CN101636030B - Lighting control method of lighting device and lighting device - Google Patents

Lighting control method of lighting device and lighting device Download PDF

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Publication number
CN101636030B
CN101636030B CN200910164641.XA CN200910164641A CN101636030B CN 101636030 B CN101636030 B CN 101636030B CN 200910164641 A CN200910164641 A CN 200910164641A CN 101636030 B CN101636030 B CN 101636030B
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lamp
illumination
light
light source
data
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CN101636030A (en
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中村雅规
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Ushio Denki KK
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Ushio Denki KK
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V23/00—Arrangement of electric circuit elements in or on lighting devices
    • F21V23/04—Arrangement of electric circuit elements in or on lighting devices the elements being switches
    • F21V23/0442—Arrangement of electric circuit elements in or on lighting devices the elements being switches activated by means of a sensor, e.g. motion or photodetectors
    • F21V23/0464—Arrangement of electric circuit elements in or on lighting devices the elements being switches activated by means of a sensor, e.g. motion or photodetectors the sensor sensing the level of ambient illumination, e.g. dawn or dusk sensors
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B47/00—Circuit arrangements for operating light sources in general, i.e. where the type of light source is not relevant
    • H05B47/10—Controlling the light source
    • H05B47/105—Controlling the light source in response to determined parameters
    • H05B47/11—Controlling the light source in response to determined parameters by determining the brightness or colour temperature of ambient light
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B20/00—Energy efficient lighting technologies, e.g. halogen lamps or gas discharge lamps
    • Y02B20/40—Control techniques providing energy savings, e.g. smart controller or presence detection

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Circuit Arrangement For Electric Light Sources In General (AREA)

Abstract

A lighting control method of lighting device and lighting device, capeble of holding lightness of the lamp injected light as a certain value, furthermore, capable of correcting detection sensitivity of light sensor with deteriorated sensitivity automatically. First recording total lighting time of the lamp 1 on IC tag 1a mounted on the lamp1, uses as specified target power of target lightness to light the lamp1, then measuring the lightness through a light sensor 15. If the reduction of lightness exceeds a certain percentage, the power supplied to lamp 1 will be modified. The modification is a modification schedule ruled by refering to relationship of the total lighting time and modified power, calculating a modified power corresponding to the total lighting time, and controlling the power supplied to the lamp1, Furthermore, correct lightness data of light of each lamp is calculated by undeteriorated light sensor which being recorded onto the IC tag Ia. When the lamp is mounted onto the device, the lightness data is compared with lightness outputted by light sensor 15 arranged on the lighting device, and output of the light sensor 15 is corrected.

Description

The lighting control method thereof of light supply apparatus and light supply apparatus
Technical field
The invention relates to lighting control method thereof and the light supply apparatus of the light supply apparatus of the light such as radiation ultraviolet ray, especially about changing along with time process of can exporting corresponding to the light of light source, to being supplied to the electric power of light source, control, in addition, can utilize and be arranged on the data that the IC tag of light source is stored, proofread and correct lighting control method thereof and light supply apparatus by the light supply apparatus of the data of the detecting unit output for detection of light illumination.
Background technology
UV/O 3ablution be as by ultraviolet ray with belong to the ozone (O of active oxygen species 3) method of cleaning that combined and being widely used, its objective is: for example pass through at substrate or semiconductor substrate surface irradiation ultraviolet radiation for LCD, the organic compound equimolecular bond that is attached to these substrate surfaces is cut off, thereby removed the impurity such as organic compound that are attached to substrate surface.
In recent years, with UV/O as above 3the light source using in ablution, to use by penetrating the good Excimer lamp of vacuum ultraviolet clean ability of wavelength 172nm as luminescent substance such as xenon etc., replace the ejaculation wavelength 185nm that used and the ultraviolet Cooper-Hewitt lamp of 254nm since in the past.Excimer lamp as implied above is to be disclosed such as patent documentation 1 etc.
In using the light supply apparatus of Excimer lamp as implied above, in order to carry out the UV-irradiation that reliability is high, process, must confirm the state of lighting a lamp of Excimer lamp.But, because main radiated light is vacuum-ultraviolet light, so the state of lighting a lamp of this Excimer lamp cannot confirming estimating.Therefore, for the various gimmicks of confirming the state of lighting a lamp of Excimer lamp and exported by the emitted light of Excimer lamp when lighting a lamp, be suggested.
As the gimmick of confirming the state of lighting a lamp of Excimer lamp, as Patent Document 1, it utilizes vacuum ultraviolet (VUV) OPTICAL SENSORS to detect the vacuum-ultraviolet light being radiated by Excimer lamp to known a kind of gimmick example.
Example as shown in figure 11, the Excimer lamp apparatus of being confirmed the state of lighting a lamp of Excimer lamp by the gimmick of this detection vacuum-ultraviolet light has: be installed in 4 Excimer lamps 90 under the state of the cooling block 81 that forms the ceiling face in shell 80, at this cooling block 81, be that area just above at each Excimer lamp 90 is formed with the photoconduction hand-hole 81A that belongs to through hole, in a distolateral vacuum ultraviolet (VUV) OPTICAL SENSORS 89 that is provided with of this photoconduction hand-hole 81A.In figure, the 83rd, for the irradiation being radiated by Excimer lamp 90 is taken out to window portion at the light of handled object.
But, detect the OPTICAL SENSORS of vacuum-ultraviolet light because the sensitivity meeting to vacuum-ultraviolet light is along with the time is through reducing, therefore known along with lengthen service time, cannot obtain the correct illumination data of the vacuum-ultraviolet light being penetrated by the Excimer lamp as detected object.
For example, if amount to while using 6000 hours OPTICAL SENSORS for detection of vacuum-ultraviolet light, the detection limit of this OPTICAL SENSORS can reduce approximately 10%.Therefore, when according to the illumination data of the vacuum-ultraviolet light that is output by OPTICAL SENSORS, while adjusting the electric power that is supplied to Excimer lamp, can be judged out the vacuum-ultraviolet light illumination being penetrated by Excimer lamp can be lower, owing to Excimer lamp being supplied with to excessive electric power, therefore have the possibility of Excimer lamp lifetime.
On the other hand, Excimer lamp is when for example amounting under the situation light a lamp 3000 hours, and along with forming quartz glass etc. deteriorated of luminous tube, the illumination of emitted vacuum-ultraviolet light can reduce approximately 70% when initially lighting a lamp.Therefore, must regularly replace to new product.
Wherein, because the OPTICAL SENSORS of detection vacuum-ultraviolet light is comparatively expensive, therefore can not replace to continually new product, and cannot in fact replace with Excimer lamp simultaneously.
In addition, lamp is generally difficult to judge whether a latter stage in useful life by its outward appearance, especially Excimer lamp is that the illumination of the vacuum-ultraviolet light that makes to penetrate along with forming quartz glass etc. deteriorated of luminous tube reduces, and is therefore difficult to judge whether a useful life by outward appearance.
Therefore, at each lamp, IC tag is set, makes the total of the lamp temporal information of lighting a lamp be stored in this IC tag, the device that amounts to the time of lighting a lamp to manage is suggested (for example, with reference to patent documentation 2).
Figure 12 is the profile that shows the ultraviolet lamp that is mounted with the lamp that is provided with IC tag.This figure is to be with the tubular axis of lamp the profile that parallel plane is cut.Wherein, be to show to use Excimer lamp as the situation of lamp in the figure.
As shown in the drawing, ultraviolet lamp has makes inert gas in the metal-made framework 101 of inner loop.In framework 101 internal configurations, have with tubular axis and be the branched Excimer lamp 100 that parallel mode configures side by side.Along Excimer lamp 100, be provided with water guide tubular speculum 102 that the ultraviolet ray of by Excimer lamp being radiated towards object being treated direction reflected corresponding with each Excimer lamp 1.Each Excimer lamp 100 that is provided with speculum 102 is to be for example fixed on water cooling tube at the aluminum cooling block 103 of inner loop.
Excimer lamp 100 is at the two ends that make the luminous tube 100a consisting of dielectric material of vacuum ultraviolet (VUV) light transmission, form respectively the sealing 100f that is embedded with metal forming 100e, inside at luminous tube 100a, the internal electrode 100b of coiled type is configured on the tubular axis of luminous tube 100a, and the surrounding of internal electrode 100b is covered by insulator 100d.In addition, the outer surface at luminous tube 100a disposes netted outer electrode 100c.
