TW201005790A - Lightening control method of light source and light source thereof - Google Patents

Lightening control method of light source and light source thereof Download PDF

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Publication number
TW201005790A
TW201005790A TW098116740A TW98116740A TW201005790A TW 201005790 A TW201005790 A TW 201005790A TW 098116740 A TW098116740 A TW 098116740A TW 98116740 A TW98116740 A TW 98116740A TW 201005790 A TW201005790 A TW 201005790A
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Taiwan
Prior art keywords
light source
illuminance
data
lamp
power
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TW098116740A
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Chinese (zh)
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TWI412062B (en
Inventor
Masaki Nakamura
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Ushio Electric Inc
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Publication of TW201005790A publication Critical patent/TW201005790A/en
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Publication of TWI412062B publication Critical patent/TWI412062B/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V23/00—Arrangement of electric circuit elements in or on lighting devices
    • F21V23/04—Arrangement of electric circuit elements in or on lighting devices the elements being switches
    • F21V23/0442—Arrangement of electric circuit elements in or on lighting devices the elements being switches activated by means of a sensor, e.g. motion or photodetectors
    • F21V23/0464—Arrangement of electric circuit elements in or on lighting devices the elements being switches activated by means of a sensor, e.g. motion or photodetectors the sensor sensing the level of ambient illumination, e.g. dawn or dusk sensors
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B47/00—Circuit arrangements for operating light sources in general, i.e. where the type of light source is not relevant
    • H05B47/10—Controlling the light source
    • H05B47/105—Controlling the light source in response to determined parameters
    • H05B47/11—Controlling the light source in response to determined parameters by determining the brightness or colour temperature of ambient light
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B20/00—Energy efficient lighting technologies, e.g. halogen lamps or gas discharge lamps
    • Y02B20/40—Control techniques providing energy savings, e.g. smart controller or presence detection

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Circuit Arrangement For Electric Light Sources In General (AREA)

Abstract

The present invention can maintain consistency of the illumination intensity of light emitted from a lamp. In addition, it can automatically calibrate the detection sensitivity of a deteriorated optical sensor. The technical solution of the present invention is as follows. The total lighting time of lamp 1 is first recorded on an IC tag 1a of lamp 1. Let the lamp 1 on by applying a target power to generate target illumination intensity and measure it by using an optical sensor 15. If the illumination intensity drop exceeds a certain percentage, the power supplied to the lamp 1 is then corrected. The correction is made by referring to the correction table that regulates the relationship between the said total lighting time and the corrected power and calculating the corrected power corresponding to the total lighting time to control the power supplied to lamp 1. In addition, the correct light illumination data of each lamp is determined from an un-deteriorated optical sensor and written to the IC tag 1a. When the lamp is installed on the device, the illumination data and the illumination intensity outputted from the optical sensor 15 of the light source are compared in order to calibrate the output of optical sensor 15.

Description

201005790 六、發明說明： 【發明所屬之技術領域】 本發明係關於放射紫外線等光之光源裝置的亮燈控制 方法及光源裝置’尤其是關於可對應於光源的光輸出的經 時變化，將供給至光源的電力進行控制，此外，可利用被 設在光源的1C標籤所記憶的資料，來校正由用以感測光 源照度的感測手段所被輸出的資料之光源裝置之亮燈控制 # 方法及光源裝置。 【先前技術】 υν/03洗淨法係作爲將紫外線與屬於活性氧種的臭氧 (〇3 )加以組合的洗淨方法而廣受利用，藉由在例如 LCD用基板或半導體基板表面照射紫外線，將附著在該等 基板表面的有機化合物等分子鍵結切斷，藉此去除附著在 基板表面的有機化合物等雜質爲其目的。 ® 近年來，以如上所示之uv/o3洗淨法中所使用的光 源而言，係使用藉由將例如氙氣等作爲發光物質而出射波 長172nm之真空紫外線之洗淨能力佳的準分子燈，來取 代自以往以來所使用之出射波長185nm及254nm之紫外 線的低壓水銀燈。如上所示之準分子燈係被揭示於例如專 利文獻1等。 在使用如上所示之準分子燈的光源裝置中，必須確認 準分子燈的亮燈狀態，俾以進行可靠性高的紫外光照射處 理。但是，由於主要所放射的光爲真空紫外光，因此該準 -5- 201005790 分子燈的亮燈狀態並無法以目測來確認。因此，用以確認 準分子燈之亮燈狀態及在亮燈時由準分子燈所出射的光輸 出的各種手法即被提出。 以確認準分子燈之亮燈狀態的手法而言，已知一種手 法例如專利文獻1所示，其利用真空紫外光感測器來感測 由準分子燈所被放射的真空紫外光》 例如第11圖所示，藉由該感測真空紫外光的手法來 確認準分子燈之亮燈狀態的準分子燈裝置係具備有：被裝 Q 設在構成外殼80中之頂棚面之冷卻塊81之狀態下的4個 準分子燈90，在該冷卻塊81係在各準分子燈90的正上 方區域形成有屬於貫穿孔的光導入孔81A，在該光導入孔 8 1 A的一端側設有真空紫外光感測器8 9。在圖中，83係 用以將由準分子燈90所放射的光照射在被處理體的光取 出窗部。 但是，檢測真空紫外光的光感測器由於真空紫外光的 感度會經時性降低，因此可知隨著使用時間加長，無法獲 Θ 得由作爲感測對象的準分子燈所出射的真空紫外光的正確 照度資料。 例如，若總計使用6000小時用以檢測真空紫外光的 光感測器時，該光感測器的檢測量會降低約1 〇%。因此， 當根據由光感測器所被輸出的真空紫外光的照度資料，來 調整供給至準分子燈的電力時，會被判斷出由準分子燈所 被出射的真空紫外光照度會較低，由於對準分子燈供給過 量的電力，因此會有準分子燈壽命變短之虞。 -6- 201005790 另一方面，準分子燈係當在例如總計亮燈3 000小時 的情形下，隨著構成發光管之石英玻璃等的劣化，所出射 之真空紫外光的照度會比初期亮燈時更加降低約70%。因 此，必須定期替換成新品。 其中，由於檢測真空紫外光的光感測器較爲昂貴，因 此並不能頻繁地替換成新品，並無法實際上與準分子燈同 時作替換。 # 此外，燈一般難以由其外觀來判斷是否已屆使用壽命 末期，尤其準分子燈係隨著構成發光管的石英玻璃等的劣 化而使所出射之真空紫外光的照度降低者，因此難以由外 觀來判斷是否已屆使用壽命。 因此，在各個燈設置1C標籤，使燈的總計亮燈時間 資訊記憶在該1C標籤，以管理總計亮燈時間的裝置已被 提出（例如參照專利文獻2 )。 在第12圖顯示裝載有設有1C標籤之燈的紫外線照射 ® 裝置的剖面圖。該圖係以與燈的管軸呈平行的平面所切的 剖面圖。其中，在該圖中係顯示使用準分子燈作爲燈的情 形。 如該圖所示，紫外線照射裝置係具有使惰性氣體在內 部循環的金屬製框體101。在框體101內部配置有以管軸 呈平行的方式並聯配置的複數支準分子燈100。沿著準分 子燈100’與各準分子燈1相對應設有將由準分子燈所放 射的紫外線朝向被處理物方向反射的導水筒狀反射鏡102 。設有反射鏡1 02的各準分子燈1 00係被固定在例如水冷 201005790 管在內部循環的鋁製冷卻塊103。 準分子燈100係在使真空紫外光透過之由介電質材料 所構成的發光管l〇〇a的兩端，分別形成埋設有金屬箔 100e的密封部l〇〇f，在發光管100a的內部，線圈狀的內 部電極100b被配置在發光管100a的管軸上，內部電極 10 0b的周圍藉由絕緣體100d予以覆蓋。此外，在發光管 l〇〇a的外表面配置有網狀的外部電極100c。 在各金屬箔l〇〇e連接有朝發光管100a外方突出的外 部引線100g，在外部引線l〇〇g連接有高壓供電纜線120c ，且在其端部設有高壓供電端子120。 在框體101安裝有樹脂製的連接器110，在該連接器 110內設有天線140。此外，在高壓供電纜線120c的端部 安裝有高壓供電端子120,在高壓供電端子120的絕緣保 持具內設有1C標籤130。 藉由在上述連接器1 10插入高壓供電端子120的插頭 ，使內部電極l〇〇b與高頻亮燈電源呈導通。關於外部電 ❹ 極10 0c雖未圖示，但是同樣地與高頻亮燈電源呈導通。 第13圖係顯示用以使上述具備有1C標籤之準分子燈 亮燈之控制系統之構成例的槪念圖。 與準分子燈1的電極相連接的高壓供電纜線的高壓供 電端子120係透過前述之連接器11〇而與高頻亮燈電源 2 00相連接，由高頻亮燈電源200供給高壓•高頻電壓， 藉此使準分子燈100亮燈。 如前所述在連接器110設有天線140，天線140係與 -8- 201005790 用以對1C標籤寫入資料、或讀出資料的讀取器/寫入器 23 0相連接。CPU210係對上述讀取器/寫入器23 0進行控 制，對1C標籤寫入資料、或由1C標籤讀取資料，並且對 上述高頻亮燈電源200進行控制，以控制燈1 00的亮燈。 在第1 3圖中，亮燈控制係如下所示來進行。 在準分子燈100亮燈開始前，透過天線140藉由讀取 器/寫入器23 0讀出被記憶在1C標籤130之前次使用時爲 • 止的總計亮燈時間資訊，使該資訊記憶在與CPU2 1 0相連 接的記憶體220。 在1C標籤130亦記憶有在各個準分子燈100爲固有 的使用壽命時間資訊，CPU2 10係調查由1C標籤130所被 讀出的總計亮燈時間是否在使用壽命時間以下，若總計亮 燈時間在使用壽命時間以下時，由CPU210對高頻亮燈電 源200傳送亮燈訊號。藉此，高頻亮燈電源200係對準分 子燈1〇〇供給高壓高頻電壓，而使準分子燈100亮燈。 ® 準分子燈100亮燈中，係隨時將最新的亮燈時間資訊 加算在被記憶在記憶體220的總計亮燈時間。 接著，若總計亮燈時間到達使用壽命時間，CPU2 1 0 係對高頻亮燈電源2 00傳送亮燈停止訊號，而將準分子燈 1 0 0滅燈。 此外，在總計亮燈時間到達使用壽命時間之前，若使 準分子燈滅燈，在準分子燈滅燈後，即在被記憶在記憶體 220的總計亮燈時間加算最新亮燈時間，藉由讀取器/寫入 器230，使最新總計亮燈時間透過天線而記憶在1C標籤 201005790 130° 藉由以上控制，針對各個準分子，可有效管理準分子 燈積算亮燈時間資訊。 (專利文獻1 )日本專利第27895 57號說明書 (專利文獻2)日本特開2007-123069公報 【發明內容】 (發明所欲解決之課題） @ 如前所述，準分子燈係在例如總計亮燈3 000小時時 ，所出射之真空紫外光的照度會比初期亮燈時降低約70% 〇 另一方面，以確認準分子燈之亮燈狀態的手法而言， 如前所述，已知一種利用光感測器來感測真空紫外光的手 法，但是該類光感測器的感度會經時降低。因此，隨著使 用時間變長，愈無法獲得由燈所出射之光的正確照度資料 ，即使根據由光感測器所被輸出的照度資料來調整供給至 〇 燈的電力，亦無法將照度維持在一定狀態。 亦即，如使採用用以檢測真空紫外光之光感測器的準 分子燈亮燈的光源裝置等所示，在具備檢測感度經時性劣 化的光感測器，藉由該光感測器來檢測照度會伴隨著時間 而降低的燈的光，以控制照度的光源裝置中，除了光感測 器的檢測感度劣化以外，燈的照度會經時性降低，因此由 燈所出射的光的照度以歷經長時間而精度佳地成爲所希望 的値的方式進行控制乃極爲困難。 -10- 201005790 此外，如上所述在使用感度會經時性降低的光感測器 時，在將光感測器安裝在光源裝置的情況下直接可自動校 正光感測器的檢測感度爲宜，但是具備有如上所示之功能 的光源裝置尙未爲人所知。 本發明係鑑於上述情形而硏創者，本發明之目的在於 在使用光照度會伴隨著時間而降低的燈，且用以確認燈之 亮燈狀態的光感測器的感度會經時性劣化的光源裝置中， Φ 可精度佳地控制由燈所出射之光的照度且將照度保持爲一 定，此外，可在將光感測器安裝在光源裝置的情況下直接 自動校正感度已劣化之光感測器的檢測感度。 (解決課題之手段） 在本發明中，如下所示解決前述課題。 A.由燈所出射之光的穩定化控制 ® 本發明係以由燈所被出射之光的照度與目標値相一致 的方式進行控制，而將照度維持爲一定。 準分子燈之所被出射之光的照度因各種要因而隨著時 間經過而降低。如上所示，爲了將照度經時性降低的燈的 照度維持爲一定，當照度降低至相對於目標照度爲預定比 例以下時，必須以增加供給至燈之電力的方式進行控制。 以如上所示之對供給至燈的電力進行控制的手段而言 ，在本發明中，係使用被安裝在燈的1C標籤，根據被記 錄在1C標籤的該燈的總計亮燈時間，對供給至燈的電力 -11 - 201005790 進行控制。 亦即，在本發明中，藉由感測手段，進行感測照度降 低是否已超過一定比例，並且當照度降低已超過一定比例 時，即對供給至燈的電力進行補正（增加）。 該電力的補正係使用例如將燈的總計亮燈時間與補正 電力資料的關係加以規定的補正表等。接著，求出與總計 亮燈時間相對應的補正電力，對供給至燈的電力進行控制 0 亦即，藉由使用1C標籤，可記錄燈的總計亮燈時間 ，且可根據被記錄在1C標籤的總計亮燈時間，來取得補 正電力的資料。 B .光感測器的補正 在本發明中，因裝配在光源裝置的光感測器的劣化， 爲了與光的感測感度的降低相對應，對由裝配在裝置之真 空紫外光感測器所被輸出的照度資料進行校正。 ® 該校正係使用藉由有別於被設在光源裝置之光感測器 之其他新品的光感測器所測定出的値來進行。 例如使用被設在工廠等的新品的感測器，藉由該新品 的感測器，求出每個燈之光的正確照度資料，且寫入至被 設在各燈的1C標籤。 接著，例如在燈替.換時，將該照度與由被裝配在準分 子燈裝置之感測器所被輸出的照度資料作對比，以後者的 値與前者的値相一致的方式來對後者的値作上方補正。 -12- 201005790 根據以上所述，在本發明中，如以下解決前述課題。 (1) 在被設在光源的ic標籤至少記錄當使光源以預定 的基準電力亮燈時由該光源所被出射之光的照度相關的固 有照度資料及該光源的總計亮燈時間。 光源裝置係具備有：來自上述1C標籤之資訊的讀取/ 寫入手段；對由光源所被出射的光的照度進行感測的感測 手段；及控制光源之亮燈的控制部的光源裝置，光源裝置 ® 的控制部係根據由前述光源之1C標籤所讀出的固有照度 資料；及所被設定的目標照度資料，求出爲了獲得該目標 照度資料所需的目標電力資料，使前述光源根據目標電力 資料而亮燈，利用前述感測手段來感測該時間點中由該光 源所被出射之光的照度，將所感測到的照度作爲基準照度 資料加以記錄。 接著’藉由前述感測手段來感測根據上述目標電力資 料而使該光源繼續亮燈時之光源的照度，判定藉由該感測 ® 手段所被感測的前述光源的照度資料是否已降低至相對於 前述所被記錄的基準照度資料爲預定比例以下。當光源的 照度資料已降低至相對於前述所被記錄之基準照度資料爲 預定比例以下時’根據由前述1C標籤所讀出的光源的總 計亮燈時間，求出該光源的總計亮燈時間所對應的補正電 力資料，根據該補正電力資料來對前述目標電力資料進行 補正’將所補正的目標電力資料供給至光源。 (2) 在上述（1)中，目標電力資料被補正，且根據所補 正的目標電力資料來使光源亮燈時，將在前述感測手段所 13- 201005790 測定之由該光源所被出射的光的照度作爲新的基準照度資 料加以記錄，判定藉由前述感測手段所被感測的前述光源 的照度資料是否已降低至相對於上述新的基準照度資料爲 預定比例以下。 (3) 在上述（1)(2)中，在上述1C標籤記錄藉由校正完 畢的感測手段來測定並記錄當以前述預定的基準電力亮燈 時之由該光源所被出射的光的照度，作爲由設有該1C標201005790 VI. TECHNOLOGICAL FIELD OF THE INVENTION [Technical Field] The present invention relates to a lighting control method and a light source device for a light source device that emits ultraviolet light or the like, in particular, with respect to a temporal change in light output that can correspond to a light source, which will be supplied The power to the light source is controlled, and the lighting control method of the light source device that corrects the data output by the sensing means for sensing the illumination of the light source by using the data stored in the 1C tag of the light source can be used. And light source device. [Prior Art] The υν/03 washing method is widely used as a cleaning method in which ultraviolet rays are combined with ozone (〇3) which is an active oxygen species, and is irradiated with ultraviolet rays on, for example, a substrate for an LCD or a surface of a semiconductor substrate. It is intended to cut off molecular bonds such as organic compounds adhering to the surface of the substrate, thereby removing impurities such as organic compounds adhering to the surface of the substrate. In recent years, in the light source used in the uv/o3 cleaning method as described above, an excimer lamp having a good cleaning ability of a vacuum ultraviolet ray having a wavelength of 172 nm by using, for example, helium or the like as a light-emitting substance is used. In place of the low-pressure mercury lamps of the ultraviolet rays having a wavelength of 185 nm and 254 nm which have been used in the past. The excimer lamp system as shown above is disclosed, for example, in Patent Document 1. In the light source device using the excimer lamp as shown above, it is necessary to confirm the lighting state of the excimer lamp, and to perform highly reliable ultraviolet light irradiation treatment. However, since the main emitted light is vacuum ultraviolet light, the lighting state of the quasi-5-201005790 molecular lamp cannot be confirmed by visual inspection. Therefore, various methods for confirming the lighting state of the excimer lamp and the light output by the excimer lamp at the time of lighting are proposed. In order to confirm the lighting state of the excimer lamp, a method is known, for example, as disclosed in Patent Document 1, which uses a vacuum ultraviolet light sensor to sense vacuum ultraviolet light emitted by an excimer lamp. As shown in Fig. 11, the excimer lamp apparatus for confirming the lighting state of the excimer lamp by the method of sensing the vacuum ultraviolet light is provided with a cooling block 81 provided with a Q disposed on the ceiling surface constituting the outer casing 80. In the four excimer lamps 90 in the state in which the cooling block 81 is directly above the excimer lamp 90, a light introducing hole 81A belonging to the through hole is formed, and one end side of the light introducing hole 8 1 A is provided. Vacuum ultraviolet light sensor 8 9 . In the figure, 83 is used to illuminate the light emitted from the excimer lamp 90 to the light take-out window of the object to be processed. However, since the sensitivity of the vacuum ultraviolet light is lowered with time due to the sensitivity of the vacuum ultraviolet light, it is known that the vacuum ultraviolet light emitted from the excimer lamp as the sensing object cannot be obtained as the use time is lengthened. Correct illumination data. For example, if a total of 6000 hours of photosensor for detecting vacuum