or no readable information and have the actual operation of lighting a lamp of this ultraviolet lamp;
The 1st setup unit, according to the information that is stored in above-mentioned IC tag, the setting initial stage condition of lighting a lamp;
The 2nd setup unit according to the information that is stored in above-mentioned IC tag, is set the stable condition of lighting a lamp;
Updating block upgrades the condition of lighting a lamp of above-mentioned initial stage according to the total time of lighting a lamp of this Excimer lamp and reaches the stable condition of lighting a lamp;
Memory cell, the condition of lighting a lamp of the above-mentioned initial stage that storage is updated reaches the stable condition of lighting a lamp; And
The control unit of lighting a lamp, carry out following operation:
The result of determination of above-mentioned identifying unit is for from the IC tag readable information and when this ultraviolet lamp actual do not lit a lamp operation, then according to the initial stage that is set by above-mentioned the 1st setup unit condition of lighting a lamp, this Excimer lamp initial stage of carrying out is lit a lamp, after lighting a lamp in the early stage, the stable condition of lighting a lamp that use is set by above-mentioned the 2nd setup unit, make this Excimer lamp transit to stable lighting a lamp
The result of determination of above-mentioned identifying unit is for from IC tag readable information and actual lighting a lamp during operation with this ultraviolet lamp, then according to the initial stage that the is stored in said memory cells condition of lighting a lamp, this Excimer lamp initial stage of carrying out is lit a lamp, after lighting a lamp in the early stage, use is stored in the stable condition of lighting a lamp of said memory cells, this Excimer lamp is transitted to stable lighting a lamp
The result of determination of above-mentioned identifying unit is from IC tag can't reading information the time, then by the initial stage as safety value of the prior defined condition of lighting a lamp, this Excimer lamp initial stage of carrying out is lit a lamp, after lighting a lamp in the early stage, use the stable condition of lighting a lamp as safety value of prior defined, make this Excimer lamp transit to stable lighting a lamp.
2. ultraviolet lamp as claimed in claim 1 is characterized in that,
Be stored in the information of intrinsic electrical characteristics of Excimer lamp of above-mentioned IC tag in expression, comprise at least starting voltage setting, initial frequency setting, burning voltage setting and the stabilized frequency setting of this Excimer lamp that is applicable to light a lamp,
Above-mentioned the 1st setup unit according to the starting voltage setting that is stored in above-mentioned IC tag and initial frequency setting, is set starting voltage desired value and the initial stage frequency targets value of lighting a lamp, as the condition of lighting a lamp of above-mentioned initial stage,
Above-mentioned the 2nd setup unit according to the burning voltage setting that is stored in above-mentioned IC tag and stabilized frequency setting, is set burning voltage desired value and stabilized frequency desired value, as the aforementioned stable condition of lighting a lamp,
Above-mentioned updating block is to light a lamp the time according to the total of this Excimer lamp, upgrades above-mentioned starting voltage desired value, initial stage light a lamp frequency targets value, burning voltage desired value and stabilized frequency desired value,
Said memory cells is light a lamp at the above-mentioned starting voltage desired value, the initial stage that are updated of storage frequency targets value, burning voltage desired value and stabilized frequency desired value,
The above-mentioned control unit of lighting a lamp carries out following operation:
The result of determination of above-mentioned identifying unit is for from the IC tag readable information and this ultraviolet lamp is unactual lights a lamp during operation, then according to the above-mentioned starting voltage desired value that is set by the 1st setup unit and the initial stage frequency targets value of lighting a lamp, this Excimer lamp initial stage of carrying out is lit a lamp, after lighting a lamp in the early stage, burning voltage desired value and stabilized frequency desired value that use is set by above-mentioned the 2nd setup unit, make this Excimer lamp transit to stable lighting a lamp
The result of determination of above-mentioned identifying unit is for from the IC tag readable information and have that this ultraviolet lamp is actual lights a lamp during operation, then according to the starting voltage desired value, the initial stage that the are stored in said memory cells frequency targets value of lighting a lamp, this Excimer lamp initial stage of carrying out is lit a lamp, after lighting a lamp in the early stage, use is stored in burning voltage desired value and the stabilized frequency desired value of said memory cells, make this Excimer lamp transit to stable lighting a lamp
The result of determination of above-mentioned identifying unit is from IC tag can't reading information the time, then by starting voltage safety value and the initial frequency safety value as the safety value that set in advance, this Excimer lamp initial stage of carrying out is lit a lamp, after lighting a lamp in the early stage, use burning voltage safety value and the stabilized frequency safety value as the safety value that set in advance, this Excimer lamp is transitted to stable lighting a lamp.