At each metal forming 100e, be connected with the outstanding outside lead 100g towards luminous tube 100a foreign side, the 100g that externally goes between is connected with high voltage supply cable 120c, and is provided with high voltage supply terminal 120 in its end.
In framework 101, resinous connector 110 is installed, in this connector 110, is provided with antenna 140.In addition, in the end of high voltage supply cable 120c, high voltage supply terminal 120 is installed, in the insulation maintenance tool of high voltage supply terminal 120, is provided with IC tag 130.
By insert the plug of high voltage supply terminal 120 at above-mentioned connector 110, make internal electrode 100b and high-frequency lighting power supply be conducting.Though 100c is not shown about outer electrode, but similarly with high-frequency lighting power turn-on.
Figure 13 shows for making the above-mentioned concept map that possesses the configuration example that has the control system that the Excimer lamp of IC tag lights a lamp.
The high voltage supply terminal 120 of the high voltage supply cable being connected with the electrode of Excimer lamp 1 is to be connected with high-frequency lighting power supply 200 by described connector 110, supplies with high voltagehigh frequency voltage, thereby Excimer lamp 100 is lit a lamp by high-frequency lighting power supply 200.
At connector 110, be provided with antenna 140 as previously mentioned, antenna 140 is to be connected with the reader/writer 230 for to IC tag data writing or sense data.CPU210 controls above-mentioned reader/writer 230, to IC tag data writing or by IC tag reading out data, and above-mentioned high-frequency lighting power supply 200 is controlled, to control lighting a lamp of lamp 100.
In Figure 13, the control of lighting a lamp is as follows carrying out.
Before Excimer lamp 100 is lit a lamp and is started, the temporal information of lighting a lamp of the total till reading while being stored in last time the using of IC tag 130 by antenna 140 by reader/writer 230, the memory 220 that this information is stored in be connected with CPU210.
In IC tag 130, also store in the intrinsic temporal information in useful life of each Excimer lamp 100, CPU210 is that the investigation total of being read by IC tag 130 is lit a lamp the time whether below the time in useful life, if amount to, lit a lamp the time when useful life, the time was following, by CPU210 to high-frequency lighting power supply 200 sending point modulating signals.Thus, high-frequency lighting power supply 200 is that Excimer lamp 100 is supplied with to high voltagehigh frequency voltage, and Excimer lamp 100 is lit a lamp.
During Excimer lamp 100 is lit a lamp, be at any time the up-to-date temporal information of lighting a lamp to be aggregated in to the total that is stored in memory 220 to light a lamp the time.
Then, if amount to the time of lighting a lamp, arrive the time in useful life, CPU210 transmits to high-frequency lighting power supply 200 stop signal of lighting a lamp, and Excimer lamp 100 is turned off the light.
In addition, the total time of lighting a lamp arrive the time in useful life before, if making Excimer lamp turns off the light, after Excimer lamp is turned off the light, in the total that is stored in memory 220 time of lighting a lamp, add up to up-to-date lighting a lamp the time, by reader/writer 230, make the up-to-date total time of lighting a lamp be stored in IC tag 130 by antenna.
By above control, for each Excimer lamp, can effectively manage Excimer lamp and add up to light a lamp temporal information.
No. 2789557 specification of (patent documentation 1) Japanese Patent Laid
(patent documentation 2) TOHKEMY 2007-123069 communique
Summary of the invention
As previously mentioned, Excimer lamp is light a lamp 3000 hours time for example amounting to, and the illumination of emitted vacuum-ultraviolet light can reduce approximately 70% when initially lighting a lamp.
On the other hand, as the gimmick of confirming the state of lighting a lamp of Excimer lamp, as previously mentioned, known a kind of gimmick of utilizing OPTICAL SENSORS to detect vacuum-ultraviolet light, but the sensitivity meeting of such OPTICAL SENSORS reduces along with time process.Therefore, along with service time is elongated, cannot obtain the correct illumination data of the light being penetrated by lamp, even if be supplied to the electric power of lamp according to the illumination data adjustment being output by OPTICAL SENSORS, also illumination cannot be maintained to certain state.
; as made, adopted light supply apparatus of lighting a lamp for detection of the Excimer lamp of the OPTICAL SENSORS of vacuum-ultraviolet light etc.; possessing detection sensitivity along with the time passes through and deteriorated OPTICAL SENSORS; by this OPTICAL SENSORS, detect the light that illumination can be accompanied by the lamp that the time reduces; to control in the light supply apparatus of illumination; except the detection sensitivity of OPTICAL SENSORS is deteriorated; the illumination of lamp can along with the time through and reduce, therefore with go through long-time and precision good become desirable value mode to control illumination by the emitted light of lamp be difficulty very.
In addition, as mentioned above, when the OPTICAL SENSORS of using sensitivity meeting to reduce along with time process, in the situation that OPTICAL SENSORS is arranged on to light supply apparatus, directly the detection sensitivity of automatically calibrating OPTICAL SENSORS is advisable, but possess, has the light supply apparatus of function as implied above not yet known.
The present invention completes in view of said circumstances, the object of the invention is to the lamp reducing using illuminance that the time can be accompanied by, and for the sensitivity meeting of the OPTICAL SENSORS of the state of lighting a lamp of alarm lamp along with the time through and deteriorated light supply apparatus, can precision control by the illumination of the emitted light of lamp goodly and illumination is remained necessarily, in addition, can be in the situation that OPTICAL SENSORS be arranged on to light supply apparatus the direct detection sensitivity of the deteriorated OPTICAL SENSORS of automatic calibration sensitivity.
In the present invention, the described problem of solution as follows.
A. by the Stabilization Control of the emitted light of lamp
The present invention controls in the illumination mode consistent with desired value by the emitted light of lamp, and illumination is maintained necessarily.
The illumination of the emitted light of Excimer lamp is wanted thereby along with the time is through reducing because of various.As implied above, for by illumination along with the time through and the illumination of the lamp that reduces is maintained necessarily, when illumination is reduced to regulation ratio when following with respect to object illumination, must control to increase supply to the mode of the electric power of lamp.
With the as implied above means of controlling being supplied to the electric power of lamp, in the present invention, be to use the IC tag that is installed in lamp, according to the total that is recorded in this lamp of IC tag, light a lamp the time, to being supplied to the electric power of lamp, control.
That is, in the present invention, by detecting unit, detect illumination reduction and whether surpassed certain proportion, and when illumination reduces over certain proportion, to being supplied to the electric power of lamp, revise (increase).
The revisal of this electric power is to use the correction chart stipulated such as the total of lamp is lit a lamp time and the relation of revising electric power data etc.Then, obtain and amount to corresponding correction electric power of the time of lighting a lamp, to being supplied to the electric power of lamp, controlling.
That is,, by using IC tag, total that can recording lamp is lit a lamp the time, and can light a lamp the time according to the total that is recorded in IC tag, obtains the data of revising electric power.
B. the correction of OPTICAL SENSORS
In the present invention, because being assemblied in OPTICAL SENSORS deteriorated of light supply apparatus, corresponding for the reduction of the sensing sensitivity with light, the illumination data that the vacuum ultraviolet (VUV) OPTICAL SENSORS by being assemblied in device is output is proofreaied and correct.
This correction is to use the value being determined by the OPTICAL SENSORS that is different from other new products of the OPTICAL SENSORS that is arranged on light supply apparatus to carry out.
Such as use, be arranged on the sensor of the new product of factory etc., by the sensor of this new product, obtain the correct illumination data of the light of each lamp, and write to the IC tag that is arranged on each lamp.
Then, for example, when lamp is replaced, this illumination and the illumination data being output by the sensor that is assembled in Excimer lamp apparatus are compared, in the latter's the value mode consistent with the former value, come that the latter's value is done to top and revise.
According to the above, in the present invention, problem as described in following solution.