ultraviolet light is used, the amount of detection of the photosensor is reduced by about 1%. Therefore, when the electric power supplied to the excimer lamp is adjusted according to the illuminance data of the vacuum ultraviolet light outputted by the photo sensor, it is judged that the vacuum ultraviolet illuminance emitted by the excimer lamp is low, Since the aligned molecular lamps supply excessive power, there is a possibility that the life of the excimer lamp becomes short. -6- 201005790 On the other hand, when the excimer lamp system is, for example, 3,000 hours in total, the illuminance of the vacuum ultraviolet light emitted will be brighter than the initial one with the deterioration of the quartz glass or the like constituting the arc tube. The time is reduced by about 70%. Therefore, it must be replaced regularly with new products. Among them, since the photosensor for detecting vacuum ultraviolet light is expensive, it cannot be frequently replaced with a new one, and it cannot be actually replaced with an excimer lamp at the same time. # In addition, it is generally difficult for the lamp to judge whether it has reached the end of its useful life by its appearance. In particular, the excimer lamp system reduces the illuminance of the emitted vacuum ultraviolet light with the deterioration of the quartz glass or the like constituting the arc tube, and thus it is difficult to Appearance to determine whether it has reached the end of its useful life. Therefore, a device for setting a 1C label for each lamp so that the total lighting time information of the lamp is stored in the 1C tag to manage the total lighting time has been proposed (for example, refer to Patent Document 2). In Fig. 12, a cross-sectional view of an ultraviolet irradiation ® device equipped with a lamp having a 1C label is shown. The figure is a cross-sectional view cut in a plane parallel to the tube axis of the lamp. Here, the case where the excimer lamp is used as the lamp is shown in the figure. As shown in the figure, the ultraviolet irradiation device has a metal casing 101 that circulates an inert gas inside. Inside the casing 101, a plurality of complementary molecular lamps 100 arranged in parallel with the tube axes being parallel are disposed. A water-conducting cylindrical mirror 102 that reflects ultraviolet rays emitted from the excimer lamp toward the object to be processed is provided along the quasi-molecular lamp 100'. Each of the excimer lamps 100 provided with the mirror 102 is fixed to an aluminum cooling block 103 which is internally circulated, for example, by a water-cooled 201005790 tube. The excimer lamp 100 is formed at each end of the light-emitting tube 10a composed of a dielectric material through which vacuum ultraviolet light is transmitted, and a sealing portion 10f embedded with the metal foil 100e is formed in the light-emitting tube 100a. Inside, the coil-shaped internal electrode 100b is disposed on the tube axis of the arc tube 100a, and the periphery of the internal electrode 100b is covered by the insulator 100d. Further, a mesh-shaped external electrode 100c is disposed on the outer surface of the arc tube l〇〇a. An outer lead 100g protruding outward from the light-emitting tube 100a is connected to each of the metal foils 10e, a high-voltage supply cable 120c is connected to the outer lead 10g, and a high-voltage power supply terminal 120 is provided at the end. A connector 110 made of resin is attached to the casing 101, and an antenna 140 is provided in the connector 110. Further, a high voltage power supply terminal 120 is attached to the end of the high voltage power supply cable 120c, and a 1C tag 130 is provided in the insulation holder of the high voltage power supply terminal 120. The internal electrode 10b is electrically connected to the high-frequency lighting power source by inserting the plug of the high-voltage power supply terminal 120 into the connector 110. Although the external electric pole 10 0c is not shown, it is electrically connected to the high-frequency lighting power source in the same manner. Fig. 13 is a view showing a configuration example of a control system for lighting the excimer lamp having the 1C tag described above. The high-voltage power supply terminal 120 of the high-voltage supply cable connected to the electrode of the excimer lamp 1 is connected to the high-frequency lighting power supply 200 through the connector 11〇, and is supplied with high-voltage and high-frequency voltage by the high-frequency lighting power supply 200. This causes the excimer lamp 100 to illuminate. The connector 110 is provided with an antenna 140 as described above, and the antenna 140 is connected to the reader/writer 230 for reading data from the 1C tag or reading the data from -8 to 201005790. The CPU 210 controls the reader/writer 230, writes data to the 1C tag, or reads data from the 1C tag, and controls the high-frequency lighting power supply 200 to control the lighting of the lamp 100. In Fig. 13, the lighting control system is performed as follows. Before the start of the illumination of the excimer lamp 100, the total lighting time information stored in the previous use of the 1C tag 130 is read by the reader/writer 23 0 through the antenna 140, so that the information memory is made. The memory 220 is connected to the CPU 2 10 . The 1C tag 130 also stores information on the life time inherent in each of the excimer lamps 100, and the CPU 2 10 checks whether the total lighting time read by the 1C tag 130 is below the service life time, if the total lighting time is When the life time is below, the CPU 210 transmits a lighting signal to the high-frequency lighting power source 200. Thereby, the high-frequency lighting power supply 200 supplies the high-voltage high-frequency voltage to the sub-lamp 1〇〇, and the excimer lamp 100 is turned on. When the excimer lamp 100 is lit, the latest lighting time information is added to the total lighting time stored in the memory 220 at any time. Then, if the total lighting time reaches the service life time, the CPU 2 1 0 transmits a lighting stop signal to the high-frequency lighting power supply 200, and turns off the excimer lamp 1 0 0. In addition, if the excimer lamp is turned off before the total lighting time reaches the service life time, the latest lighting time is added after the excimer lamp is turned off, that is, when the total lighting time stored in the memory 220 is added. The reader/writer 230 allows the latest total lighting time to pass through the antenna and is stored in the 1C tag 201005790 130°. With the above control, the accelerometer lamp integration time information can be effectively managed for each excimer. (Patent Document 1) Japanese Patent No. 27895 57 (Patent Document 2) JP-A-2007-123069 SUMMARY OF INVENTION (Problems to be Solved by the Invention) @ As described above, excimer lamps are, for example, brightly lit. When the lamp is 3 000 hours, the illuminance of the vacuum ultraviolet light emitted will be reduced by about 70% compared with the initial lighting. On the other hand, in order to confirm the lighting state of the excimer lamp, as described above, it is known. A method of sensing vacuum ultraviolet light using a light sensor, but the sensitivity of such a light sensor is reduced over time. Therefore, as the use time becomes longer, the correct illuminance data of the light emitted by the lamp cannot be obtained, and even if the electric power supplied to the xenon lamp is adjusted according to the illuminance data output by the photo sensor, the illuminance cannot be maintained. In a certain state. That is, as shown by a light source device or the like that illuminates the excimer lamp using the photosensor for detecting vacuum ultraviolet light, the photosensor having the sensitivity of the detection sensitivity is deteriorated by the light sensing In order to detect the light of the lamp whose illuminance is lowered with time, in the light source device for controlling the illuminance, in addition to the deterioration of the detection sensitivity of the photo sensor, the illuminance of the lamp is reduced with time, and thus the light emitted by the lamp The illuminance is extremely difficult to control in such a way that it becomes a desired flaw over a long period of time with high precision. -10- 201005790 In addition, as described above, when a light sensor whose sensitivity is reduced with time is used, it is preferable to automatically correct the detection sensitivity of the light sensor directly when the light sensor is mounted on the light source device. However, a light source device having the function as described above is not known. The present invention has been made in view of the above circumstances, and an object of the present invention is to use a lamp in which the illuminance is lowered with time, and the sensitivity of the photosensor for confirming the lighting state of the lamp deteriorates with time. In the light source device, Φ can accurately control the illuminance of the light emitted by the lamp and keep the illuminance constant, and can directly correct the sensation of the deteriorated sensitivity directly when the photo sensor is mounted on the light source device. The sensitivity of the detector. (Means for Solving the Problem) In the present invention, the above problems are solved as follows. A. Stabilization Control of Light Emitted by Lamps ® The present invention controls the illuminance of the light emitted by the lamp in accordance with the target , to maintain the illuminance constant. The illuminance of the light emitted by the excimer lamp is lowered as time passes. As described above, in order to maintain the illuminance of the lamp whose illuminance is reduced with time is kept constant, when the illuminance is lowered to a predetermined ratio or less with respect to the target illuminance, it is necessary to control the electric power supplied to the lamp. In the present invention, the means for controlling the electric power supplied to the lamp is used. In the present invention, the 1C tag mounted on the lamp is used, and the supply is based on the total lighting time of the lamp recorded on the 1C tag. To the power of the lights -11 - 201005790 for control. That is, in the present invention, whether or not the sensed illumination reduction has exceeded a certain ratio by the sensing means, and when the illumination reduction has exceeded a certain ratio, the power supplied to the lamp is corrected (increased). For the correction of the electric power, for example, a correction table that defines the relationship between the total lighting time of the lamp and the corrected electric power data is used. Next, the correction power corresponding to the total lighting time is obtained, and the power supplied to the lamp is controlled to 0. That is, by using the 1C tag, the total lighting time of the lamp can be recorded, and can be recorded according to the 1C tag. The total lighting time is used to obtain information on the correction power. B. Replenishment of Photosensor In the present invention, due to the deterioration of the photosensor mounted in the light source device, in order to correspond to the decrease in the sensitivity of the light, the vacuum ultraviolet sensor mounted on the device The illuminance data that is output is corrected. ® This calibration is performed using a 测定 measured by a light sensor different from other new products of the light sensor provided in the light source device. For example, using a sensor of a new product installed in a factory or the like, the sensor of the new product obtains the correct illuminance data of the light of each lamp, and writes it to the 1C tag provided in each lamp. Then, for example, when the lamp is replaced, the illuminance is compared with the illuminance data output by the sensor mounted on the excimer lamp device, and the latter's 値 is consistent with the enthalpy of the former to the latter The top of the work is corrected. -12- 201005790 From the above, in the present invention, the above problems are solved as follows. (1) At least the illuminance data relating to the illuminance of the light emitted from the light source when the light source is turned on at a predetermined reference power and the total lighting time of the light source are recorded at the ic label provided on the light source. The light source device includes: a reading/writing means for reading information from the 1C tag; a sensing means for sensing