3. the lighting control method thereof of a ultraviolet lamp, this ultraviolet lamp is to have: from the read/write unit of the information of the IC tag that is arranged at Excimer lamp, and the control part of lighting a lamp of control Excimer lamp, the lighting control method thereof of this ultraviolet lamp is characterised in that
In above-mentioned IC tag, the total that records at least the Excimer lamp with this IC tag light a lamp the time, represent the intrinsic electrical characteristics of this Excimer lamp information, and this ultraviolet lamp of expression have or not the actual operation of lighting a lamp,
The control part of above-mentioned ultraviolet lamp,
When Excimer lamp was installed in this ultraviolet lamp, above-mentioned Excimer lamp had IC tag, differentiate according to this IC tag whether to can read/writing information,
From the IC tag of this Excimer lamp can read/during writing information, then obtain the information that is stored in IC tag,
According to from the obtained information of IC tag, differentiate the actual operation of lighting a lamp of this ultraviolet lamp that has or not this Excimer lamp,
Carry out following (A) to the step of (C) according to above-mentioned differentiation result:
(A) from the IC tag readable information, and this ultraviolet lamp is unactual lights a lamp during operation, then according to the information that is stored in above-mentioned IC tag, the setting initial stage condition of lighting a lamp, and according to the initial stage that this is set condition of lighting a lamp, lit a lamp at this Excimer lamp initial stage of carrying out
According to the information that is stored in above-mentioned IC tag, set the stable condition of lighting a lamp, and after the initial stage lights a lamp, use this stable condition of lighting a lamp that is set, make this Excimer lamp transit to stable lighting a lamp,
(B) from the IC tag readable information, and have that this ultraviolet lamp is actual lights a lamp during operation, then according to the information relevant with this Excimer lamp that is stored in this ultraviolet lamp and/or be stored in the information of above-mentioned IC tag, the setting initial stage condition of lighting a lamp, and according to the initial stage that this is set condition of lighting a lamp, this Excimer lamp initial stage of carrying out is lit a lamp
According to the information relevant with this Excimer lamp that is stored in this ultraviolet lamp and/or be stored in the information of above-mentioned IC tag, set the stable condition of lighting a lamp, and after lighting a lamp in the early stage, the stable condition of lighting a lamp of using this to be set, make this Excimer lamp transit to stable lighting a lamp
(C) from IC tag can't reading information the time, the initial stage as safety value of the setting prior defined condition of lighting a lamp, and by the condition of lighting a lamp as this initial stage of this safety value, lit a lamp at this Excimer lamp initial stage of carrying out,
Set the stable condition of lighting a lamp as safety value of prior defined, the initial stage is used the condition of should stable lighting a lamp as safety value after lighting a lamp, and makes this Excimer lamp transit to stable lighting a lamp.
4. the lighting control method thereof of ultraviolet lamp as claimed in claim 3 is characterized in that,
In the step of above-mentioned (A), from the IC tag readable information, and this ultraviolet lamp is unactual lights a lamp operation and have that other devices are actual lights a lamp during operation,
The light a lamp information of intrinsic electrical characteristics of time and this Excimer lamp of the total of using expression to be stored in IC tag, the setting initial stage condition of lighting a lamp, and set the stable condition of lighting a lamp.
5. the lighting control method thereof of ultraviolet lamp as claimed in claim 3 is characterized in that,
Be stored in the information of intrinsic electrical characteristics of Excimer lamp of above-mentioned IC tag in expression, comprise at least and be applicable to starting voltage setting, initial frequency setting, burning voltage setting and stabilized frequency setting that this Excimer lamp is lit a lamp,
In the step of above-mentioned (A), (B), according to the starting voltage setting that is stored in above-mentioned IC tag, initial frequency setting and/or the information relevant with this Excimer lamp that is stored in this ultraviolet lamp, set starting voltage desired value and the initial stage frequency targets value of lighting a lamp, as the condition of lighting a lamp of above-mentioned initial stage
According to the burning voltage setting that is stored in above-mentioned IC tag, stabilized frequency setting and/or the information relevant with this Excimer lamp that is stored in this ultraviolet lamp, set burning voltage desired value and stabilized frequency desired value, as the aforementioned stable condition of lighting a lamp
In the step of above-mentioned (C), set starting voltage safety value and initial frequency safety value as safety value, as the condition of lighting a lamp of above-mentioned initial stage,
Set burning voltage safety value and the stabilized frequency safety value as safety value of prior defined, as the aforementioned stable condition of lighting a lamp.
6. the lighting control method thereof of ultraviolet lamp as claimed in claim 5 is characterized in that,
In above-mentioned (A) and step (B), according to the information that is stored in above-mentioned IC tag and/or the information relevant with this Excimer lamp that is stored in this ultraviolet lamp, obtain in such a way above-mentioned starting voltage desired value and the initial stage frequency targets value of lighting a lamp
(a) obtain corresponding to the light a lamp starting voltage correction value of time of the total of this Excimer lamp,
(b) starting voltage correction value and starting voltage setting are carried out computing, and obtain the starting voltage desired value,
(c) obtain corresponding to initial stage of this starting voltage desired value of obtaining some modulation frequency correction value,
This some modulation frequency correction value and initial frequency setting are carried out computing at initial stage, and the initial stage of the obtaining frequency targets value of lighting a lamp.
7. the lighting control method thereof of ultraviolet lamp as claimed in claim 5 is characterized in that,
In above-mentioned (A) and step (B), according to the information that is stored in above-mentioned IC tag and/or the information relevant with this Excimer lamp that is stored in this ultraviolet lamp, obtain in such a way aforementioned stable voltage-target and stabilized frequency desired value
(a) obtain corresponding to the light a lamp point of safes modulating voltage correction value of time of the total of this Excimer lamp,
(b) point of safes modulating voltage correction value and burning voltage setting are carried out computing, and obtain the burning voltage desired value,
(c) obtain point of safes modulation frequency correction value corresponding to this burning voltage desired value of obtaining,
This point of safes modulation frequency correction value and stabilized frequency setting are carried out computing, and obtain the stabilized frequency desired value.
8. such as the lighting control method thereof of each described ultraviolet lamp in the claim 3 to 7, it is characterized in that,
From the IC tag readable information and information can be write IC tag the time,
Above-mentioned control part when Excimer lamp is turned off the light, upgrades the total of the IC tag that is arranged at this Excimer lamp and lights a lamp the time, and is recorded in the situation that this ultraviolet lamp has the use actual job,
Be used for identifying the information of above-mentioned Excimer lamp in the storage of this ultraviolet lamp, and light a lamp frequency targets value, burning voltage desired value and stabilized frequency desired value of starting voltage desired value, initial stage when next time lighting a lamp.
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