(1) lighting control method thereof of light supply apparatus of the present invention, this light supply apparatus has: from the read/write unit of information that is arranged on the IC tag of light source; The detecting unit that illumination by the emitted light of light source is detected; And the control part of lighting a lamp of control light source, being characterized as of the lighting control method thereof of this light supply apparatus, the total that at least records intrinsic illumination data and this light source in above-mentioned IC tag is lit a lamp the time, above-mentioned intrinsic illumination data is relevant to the illumination of the light being penetrated by this light source when light source is lit a lamp with the benchmark electric power of regulation
In above-mentioned IC tag, record by the value of proofreading and correct complete detecting unit and determine the illumination by the emitted light of this light source while lighting a lamp with the benchmark electric power of described regulation, as described intrinsic illumination data,
The control part of above-mentioned light supply apparatus, according to the intrinsic illumination data of reading from the IC tag of described light source and the object illumination data that set, obtains in order to obtain the required target power data of these object illumination data,
Described light source is lit a lamp according to target power data, utilizes described detecting unit to detect the illumination of the light that this time point of lighting a lamp penetrates by this light source, and detected illumination is carried out to record as benchmark illumination data,
By described detecting unit, detect the illumination of the light source while making this light source continue to light a lamp according to above-mentioned target power data, whether the illumination data of the described light source that judgement is detected by this detecting unit has been reduced to below regulation ratio with respect to the benchmark illumination data of described record
When the illumination data of light source has been reduced to regulation ratio when following with respect to the benchmark illumination data of described record, according to the total of the light source of being read by described IC tag, light a lamp the time, obtain and the total of this light source corresponding correction electric power data of time of lighting a lamp,
According to this correction electric power data, described target power data are revised, and according to revised target power data, light source are lit a lamp,
And be arranged on above-mentioned light supply apparatus detecting unit sensitivity along with the time through and deteriorated,
When above-mentioned light supply apparatus is provided with new light source, this light source is lit a lamp with said reference electric power, and by being arranged on the detecting unit of this light supply apparatus, measure the illumination by the emitted light of this light source,
The intrinsic illumination data of reading according to the illumination data of being measured by the detecting unit that is arranged on above-mentioned light supply apparatus and from described IC tag, obtain the correction parameter of the measured value of proofreading and correct the detecting unit that is arranged on above-mentioned light supply apparatus, according to this correction parameter, the output of detecting unit is revised.
(2) in above-mentioned (1), the lighting control method thereof of described light supply apparatus, is characterized by,
In described target power data, be corrected, and while light source being lit a lamp according to revised target power data, the illumination of the light being penetrated by this light source of being measured by described detecting unit carried out to record as new benchmark illumination data,
Whether the illumination data of the described light source that judgement is detected by described detecting unit has been reduced to below regulation ratio with respect to above-mentioned new benchmark illumination data.
(3) light supply apparatus of the present invention, has: from the read/write unit of information that is arranged on the IC tag of light source; The detecting unit that illumination by the emitted light of light source is detected; And the control part of lighting a lamp of control light source, this light supply apparatus is characterized as: the total that at least records intrinsic illumination data and this light source in above-mentioned IC tag is lit a lamp the time, this intrinsic illumination data to make light source relevant by the illumination of the emitted light of this light source while lighting a lamp with the benchmark electric power of regulation
In above-mentioned IC tag, record by the value of proofreading and correct complete detecting unit and determine the illumination by the emitted light of this light source while lighting a lamp with the benchmark electric power of described regulation, as described intrinsic illumination data,
The control part of above-mentioned light supply apparatus has: target power data computing unit, according to the intrinsic illumination data of being read by the IC tag of described light source and the object illumination data that are set, obtain in order to obtain the required target power data of these object illumination data, storage part, benchmark illumination data obtains unit, described light source is lit a lamp according to above-mentioned target power data, the illumination data by the emitted light of this light source that the time point that makes to light a lamp at this utilizes described detecting unit to detect, is recorded in above-mentioned storage part as benchmark illumination data, revise power system calculation unit, the illumination of the light source that judgement is detected by described detecting unit while making this light source continue to light a lamp according to above-mentioned target power data, with respect to described benchmark illumination data, whether be reduced to below regulation ratio, when determining the illumination data of light source, with respect to the described benchmark illumination data being recorded, be reduced to regulation ratio when following, according to the total of the light source of being read by described IC tag, light a lamp the time, obtain and the total of this light source corresponding correction electric power data of time of lighting a lamp, and according to this correction electric power data, described target power data are revised, and the control unit of lighting a lamp, the mode that is supplied to light source with the above-mentioned target power of being revised is controlled,
Be arranged on above-mentioned light supply apparatus detecting unit sensitivity along with the time through and deteriorated,
The control part of above-mentioned light supply apparatus has the correcting unit of above-mentioned detecting unit,
This correcting unit is when above-mentioned light supply apparatus is provided with new light source, this light source is lit a lamp with said reference electric power, the illumination of the light being penetrated by this light source detecting according to the detecting unit by being arranged on this light supply apparatus and the intrinsic illumination data of being read by described IC tag, obtain the correction parameter of the measured value of proofreading and correct the detecting unit that is arranged on above-mentioned light supply apparatus, and according to this correction parameter, the output of detecting unit is revised.
In the present invention, can obtain following effect.
(1) in the present invention, in order to obtain object illumination data, by required target power data, light source is lit a lamp, illumination is now detected by detecting unit and carry out record as benchmark illumination data, when the illumination of the described light source being detected by this detecting unit is reduced to regulation ratio when following with respect to the benchmark illumination data of above-mentioned record, according to the total of the light source of being read by IC tag, light a lamp the time, obtain correction electric power data, by this, revise electric power data, light source is revised and be supplied to described target power data, even therefore the illumination of the vacuum-ultraviolet light of lamp along with the time through and under the situation that reduces, also the illumination of light source can be maintained necessarily.
And, according to light supply apparatus of the present invention, when the illumination of the light at every turn being detected by described detecting unit reduces over prescribed limit, record consider lamp along with the time through and illumination reduces and the up-to-date benchmark illumination data of the sensitivity of detecting unit, obtain accordingly correction electric power data, control light source, can illumination is maintained roughly certain with high accuracy thus.
(2) in IC tag, first will measure and using the illumination of the light that penetrated by light source when stipulated standard electric power is lit a lamp and carry out record as intrinsic illumination data by proofreading and correct complete detecting unit, when being mounted new light source at light supply apparatus, this light source is lit a lamp with said reference electric power, by being arranged on the detecting unit of this light supply apparatus, the illumination of the light that mensuration is penetrated by this light source, according to this illumination data, and the intrinsic illumination data of being read by IC tag, detecting unit to above-mentioned light supply apparatus is proofreaied and correct, therefore when the Excimer lamp that finishes useful life being replaced to new product at every turn, can proofread and correct the illumination data of being exported by sensor, even if it is deteriorated because using to be for a long time assemblied in the OPTICAL SENSORS of light supply apparatus, also can obtain correct illumination.
Therefore, the illumination of can precision controlling the light being penetrated by lamp goodly, and can solve since in the past, become problem because supply with excess power to Excimer lamp, and the illumination that produces the light that is irradiated onto handled object significantly surpasses the so-called overshoot (overshoot) of object illumination or the bad situations such as lifetime of lamp.
Accompanying drawing explanation
Fig. 1 is the system construction drawing that shows the light supply apparatus of one embodiment of the present invention;
Fig. 2 is the functional block diagram of the light supply apparatus of an embodiment of the invention;
Fig. 3 is the figure of the sensitivity of explanation OPTICAL SENSORS;
Fig. 4 is the correction chart that records the relation that amounts to light a lamp time and electric power correction factor (electric power recruitment);
Fig. 5 is presented at IC tag record and intrinsic illumination data X 1the flow chart of the processing of corresponding percentage Y;
Fig. 6 shows according to the data that are recorded in IC tag to proofread and correct the flow chart of the processing of OPTICAL SENSORS 15;
Fig. 7 is the flow chart of all handling processes that shows the light supply apparatus of present embodiment;
Fig. 8 shows the illumination of the light being penetrated by lamp to maintain the flow chart that certain control is processed;
Fig. 9 shows the illumination change of the time of lighting a lamp and the key diagram that is supplied to the electric power variation of lamp;
Figure 10 is the flow chart that shows the processing while turning off the light;
Figure 11 is the figure that shows the configuration example of the Excimer lamp apparatus of confirming the state of lighting a lamp;
Figure 12 is at the tubular axis of lamp of ultraviolet lamp that is provided with the lamp of IC tag with loading the profile that parallel plane is cut;
Figure 13 is the concept map that shows the configuration example of the ultraviolet lamp shown in Figure 12.