an illuminance of light emitted from the light source; and a light source device for controlling a lighting unit for lighting the light source The control unit of the light source device® determines the target power data required to obtain the target illuminance data based on the illuminance data read by the 1C tag of the light source; and the target illuminance data set. The light is turned on according to the target power data, and the illuminance of the light emitted by the light source at the time point is sensed by the sensing means, and the sensed illuminance is recorded as the reference illuminance data. Then, the illuminance of the light source when the light source continues to be lit according to the target power data is sensed by the sensing means, and it is determined whether the illuminance data of the light source sensed by the sensing method is lowered. The reference illuminance data to be recorded with respect to the foregoing is a predetermined ratio or less. When the illuminance data of the light source has been reduced to a predetermined ratio or less with respect to the reference illuminance data recorded as described above, 'based on the total lighting time of the light source read by the 1C label, the total lighting time of the light source is determined. Corresponding corrected power data, the target power data is corrected based on the corrected power data, and the corrected target power data is supplied to the light source. (2) In the above (1), when the target power data is corrected and the light source is turned on based on the corrected target power data, the light source is emitted by the sensing means 13-201005790. The illuminance of the light is recorded as new reference illuminance data, and it is determined whether the illuminance data of the light source sensed by the sensing means has been reduced to a predetermined ratio or less with respect to the new reference illuminance data. (3) In the above (1) and (2), the 1C tag record is measured by the corrected sensing means and records the light emitted by the light source when the predetermined reference power is turned on. Illuminance, as the 1C standard

籤之光源所被出射之光的照度相關的固有照度資料。 Q 接著，上述光源裝置的控制部係當在光源裝置被安裝 有新的光源時，使該光源以上述基準電力亮燈，藉由被設 在該光源裝置的感測手段，測定由該光源所被出射的光的 照度。 接著，根據藉由被設在光源裝置的感測手段所測定的 照度資料、及由前述1C標籤所讀出的固有照度資料，求 出用以校正被設在上述光源裝置之感測手段的測定値的校 正參數，根據該校正參數，對感測手段的輸出進行補正。 _ (4) 在被設在光源之1C標籤至少記錄當使光源以預定 的基準電力亮燈時由該光源所被出射之光的照度相關的固 有照度資料及該光源的總計亮燈時間。 光源裝置係具備有：來自1C標籤之資訊的讀取/寫入 手段；對由光源所被出射的光的照度進行感測的感測手段 ;及控制光源之亮燈的控制部，該控制部係具備有：目標 電力資料算出手段，根據由前述光源之1C標籤所讀出的 固有照度資料、及所被設定的目標照度資料，求出爲了獲 -14- 201005790 得該目標照度資料所需的目標電力資料；基準照度資料取 得手段’使前述光源根據上述目標電力資料而亮燈，使在 該時間點中利用前述感測手段所感測之由該光源所被出射 之光的照度資料作爲基準照度資料而記錄在記憶部；補正 手段’判定根據上述目標電力資料而使該光源繼續亮燈時 藉由前述感測手段所感測之光源的照度，是否已降低至相 對於前述基準照度資料爲預定比例以下，當判定出光源的 Ο 照度資料已降低至相對於前述所被記錄之基準照度資料爲 預定比例以下時，求出根據由前述1C標籤所讀出的光源 的總計亮燈時間所求出的該光源的總計亮燈時間所對應的 補正電力資料，且根據該補正電力資料來對前述目標電力 資料進行補正：及亮燈控制手段，以上述目標電力被供給 至光源的方式進行控制。 (5)在上述（4)中，在上述1C標籤係記錄有藉由校正完 畢的感測手段來測定出當以前述預定的基準電力亮燈時之 ® 由該光源所被出射的光的照度的値，作爲由設有該1C標 籤之光源所被出射之光的照度相關的固有照度資料。 上述光源裝置的控制部係具備有感度經時性劣化之上 述感測手段的校正手段，該校正手段係當在上述光源裝置 被安裝有新的光源時，使該光源以上述基準電力亮燈，根 據藉由被設在該光源裝置的感測手段所被感測之由該光源 所被出射的光的照度、及由前述1C標籤所讀出的固有照 度資料，求出用以校正被設在上述該光源裝置之感測手段 的測定値的校正參數，根據該校正參數，對感測手段的輸 -15- 201005790 出進行補正。 (6)在安裝有1C標籤的光源中，在該1C標籤記錄有 該光源的總計亮燈時間；及當使該光源以預定的基準電力 亮燈時藉由校正完畢的感測手段所測定出之由該光源所被 出射的光的照度，作爲由設有該1C標籤之光源所被出射 之光的照度相關的固有照度資料。 (發明之效果） 在本發明中，可得以下效果。 (1) 在本發明中，藉由爲了獲得目標照度資料所需的 目標電力資料來使光源亮燈，將此時的照度藉由感測手段 進行感測且作爲基準照度資料加以記錄，當藉由該感測手 段所被感測的前述光源的照度降低至相對於上述所被記錄 之基準照度資料爲預定比例以下時，根據由1C標籤所讀 出的光源的總計亮燈時間，求出補正電力資料，藉由該補 正電力資料，對前述目標電力資料進行補正且供給至光源 ，因此即使在燈的真空紫外光的照度經時性降低的情形下 ’亦可將光源的照度維持爲一定。 而且，藉由本發明之光源裝置，在每次藉由前述感測 手段所被感測到的光的照度超過預定範圍而降低時，記錄 考慮到燈之經時性照度降低及感測手段之感度降低的最新 基準照度資料，據此求出補正電力資料，以控制光源，田 此可以高精度將照度維持爲大致一定。 (2) 在1C標籤先將藉由校正完畢的感測手段來測定以 201005790 預定基準電力亮燈時由光源所被出射的光的照度作爲固有 照度資料加以記錄，當在光源裝置被安裝有新的光源時， 使該光源以上述基準電力亮燈，藉由被設在該光源裝置的 感測手段，測定由該光源所被出射的光的照度，根據該照 度資料、及由1C標籤讀出的固有照度資料，對上述光源 裝置的感測手段進行校正，因此在每次將已結束使用壽命 之準分子燈替換成新品時，可對由感測器所被輸出的照度 Φ 資料進行校正，即使裝配在光源裝置的光感測器因長時間 的使用而劣化，亦可獲得正確的照度。 因此，可精度佳地控制由燈所出射的光的照度，並且 可解決自以往以來所造成問題之因對準分子燈供給過量電 力，而產生被照射在被處理體的光的照度大幅超過目標照 度之所謂的過衝（overshoot)，或燈的壽命變短等不良情 形。 ® 【實施方式】 第1圖係顯示本發明之一實施形態之光源裝置的系統 構成圖。 如該圖所示，本發明之光源裝置係具備有：具有可以 非接觸輸入記錄資訊的1C標籤la的光源（以下稱爲燈） 1 ;用以將高頻高電壓供給至燈1的亮燈電源2 ;被設在 亮燈電源2之輸出側的變壓器3 ;控制燈1之亮燈的控制 部4 ;及輸入部5。 控制部4係由以下所構成：感測由燈1所出射的真空 -17- 201005790 紫外光等光而輸出照度訊號之屬於感測手段的光感測器 15;根據該光感測器15的照度資料等，對燈1的亮燈進 行控制，並且執行用以進行光感測器丨5之校正之運算處 理的運算處理部（CPU ) 1 1 ;記憶部13 ;用以在與1C標 籤1 a之間進行資料之傳送接收的天線1 4 ;用以控制與1C 標籤la之間之資料的傳送接收的1C標籤R/W部12; A/D轉換器16a、16b;及D/A轉換器17。A/D轉換器 1 6a、1 6b係將來自光感測器1 5的訊號及來自亮燈光源2 0 的訊號轉換成數位訊號而送出至CPU11，D/A轉換器17 係將來自CPU11的數位訊號轉換成類比訊號而送出至亮 燈電源2。 上述記憶部13係具備有：可讀寫之揮發性記億體（ RAM13a);讀取專用之非揮發性記億體（R〇M13b);及 可重寫之非揮發性記憶體（EEPROM13C )，用以記憶程 式或資料。 在記憶部13的ROM13b係被記錄有：用以按照總計 ❹ 亮燈時間來補正供給至燈1之電力的補正表Tab、準分子 燈的規格照度資料Χ〇、基準電力資料Z。等資訊，在 EEPROM13C係被記錄有穩定維持由準分子燈所出射之真 空紫外光的照度所需資訊。 上述光源1係封入有例如氙氣等放電氣體，且出射波 長172nm之真空紫外光的準分子燈。其中，以下係針對 燈1爲準分子燈的情形加以說明。 1C標籤la係按各燈而設，記錄有與有關於各準分子 -18- 201005790 燈固有照度之固有照度資料乂！相對應的百分率Υ〔=(固 有照度資料規格照度資料XG) XI 00〕、總計亮燈時間 T s 〇 若燈爲準分子燈，光感測器1 5即爲真空紫外光感測 器，例如ALGN (氮化鋁鎵）等半導體光感測器，藉由將 紫外光轉換成可見光的螢光體等所構成。 如前述之第11圖所示，光感測器15係被配置在形成 • 於冷卻塊之光導入孔的一端側，來自燈1的真空紫外線透 過該光導入孔而被入射至光感測器15的光入射面。 真空紫外光感測器中的感度係如前所述，隨著使用時 間加長而降低。 例如第3圖之（C)所示，真空紫外光的感度係在從使 用開始經過3 000小時之後降低30%程度。 亦即，由光感測器1 5所被輸出的照度資料係成爲低 於實際上由燈1所出射之真空紫外光的照度的値。因此， ® 以由燈1所出射的真空紫外光的照度被維持爲一定的方式 ，若欲根據來自光感測器15的照度資料來控制供給至燈 1的電力進行控制時，即對燈1進行過量的電力供給。 因此，如第3圖之（A)所示，準分子燈的照度變得高 於第3圖之（B)的目標照度，而會引起過衝（overshoot) 。爲了避免如上所示之過衝，必須將伴隨著光感測器1 5 的劣化所發生的真空紫外光的感度降低進行補正。 控制部4的CPU 1 1如後所述，根據由輸入部5所被 供予的目標照度資料或藉由光感測器1 5所被感測到的照 -19- 201005790 度資料，以使由燈1所被出射的真空紫外光的照度與作爲 目標的照度相一致的方式，對亮燈電源2傳送指令而控制 供給至燈1的電力。此外，根據藉由光感測器1 5所感測 到的照度資料、及由燈1所具備的1C標籤la所讀出的固 有照度資料’以由光感測器15所被輸出的照度資料與固 有照度資料相一致的方式來校正光感測器15的輸出。 輸入部5係具有例如液晶顯示畫面等的觸控面板式， 被使用在光源裝置的使用者將按每一被處理體所需之真空 紫外光的照度相關的目標照度資料輸入至CPU11。 在此，彙整顯示本實施形態中所使用的各種資料。該 等資料係例如以下所示，被儲放在1C標籤、讀取專用之 非揮發性記億體（ROM 13b)、可重寫之非揮發性記憶體 (EEPROM13C )等’在執行時，視需要被轉送至可讀取 寫入的記憶體（RAM13a)並予以儲放。 其中，該等資料的儲放部位可適當變更，例如可未設 置ROM，而將所有資料儲放在EEPROM，亦可先記憶在 所謂的記憶體媒體（例如非揮發性記憶體或磁碟等），在 執行時在RAM13a展開，在結束時轉移至非揮發性記憶體 或記憶媒體。 此外，在以下說明中，爲了易於理解，在資料被轉送 至RAM的情形下，亦會有視需要，在裝置起動時所被儲 放的場所來特定資料之儲放場所的情形。 •規格照度X〇:由標準的準分子燈所被照射的真空紫外 光的照度（儲放在ROM) 201005790 •固有照度Xi :被記錄在1C標籤之該燈的固有照度（儲 放在1C標籤、EEPROM) •實測照度X2:由裝置裝配的光感測器所得的照度資料 •目標照度X3:由輸入部所被設定的目標照度（儲放在 EEPROM ) •基準照度X4:初期或電力補正後，藉目標電力資料Z! 或、補正電力資料z2使該燈亮燈時，由裝置裝配的光 Φ 感測器所得的照度資料（儲放在EEPROM ) •基準電力ZQ:標準的準分子燈輸出規格照度XQ所需電 力（儲放在ROM ) •目標電力 Zi :獲得目標照度所需電力（儲放在 EEPROM ) •補正電力Z2:藉由補正電力係數所被補正的目標電力 (儲放在EEPROM) •補正係數K=固有照度X"實測照度X2 ® •百分率γ=(固有照度X"規格照度X。）x 100 (儲放在1C標籤、EEPROM) •總計亮燈時間Ts :燈亮燈時間的積算値（儲放在1C標 籤、EEPROM ) •補正表Tab :記錄有對總計亮燈時間之電力增加量（補 正電力係數）的表（儲放在ROM ) 第2圖係本發明之一實施形態之光源裝置的功能方塊 圖，將藉由利用控制部4的CPU11所被執行的處理所實 -21 - 201005790 現的功能顯示爲方塊圖者。 在被設在燈1的1C標籤la係如前所述記錄有百分率 Y=(固有照度Χι/規格照度XQ ) X 1〇〇及該燈丨的總計亮 燈時間Ts。 上述固有照度Χϊ係藉由例如新品的光感測器等般輸 出正確照度資料之校正完畢的光感測器，來測定出在使燈 1以上述基準電力亮燈時由燈1所被出射的光的照度的資 料。 ❿ 1C標籤R/W部12係如前所述透過天線14，讀入被 記錄在上述1C標籤la的上述資料，且作爲ic標籤資料 而記憶在記憶部1 3。 控制部4的校正手段4f係當在光源裝置被安裝新品 的燈1 (總計亮燈時間Ts爲0的燈）時，藉由亮燈控制 手段4e，使該燈1以上述基準電力ZQ亮燈，根據由藉由 光感測器1 5所被感測的該燈1所被出射的光的照度、及 由前述1C標籤la所讀出的固有照度X!，求出用以校正 _ 被設在上述該光源裝置的感測手段的測定値的校正參數。 接著，根據校正參數，將光感測器15的輸出進行補正。 藉此，在燈1每次被替換成新的燈時，可以光感測器 15輸出正確測定値的方式進行校正。 控制部4的積算計時器4g係將燈1呈亮燈的時間作 積算計數，總計亮燈時間更新手段4a係在每次達到預定 的積算時間時，即更新被記憶在記憶部1 3的總計亮燈時 間。該所被更新的總計亮燈時間Ts係在使光源裝置的動 -22- 201005790 作停止時，即被寫入至被設在燈1的1C標籤la。 如前所述由輸入部5將目標照度X3輸入至CPU1 1 ’ 該資料係被記憶在記憶部1 3。 控制部4的目標電力算出手段4b係根據基於由1C標 籤la所被讀出的百分率γ所計算出的固有照度X!與基準 電力ZG、上述目標照度χ3，計算出爲了獲得該目標照度 Χ3所需的目標電力Ζ:。所被計算出的目標電力Ζ!係被記 φ 億在記憶部1 3。 基準照度資料取得手段4d係在裝置起動時或後述之 電力補正時，藉由亮燈控制手段4e使燈1根據上述目標 電力Z!或補正電力Z2亮燈，獲得在該時間點藉光感測器 1 5所被感測的光的照度資料。該値係作爲基準照度資料 X4而被記憶在記憶部1 3。 亮燈控制手段4e係以被供給至燈1的電力與利用上 述目標電力算出手段4b所被計算出的目標電力Z:(補正 ® 後爲補正電力Z2 )爲相一致的方式來控制亮燈電源2。 亦即，檢測被施加至燈1的電壓與燈電流，由亮燈電 源2被傳送至控制部4的亮燈控制手段4e。其中，由亮 . 燈電源2所被檢測到的電壓、電流爲類比訊號，該類比訊 號係如前所述藉由A/D轉換器被轉換成數位訊號，且被 傳送至控制部4的CPU。 亮燈控制手段4e係根據上述電壓、電流計算出被供 給至燈的電力，且將所計算出的電力與前述目標電力Zl (補正後爲補正電力Z2 )作比較。接著，將上述所被計 -23- 201005790 算出的電力與目標電力Z,(補正後爲補正電力z2)爲相 一致的燈電壓與頻率進行運算。該燈電壓與頻率係作爲電 壓指令、頻率指令而被送出至亮燈電源2。 亮燈電源2係按照該電壓指令、頻率指令來控制燈1 的驅動電壓、頻率。藉此，以被供給至燈1的電力與上述 目標電力Ζι (補正後爲補正電力Z2)爲相一致的方式被 控制，燈1係以與目標電力Zi (補正後爲補正電力Z2 ) 相對應的照度而亮燈。 @ 在此，準分子燈係如前所述所出射的光照度會隨著時 間經過而降低。因此，在亮燈初期，係對燈1供給與目標 電力資料相對應的電力，藉此燈1係以與目標照度相一致 的照度而亮燈，但是隨著亮燈時間的經過，燈1的照度會 降低。 補正電力算出手段4c係以上述燈1之照度降低被補 正的方式，求出已將目標電力補正後的補正電力Z2。 亦即，補正電力算出手段4c係根據上述目標電力Z1 〇 (補正後爲補正電力Z2)，取得使燈1繼續亮燈時藉由 前述光感測器1 5所感測的照度（實測照度X2 )，進行判 定該實測照度X2是否已降低至相對於前述基準照度X4爲 預定比例以下。 接著，補正電力算出手段4c係當燈1的實測照度X2 降低至相對於前述基準照度X4爲預定比例以下時，讀出 被記憶在前述記億部1 3的燈1的總計亮燈時間Ts，參照 被記憶在記憶部1 3的捕正表Tab，求出與總計亮燈時間 -24- 201005790The inherent illuminance data related to the illuminance of the light emitted by the light source. Q, when the light source device is mounted with a new light source, the light source device lights the light source with the reference power, and the light source is measured by the sensing means provided in the light source device. The illuminance of the light that is emitted. Then, based on the illuminance data measured by the sensing means provided in the light source device and the illuminance data read by the 1C tag, the measurement for correcting the sensing means provided in the light source device is obtained. The correction parameter of 値 corrects the output of the sensing means according to the correction parameter. _ (4) At least the illuminance data relating to the illuminance of the light emitted by the light source when the light source is turned on at a predetermined reference power and the total lighting time of the light source are recorded at the 1C label provided on the light source. The light source device includes: a reading/writing means for information from the 1C tag; a sensing means for sensing the illuminance of the light emitted from the light source; and a control unit for controlling the lighting of the light source, the control section The target power data calculation means includes, based on the specific illuminance data read by the 1C tag of the light source, and the target illuminance data set, the required illuminance data for obtaining the target illuminance data of -1405705790 is obtained. The target electric power data; the reference illuminance data obtaining means 'lights the light source according to the target electric power data, and the illuminance data of the light emitted by the light source sensed by the sensing means at the time point is used as the reference illuminance The data is recorded in the memory unit; the correcting means 'determines whether the illuminance of the light source sensed by the sensing means when the light source continues to be lit according to the target power data has been reduced to a predetermined ratio with respect to the reference illuminance data Hereinafter, when it is determined that the illuminance data of the light source has been reduced to a predetermined ratio with respect to the reference illuminance data recorded as described above In the following example, the corrected power data corresponding to the total lighting time of the light source obtained from the total lighting time of the light source read by the 1C tag is obtained, and the target power is obtained based on the corrected power data. The data is corrected: and the lighting control means is controlled such that the target power is supplied to the light source. (5) In the above (4), the 1C label is recorded with the illuminance of the light emitted by the light source when the light is turned on by the predetermined reference power by the corrected sensing means. The flaw is the inherent illuminance data related to the illuminance of the light emitted by the light source provided with the 1C label. The control unit of the light source device includes a correction means for sensing the deterioration of the time-dependent property, and the correction means lights the light source by the reference power when the light source device is mounted with a new light source. The correction is set based on the illuminance of the light emitted by the light source sensed by the sensing means provided in the light source device and the illuminance data read by the 1C tag. The calibration parameter of the measurement device of the sensing means of the light source device is corrected based on the correction parameter for the input of the sensing means -15-201005790. (6) in the light source in which the 1C tag is mounted, the total lighting time of the light source is recorded in the 1C tag; and when the light source is turned on with a predetermined reference power, it is determined by the corrected sensing means. The illuminance of the light emitted by the light source is the illuminance data relating to the illuminance of the light emitted by the light source provided with the 1C label. (Effects of the Invention) In the present invention, the following effects can be obtained. (1) In the present invention, the light source is illuminated by the target power data required to obtain the target illuminance data, and the illuminance at this time is sensed by the sensing means and recorded as the reference illuminance data. When the illuminance of the light source sensed by the sensing means is reduced to a predetermined ratio or less with respect to the reference illuminance data to be recorded, the correction is obtained based on the total lighting time of the light source read by the 1C tag. In the electric power data, the target electric power data is corrected and supplied to the light source by the correction electric power data. Therefore, even when the illuminance of the vacuum ultraviolet light of the lamp is lowered with time, the illuminance of the light source can be maintained constant. Further, with the light source device of the present invention, each time the illuminance of the light sensed by the sensing means is reduced beyond a predetermined range, the recording takes into consideration the decrease in the illuminance of the lamp and the sensitivity of the sensing means. The reduced latest reference illuminance data is used to obtain the corrected power data to control the light source, and the illuminance can be maintained at a high level with high accuracy. (2) The 1C tag first measures the illuminance of the light emitted by the light source when the predetermined reference power is turned on by the corrected sensing means as the intrinsic illuminance data, and is installed in the light source device. When the light source is turned on, the light source is turned on by the reference power, and the illuminance of the light emitted by the light source is measured by a sensing means provided in the light source device, and is read from the 1C tag based on the illuminance data. The inherent illuminance data corrects the sensing means of the light source device, so that the illuminance Φ data output by the sensor can be corrected each time the excimer lamp whose end of life has been replaced is replaced with a new one. Even if the photosensor mounted in the light source device is deteriorated due to long-term use, the correct illuminance can be obtained. Therefore, it is possible to accurately control the illuminance of the light emitted from the lamp, and it is possible to solve the problem caused by the conventional problem, and supply the excess power to the molecular lamp, and the illuminance of the light irradiated to the object to be processed greatly exceeds the target. The so-called overshoot of illuminance, or the short life of the lamp. [Embodiment] Fig. 1 is a system configuration diagram showing a light source device according to an embodiment of the present invention. As shown in the figure, the light source device of the present invention is provided with a light source (hereinafter referred to as a lamp) 1 having a 1C tag 1a capable of inputting recorded information in a non-contact manner, and lighting for supplying a high-frequency high voltage to the lamp 1 The power source 2; the transformer 3 provided on the output side of the lighting power source 2; the control unit 4 that controls the lighting of the lamp 1; and the input unit 5. The control unit 4 is configured to: a light sensor 15 that senses light, such as vacuum -17-201005790 ultraviolet light emitted by the lamp 1 and outputs an illuminance signal, belonging to a sensing means; according to the light sensor 15 The illuminance data or the like controls the lighting of the lamp 1 and executes an arithmetic processing unit (CPU) 1 1 for performing arithmetic processing of the correction of the photo sensor 丨 5; the memory unit 13 is used for the 1C tag 1 An antenna 14 for transmitting and receiving data between a; a 1C tag R/W portion 12 for controlling transmission and reception of data between the 1C tag la; A/D converters 16a, 16b; and D/A conversion 17. The A/D converters 1 6a and 16b convert the signal from the photo sensor 15 and the signal from the illumination source 20 into a digital signal and send it to the CPU 11. The D/A converter 17 will be from the CPU 11. The digital signal is converted into an analog signal and sent to the lighting power supply 2. The memory unit 13 is provided with a readable and writable volatile memory (RAM 13a), a read-only non-volatile memory (R〇M13b), and a rewritable non-volatile memory (EEPROM 13C). Used to memorize programs or materials. The ROM 13b of the memory unit 13 is recorded with a correction table Tab for correcting the power supplied to the lamp 1 in accordance with the total ❹ lighting time, a specification illuminance data 准 of the excimer lamp, and a reference power data Z. In the EEPROM13C, information required to stably maintain the illuminance of the vacuum ultraviolet light emitted by the excimer lamp is recorded. The light source 1 is an excimer lamp in which a discharge gas such as helium gas is sealed and a vacuum ultraviolet light having a wavelength of 172 nm is emitted. In the following, the case where the lamp 1 is an excimer lamp will be described below. The 1C label la is set for each lamp, and the intrinsic illumination data relating to the inherent illumination of each excimer -18-201005790 is recorded! Corresponding percentage Υ [= (inherent illuminance data specification illuminance data XG) XI 00], total lighting time T s 〇 If the lamp is an excimer lamp, the photo sensor 15 is a vacuum ultraviolet sensor, for example A semiconductor photosensor such as ALGN (aluminum gallium nitride) is formed by a phosphor that converts ultraviolet light into visible light. As shown in the eleventh aspect, the photo sensor 15 is disposed on one end side of the light introducing hole formed in the cooling block, and vacuum ultraviolet rays from the lamp 1 are transmitted through the light introducing hole to be incident on the photo sensor. The light incident surface of 15. The sensitivity in the vacuum ultraviolet sensor is as described above and decreases as the time of use increases. For example, as shown in Fig. 3(C), the sensitivity of the vacuum ultraviolet light is reduced by 30% after 3,000 hours from the start of use. That is, the illuminance data outputted by the photo sensor 15 becomes lower than the illuminance of the vacuum ultraviolet light actually emitted by the lamp 1. Therefore, the illuminance of the vacuum ultraviolet light emitted from the lamp 1 is maintained in a constant manner. If the electric power supplied to the lamp 1 is to be controlled according to the illuminance data from the photo sensor 15, the lamp 1 is Excessive power supply is performed. Therefore, as shown in (A) of Fig. 3, the illuminance of the excimer lamp becomes higher than the target illuminance of (B) of Fig. 3, and an overshoot is caused. In order to avoid the overshoot as described above, it is necessary to correct the sensitivity of the vacuum ultraviolet light which occurs with the deterioration of the photo sensor 15 . The CPU 11 of the control unit 4 is based on the target illuminance data supplied from the input unit 5 or the photographic data of the -19-201005790 sensed by the photo sensor 15 as will be described later. The illuminance of the vacuum ultraviolet light emitted from the lamp 1 is transmitted to the lighting power source 2 to control the electric power supplied to the lamp 1 so as to coincide with the target illuminance. Further, the illuminance data output by the photo sensor 15 is based on the illuminance data sensed by the photosensor 15 and the illuminance data read by the 1C tag la provided in the lamp 1 The output of the photo sensor 15 is corrected in a manner consistent with the inherent illuminance data. The input unit 5 has a touch panel type such as a liquid crystal display screen, and the user who uses the light source device inputs the target illuminance data relating to the illuminance of the vacuum ultraviolet light required for each object to be processed to the CPU 11. Here, the various materials used in the present embodiment are shown. These data are stored in the 1C tag, read-only non-volatile memory (ROM 13b), rewritable non-volatile memory (EEPROM13C), etc., as shown below. It needs to be transferred to the readable and writable memory (RAM 13a) and stored. The storage location of the data may be appropriately changed. For example, the ROM may not be set, and all the data may be stored in the EEPROM, or may be memorized in a so-called memory medium (for example, non-volatile memory or disk). At the time of execution, it is expanded in the RAM 13a, and at the end, it is transferred to a non-volatile memory or a memory medium. Further, in the following description, in order to facilitate understanding, in the case where the material is transferred to the RAM, there is a case where the storage place of the specific material is placed at the place where the device is stored when the device is started up. •Specification Illuminance X〇: Illuminance of vacuum ultraviolet light irradiated by a standard excimer lamp (stored in ROM) 201005790 • Inherent Illumination Xi: The inherent illuminance of the lamp recorded in the 1C tag (stored in the 1C tag) EEPROM) • Actual illuminance X2: Illuminance data obtained by the light sensor mounted on the device • Target illuminance X3: Target illuminance set by the input unit (stored in EEPROM) • Reference illuminance X4: Initial or after power correction Illumination data obtained by the light Φ sensor assembled by the device (stored in EEPROM) by the target power data Z! or corrected power data z2 • Reference power ZQ: standard excimer lamp output Specification Illumination XQ required power (stored in ROM) • Target power Zi: Power required to obtain the target illuminance (stored in EEPROM) • Correction power Z2: Target power corrected by correcting the power factor (stored in EEPROM • Correction factor K = intrinsic illuminance X" measured illuminance X2 ® • percentage γ = (inherent illuminance X" specification illuminance X.) x 100 (stored in 1C tag, EEPROM) • total lighting time Ts: lamp lighting time Total accumulation In the 1C tag, EEPROM) • Correction table Tab: A table in which the power increase amount (correction power factor) for the total lighting time is recorded (stored in the ROM). FIG. 2 is a function of the light source device according to an embodiment of the present invention. The block diagram is displayed as a block diagram by the current function of the processing executed by the CPU 11 of the control unit 4 - 201005790. The percentage Y = (inherent illuminance Χ ι / specification illuminance XQ ) X 1 〇〇 and the total lighting time Ts of the lamp cymbal are recorded as described above in the 1C tag la set on the lamp 1. The intrinsic illuminance is measured by a light sensor that outputs correct illuminance data, such as a new photosensor, to detect that the lamp 1 is emitted by the lamp 1 when the lamp 1 is turned on by the reference electric power. Information on the illumination of light. The 1C tag R/W unit 12 reads the data recorded on the 1C tag 1a through the antenna 14 as described above, and stores it in the memory unit 13 as ic tag data. The correction means 4f of the control unit 4 turns on the lamp 1 with the reference electric power ZQ by the lighting control means 4e when the new lamp 1 is mounted on the light source device (the lamp having the total lighting time Ts is 0). According to the illuminance of the light emitted by the lamp 1 sensed by the photosensor 15 and the illuminance X! read by the 1C tag la, the correction _ is set. The correction parameter of the measurement 値 of the sensing means of the light source device described above. Next, the output of the photo sensor 15 is corrected based on the correction parameters. Thereby, each time the lamp 1 is replaced with a new one, the photosensor 15 can be corrected in such a manner that the sputum 15 is correctly measured. The integration timer 4g of the control unit 4 counts the time when the lamp 1 is turned on, and the total lighting time update means 4a updates the total amount stored in the storage unit 13 every time the predetermined integration time is reached. Lighting time. The updated total lighting time Ts of the station is written to the 1C tag la provided in the lamp 1 when the moving device -22-201005790 is stopped. The target illuminance X3 is input to the CPU 1 1 ' by the input unit 5 as described above. The data is stored in the memory unit 13 . The target power calculation means 4b of the