Drawing reference numeral explanation
1: lamp (Excimer lamp)
1a:IC label
2: the power supply of lighting a lamp
3: transformer
4: control part
4a: amount to the time updating block of lighting a lamp
4b: target power computing unit
4c: revise power system calculation unit
4d: benchmark illumination data obtains unit
4e: the control unit of lighting a lamp
4f: correcting unit
4g: hour totalizer
5: input part
10: light supply apparatus
11：CPU
12:IC label R/W portion
13: storage part
13a: memory (RAM)
13b: memory (ROM)
13c: memory (EEPROM)
14: antenna
15: OPTICAL SENSORS
16a, 16b:A/D transducer
17:D/A transducer
80: shell
81: cooling block
81A: photoconduction hand-hole
83: light takes out window portion
89: vacuum ultraviolet (VUV) OPTICAL SENSORS
90: Excimer lamp
100: Excimer lamp
100a: luminous tube
100b: internal electrode
100c: outer electrode
100d: insulator
100e: metal forming
100f: sealing
100g: outside lead
102: speculum
103: cooling block
101: framework
101a: irradiation window
110: connector
120: high voltage supply terminal
120c: high voltage supply cable
130:IC label
140: antenna
200: the power supply of lighting a lamp
210：CPU
220: memory
230: reader/writer
Embodiment
Fig. 1 is the system construction drawing that shows the light supply apparatus of an embodiment of the invention.
As shown in the drawing, light supply apparatus of the present invention has: have can noncontact the light source (hereinafter referred to as lamp) 1 of IC tag 1a of input recorded information; For high-frequency high-voltage being supplied to the power supply 2 of lighting a lamp of lamp 1; Be arranged on the transformer 3 of the outlet side of the power supply 2 of lighting a lamp; Control the control part of lighting a lamp 4 of lamp 1; And input part 5.
Control part 4 has: detect the light such as vacuum-ultraviolet light penetrated by lamp 1 and export the OPTICAL SENSORS 15 as detecting unit of illumination intensity signal; According to the illumination data of this OPTICAL SENSORS 15 etc., lighting a lamp of lamp 1 controlled, and carried out for carrying out the arithmetic processing section (CPU) 11 of calculation process of the correction of OPTICAL SENSORS 15; Storage part 13; For and IC tag 1a between carry out the antenna 14 that the transmission of data receives; For control and IC tag 1a between the IC tag R/W portion 12 that receives of the transmission of data; A/D converter 16a, 16b; And D/A converter 17.A/D converter 16a, 16b convert digital signal to and send to CPU11 by the signal from OPTICAL SENSORS 15 and from the signal of a lamp source 2, and D/A converter 17 is that the digital signal from CPU11 is converted to analog signal and sends to the power supply 2 of lighting a lamp.
Above-mentioned storage part 13 has: read-write volatile memory (RAM13a); Read special-purpose nonvolatile memory (ROM13b); And rewritable nonvolatile memory (EEPROM13c), for storage program or data.
ROM13b at storage part 13 records: for revise the correction chart Tab of the electric power that is supplied to lamp 1, the standard illumination data X of Excimer lamp according to the total time of lighting a lamp 0, benchmark electric power data Z 0etc. information, at EEPROM13c, record the illumination information needed of the vacuum-ultraviolet light being penetrated by Excimer lamp as stable maintenance.
Above-mentioned light source 1 is enclosed to be had such as discharge gass such as xenons, and penetrates the Excimer lamp of the vacuum-ultraviolet light of wavelength 172nm.Wherein, be to be below illustrated for the situation of Excimer lamp for lamp 1.
IC tag 1a arranges by each lamp, records the intrinsic illumination data X with the intrinsic illumination of relevant each Excimer lamp 1the corresponding intrinsic illumination data X of percentage Y[=( 1/ standard illumination data X 0) * 100], amount to the time T s that lights a lamp.
If lamp is Excimer lamp, OPTICAL SENSORS 15 is vacuum ultraviolet (VUV) OPTICAL SENSORS, such as ALGN(aluminium gallium nitride alloy) etc. optical semiconductor sensor, by fluorophor that ultraviolet light is converted to visible ray etc., formed.
As described in Figure 11 as shown in, OPTICAL SENSORS 15 is configured in photoconduction hand-hole one distolateral that is formed at cooling block, from the vacuum ultraviolet of lamp 1, is incident to the light entrance face of OPTICAL SENSORS 15 by this photoconduction hand-hole.
Sensitivity in vacuum ultraviolet (VUV) OPTICAL SENSORS is as previously mentioned, along with lengthening service time and reducing.
For example, shown in Fig. 3 (C), the sensitivity of vacuum-ultraviolet light is being started to reduce by 30% left and right after 3000 hours from using.
Also the illumination data of, being exported by OPTICAL SENSORS 15 becomes lower than in fact by the value of the illumination of the emitted vacuum-ultraviolet light of lamp 1.Therefore, with the illumination by the emitted vacuum-ultraviolet light of lamp 1, be maintained certain mode, if in the time of will controlling being supplied to the electric power of lamp 1 according to the illumination data from OPTICAL SENSORS 15, lamp 1 carried out to excessive electric power and supply with.
Therefore,, as shown in Fig. 3 (A), the illumination of Excimer lamp becomes higher than the object illumination of Fig. 3 (B), and can cause overshoot (overshoot).For fear of overshoot as above, the sensitivity that is accompanied by deteriorated the occurred vacuum-ultraviolet light of OPTICAL SENSORS 15 need to be revised.
The CPU11 of control part 4 as described later, according to the object illumination data that provided by input part 5 or by the detected illumination data of OPTICAL SENSORS 15, so that the illumination of the vacuum-ultraviolet light being penetrated by lamp 1 mode consistent with illumination as target, to lighting a lamp, power supply 2 sends instructions and controls the electric power that is supplied to lamp 1.In addition, the intrinsic illumination data that illumination data based on being detected by OPTICAL SENSORS 15 and the IC tag 1a being possessed by lamp 1 read, proofreaies and correct the output of OPTICAL SENSORS 15 in the illumination data mode consistent with intrinsic illumination data of being exported by OPTICAL SENSORS 15.
Input part 5 has such as the touch surface of liquid crystal display picture etc. board-like, and the user who is used in light supply apparatus will input to CPU11 by the relevant object illumination data of the illumination of the required vacuum-ultraviolet light of each handled object.
At this, converge the various data of using in whole demonstration present embodiment.These data are for example shown below, be stored in IC tag, read special-purpose nonvolatile memory (ROM13b), rewritable nonvolatile memory (EEPROM13c) etc., when carrying out, transferred to and can read the memory (RAM13a) writing and be stored as required.
Wherein, the stores location of these data can suitably change, for example ROM can be set, and all data are stored in to EEPROM, also can first be stored in so-called storage medium (such as nonvolatile memory or magnetic disc etc.), when carrying out, at RAM13a, launch, when finishing, be stored to nonvolatile memory or storage medium.
In addition, in the following description, for ease of understanding, in data, transferred under the situation of RAM, also can be as required, when device starting, the situation of the storage of specified data is carried out in the place of storage.
Standard illumination X 0: the illumination (being stored in ROM) of the vacuum-ultraviolet light being irradiated by the Excimer lamp of standard
Intrinsic illumination X 1: the intrinsic illumination (being stored in IC tag, EEPROM) that is recorded in this lamp of IC tag
Illuminations actually measured X 2: the illumination data of the OPTICAL SENSORS gained being assembled by device
Object illumination X 3: the object illumination being set by input part (being stored in EEPROM)
Benchmark illumination X 4: after initial or electric power correction, by target power data Z 1or correction electric power data Z 2when this lamp is lit a lamp, the illumination data (being stored in EEPROM) of the OPTICAL SENSORS gained being assembled by device
Benchmark electric power Z 0: the Excimer lamp outputting standard illumination X of standard 0required electric power (being stored in ROM)
Target power Z 1:. obtain object illumination required electric power (being stored in EEPROM)
Revise electric power Z 2: by the target power (being stored in EEPROM) of revising drag coefficient correction
Adjusted coefficient K=intrinsic illumination X 1/ illuminations actually measured X 2
The intrinsic illumination X of percentage Y=( 1/ standard illumination X 1) * 100
(being stored in IC tag, EEPROM)
The total time T s that lights a lamp: the light a lamp aggregate-value (being stored in IC tag, EEPROM) of time of lamp
Correction chart Tab: record amounting to the table (being stored in ROM) of the electric power recruitment (correction drag coefficient) of the time of lighting a lamp
Fig. 2 is the functional block diagram of the light supply apparatus of an embodiment of the invention, and the Fumction display that the processing that the CPU11 by utilizing control part 4 is carried out realizes is block diagram.
At the IC tag 1a that is arranged on lamp 1, be to record as previously mentioned the intrinsic illumination X of percentage Y=( 1/ standard illumination X 0the total of) * 100 and this lamp 1 time T s that lights a lamp.