control unit 4 calculates the illuminance X! calculated based on the percentage γ read by the 1C tag 1a, the reference power ZG, and the target illuminance χ3, in order to obtain the target illuminance Χ3. Required target power Ζ:. The calculated target power Ζ is recorded in the memory unit 13 . The reference illuminance data acquisition means 4d lights up the lamp 1 based on the target electric power Z! or the correction electric power Z2 by the lighting control means 4e at the time of starting the electric device or when the electric power is corrected later, and obtains the light sensing at the time point. Illuminance data of the light sensed by the device 15. This enthalpy is stored in the memory unit 13 as the reference illuminance data X4. The lighting control means 4e controls the lighting power source such that the electric power supplied to the lamp 1 matches the target electric power Z calculated by the target electric power calculating means 4b (correction power is corrected power Z2) 2. That is, the voltage applied to the lamp 1 and the lamp current are detected and transmitted from the lighting power source 2 to the lighting control means 4e of the control unit 4. The voltage and current detected by the lamp power supply 2 are analog signals, and the analog signal is converted into a digital signal by the A/D converter as described above, and transmitted to the CPU of the control unit 4. . The lighting control means 4e calculates the electric power supplied to the lamp based on the voltage and current, and compares the calculated electric power with the target electric power Z1 (corrected electric power Z2 after correction). Next, the electric power calculated by the above-mentioned -23-201005790 is calculated by matching the target electric power Z with the corrected electric power z2 (corrected electric power z2 after correction). The lamp voltage and frequency are sent to the lighting power source 2 as a voltage command and a frequency command. The lighting power source 2 controls the driving voltage and frequency of the lamp 1 in accordance with the voltage command and the frequency command. Thereby, the electric power supplied to the lamp 1 is controlled so as to coincide with the target electric power ( (correction electric power Z2 after correction), and the lamp 1 corresponds to the target electric power Zi (corrected electric power Z2 after correction) The illumination is illuminated. @ Here, the illuminance of the excimer lamp system as described above will decrease as time passes. Therefore, in the initial stage of lighting, the lamp 1 is supplied with electric power corresponding to the target electric power data, whereby the lamp 1 is illuminated with the illuminance in accordance with the target illuminance, but with the passage of the lighting time, the lamp 1 is The illuminance will decrease. The corrected electric power calculation means 4c obtains the corrected electric power Z2 obtained by correcting the target electric power so that the illuminance reduction of the lamp 1 is corrected. In other words, the corrected electric power calculation means 4c obtains the illuminance (measured illuminance X2) sensed by the photosensor 15 when the lamp 1 continues to be lit, based on the target electric power Z1 〇 (corrected electric power Z2 after correction). It is determined whether or not the measured illuminance X2 has decreased to a predetermined ratio or less with respect to the reference illuminance X4. Then, when the measured illuminance X2 of the lamp 1 is lowered to a predetermined ratio or less with respect to the reference illuminance X4, the corrected electric power calculation means 4c reads out the total lighting time Ts of the lamp 1 stored in the said gamut part 13 Refer to the trap table Tab that is memorized in the memory unit 13 to find the total lighting time -24- 201005790

Ts相對應的補正電力資料Z2，且使其記憶在記憶部13。 準分子燈所出射的真空紫外光的照度係因各種要因而 經時性降低。爲了補正該照度降低，必須使供給至準分子 燈的電力增加，如第4圖所示，在補正表Tab係被規定有 準分子燈的總計亮燈時間與電力補正係數的關係。 亦即，事前按每個準分子燈求出總計亮燈時間與真空 紫外光之照度降低率的關係，根據該關係，求出爲了將真 Φ 空紫外光的照度維持爲一定所需的電力增加率，在補正表 登錄總計亮燈時間與電力補正係數的關係。因此，讀出該 補正表的電力補正係數，藉由乘上目標電力Z1，可求出 補正電力資料Z2。 亮燈控制手段4e係在被計算出補正電力資料Z2時， 將如前所述被供給至燈的電力成爲所被補正後的補正電力 資料Z2的燈電壓與頻率進行運算而送出至亮燈電源2。 亮燈電源2係藉由該燈電壓與頻率而使燈1亮燈。 ® 此外，當計算出補正電力資料Z2，且根據該補正電 力資料z2而使燈1亮燈時，前述基準照度資料取得手段 4d係將藉由光感測器1 5所被測定之由燈1所出射的光照 度作爲新的基準照度X4而被記憶在記憶部1 3。 以下，與前述相同地，判定相對於上述基準照度X4 ，藉由前述光感測器15所被感測的照度是否已降低至預 定比例以下，若已降低至預定比例以下，與上述相同地， 求出與總計亮燈時間相對應的補正電力資料Z2。 如上所示，使燈1基本上以一定的電力亮燈，在每次 -25- 201005790 燈1的照度降低至相對於最新的補正後基準照度爲預定比 例以下時，即按照燈的總計亮燈時間，增加供給至燈1的 電力，將燈1的照度作上方補正，因此即使燈1的照度隨 著時間經過而降低，亦可將燈1的照度保持爲大致一定。 此外，藉由光感測器1 5所得之檢測値係使用在判定燈1 的照度是否已降低至相對於基準照度爲預定比例以下，因 此即使光感測器1 5的檢測感度經時性降低，亦不會大幅 受到其影響。 @ 接著，針對本實施形態之光源裝置的動作，藉由流程 圖詳加說明。 1 .對於1C標籤的資料記錄與光感測器的校正 (1)對於1C標籤的資料記錄 首先，藉由第5圖，針對在前述1C標籤記錄與固有 照度資料乂1相對應之百分率Y的處理加以說明。 有別於第1圖所示之光源裝置所具備之會有感度劣化 @ 之可能性的光感測器1 5，而在使用配置在例如工廠等之 新品的光感測器或校正完畢的光感測器的光源裝置設置燈 1，在該燈1的1C標籤la記錄上述資料。該光源裝置係 除了例如光感測器爲新品或校正完畢者以外，爲具有與第 1圖所示者爲相同構成者即可，以下針對使用第1圖所示 之光源裝置而在1C標籤la寫入資料的情形加以說明，但 是亦可使用1C標籤寫入用的專用裝置。亦即，亦可使用 專用的裝置，藉由新品的光感測器或校正完畢的光感測器 -26- 201005790 來測定燈的照度，計算與固有照度資料χι相對應的百分 率Υ，使用1C標籤寫入用的裝置而寫入資料至1C標籤la 〇 其中，在以下流程圖中，係針對與固有照度資料χι 相對應的百分率Υ的記錄加以說明，但是在1C標籤’除 了該資料以外，另外如前所述記錄有總計亮燈時間，且爲 新品的燈時，即記錄〇作爲總計亮燈時間。 (步驟S101 ) 首先，讀出被記錄在讀取專用記憶體（ROM) 13b的 基準電力Z〇，以基準電力Ζα使燈1亮燈。 (步驟S102 ) 確認由燈1所被出射之真空紫外光的照度是否呈穩定 。該確認係進行判斷例如在5分鐘內是否照度變化爲1 % © 以下。照度穩定時，即進至步驟S1 04。 (步驟S103 ) 照度不穩定時’進行確認是否逾時（Ume-out)。照 度在30分鐘以內爲穩定時’係返回步驟S101。即使經過 3 0分鐘，照度亦如上所述爲不穩定時，即判斷燈1爲不 良品，而結束程序。 (步驟S104 ) -27- 201005790 取得照度穩定時的固有照度資料Xi。來自光感測器 15的類比訊號係藉由A/D轉換器16b而被轉換成數位訊 號’並且該數位訊號作爲固有照度資料Χι而被輸入至 CPU11 。 (步驟S105 ) 與被輸入至CPU之固有照度資料X,相對應的値被記 錄在1C標籤la。在此，固有照度資料1係如以下（1) 式所示，作爲被記億在讀取專用記憶體（ROM ) 13b之固 有照度資料Xia規格照度資料XD的百分率Y而被記錄在 1C標籤12。 Y= ( Χ,/Χ〇 ) χΙΟΟ... ( 1 ) (2)光感測器之校正 接著，針對光感測器之校正動作，藉由流程圖加以說 明。其中，該動作係與利用第2圖的校正手段4f所實現 的動作相對應。 第6圖係根據被記錄在1C標籤的資料來校正光感測 器15的流程。上述校正係在每次將已結束使用壽命的燈 替換成新品時，即在執行對於被處理體之光照射處理之前 進行。至燈的使用壽命結束爲止，並不進行光感測器15 之補正。 -28- 201005790 (步驟S201 ) 首先，由CPU11在1C標籤R/W部12作進出（ access)，對於ic標籤la經由天線14而以135kHz的搬 送頻率傳送指令，藉由雙向通訊，由1C標籤la讀出資訊 ，經由1C標籤R/W部12而在CPU1 1接收該資訊。 CPU11係由被記錄在1C標籤la的總計亮燈時間，來 確認燈1是否爲新品。若總計亮燈時間Ts = 〇，即判斷燈1 φ 爲新品而進至步驟S202。另一方面，若非爲總計亮燈時 間Ts = 0，則並未進行光感測器15之校正，且結束處理。 (步驟S202 ) 取得藉由CPU11而被記錄在1C標籤la之固有照度 資料Χι的百分率Y。亦即，由1C標籤R/W部12對1C 標籤la以135kHz的搬送頻率傳送指令，經由天線14而 由1C標籤la取得百分率Y。 (步驟S203 ) 接著，以被記錄在記憶部13之讀取專用記憶體（ ROM 1 3b )的基準電力Z。使燈1亮燈。 (步驟S204 ) 確認由燈1所出射的光的照度是否已穩定。該確認係 判斷例如在5分鐘內是否照度變化爲1 %以下。若照度穩 定，即進至步驟S206。 -29- 201005790 (步驟S 2 0 5 ) 照度不穩定時，進行確認是否逾時（time-out)。照 度在30分鐘以內爲穩定時，係返回步驟S201，且執行步 驟S20 1至S204之程序。即使經過30分鐘，照度亦如上 所述爲不穩定時，即判斷燈1爲不良品，而結束程序。 (步驟S206 ) 接著，利用光感測器1 5來感測由燈1所出射的光的 照度。來自光感測器15的類比訊號係藉由 A/D轉換器 1 6b而被轉換成數位訊號，該數位訊號作爲實測照度資料 X2而被輸入至CPU1 1。 (步驟S207 ) 最後，根據在步驟S202中所取得之固有照度資料Xi 及在步驟S2 06中所取得之實測照度資料X2，來對由光感 測器1 5所被輸出的照度資料進行補正。步驟S207的補正 係如以下所示來進行。 ⑴根據由記憶部13之讀取專用記憶體（R〇M13b )所讀 出的規格照度資料XQ、及由1C標籤ia所讀出的百分 率Y，對固有照度資料1的値進行運算。 如以下之（2 )所示，求出作爲固有照度資料Xl對實 測照度資料X2之比率的補正係數K。 補正係數K =(固有照度資料Xl)/(實測照度資料χ2)··· ( 2 ) -30- 201005790 (ii)在實測照度資料X2乘以（2 )式中所求得的補正係數 K。 如以上所示’事前在工廠等中使用新品的光感測器或 校正完畢的光感測器而在1C標籤記錄表示固有照度資料 乂1的百分率Y’藉由根據由其所求出的固有照度資料Xl 、及由裝配在光源裝置之光感測器所得之實測照度資料 X2所求出的補正係數K ’可對由真空紫外光感測器所被 • 輸出的實測照度資料進行補正。 因此，每次在將已結束使用壽命之準分子燈替換成新 品時，即先求出上述補正係數K且加以記憶，藉由該補 正係數K來對由感測器所被輸出的照度資料進行補正， 藉此即使爲裝配在準分子燈之真空紫外光感測器因長時間 使用而劣化者，亦可獲得正確的真空紫外光的照度。 因此，藉由本發明，可解決自以往以來所造成問題之 因對準分子燈供給過量電力，而產生被照射在被處理體之 ® 真空紫外光的照度大幅超過目標照度之所謂的過衝（ overshoot)、或準分子燈壽命變短等不良情形。 2.光穩定化控制 (1)全體處理流程 首先，針對本實施形態之光源裝置之全體處理流程加 以說明。 第7圖係顯示本實施形態之光源裝置之全體處理流程 的流程圖。 -31 - 201005790 如第7圖所示，光源裝置係如下進行動作。 (步驟S1 ) 裝置被起動。 (步驟 S2、S3 ) 由被設在燈的1C標籤取得資料。根據由1C標籤所取 得的總計亮燈時間資料，判定該燈是否爲新品的燈（總計 Q 亮燈時間爲〇 )。 (步驟S4) 若該燈爲新品的燈，則使燈1以基準電力Z〇亮燈， 且藉由光感測器1 5來測定照度。接著，如前所述，根據 所測定出的實測照度、及根據由1C標籤所讀出之百分率 Y所求出的固有照度X!，求出用以校正光感測器15之輸 出的校正參數，根據該校正參數，對光感測器15的輸出 0 進行補正。 (步驟S 5 ) 若該燈非爲新品的燈，如前所述，根據由1C標籤所 讀出的固有照度又1及所被設定的目標照度χ3來求出目標 電力Z!，且以燈電力與目標電力Zl相一致的方式進行控 制。 在此’利用光感測器1 5來感測如前所述根據目標電 -32- 201005790 力Zt而使燈1亮燈時的照度，當該照度降低至相對於基 準照度X4爲預定比例以下時，求出根據總計亮燈時間TS 所求得的補正電力z2，以對目標電力Zi進行補正。 (步驟 S6、S7 ) 持續以上動作至燈滅燈爲止，在燈滅燈時，係進行燈 的滅燈處理，並且將所需資料進行對於記憶部13之可重 # 寫的非揮發性記憶體（EEPROM )的轉換、及1C標籤之 總計亮燈時間的重寫。 (2)光穩定化控制 由燈所出射的光的照度係隨著時間的經過而降低。爲 了將照度維持爲一定，當燈的照度降低至相對於目標照度 爲預定比例以下時，必須以增加供給至燈之電力的方式進 行控制。 〇 在本實施形態之光源裝置中，如以下第8圖之流程之 說明所示，爲了控制供給至燈的電力，使用被記錄在1C 標籤的燈的總計亮燈時間，據此求出電力的補正量（補正 電力）。 第8圖係顯示用以將由燈所被出射的光的照度維持爲 一定的控制處理的流程圖。 (步驟S 3 0 1 ) 由CPU11在1C標籤R/W部12作進出（access)， -33- 201005790 對於ic標籤la’透過天線14以135kHz的搬送頻率傳送 指令，藉由雙向通訊，由1C標籤la讀出資訊，透過1C 標籤R/W部12而在CPU 1 1接收該資訊。藉此，可取得與 被記錄在1C標籤之固有照度資料Χι相對應的百分率γ 及總計亮燈時間Ts。 (步驟S302 ) 根據在步驟S 3 0 1中所得之總計亮燈時間Ts，確認燈 1是否爲新品。若總計亮燈時間Ts = 0，則判斷燈1爲新品 且進至步驟S304。另一方面，若非爲總計亮燈時間Ts = 0 ’則進至步驟S 3 03。 (步驟S3 03 ) 若非爲總計亮燈時間 Ts = 0，在記憶部13 ( EEPROM13C )係記憶有當使該燈先亮燈時的目標電力資 料Z1，且取得該記憶完畢的目標電力資料Zj。 (步驟S304 ) 取得由輸入部5所被輸入且儲放在記憶部13的目標 照度資料χ3。 (步驟S305 ) 根據在步驟S3 04中所得的目標照度資料χ3、由IC 標簾1a所讀出的百分率γ、以及由記憶部i3(R〇M13b -34- 201005790 )所讀出的規格照度資料Xq及基準電力資料z〇’取得爲 了獲得目標照度所需的目標電力資料Z1。 目標電力資料Ζι係如下所示所求得。 固有照度Χι:目標照度X3 =基準電力Z〇:目標電力The power data Z2 corresponding to the Ts is corrected and stored in the memory unit 13. The illuminance of the vacuum ultraviolet light emitted by the excimer lamp is reduced in time due to various reasons. In order to correct the illuminance reduction, it is necessary to increase the electric power supplied to the excimer lamp. As shown in Fig. 4, the correction table Tab is defined with the relationship between the total lighting time of the excimer lamp and the electric power correction coefficient. That is, the relationship between the total lighting time and the illuminance reduction rate of the vacuum ultraviolet light is obtained for each excimer lamp in advance, and based on this relationship, the power increase required to maintain the illuminance of the true Φ empty ultraviolet light is determined. Rate, the relationship between the total lighting time and the power correction coefficient in the correction table registration. Therefore, the power correction coefficient of the correction table is read, and the corrected power data Z2 can be obtained by multiplying the target power Z1. When the correction power data Z2 is calculated, the lighting control means 4e calculates the lamp voltage and the frequency of the corrected power data Z2 after the electric power supplied to the lamp as described above, and sends it to the lighting power source. 2. The lighting power source 2 lights the lamp 1 by the lamp voltage and frequency. In addition, when the corrected power data Z2 is calculated and the lamp 1 is turned on based on the corrected power data z2, the reference illuminance data obtaining means 4d is determined by the light sensor 15 by the lamp 1 The emitted illuminance is memorized in the memory unit 13 as a new reference illuminance X4. In the same manner as described above, it is determined whether or not the illuminance sensed by the photosensor 15 has decreased to a predetermined ratio or less with respect to the reference illuminance X4, and if it has decreased to a predetermined ratio or less, the same as described above. The corrected power data Z2 corresponding to the total lighting time is obtained. As shown above, the lamp 1 is substantially illuminated with a certain amount of power, and the illumination of the lamp 1 is lowered to a predetermined ratio or less with respect to the latest corrected reference illumination every time -25-200505790, that is, according to the total of the lamps. The electric power supplied to the lamp 1 is increased in time, and the illuminance of the lamp 1 is corrected upward. Therefore, even if the illuminance of the lamp 1 is lowered as time passes, the illuminance of the lamp 1 can be kept substantially constant. Further, the detection 所得 obtained by the photo sensor 15 is used to determine whether or not the illuminance of the lamp 1 has been lowered to a predetermined ratio or less with respect to the reference illuminance, so that the detection sensitivity of the photo sensor 15 is reduced with time. It will not be greatly affected by it. @ Next, the operation of the light source device of the present embodiment will be described in detail with reference to the flowchart. 1. Correction of data recording and photosensor for 1C tag (1) Data recording for 1C tag First, with reference to Fig. 5, for the percentage of Y corresponding to the inherent illuminance data 乂1 in the aforementioned 1C tag record Processing is explained. Unlike the photosensor 15 having the possibility of deterioration in sensitivity of the light source device shown in Fig. 1, a light sensor or a corrected light disposed in, for example, a factory or the like is used. The light source device of the sensor is provided with a lamp 1, and the above information is recorded at the 1C tag la of the lamp 1. The light source device may have the same configuration as that shown in Fig. 1 except for the case where the photo sensor is new or corrected, and the following is directed to the light source device shown in Fig. 1 at 1C label la The case of writing data will be described, but a dedicated device for writing 1C tags can also be used. That is, a dedicated device can also be used to measure the illuminance of the lamp by a new photosensor or a calibrated photosensor -26-201005790, and calculate the percentage corresponding to the intrinsic illuminance data Υ, using 1C The device for writing a label writes the data to the 1C tag la 〇. In the following flowchart, the record of the percentage Υ corresponding to the illuminance data χ ι is described, but in the 1C tag 'except the data, In addition, when the total lighting time is recorded as described above and the lamp is new, the 〇 is recorded as the total lighting time. (Step S101) First, the reference power Z〇 recorded in the read-only memory (ROM) 13b is read, and the lamp 1 is turned on with the reference power Ζα. (Step S102) It is confirmed whether or not the illuminance of the vacuum ultraviolet light emitted from the lamp 1 is stable. This confirmation judges whether, for example, the illuminance change is 1% © in 5 minutes. When the illuminance is stable, the process proceeds to step S1 04. (Step S103) When the illuminance is unstable, 'Check if Ume-out is exceeded. When the illuminance is stable within 30 minutes, the process returns to step S101. Even if the illuminance is unstable as described above after 30 minutes, the lamp 1 is judged to be defective, and the program is terminated. (Step S104) -27- 201005790 The illuminance data Xi at the time when the illuminance is stabilized is obtained. The analog signal from the photo sensor 15 is converted into a digital signal by the A/D converter 16b and the digital signal is input to the CPU 11 as an inherent luminance data. (Step S105) The 値 corresponding to the illuminance data X input to the CPU is recorded in the 1C tag la. Here, the inherent illuminance data 1 is recorded in the 1C tag 12 as the percentage Y of the specific illuminance data Xia specification illuminance data XD of the reading dedicated memory (ROM) 13b as shown in the following formula (1). . Y= ( Χ, /Χ〇 ) χΙΟΟ... (1) (2) Correction of the photo sensor Next, the correction operation of the photo sensor is explained by a flowchart. Here, this operation corresponds to the operation realized by the correction means 4f of Fig. 2 . Fig. 6 is a diagram for correcting the flow of the photo sensor 15 based on the data recorded on the 1C tag. The above correction is performed each time the lamp whose end of life has been replaced with a new one, i.e., before the light irradiation process for the object to be processed is performed. The correction of the photo sensor 15 is not performed until the end of the life of the lamp. -28- 201005790 (Step S201) First, the CPU 11 makes an access in the 1C tag R/W unit 12, and transmits an instruction to the ic tag 1a via the antenna 14 at a transfer frequency of 135 kHz, by means of two-way communication, by 1C tag. The la read information is received by the CPU 11 via the 1C tag R/W unit 12. The CPU 11 confirms whether or not the lamp 1 is new by the total lighting time recorded in the 1C tag la. If the total lighting time Ts = 〇, it is judged that the lamp 1 φ is new and the process proceeds to step S202. On the other hand, if the total lighting time Ts = 0, the correction by the photo sensor 15 is not performed, and the processing is terminated. (Step S202) The percentage Y of the specific illuminance data Χι recorded by the CPU 11 at the 1C tag la is obtained. That is, the 1C tag R/W unit 12 transmits a command to the 1C tag la at a transfer frequency of 135 kHz, and the percentage Y is obtained from the 1C tag la via the antenna 14. (Step S203) Next, the reference power Z recorded in the read-only memory (ROM 1 3b) of the storage unit 13 is recorded. Light 1 is turned on. (Step S204) It is confirmed whether or not the illuminance of the light emitted by the lamp 1 has stabilized. This confirmation judges whether or not the illuminance change is 1% or less within 5 minutes, for example. If the illuminance is stable, the process proceeds to step S206. -29- 201005790 (Step S 2 0 5) When the illuminance is unstable, check whether time-out is exceeded. When the illuminance is stable within 30 minutes, the process returns to step S201, and the procedures of steps S20 1 to S204 are executed. Even if the illuminance is unstable as described above after 30 minutes, the lamp 1 is judged to be defective, and the program is terminated. (Step S206) Next, the illuminance of the light emitted from the lamp 1 is sensed by the photo sensor 15. The analog signal from the photo sensor 15 is converted into a digital signal by the A/D converter 16b, and the digital signal is input to the CPU 1 as the measured illuminance data X2. (Step S207) Finally, the illuminance data output by the photo sensor 15 is corrected based on the illuminance data Xi obtained in step S202 and the actual illuminance data X2 obtained in step S206. The correction in step S207 is performed as follows. (1) The illuminance of the illuminance data 1 is calculated based on the illuminance XQ of the specification read by the read-only memory (R 〇 M13b) of the memory unit 13 and the percentage Y read by the 1C tag ia. As shown in the following (2), the correction coefficient K which is the ratio of the inherent illuminance data X1 to the actual illuminance data X2 is obtained. Correction coefficient K = (inherent illuminance data Xl) / (measured illuminance data χ 2) · (2) -30- 201005790 (ii) Multiply the measured illuminance data X2 by the correction coefficient K obtained by the equation (2). As described above, the photometric sensor or the corrected photosensor used in the factory or the like is used to record the percentage Y' of the inherent illuminance data 乂1 in the 1C tag by the inherent The illuminance data X1 and the correction coefficient K′ obtained from the measured illuminance data X2 obtained by the light sensor mounted on the light source device can correct the measured illuminance data output by the vacuum ultraviolet sensor. Therefore, each time the excimer lamp whose end of life has been replaced is replaced with a new product, the above-mentioned correction coefficient K is first obtained and memorized, and the illuminance data output by the sensor is performed by the correction coefficient K. Correction, whereby the illuminance of the correct vacuum ultraviolet light can be obtained even if the vacuum ultraviolet sensor mounted on the excimer lamp is deteriorated due to long-term use. Therefore, according to the present invention, it is possible to solve the problem caused by the conventional problem that the molecular lamp is supplied with excessive electric power, and the illuminance of the vacuum ultraviolet light irradiated to the object to be processed greatly exceeds the target illuminance so-called overshoot (overshoot) ), or the shortcomings of the life of the excimer lamp is shortened. 2. Light Stabilization Control (1) Overall Process Flow First, the overall processing flow of the light source device of the present embodiment will be described. Fig. 7 is a flow chart showing the overall processing flow of the light source device of the embodiment. -31 - 201005790 As shown in Fig. 7, the light source device operates as follows. (Step S1) The device is activated. (Steps S2, S3) The data is acquired by the 1C tag set on the lamp. Based on the total lighting time data obtained from the 1C tag, it is determined whether the lamp is a new lamp (the total Q lighting time is 〇). (Step S4) If the lamp is a new lamp, the lamp 1 is turned on with reference power Z〇, and the illuminance is measured by the photo sensor 15. Next, as described above, the correction parameter for correcting the output of the photo sensor 15 is obtained based on the measured actual illuminance and the illuminance X! obtained from the percentage Y read by the 1C label. According to the correction parameter, the output 0 of the photo sensor 15 is corrected. (Step S5) If the lamp is not a new lamp, the target power Z! is obtained based on the inherent illuminance read by the 1C tag and the target illuminance χ3 set as described above, and the lamp is used. The power is controlled in a manner consistent with the target power Z1. Here, the illuminance when the lamp 1 is turned on according to the target electric-32-201005790 force Zt is sensed by the photo sensor 15 when the illuminance is lowered to a predetermined ratio below the reference illuminance X4. At this time, the corrected electric power z2 obtained from the total lighting time TS is obtained to correct the target electric power Zi. (Steps S6 and S7) The above operation is continued until the lamp is turned off, and when the lamp is turned off, the lamp is turned off, and the required data is subjected to the non-volatile memory written to the memory unit 13. (EEPROM) conversion, and rewriting of the total lighting time of the 1C tag. (2) Light stabilization control The illuminance of the light emitted by the lamp decreases as time passes. In order to maintain the illuminance constant, when the illuminance of the lamp is reduced to a predetermined ratio or less with respect to the target illuminance, it is necessary to control the electric power supplied to the lamp. In the light source device of the present embodiment, as shown in the flow chart of FIG. 8 below, in order to control the electric power supplied to the lamp, the total lighting time of the lamp recorded on the 1C tag is used, and the electric power is obtained therefrom. Correction amount (correction of power). Fig. 8 is a flow chart showing a control process for maintaining the illuminance of the light emitted from the lamp to be constant. (Step S3 0 1 ) The CPU 11 makes an access in the 1C tag R/W unit 12, -33- 201005790. The ic tag la' transmits the command through the antenna 14 at a transfer frequency of 135 kHz, and is bidirectionally communicated by 1C. The tag la reads the information and receives the information on the CPU 11 through the 1C tag R/W unit 12. Thereby, the percentage γ corresponding to the inherent illuminance data Χι recorded on the 1C tag and the total lighting time Ts can be obtained. (Step S302) It is confirmed whether or not the lamp 1 is a new one based on the total lighting time Ts obtained in the step S301. If the total lighting time Ts = 0, it is judged that the lamp 1 is new and the flow proceeds to step S304. On the other hand, if it is not the total lighting time Ts = 0 ', it proceeds to step S3 03. (Step S3 03) If the total lighting time Ts = 0, the memory unit 13 (EEPROM 13C) stores the target power data Z1 when the lamp is turned on first, and acquires the recorded target power data Zj. (Step S304) The target illuminance data χ3 input by the input unit 5 and stored in the storage unit 13 is acquired. (Step S305) According to the target illuminance data χ3 obtained in step S3 04, the percentage γ read by the IC tab 1a, and the specification illuminance data read by the memory unit i3 (R〇M13b -34-201005790) Xq and the reference power data z〇' obtain the target power data Z1 required to obtain the target illuminance. The target power data Ζι is obtained as shown below. Inherent Illumination Χι: Target Illumination X3 = Reference Power Z〇: Target Power