Above-mentioned intrinsic illumination X 1be by the complete OPTICAL SENSORS of correction of exporting correct illumination data as OPTICAL SENSORS such as new product etc., determine when lamp 1 being lit a lamp with said reference electric power the data of the illumination of the light being penetrated by 1 quilt of lamp.
IC tag R/W portion 12 by antenna 14, reads in the above-mentioned data that are recorded in above-mentioned IC tag 1a, and is stored in storage part 13 as IC tag data as previously mentioned.
It is 0 lamp that the lamp 1(that the correcting unit 4f of control part 4 is mounted new product at light supply apparatus amounts to the time T s that lights a lamp) time, by the control unit 4e that lights a lamp, make this lamp 1 with said reference electric power Z 0light a lamp, the illumination of the light penetrating according to this lamp 1 being detected by OPTICAL SENSORS 15 and the intrinsic illumination X being read by described IC tag 1a 1, obtain for proofreading and correct the correction parameter of the measured value of the detecting unit that is arranged on above-mentioned this light supply apparatus.Then,, according to correction parameter, the output of OPTICAL SENSORS 15 is revised.
Thus, when lamp 1 is replaced by new lamp at every turn, can proofread and correct in the mode of the correct measured value of OPTICAL SENSORS 15 output.
The hour totalizer 4g of control part 4 is lamp 1 the time intercropping stored count of lighting a lamp, and amounts to and lights a lamp time updating block 4a at every turn when reaching the cumulative time of regulation, upgrades the total that is stored in storage part 13 and lights a lamp the time.This total being updated is lit a lamp time T s when the action that makes light supply apparatus stops, and writes to the IC tag 1a that is arranged on lamp 1.
As previously mentioned by input part 5 by object illumination X 3input to CPU11, these data are stored in storage part 13.
The intrinsic illumination X that the target power computing unit 4b of control part 4 calculates according to the percentage Y based on being read by IC tag 1a 1with benchmark electric power Z 0, above-mentioned object illumination X 3, calculate in order to obtain this object illumination X 3required target power Z 1.The target power Z calculating 1be stored in storage part 13.
Benchmark illumination data obtains unit 4d when when starting device or electric power correction described later, by the control unit 4e that lights a lamp, makes lamp 1 according to above-mentioned target power Z 1or correction electric power Z 2light a lamp, obtain the illumination data of the light being detected by OPTICAL SENSORS 15 at this time point.This value is as benchmark illumination data X 4and be stored in storage part 13.
It is correction electric power Z that the control unit 4e that lights a lamp be take after the electric power that is supplied to lamp 1 and the target power 2(that utilizes above-mentioned target power computing unit 4b to calculate revise 2) consistent mode controls the power supply 2 of lighting a lamp.
That is, detect the voltage and the lamp current that are applied to lamp 1, from the power supply 2 of lighting a lamp, be sent to the control unit 4e that lights a lamp of control part 4.Wherein, by the detected voltage of power supply 2 of lighting a lamp, electric current, be analog signal, this analog signal is by A/D converter, to be converted into digital signal as previously mentioned, and is transferred into the CPU of control part 4.
The control unit 4e that lights a lamp calculates the electric power that is supplied to lamp according to above-mentioned voltage, galvanometer, and by calculated electric power and described target power Z 1(after revising, be correction electric power Z 2) compare.Then, by the above-mentioned electric power calculating and target power Z 1(after revising, be correction electric power Z 2) consistent modulating voltage and frequency carry out computing.This modulating voltage and frequency are as voltage instruction, frequency instruction and be sent to the power supply 2 of lighting a lamp.
The power supply 2 of lighting a lamp is controlled driving voltage, the frequency of lamp 1 according to this voltage instruction, frequency instruction.Thus, to be supplied to electric power and the above-mentioned target power Z of lamp 1 1(after revising, be correction electric power Z 2) consistent mode controlled, lamp 1 with target power Z 1(after revising, be correction electric power Z 2) corresponding illumination and lighting a lamp.
At this, Excimer lamp be the light that penetrates as previously mentioned illumination can along with the time through and reduce.Therefore, at the initial stage of lighting a lamp, be that lamp 1 is supplied with to the electric power corresponding with target power data, lamp 1 is lit a lamp with the illumination consistent with object illumination thus, and still, along with the process of the time of lighting a lamp, the illumination of lamp 1 can reduce.
Correction power system calculation unit 4c reduces with the illumination of above-mentioned lamp 1 mode being corrected, and obtains by target power Z 1revised correction electric power Z 2.
That is, revise power system calculation unit 4c according to above-mentioned target power Z 1(after revising, be correction electric power Z 2), obtain illumination (the illuminations actually measured X being detected by described OPTICAL SENSORS 15 while making lamp 1 continue to light a lamp 2), judge this illuminations actually measured X 2with respect to described benchmark illumination X 4whether be reduced to below regulation ratio.
Then, revise power system calculation unit 4c as the illuminations actually measured X of lamp 1 2with respect to described benchmark illumination X 4be reduced to regulation ratio when following, the total of reading the lamp 1 that the is stored in described storage part 13 time T s that lights a lamp, the correction chart Tab with reference to being stored in storage part 13, obtains the correction electric power data Z corresponding with amounting to the time T s that lights a lamp 2, and make it be stored in storage part 13.
The illumination of the vacuum-ultraviolet light that Excimer lamp penetrates is because a variety of causes is along with the time is through reducing.In order to revise this illumination, reduce, must make the electric power that is supplied to Excimer lamp increase, as shown in Figure 4, the light a lamp relation of time and electric power correction factor of the total that is prescribed Excimer lamp at correction chart Tab.
; by each Excimer lamp, obtain the relation of the illumination reduced rate that amounts to light a lamp time and vacuum-ultraviolet light in advance; according to this relation, obtain for the illumination of vacuum-ultraviolet light being maintained to certain required electric power increment rate, in correction chart login, amount to the relation of light a lamp time and electric power correction factor.Therefore, read the electric power correction factor of this correction chart, by being multiplied by target power Z 1, can obtain and revise electric power data Z 2.
The control unit 4e that lights a lamp is calculating correction electric power data Z 2time, the electric power that is supplied to as previously mentioned lamp is become to revised correction electric power data Z 2modulating voltage and frequency carry out computing and send to the power supply 2 of lighting a lamp.The power supply 2 of lighting a lamp lights a lamp lamp 1 by this modulating voltage and frequency.
In addition, when calculating, revise electric power data Z 2, and revise electric power data Z according to this 2and when lamp 1 is lit a lamp, described benchmark illumination data obtains unit 4d using the illumination of the light being penetrated by lamp 1 of being measured by OPTICAL SENSORS 15 as new benchmark illumination X 4and be stored in storage part 13.
Below, with in the same manner described, judge with respect to said reference illumination X 4, whether the illumination being detected by described OPTICAL SENSORS 15 has been reduced to below regulation ratio, if be reduced to below regulation ratio, same as described above, obtains and amounts to corresponding correction electric power data Z of the time of lighting a lamp 2.
As implied above, lamp 1 is lit a lamp with certain electric power substantially, after the illumination of each lamp 1 is with respect to up-to-date correction, benchmark illumination is reduced to regulation ratio when following, total according to lamp is lit a lamp the time, increase supply to the electric power of lamp 1, the illumination of lamp 1 is carried out to top and revise, even if therefore the illumination of lamp 1 reduces along with time process, also the illumination of lamp 1 can be remained roughly certain.In addition, whether the detected value by OPTICAL SENSORS 15 gained is to use with respect to benchmark illumination, to be reduced to below regulation ratio in the illumination of judging lamp 1, even if therefore the detection sensitivity of OPTICAL SENSORS 15 reduces along with time process, can significantly not be subject to its impact yet.
Then, the action for the light supply apparatus of present embodiment, illustrates in detail by flow chart.
1. for the correction of data record and the OPTICAL SENSORS of IC tag
(1) for the data record of IC tag
First, by Fig. 5, for recording and intrinsic illumination data X in described IC tag 1the processing of corresponding percentage Y is illustrated.
Be different from the OPTICAL SENSORS 15 of the possibility that has sensitivity deterioration that the light supply apparatus shown in Fig. 1 possesses, and be configured in such as the OPTICAL SENSORS of the new product of factory etc. or the light supply apparatus of proofreading and correct complete OPTICAL SENSORS lamp 1 is set in use, at the IC tag 1a of this lamp 1, record above-mentioned data.This light supply apparatus is to be new product or to proofread and correct complete person except for example OPTICAL SENSORS, there is structure same as shown in Figure 1, for using the light supply apparatus shown in Fig. 1, the situation at IC tag 1a data writing is illustrated below, but also can use IC tag to write the special purpose device of use.That is, also can use special-purpose device, by the OPTICAL SENSORS of new product or proofread and correct the illumination that complete OPTICAL SENSORS is measured lamp, calculate and intrinsic illumination data X 1corresponding percentage Y, use IC tag to write the device of use and data writing to IC tag 1a.
Wherein, in following flow chart, be for intrinsic illumination data X 1the record of corresponding percentage Y is illustrated, but in IC tag, except these data, records as previously mentioned in addition to amount to and lights a lamp the time, and while being the lamp of new product, recording 0 and light a lamp the time as total.
(step S101)
First, read and be recorded in the benchmark electric power Z that reads private memory (ROM) 13b 0, with benchmark electric power Z 0lamp 1 is lit a lamp.
(step S102)
Whether confirmation is stable by the illumination of the emitted vacuum-ultraviolet light of lamp 1.This confirmation judges for example whether illumination change is below 1% in 5 minutes.When illumination is stablized, proceed to step S104.
(step S103)
When illumination is unstable, be confirmed whether overtime (time-out).Illumination be take interior when stablizing at 30 minutes, return to step S101.Even through 30 minutes, when illumination is also unstable as mentioned above, judge that lamp 1 is for poor products, and termination routine.
(step S104)
Intrinsic illumination data X when obtaining illumination and stablizing 1.Analog signal from OPTICAL SENSORS 15 converts digital signal to by A/D converter 16b, and this digital signal is as intrinsic illumination data X 1and be input to CPU11.
(step S105)
With the intrinsic illumination data X that is input to CPU 1corresponding value is recorded in IC tag 1a.At this, intrinsic illumination data X 1as shown in following (1) formula, as being stored in the intrinsic illumination data X that reads private memory (ROM) 13b 1to standard illumination data X 0percentage Y and be recorded in IC tag 12.
Y=（X 1/X 0）×100...（1）
(2) correction of OPTICAL SENSORS
Then, the corrective action for OPTICAL SENSORS, is illustrated by flow chart.Wherein, this action is corresponding with the action that the correcting unit 4f that utilizes Fig. 2 realizes.
Fig. 6 proofreaies and correct the flow process of OPTICAL SENSORS 15 according to the data that are recorded in IC tag.Above-mentioned correction, when at every turn the lamp that finishes useful life being replaced to new product, is carried out before carrying out for the photo-irradiation treatment of handled object.Till finishing to useful life of lamp, do not carry out the correction of OPTICAL SENSORS 15.
(step S201)
First, by CPU11 access (access) IC tag R/W portion 12, for IC tag 1a transmission frequency move instruction with 135kHz via antenna 14, by two-way communication, by IC tag 1a sense information, via IC tag R/W portion 12, at CPU11, receive this information.
CPU11 is lit a lamp the time by the total that is recorded in IC tag 1a, comes whether alarm lamp 1 is new product.The time T s=0 that lights a lamp if amount to, judges that lamp 1 proceeds to step S202 for new product.On the other hand, if not for amounting to the time T s=0 that lights a lamp, do not carry out the correction of OPTICAL SENSORS 15, and end process.
(step S202)
Obtain the intrinsic illumination data X that is recorded in IC tag 1a by CPU11 1percentage Y.That is, the transmission frequency move instruction by 12 couples of IC tag 1a of IC tag R/W portion with 135kHz, obtains percentage Y via antenna 14 by IC tag 1a.
(step S203)
Then, to be recorded in the benchmark electric power Z that reads private memory (ROM13b) of storage part 13 0 lamp 1 is lit a lamp.
(step S204)
Whether the illumination of the light that confirmation is penetrated by lamp 1 is stable.For example in 5 minutes, whether illumination change is below 1% in this confirmation judgement.If illumination is stable, proceed to step S206.
(step S205)
When illumination is unstable, be confirmed whether overtime (time-out).Illumination be take interior when stablizing at 30 minutes, return to step S201, and the program of execution step S201 to S204.Even through 30 minutes, when illumination is also unstable as mentioned above, judge that lamp 1 is for poor products, and termination routine.
(step S206)
Then, utilize OPTICAL SENSORS 15 to detect the illumination by the emitted light of lamp 1.Analog signal from OPTICAL SENSORS 15 converts digital signal to by A/D converter 16b, and this digital signal is as illuminations actually measured data X 2and be input to CPU11.
(step S207)
Finally, according to intrinsic illumination data X obtained in step S202 1and in step S206 obtained illuminations actually measured data X 2, the illumination data being output by OPTICAL SENSORS 15 is revised.The correction of step S207 is carried out as described below.
(i) according to the standard illumination data X that private memory (ROM13b) is read that reads by storage part 13 0, and the percentage Y that read by IC tag 1a, to intrinsic illumination data X 1value carry out computing.
As shown in following (2), obtain as intrinsic illumination data X 1adjusted coefficient K to the ratio of illuminations actually measured data X2.
Adjusted coefficient K=(intrinsic illumination data X 1)/(illuminations actually measured data X 2) ... (2)
(ii) at illuminations actually measured data X 2be multiplied by the adjusted coefficient K of trying to achieve in (2) formula.
As previously discussed, in factory etc., use the OPTICAL SENSORS of new product in advance or proofread and correct complete OPTICAL SENSORS and represent intrinsic illumination data X at IC tag record, percentage Y, according to the intrinsic illumination data X being obtained by it 1, and by the illuminations actually measured data X that is assemblied in the OPTICAL SENSORS gained of light supply apparatus 2the adjusted coefficient K of obtaining, can revise the illuminations actually measured data of being exported by vacuum ultraviolet (VUV) OPTICAL SENSORS.
Therefore, it is each when the Excimer lamp that finishes useful life is replaced to new product, first obtain above-mentioned adjusted coefficient K and store, by this adjusted coefficient K, the illumination data of being exported by sensor is revised, thereby, even if it is deteriorated because of long-time use to be assemblied in the vacuum ultraviolet (VUV) OPTICAL SENSORS of Excimer lamp, also can obtain the illumination of correct vacuum-ultraviolet light.
Therefore, according to the present invention, can solve since in the past, become problem because Excimer lamp being supplied with to excess power, and the illumination that produces the vacuum-ultraviolet light that is irradiated onto handled object significantly surpasses the bad situations such as the so-called overshoot (overshoot) of object illumination or Excimer lamp lifetime.
2. Photostabilised control
(1) all handling processes
First, all handling processes for the light supply apparatus of present embodiment are illustrated.
Fig. 7 is the flow chart of all handling processes that shows the light supply apparatus of present embodiment.
As shown in Figure 7, light supply apparatus moves as follows.
(step S1)
Device is started.
(step S2, S3)
By the IC tag that is arranged on lamp, obtain data.According to the time data of being lit a lamp by the obtained total of IC tag, judge that whether this lamp is the lamp (total is lit a lamp the time as 0) of new product.
(step S4)
If the lamp that this lamp is new product, makes lamp 1 with benchmark electric power Z 0light a lamp, and measure illumination by OPTICAL SENSORS 15.Then, as previously mentioned, according to determined illuminations actually measured and the intrinsic illumination X that obtains according to the percentage Y being read by IC tag 1, obtain for proofreading and correct the correction parameter of the output of OPTICAL SENSORS 15, according to this correction parameter, the output of OPTICAL SENSORS 15 is revised.
(step S5)
If this lamp is non-, be the lamp of new product, as previously mentioned, according to the intrinsic illumination X being read by IC tag 1and the object illumination X being set 3obtain target power Z 1, and with lamp electric power and target power Z 1consistent mode is controlled.
At this, utilize OPTICAL SENSORS 15 to detect as previously mentioned according to target power Z 1and illumination when lamp 1 is lit a lamp, when this illumination is with respect to benchmark illumination X 4be reduced to regulation ratio when following, obtain according to the total correction electric power Z that time T s tries to achieve that lights a lamp 2, come target power Z 1revise.
(step S6, S7)
Continue above move to lamp, turn off the light till, when lamp is turned off the light, carry out the processing of turning off the light of lamp, and desired data carried out for the light a lamp rewriting of time of the storage of rewritable nonvolatile memory (EEPROM) of storage part 13 and the total of IC tag.