Zl 目標電力z!=基準電力ZGx目標照度X3/固有照度Xl φ 將如上所述所求出的該目標電力資料Z!記錄在記憶 部 1 3 ( EEPROM 1 3c )。 (步驟S306 ) 使積算計時器（第2圖的4g )爲ON，開始計測被加 算在總計亮燈時間的亮燈時間。 (步驟S307 ) ® 根據在步驟S303或步驟S305中所求出的目標電力資 料Z1，使燈1亮燈。 第9圖係爲了易於理解以下步驟S308至S313的程序 ，槪念性顯示對亮燈時間之照度變化與供給至燈之電力變 化的說明圖。該圖之縱軸係表示燈之光照度（利用感度劣 化之光感測器所測定之照度的値與目標照度），該圖之橫 軸係表示燈的亮燈時間。 其中，該圖的實線係表示目標照度，加粗實線係表示 藉由已劣化的感測器所測定出的照度的値。此外，該圖之 -35- 201005790 一點鏈線係表示由燈所被出射之真空紫外光的照度因各種 要因而經時性降低的態樣，該圖之虛線係表示隨著光感測 器的感度降低，由感測器所被輸出的照度資料會經時性降 低的態樣。 使用第9圖，說明藉由以下步驟S308至S313所執行 之程序的槪要。 在燈替換時間點中，執行前述第6圖之流程圖所示之 光感測器15的補正，在燈的亮燈中，並不進行該圖之流 q 程所示之光感測器1 5的補正。 第9圖之T〇時間點的照度P1係在步驟S307中根據 目標電力資料Zi而將準分子燈亮燈時之初期的基準照度 X4。 如第9圖所示，使燈以定電力（目標電力）亮燈，在 燈的照度降低至相對於初期基準照度P !爲預定比例以下 之？2的Ti的時間點中，將供給至燈的電力進行補正，且 將燈的照度由P2至P3作上方補正。 @ 該補正係如後所述，如以下來進行。 參照第4圖所示之補正表Tab，讀出被記憶在記憶部 1 3之該時間點中之總計亮燈時間Ts所對應的補正電力係 數，將該補正電力係數乘以被記憶在記憶部1 3之該時間 點中之目標電力，求出補正電力22，且將該電力供給至 燈1。接著，利用光感測器1 5來感測此時的燈1的照度 ，且形成爲補正後的基準照度P3 ( =X4 ) ° 將該經上方補正的照度P3設爲補正後的基準照度。 -36- 201005790 補正後的基準照度p3係與燈的光照度經時性降低並且光 感測器中之光的感度經時性降低的情形相對應，因此被設 定爲該圖之一點鏈線上的値。 之後’使燈繼續以定電力亮燈，在燈的照度降低至相 對於補正後基準照度p3爲預定比例以下的卩4的τ2時間 點中，與上述相同地，對供給至燈的電力進行補正，將燈 的照度由Ρ4至Ρ5作上方補正。將該經上方補正的照度Ρ5 φ 設爲補正後的基準照度χ4。 補正後的基準照度Ρ5 ( =Χ4 )係與上述Ρ3相同地，與 燈的光照度經時性降低並且光感測器中之真空紫外光的感 度經時性降低的情形相對應，因此被設定爲該圖之一點鏈 線上的値。 如上所示，基本上使燈以定電力亮燈，每次燈的照度 降低至相對於最新的補正後基準照度爲預定比例以下時， 即增加供給至燈的電力，藉此對燈的照度作上方補正。因 ο 此，在每次執行電力的補正時，以時間序列爲較舊的補正 後基準照度資料Χ4依序被更新爲較新的補正後基準照度 資料χ4,僅有最新的補正後基準照度資料被記錄在記憶 部 13 ( EEPROM13C )。 返回第8圖的流程，針對步驟S3 08以後的程序加以 說明。 (步驟S 3 08 ) 藉由光感測器，對由燈所被出射的光的照度進行感測 -37- 201005790 。來自光感測器1 5的類比訊號係藉由第1圖所示之A/D 轉換器16b而被轉換成數位訊號’作爲初期的基準照度資 料χ4(與第9圖的照度P1相對應）而被輸入至CPU。該 初期的基準照度資料 X4係被記錄在記憶部 13 ( EEPROM1 3 c)。 (步驟S309 ) 確認藉由光感測器所被感測的光的照度資料是否已降 低至相對於在步驟S 3 08中所得之基準照度資料X4爲預定 比例以下。預定比例係依執行光照射處理的被處理體的種 類而異，例如10%。 若例如使用第9圖加以說明，Τι時間點的照度資料 P2相對於照度資料P!降低10%以上時，係進至步驟S3 10 。照度資料P2相對於照度資料P!的降低未超過10%時， 係進至步驟S313。 (步驟S310) 讀出被記錄在記憶部13 ( ROM13b )之補正表Tab ( 參照第4圖），在該補正表Tab應用被記憶在記憶部13 的總計亮燈時間Ts，取得與總計亮燈時間Ts相對應的補 正電力係數。 補正電力係數係如前所述，將用以被供給至燈的電力 形成爲將第9圖中之照度資料？2朝P3作上方補正所需之 位準而設定。 -38- 201005790 其中，第9圖的P3係參照第4圖的補正表Tab，與 光感測器之感度之經時性降低相對應而設定。例如準分子 燈的總計亮燈時間爲2 0 0 0小時時，補正電力係數被求出 爲1.1。根據該補正電力係數所被決定的補正電力資料Z2 被記錄在記憶部1 3。 (步驟311、步驟S312) 參 CPU11係根據在步驟S310中所得之補正電力資料Z2 ，對亮燈電源2傳送指令，透過亮燈電源2而使供給至燈 1的電力增加。 使燈1根據補正電力資料Z2而亮燈時，藉由光感測 器1 5來感測由燈1所被出射的光的照度。來自光感測器 15的類比訊號係藉由A/D轉換器16b (參照第1圖）而 被轉換成數位訊號，作爲補正後的基準照度資料X4而被 輸入至CPU11，並且被記錄在記憶部13。補正後的基準 ® 照度資料X4係與第9圖的照度P3相對應。 (步驟S3 1 3 ) CPUU係確認是否已被輸入燈滅燈訊號。若已被輸入 燈滅燈訊號，即停止對燈1供給電力而使燈滅燈。 若在步驟S313中未被輸入有準分子燈滅燈訊號時， 即返回步驟S309，反覆執行步驟S309至S312之程序。 由步驟S313返回至步驟S309時的處理係與上述相同 ’在步騾S 3 0 9中，確認藉由光感測器1 5所被感測的照度 -39- 201005790 資料是否相對於在步驟S312中所得之補正後的基準照度 資料X4爲降低例如10%以上，若降低10%以上，即進至 步驟S3 10。若照度降低未超過10%，則進至步驟S3 13。 接著，如前所述參照補正表Tab，取得與總計亮燈時 間Ts相對應的補正電力係數，根據該補正電力係數所被 決定的補正電力資料^2被記錄在記憶部13。 CPU11係如前所述根據上述補正電力資料Z2而對亮 燈電源2傳送指令，使供給至燈1的電力增加。 _ 此外，藉由光感測器來感測根據補正電力資料Z2而 使燈1亮燈時的照度，且作爲補正後的基準照度資料X4 加以記憶。 如上所示，燈滅燈訊號被輸入至CPU11爲止之期間 ，係一面將以時間序列爲較舊的基準照度資料及補正電力 資料依序更新爲最新的基準照度資料及補正電力資料，一 面記錄在EEPROM13C。僅有最新的基準照度資料及補正 電力資料被記億在記億部13 ( EEPROM13C) 。 〇 第10圖係顯示滅燈時之處理的流程圖。 在該圖中，滅燈時係進行以下之處理。 (步驟S11 ) 進行燈之滅燈處理。在燈爲準分子燈的情形下，例如 在滅燈時，以低電壓施加高頻率的電壓，抑制放電容器的 分極而滅燈。 -40- 201005790 (步驟S12 ) 將亮燈電源2關斷（off) ’且將積算計時器形成爲 關斷。 (步驟S13 ) 在燈的1C標籤寫入記憶 部13的資料，此外，視需要 使屬於讀取寫入記憶體的RAM的內容轉移至eEPROM等 〇 非揮發性記憶體等。 (步驟S14 ) 將控制部的電源形成爲關斷（off )。 如以上所示，本實施形態之光源系統係當燈的光照度 超過預定範圍而降低時，根據補正表、及被記錄在1C標 籤的總計亮燈時間，求出補正電力資料，且根據該補正電 力資料來對供給至準分子燈的電力進行控制。 ® 因此，即使在燈之真空紫外光的照度經時性降低的情 形下，亦可將燈的照度維持在一定。 而且，在每次燈的光照度超過預定範圍而降低時，記 錄有與燈的經時性照度降低及光感測器的感度降低相對應 的最新基準照度資料，因此即使光感測器的感度降低，亦 可以將燈的照度以高精度維持爲一定。 【圖式簡單說明】 第1圖係顯示本發明之一實施形態之光源裝置的系統 -41 - 201005790 構成圖。 第2圖係本發明之一實施形態之光源裝置的功能方塊 圖。 第3圖係說明光感測器之感度降低的說明圖。 第4圖係記錄有總計亮燈時間與電力補正係數（電力 增加量）之關係的補正表。 第5圖係顯示在1C標籤記錄與固有照度資料X,相對 應的百分率Y之處理的流程圖。 第6圖係顯示根據被記錄在1C標籤的資料來校正光 感測器15之處理的流程圖。 第7圖係顯示本實施形態之光源裝置之全體處理流程 的流程圖。’ 第8圖係顯示用以將由燈所出射之光的照度維持在一 定之控制處理的流程圖。 第9圖係顯示對亮燈時間之照度變化與供給至燈之電 力變化的說明圖。 第10圖係顯示滅燈時之處理的流程圖。 第1 1圖係顯示確認亮燈狀態之準分子燈裝置的構成 例圖。 第12圖係在與裝載設有1C標籤之燈的紫外線照射裝 置的燈的管軸呈平行的平面所切的剖面圖。 第13圖係顯示第12圖所示之紫外線照射裝置之構成 例的槪念圖。 -42- 201005790 【主要元件符號說明】 1 :燈（準分子燈） la : 1C標籤 2 :亮燈電源 3 :變壓器 4 :控制部 4a :總計亮燈時間更新手段 φ 4b :目標電力算出手段 4c:補正電力算出手段 4d :基準照度資料取得手段 4e :亮燈控制手段 4f :校正手段 4g :積算計時器 5 :輸入部Z1 target power z! = reference power ZGx target illuminance X3 / inherent illuminance Xl φ The target power data Z! obtained as described above is recorded in the memory unit 13 (EEPROM 1 3c). (Step S306) The integration timer (4g in Fig. 2) is turned ON, and the measurement is started at the lighting time of the total lighting time. (Step S307) ® The lamp 1 is turned on in accordance with the target electric power material Z1 obtained in step S303 or step S305. In the ninth figure, in order to facilitate the understanding of the procedures of the following steps S308 to S313, an illustrative view showing changes in the illuminance of the lighting time and changes in the power supplied to the lamps is shown. The vertical axis of the figure indicates the illuminance of the lamp (the illuminance and the target illuminance measured by the photosensor which is degraded by sensitivity), and the horizontal axis of the figure indicates the lighting time of the lamp. Here, the solid line of the figure indicates the target illuminance, and the thick solid line indicates the illuminance of the illuminance measured by the deteriorated sensor. In addition, the figure -35-201005790 a little chain line indicates the illuminance of the vacuum ultraviolet light emitted by the lamp due to various reasons, and the dotted line of the figure is indicated by the photo sensor. The sensitivity is lowered, and the illuminance data output by the sensor is temporally reduced. A summary of the procedure executed by the following steps S308 to S313 will be described using Fig. 9. In the lamp replacement time point, the correction of the photo sensor 15 shown in the flowchart of FIG. 6 is performed, and in the lighting of the lamp, the photo sensor 1 shown in the flow of the figure is not performed. 5 corrections. The illuminance P1 at the time T of Fig. 9 is the initial reference illuminance X4 when the excimer lamp is turned on based on the target electric power data Zi in step S307. As shown in Fig. 9, the lamp is turned on with constant power (target power), and the illuminance of the lamp is reduced to a predetermined ratio or less with respect to the initial reference illuminance P! At the time point of Ti of 2, the electric power supplied to the lamp is corrected, and the illuminance of the lamp is corrected upward from P2 to P3. @ The correction is as follows, as follows. Referring to the correction table Tab shown in FIG. 4, the corrected power coefficient corresponding to the total lighting time Ts stored at the time point of the memory unit 13 is read, and the corrected power coefficient is multiplied by the memory unit. The target electric power at the time point of 1-3 is obtained as the corrected electric power 22, and the electric power is supplied to the lamp 1. Next, the illuminance of the lamp 1 at this time is sensed by the photosensor 15 and formed as the reference illuminance P3 (=X4) after correction. The illuminance P3 corrected above is used as the reference illuminance after correction. -36- 201005790 The reference illuminance p3 after correction corresponds to the case where the illuminance of the lamp decreases with time and the sensitivity of the light in the photo sensor decreases with time, so it is set as the 链 line on the dot line of the figure. . After that, the lamp is continuously turned on by the constant power, and the illuminance of the lamp is reduced to τ2 at a predetermined ratio or less with respect to the corrected reference illuminance p3, and the electric power supplied to the lamp is corrected in the same manner as described above. , the illumination of the lamp is corrected from Ρ4 to Ρ5. The illuminance Ρ5 φ corrected above is set as the reference illuminance χ4 after correction. The reference illuminance Ρ5 (=Χ4) after correction is the same as the above-described Ρ3, and corresponds to the case where the illuminance of the lamp is lowered with time and the sensitivity of the vacuum ultraviolet light in the photosensor is lowered with time, and thus is set to One of the graphs points to the 链 on the chain. As shown above, basically, the lamp is turned on with constant power, and each time the illuminance of the lamp is reduced to a predetermined ratio or less with respect to the latest corrected reference illuminance, the electric power supplied to the lamp is increased, thereby making the illuminance of the lamp Correction above. Because of this, each time the power correction is performed, the old corrected reference illuminance data Χ4 is sequentially updated to the new corrected reference illuminance data χ4 in time series, and only the latest corrected reference illuminance data is available. It is recorded in the memory unit 13 (EEPROM 13C). Return to the flow of Fig. 8 and explain the procedure after step S3 08. (Step S3 08) The illuminance of the light emitted by the lamp is sensed by the light sensor -37-201005790. The analog signal from the photo sensor 15 is converted into a digital signal by the A/D converter 16b shown in Fig. 1 as the initial reference illuminance data χ4 (corresponding to the illuminance P1 of Fig. 9) It is input to the CPU. The initial reference illuminance data X4 is recorded in the memory unit 13 (EEPROM 1 3 c). (Step S309) It is confirmed whether or not the illuminance data of the light sensed by the photo sensor has been lowered to a predetermined ratio or less with respect to the reference illuminance data X4 obtained in the step S308. The predetermined ratio varies depending on the kind of the object to be treated which performs the light irradiation treatment, for example, 10%. For example, when the illuminance data P2 at the time point is reduced by 10% or more with respect to the illuminance data P!, for example, the process proceeds to step S310. When the decrease in the illuminance data P2 with respect to the illuminance data P! does not exceed 10%, the process proceeds to step S313. (Step S310) The correction table Tab (refer to Fig. 4) recorded in the memory unit 13 (ROM 13b) is read, and the total lighting time Ts stored in the memory unit 13 is applied to the correction table Tab, and the total lighting is obtained. The corrected power factor corresponding to the time Ts. The correction power factor is as described above, and the power to be supplied to the lamp is formed as the illuminance data in Fig. 9? 2 Set to the level required for P3 to correct the top. -38- 201005790 Here, the P3 of Fig. 9 is set in accordance with the correction table Tab of Fig. 4 in accordance with the temporal deterioration of the sensitivity of the photosensor. For example, when the total lighting time of the excimer lamp is 200 hours, the correction power factor is found to be 1.1. The corrected power data Z2 determined based on the corrected power factor is recorded in the memory unit 13. (Step 311, Step S312) The CPU 11 transmits a command to the lighting power source 2 based on the corrected power data Z2 obtained in the step S310, and increases the power supplied to the lamp 1 through the lighting power source 2. When the lamp 1 is turned on in accordance with the corrected power data Z2, the illuminance of the light emitted by the lamp 1 is sensed by the photo sensor 15. The analog signal from the photo sensor 15 is converted into a digital signal by the A/D converter 16b (refer to FIG. 1), is input to the CPU 11 as the corrected reference illuminance data X4, and is recorded in the memory. Part 13. The corrected reference ® illuminance data X4 corresponds to the illuminance P3 of Fig. 9. (Step S3 1 3) The CPUU confirms whether or not the lamp has been input. If the input lamp is turned off, the power supply to the lamp 1 is stopped and the lamp is turned off. If the excimer lamp off signal is not input in step S313, the process returns to step S309, and the procedures of steps S309 to S312 are repeatedly executed. The processing in the case of returning to step S309 in step S313 is the same as described above. In step S309, it is confirmed whether the illuminance-39-201005790 data sensed by the photo sensor 15 is relative to the step S312. The reference illuminance data X4 obtained after the correction is reduced by, for example, 10% or more, and if it is decreased by 10% or more, the process proceeds to step S3 10. If the illuminance reduction does not exceed 10%, the process proceeds to step S3 13. Then, the corrected power coefficient corresponding to the total lighting time Ts is obtained by referring to the correction table Tab as described above, and the corrected power data 2 determined based on the corrected power coefficient is recorded in the memory unit 13. The CPU 11 transmits a command to the lighting power source 2 based on the corrected power data Z2 as described above, and increases the power supplied to the lamp 1. Further, the illuminance when the lamp 1 is turned on based on the corrected power data Z2 is sensed by the photo sensor, and is stored as the corrected reference illuminance data X4. As described above, while the light-off signal is input to the CPU 11, the reference illuminance data and the corrected power data in the time series are sequentially updated to the latest reference illuminance data and the corrected power data, and are recorded in the EEPROM13C. Only the latest reference illuminance data and correction power data are recorded in the billion unit 13 (EEPROM13C). 