(2) Photostabilised control
Illumination by the emitted light of lamp reduces along with the process of time.For illumination being maintained necessarily, when the illumination of lamp is reduced to regulation ratio when following with respect to object illumination, must control to increase supply to the mode of the electric power of lamp.
In the light supply apparatus of this example, as shown in the explanation of the flow process of following Fig. 8, in order to control the electric power that is supplied to lamp, use the total of the lamp that is recorded in IC tag to light a lamp the time, obtain accordingly the correction (correction electric power) of electric power.
Fig. 8 shows the flow chart of processing for the illumination of the light being penetrated by lamp being maintained to certain control.
(step S301)
By CPU11 access IC tag R/W portion 12, for IC tag 1a, the transmission frequency transmission instruction by antenna 14 with 135kHz, by two-way communication, by IC tag 1a sense information, receives this information by IC tag R/W portion 12 by CPU11.Thus, can obtain and the intrinsic illumination data X that is recorded in IC tag 1corresponding percentage Y and the total time T s that lights a lamp.
(step S302)
According to the total of gained in the step S301 time T s that lights a lamp, whether alarm lamp 1 is new product.If amount to the time T s=0 that lights a lamp, judge lamp 1 for new product and proceed to step S304.On the other hand, if not for amounting to the time T s=0 that lights a lamp, proceed to step S303.
(step S303)
If not amount to the time T s=0 that lights a lamp, at storage part 13(EEPROM13c) store the target power data Z when this lamp is first lit a lamp 1, and obtain this and store complete target power data Z 1.
(step S304)
Obtain the object illumination data X that inputs and be stored in storage part 13 by input part 5 3.
(step S305)
According to the object illumination data X of gained in step S304 3, the percentage Y that read by IC tag 1a and by storage part 13(ROM13b) the standard illumination data X that reads 0and benchmark electric power data Z 0, obtain in order to obtain the required target power data Z of object illumination 1.
Target power data Z 1as follows trying to achieve.
Intrinsic illumination X 1: object illumination X 3=benchmark electric power Z 0: target power Z 1
Target power Z 1=benchmark electric power Z 0* object illumination X 3/ intrinsic illumination X 1
By these target power data Z of obtaining as mentioned above 1be recorded in storage part 13(EEPROM13c).
(step S306)
Making hour totalizer (4g of Fig. 2) is ON, starts to measure to be aggregated in to amount to lighting a lamp the time of the time of lighting a lamp.
(step S307)
According to the target power data Z obtaining in step S303 or step S305 1, lamp 1 is lit a lamp.
Fig. 9 is for ease of understanding the program of following steps S308 to S313, and conceptual demonstration is to the illumination change of the time of lighting a lamp and the key diagram that is supplied to the electric power variation of lamp.The longitudinal axis of this figure means the illuminance (utilizing value and the object illumination of the illumination that the OPTICAL SENSORS of sensitivity deterioration measures) of lamp, and the transverse axis of this figure means lighting a lamp the time of lamp.
Wherein, the solid line of this figure means object illumination, adds the value that heavy line means the illumination being determined by deteriorated sensor.In addition, some chain lines of this figure mean that the illumination of the vacuum-ultraviolet light being penetrated by lamp is because a variety of causes is along with the situation of time through reducing, the dotted line system of this figure represents the sensitivity along with OPTICAL SENSORS, the situation that the illumination data being output by sensor can reduce along with time process.
Use Fig. 9, the summary by the performed program of following steps S308 to S313 is described.
At lamp, replace time point, carry out the correction of the OPTICAL SENSORS 15 shown in the flow chart of described Fig. 6, in the lighting a lamp of lamp, do not carry out the correction of the OPTICAL SENSORS 15 shown in the flow process of this figure.
The T of Fig. 9 0the illumination P1 of time point is according to target power data Z in step S307 1and the benchmark illumination X at initial stage when Excimer lamp is lit a lamp 4.
As shown in Figure 9, lamp is lit a lamp to determine electric power (target power), in the illumination of lamp with respect to initial stage benchmark illumination P 1be reduced to the P below regulation ratio 2t 1time point, the electric power that is supplied to lamp is revised, and by the illumination of lamp by P 2to P 3carrying out top revises.
This correction is as described later, as carried out to get off.
With reference to the correction chart Tab shown in Fig. 4, the total of reading this time point that the is stored in storage part 13 corresponding correction drag coefficient of time T s of lighting a lamp, is multiplied by this correction drag coefficient the target power of this time point that is stored in storage part 13, obtains and revises electric power Z 2, and this electric power is supplied to lamp 1.Then, utilize OPTICAL SENSORS 15 to detect the illumination of lamp 1 now, and form revised benchmark illumination P 3(=X 4).
The illumination P that this is revised through top 3be made as revised benchmark illumination.Revised benchmark illumination P 3with the illuminance of lamp along with the time through and reduce and OPTICAL SENSORS in light sensitivity along with the time through and the situation that reduces is corresponding, be therefore set to the value on some chain lines of this figure.
Afterwards, make lamp continue to light a lamp to determine electric power, in the illumination of lamp with respect to benchmark illumination P after revising 3be reduced to the P below regulation ratio 4t 2time point, in the same manner as described above, revises being supplied to the electric power of lamp, by the illumination of lamp by P 4carry out top and be modified to P 5.The illumination P that this is revised through top 5be made as revised benchmark illumination X 4.
Revised benchmark illumination P 5(=X 4) and above-mentioned P 3in the same manner, with the illuminance of lamp along with the time through and reduce and OPTICAL SENSORS in vacuum-ultraviolet light sensitivity along with the time through and the situation that reduces is corresponding, be therefore set to the value on some chain lines of this figure.
As implied above, substantially make lamp light a lamp to determine electric power, the illumination of each lamp with respect to up-to-date correction after benchmark illumination be reduced to regulation ratio when following, increase supply to the electric power of lamp, thus the illumination of lamp is done to top correction.Therefore, each while carrying out the correction of electric power, take time series benchmark illumination data X after older correction 4sequentially be updated to benchmark illumination data X after newer correction 4, only have up-to-date correction after benchmark illumination data be recorded in storage part 13(EEPROM13c).
Return to the flow process of Fig. 8, the program later for step S308 is illustrated.
(step S308)
By OPTICAL SENSORS, the illumination by the emitted light of lamp is detected.Analog signal from OPTICAL SENSORS 15 converts digital signal to by the A/D converter 16b shown in Fig. 1, as the benchmark illumination data X at initial stage 4(with the illumination P of Fig. 9 1corresponding) and be input to CPU.The benchmark illumination data X at this initial stage 4be recorded in storage part 13(EEPROM13c).
(step S309)
Confirmation is the benchmark illumination data X with respect to gained in step S308 by the illumination data of the detected light of OPTICAL SENSORS 4whether be reduced to below regulation ratio.Regulation ratio is different according to the kind of the handled object of execution photo-irradiation treatment, for example, be 10%.
If for example use Fig. 9 to be illustrated, T 1the illumination data P of time point 2with respect to illumination data P 1when reduction by 10% is above, proceed to step S310.Illumination data P 2with respect to illumination data P 1reduction while not surpassing 10%, proceed to step S313.
(step S310)
Read and be recorded in storage part 13(ROM13b) correction chart Tab(with reference to Fig. 4), the total that is stored in storage part 13 in this correction chart Tab application time T s that lights a lamp, obtains the correction drag coefficient corresponding with amounting to the time T s that lights a lamp.
Revising drag coefficient is as previously mentioned, will form the illumination data P of Fig. 9 for being supplied to the electric power of lamp 2carry out top and be adapted to P 3required grade and setting.
Wherein, the P of Fig. 9 3be the correction chart Tab with reference to Fig. 4, set with the reducing corresponding along with time process of sensitivity of OPTICAL SENSORS.For example, when the total time of lighting a lamp of Excimer lamp is 2000 hours, it is 1.1 that correction drag coefficient is obtained.According to this correction drag coefficient the correction electric power data Z that determined 2be recorded in storage part 13.
(step S311, step S312)
CPU11 is according to the correction electric power data Z of gained in step S310 2, to power supply 2 move instructions of lighting a lamp, by the power supply 2 of lighting a lamp, the electric power that is supplied to lamp 1 is increased.
Make lamp 1 according to revising electric power data Z 2and while lighting a lamp, by OPTICAL SENSORS 15, come sensing by the illumination of the emitted light of lamp 1.From the analog signal of OPTICAL SENSORS 15 by A/D converter 16b(with reference to Fig. 1) and be converted into digital signal, as revised benchmark illumination data X 4input to CPU11, and be recorded in storage part 13.Revised benchmark illumination data X 4the illumination P with Fig. 9 3corresponding.
(step S313)
CPU11 is confirmed whether to be transfused to the lamp signal of turning off the light.If be transfused to the lamp signal of turning off the light, stop lamp 1 supply with electric power and lamp is turned off the light.
If be not transfused in step S313 while having Excimer lamp to turn off the light signal, return to step S309, repeatedly perform step the program of S309 to S312.
Processing while being back to step S309 by step S313 is same as described above, in step S309, confirms that the illumination data detected by OPTICAL SENSORS 15 is whether with respect to the revised benchmark illumination data X of gained in step S312 4for for example reducing more than 10%, if reduce more than 10%, proceed to step S310.If illumination reduces, do not surpass 10%, proceed to step S313.
Then, as previously mentioned with reference to correction chart Tab, obtain the correction drag coefficient corresponding with amounting to the time T s that lights a lamp, according to this correction drag coefficient the correction electric power data Z that determined 2be recorded in storage part 13.
CPU11 is as previously mentioned according to above-mentioned correction electric power data Z 2and to lighting a lamp power supply 2 move instructions, the electric power that is supplied to lamp 1 is increased.
In addition by OPTICAL SENSORS, detect according to revising electric power data Z, 2and illumination when lamp 1 is lit a lamp, and as revised benchmark illumination data X 4store.
As implied above, lamp turn off the light signal be input to till CPU11 during, be that one side is sequentially updated to up-to-date benchmark illumination data and revises electric power data take time series as older benchmark illumination data and revising electric power data, one side is recorded in EEPROM13c only has up-to-date benchmark illumination data and correction electric power data to be stored in storage part 13(EEPROM13c).
Figure 10 is the flow chart that shows the processing while turning off the light.
While turning off the light in the figure,, be to carry out following processing.
(step S11)
Carry out the processing of turning off the light of lamp.Under the situation that is Excimer lamp at lamp, for example, when turning off the light, with low-voltage, apply high-frequency voltage, suppress the split pole of discharge vessel and turn off the light.
(step S12)
The power supply 2 of lighting a lamp turn-offs (off), and hour totalizer is formed to shutoff.
(step S13)
In the IC tag of lamp, write the data of storage part 13, in addition, make as required the content that belongs to the RAM that reads write memory be stored to the nonvolatile memories such as EEPROM etc.
(step S14)
The power supply of control part is formed to shutoff (off).
As shown above, the light-source system of present embodiment is when the illumination of the light of lamp reduces over prescribed limit, according to correction chart and the total that is recorded in IC tag, light a lamp the time, obtain correction electric power data, and control being supplied to the electric power of Excimer lamp according to this correction electric power data.
Therefore, even in the situation that the illumination of the vacuum-ultraviolet light of lamp reduces along with time process, also the illumination of lamp can be maintained necessarily.
And, when the illuminance of each lamp reduces over prescribed limit, record the up-to-date benchmark illumination data that illumination reduces and the sensitivity of OPTICAL SENSORS is corresponding along with time process with lamp, even if therefore the sensitivity of OPTICAL SENSORS, also can be maintained the illumination of lamp necessarily with high accuracy.

Claims (3)

1. a lighting control method thereof for light supply apparatus, this light supply apparatus has: from the read/write unit of information that is arranged on the IC tag of light source; The detecting unit that illumination by the emitted light of light source is detected; And control the control part of lighting a lamp of light source, being characterized as of the lighting control method thereof of this light supply apparatus,
The total that at least records intrinsic illumination data and this light source in above-mentioned IC tag is lit a lamp the time, and above-mentioned intrinsic illumination data is relevant to the illumination of the light being penetrated by this light source when light source is lit a lamp with the benchmark electric power of regulation,
In above-mentioned IC tag, record by the value of proofreading and correct complete detecting unit and determine the illumination by the emitted light of this light source while lighting a lamp with the benchmark electric power of described regulation, as described intrinsic illumination data,
The control part of above-mentioned light supply apparatus, according to the intrinsic illumination data of reading from the IC tag of described light source and the object illumination data that set, obtains in order to obtain the required target power data of these object illumination data,
Described light source is lit a lamp according to target power data, utilize described detecting unit to detect the illumination of the light that this time point of lighting a lamp penetrates by this light source, and detected illumination is shone as benchmark
Degrees of data is carried out record,
By described detecting unit, detect the illumination of the light source while making this light source continue to light a lamp according to above-mentioned target power data, whether the illumination data of the described light source that judgement is detected by this detecting unit has been reduced to below regulation ratio with respect to the benchmark illumination data of described record
When the illumination data of light source has been reduced to regulation ratio when following with respect to the benchmark illumination data of described record, according to the total of the light source of being read by described IC tag, light a lamp the time, obtain and the total of this light source corresponding correction electric power data of time of lighting a lamp,
According to this correction electric power data, described target power data are revised, and according to revised target power data, light source are lit a lamp,
And be arranged on above-mentioned light supply apparatus detecting unit sensitivity along with the time through and deteriorated,
When above-mentioned light supply apparatus is provided with new light source, this light source is lit a lamp with said reference electric power, and by being arranged on the detecting unit of this light supply apparatus, measure the illumination by the emitted light of this light source,
The intrinsic illumination data of reading according to the illumination data of being measured by the detecting unit that is arranged on above-mentioned light supply apparatus and from described IC tag, obtain the correction parameter of the measured value of proofreading and correct the detecting unit that is arranged on above-mentioned light supply apparatus, according to this correction parameter, the output of detecting unit is revised.
2. the lighting control method thereof of light supply apparatus as claimed in claim 1, is characterized by,
In described target power data, be corrected, and while light source being lit a lamp according to revised target power data, the illumination of the light being penetrated by this light source of being measured by described detecting unit carried out to record as new benchmark illumination data,
Whether the illumination data of the described light source that judgement is detected by described detecting unit has been reduced to below regulation ratio with respect to above-mentioned new benchmark illumination data.
3. a light supply apparatus, has: from the read/write unit of information that is arranged on the IC tag of light source; The detecting unit that illumination by the emitted light of light source is detected; And the control part of lighting a lamp of control light source, this light supply apparatus is characterized as:
The total that at least records intrinsic illumination data and this light source in above-mentioned IC tag is lit a lamp the time, this intrinsic illumination data to make light source relevant by the illumination of the emitted light of this light source while lighting a lamp with the benchmark electric power of regulation,
In above-mentioned IC tag, record by the value of proofreading and correct complete detecting unit and determine the illumination by the emitted light of this light source while lighting a lamp with the benchmark electric power of described regulation, as described intrinsic illumination data,
The control part of above-mentioned light supply apparatus has:
Target power data computing unit, according to the intrinsic illumination data of being read by the IC tag of described light source and the object illumination data that are set, obtains in order to obtain the required target power data of these object illumination data;
Storage part;
Benchmark illumination data obtains unit, described light source is lit a lamp according to above-mentioned target power data, the illumination data by the emitted light of this light source that the time point that makes to light a lamp at this utilizes described detecting unit to detect, is recorded in above-mentioned storage part as benchmark illumination data;
Revise power system calculation unit, the illumination of the light source that judgement is detected by described detecting unit while making this light source continue to light a lamp according to above-mentioned target power data, with respect to described benchmark illumination data, whether be reduced to below regulation ratio, when determining the illumination data of light source, with respect to the described benchmark illumination data being recorded, be reduced to regulation ratio when following, according to the total of the light source of being read by described IC tag, light a lamp the time, obtain and the total of this light source corresponding correction electric power data of time of lighting a lamp, and according to this correction electric power data, described target power data are revised, and
The control unit of lighting a lamp, the mode that is supplied to light source with the above-mentioned target power of being revised is controlled,
Be arranged on above-mentioned light supply apparatus detecting unit sensitivity along with the time through and deteriorated,
The control part of above-mentioned light supply apparatus has the correcting unit of above-mentioned detecting unit,
This correcting unit is when above-mentioned light supply apparatus is provided with new light source, this light source is lit a lamp with said reference electric power, the illumination of the light being penetrated by this light source detecting according to the detecting unit by being arranged on this light supply apparatus and the intrinsic illumination data of being read by described IC tag, obtain the correction parameter of the measured value of proofreading and correct the detecting unit that is arranged on above-mentioned light supply apparatus, and according to this correction parameter, the output of detecting unit is revised.
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