〇 Fig. 10 is a flow chart showing the processing when the light is turned off. In the figure, the following processing is performed when the lamp is turned off. (Step S11) The lamp is turned off. In the case where the lamp is an excimer lamp, for example, when the lamp is turned off, a high-frequency voltage is applied at a low voltage to suppress the polarization of the discharge vessel and the lamp is turned off. -40- 201005790 (Step S12) The lighting power supply 2 is turned off (off) and the integrated timer is turned off. (Step S13) The data of the memory unit 13 is written in the 1C tag of the lamp, and the contents of the RAM belonging to the read/write memory are transferred to eEPROM or the like, non-volatile memory or the like as necessary. (Step S14) The power supply of the control unit is turned off (off). As described above, in the light source system of the present embodiment, when the illuminance of the lamp is lowered beyond the predetermined range, the correction power data is obtained based on the correction table and the total lighting time recorded in the 1C tag, and the correction power is obtained based on the correction power. Information is used to control the power supplied to the excimer lamp. ® Therefore, even when the illuminance of the vacuum ultraviolet light of the lamp is reduced with time, the illuminance of the lamp can be maintained constant. Further, when the illuminance of the lamp is lowered beyond the predetermined range, the latest reference illuminance data corresponding to the decrease in the temporal illuminance of the lamp and the decrease in the sensitivity of the photosensor is recorded, so that even if the sensitivity of the photosensor is lowered It is also possible to maintain the illumination of the lamp with a high precision. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a block diagram showing a system of a light source device according to an embodiment of the present invention - 41 - 201005790. Fig. 2 is a functional block diagram of a light source device according to an embodiment of the present invention. Fig. 3 is an explanatory view for explaining the sensitivity reduction of the photo sensor. Fig. 4 is a correction table in which the relationship between the total lighting time and the power correction coefficient (power increase amount) is recorded. Fig. 5 is a flow chart showing the processing of the percentage Y corresponding to the 1C label record and the inherent illuminance data X. Fig. 6 is a flow chart showing the processing of correcting the photo sensor 15 based on the data recorded on the 1C tag. Fig. 7 is a flow chart showing the overall processing flow of the light source device of the embodiment. Fig. 8 is a flow chart showing the control process for maintaining the illuminance of the light emitted by the lamp at a certain level. Fig. 9 is an explanatory view showing changes in illuminance with respect to lighting time and power supply to the lamp. Figure 10 is a flow chart showing the processing when the light is turned off. Fig. 1 is a view showing an example of the configuration of an excimer lamp device for confirming the lighting state. Fig. 12 is a cross-sectional view taken along a plane parallel to the tube axis of the lamp of the ultraviolet irradiation device on which the 1C-labeled lamp is mounted. Fig. 13 is a view showing a configuration example of the ultraviolet irradiation device shown in Fig. 12. -42- 201005790 [Description of main component symbols] 1 : Lamp (excimer lamp) la : 1C tag 2 : Lighting power supply 3 : Transformer 4 : Control unit 4a : Total lighting time update means φ 4b : Target power calculation means 4c : Correction power calculation means 4d : Reference illuminance data acquisition means 4e : Lighting control means 4f : Correction means 4g : Integration timer 5 : Input section

10 :光源裝置 〇 11： CPU 12 : 1C標籤R/W部 1 3 :記憶部 13a :記憶體（RAM ) 13b :記憶體（ROM) 13c ：記憶體（EEPROM ) 1 4 :天線 1 5 :光感測器 1 6a、1 6b : A/D 轉換器 201005790 17 : D/A轉換器 80 :外殼 8 1 :冷卻塊 8 1 A :光導入孔 83 :光取出窗部 89 :真空紫外光感測器 90 :準分子燈 100 :準分子燈 . l〇〇a :發光管 1 〇〇b :內部電極 1 0 0 c :外部電極 1 0 0 d :絕緣體 1 〇〇e :金屬箔 1 0 0 f :密封部 1 00g :外部引線10: Light source device 〇11: CPU 12: 1C tag R/W unit 1 3 : Memory unit 13a: Memory (RAM) 13b: Memory (ROM) 13c: Memory (EEPROM) 1 4 : Antenna 1 5 : Light Sensors 1 6a, 16b: A/D converter 201005790 17 : D/A converter 80: housing 8 1 : cooling block 8 1 A : light introduction hole 83 : light extraction window portion 89 : vacuum ultraviolet light sensing 90: excimer lamp 100: excimer lamp. l〇〇a: light-emitting tube 1 〇〇b: internal electrode 1 0 0 c: external electrode 1 0 0 d: insulator 1 〇〇e: metal foil 1 0 0 f : Sealing part 1 00g : External lead

102 :反射鏡 H 1 0 3 :冷卻塊 101 :框體 1 〇 1 a :光照射窗 1 10 :連接器 120 :高壓供電端子 1 2 0 c :高壓供電纜線 130 : 1C標籤 1 4 0 :天線 -44- 201005790 2 0 0 :亮燈電源 210 ： CPU 220 :記憶體 230 :讀取器/寫入器102: Mirror H 1 0 3 : Cooling block 101 : Frame 1 〇 1 a : Light illuminating window 1 10 : Connector 120 : High voltage power supply terminal 1 2 0 c : High voltage supply cable 130 : 1C label 1 4 0 : Antenna-44- 201005790 2 0 0 : Lighting power supply 210 : CPU 220 : Memory 230 : Reader / Writer

Claims (1)

201005790 七、申請專利範圍： .1.—種光源裝置之亮燈控制方法，係具備有：來自被 設在光源之ic標籤之資訊的讀取/寫入手段；對由光源所 被出射的光的照度進行感測的感測手段；及控制光源之亮 燈的控制部的光源裝置之亮燈控制方法，其特徵爲： 在上述1C標籤係至少記錄有當使光源以預定的基準 電力亮燈時由該光源所被出射之光的照度相關的固有照度 資料及該光源的總計亮燈時間， I Ο 上述光源裝置的控制部係 根據由前述光源之1C標籤所讀出的固有照度資料； 及所被設定的目標照度資料’求出爲了獲得該目標照度資 料所需的目標電力資料， 使前述光源根據目標電力資料而亮燈，利用前述感測 手段來感測該時間點中由該光源所被出射之光的照度，將 所感測到的照度作爲基準照度資料加以記錄， 藉由前述感測手段來感測根據上述目標電力資料而使 _ 該光源繼續亮燈時之光源的照度，判定藉由該感測手段所 被感測的前述光源的照度資料是否已降低至相對於前述所 被記錄的基準照度資料爲預定比例以下， 當光源的照度資料已降低至相對於前述所被記錄之基 準照度資料爲預定比例以下時，求出根據由前述1C標籤 所讀出的光源的總計亮燈時間所求出的該光源的總計亮燈 時間所對應的補正電力資料， 根據該補正電力資料來對前述目標電力資料進行補正 -46 - 201005790 ，根據所補正的目標電力資料，使光源亮燈。 2.如申請專利範圍第1項之光源裝置之亮燈控制方法 ，其中，前述目標電力資料被補正，且根據所補正的目標 電力資料來使光源亮燈時，將藉前述感測手段所測定之由 該光源所被出射的光的照度作爲新的基準照度資料加以記 錄， 判定藉由前述感測手段所被感測的前述光源的照度資 φ 料是否已降低至相對於上述新的基準照度資料爲預定比例 以下。 3 .如申請專利範圍第1項或第2項之光源裝置之亮燈 控制方法，其中，在上述1C標籤係記錄有藉由校正完畢 的感測手段來測定出當以前述預定的基準電力亮燈時之由 該光源所被出射的光的照度的値，作爲由設有該1C標籤 之光源所被出射之光的照度相關的固有照度資料， 被設在上述光源裝置的感測手段係感度經時性劣化者 上述光源裝置的控制部係 當在上述光源裝置被安裝有新的光源時，使該光源以 上述基準電力亮燈，藉由被設在該光源裝置的感測手段， 測定由該光源所被出射的光的照度， 根據藉由被設在上述光源裝置的感測手段所測定的照 度資料、及由前述1C標籤所讀出的固有照度資料，求出 用以校正被設在上述該光源裝置之感測手段的測定値的校 正參數’根據該校正參數，對感測手段的輸出進行補正。 -47- 201005790 4. 一種光源裝置，係具備有：來自被設在光源之IC 標籤之資訊的讀取/寫入手段；對由光源所被出射的光的 照度進行感測的感測手段；及控制光源之亮燈的控制部的 光源裝置，其特徵爲： 在上述1C標籤係至少記錄有當使光源以預定的基準 電力亮燈時由該光源所被出射之光的照度相關的固有照度 資料及該光源的總計亮燈時間， 上述光源裝置的控制部係具備有： @ 目標電力資料算出手段，根據由前述光源之1C標籤 所讀出的固有照度資料、及所被設定的目標照度資料，求 出爲了獲得該目標照度資料所需的目標電力資料； 基準照度資料取得手段，使前述光源根據上述目標電 力資料而亮燈，使在該時間點中利用前述感測手段所感測 之由該光源所被出射之光的照度資料作爲基準照度資料而 記錄在記億部； 補正電力算出手段，判定根據上述目標電力資料而使 〇 該光源繼續亮燈時藉由前述感測手段所感測之光源的照度 ’是否已降低至相對於前述基準照度資料爲預定比例以下 ’當判定出光源的照度資料已降低至相對於前述所被記錄 之基準照度資料爲預定比例以下時，求出根據由前述1C 標籤所讀出的光源的總計亮燈時間所求出的該光源的總計 亮燈時間所對應的補正電力資料，且根據該補正電力資料 來對前述目標電力資料進行補正；及 亮燈控制手段，以上述所補正的目標電力資料被供給 -48- 201005790 至光源的方式進行控制。 5. 如申請專利範圍第4項之光源裝置，其中， 1C標籤係記錄有藉由校正完畢的感測手段來測定出 前述預定的基準電力亮燈時之由該光源所被出射的光 度的値，作爲由設有該1C標籤之光源所被出射之光 度相關的固有照度資料， 被設在上述光源裝置的感測手段係感度經時性劣 上述光源裝置的控制部係具備有上述感測手段的 手段， 該校正手段係當在上述光源裝置被安裝有新的光 ，使該光源以上述基準電力亮燈，根據藉由被設在該 裝置的感測手段所被感測之由該光源所被出射的光的 、及由前述1C標籤所讀出的固有照度資料，求出用 正被設在上述該光源裝置之感測手段的測定値的校正 ❹ ，根據該校正參數，對感測手段的輸出進行補正。 6. —種安裝有1C標籤的光源，其特徵爲：在上: 標籤係記錄有該光源的總計亮燈時間；及當使該光源 定的基準電力亮燈時藉由校正完畢的感測手段所測定 由該光源所被出射的光的照度，作爲由設有該1C標 光源所被出射之光的照度相關的固有照度資料。 上述 當以 的照 的照 化者 校正 源時 光源 照度 以校 參數 ft 1C 以預 出之 籤之 -49-201005790 VII. Patent application scope: .1. A lighting control method for a light source device, comprising: reading/writing means from information of an ic tag set on a light source; and light emitted by the light source a sensing means for sensing the illuminance; and a lighting control method for the light source device for controlling the lighting of the light source, wherein: at least the 1C tag is recorded to illuminate the light source with a predetermined reference power The inherent illuminance data related to the illuminance of the light emitted by the light source and the total lighting time of the light source, I Ο the control unit of the light source device is based on the inherent illuminance data read by the 1C tag of the light source; The set target illuminance data 'determines the target power data required to obtain the target illuminance data, causes the light source to illuminate according to the target power data, and senses the time point by the light source by using the sensing means The illuminance of the emitted light, the illuminance sensed is recorded as the reference illuminance data, and the sensing power is used to sense the power according to the target And illuminating the illuminance of the light source when the light source continues to be lit, determining whether the illuminance data of the light source sensed by the sensing means has decreased to a predetermined ratio below the reference illuminance data recorded When the illuminance data of the light source has been reduced to a predetermined ratio or less with respect to the reference illuminance data recorded as described above, the total amount of the light source obtained from the total lighting time of the light source read by the 1C label is obtained. The corrected power data corresponding to the lighting time is corrected according to the corrected power data -46 - 201005790, and the light source is turned on according to the corrected target power data. 2. The lighting control method of a light source device according to claim 1, wherein the target power data is corrected, and when the light source is turned on according to the corrected target power data, the sensing means is determined by the sensing means. The illuminance of the light emitted by the light source is recorded as new reference illuminance data, and it is determined whether the illuminance of the light source sensed by the sensing means has been lowered to be relative to the new reference illuminance. The information is below the predetermined ratio. 3. The lighting control method of a light source device according to claim 1 or 2, wherein the 1C label is recorded with a corrected sensing means for determining that the predetermined reference power is bright The illuminance of the light emitted by the light source at the time of the lamp is the sensitivity of the sensing means provided in the light source device as the illuminance data relating to the illuminance of the light emitted by the light source provided with the 1C tag. The time-dependent deterioration of the light source device is such that when the light source device is mounted with a new light source, the light source is turned on by the reference power, and the sensing means provided in the light source device measures The illuminance of the light emitted by the light source is determined based on the illuminance data measured by the sensing means provided in the light source device and the illuminance data read by the 1C tag. The measurement parameter "measurement parameter" of the sensing means of the light source device described above corrects the output of the sensing means based on the correction parameter. -47- 201005790 4. A light source device comprising: a reading/writing means from information of an IC tag provided in a light source; and a sensing means for sensing an illuminance of light emitted by the light source; And a light source device of a control unit that controls lighting of the light source, wherein the 1C tag is configured to record at least an illuminance associated with illuminance of light emitted by the light source when the light source is turned on with a predetermined reference power. The data and the total lighting time of the light source, the control unit of the light source device includes: @target power data calculating means, based on the specific illuminance data read by the 1C tag of the light source, and the set target illuminance data And determining a target power data required for obtaining the target illuminance data; and the reference illuminance data obtaining means, wherein the light source is turned on according to the target power data, so that the sensing device is sensed at the time point by the sensing means The illuminance data of the light emitted by the light source is recorded as the reference illuminance data in the Jiuyi section; the correction power calculation means is determined based on the above The target power data is such that when the light source continues to be lit, whether the illuminance ' of the light source sensed by the sensing means has decreased to a predetermined ratio below the reference illuminance data' is determined when the illuminance data of the light source has been reduced to When the reference illuminance data recorded as described above is equal to or less than a predetermined ratio, the corrected power data corresponding to the total lighting time of the light source obtained from the total lighting time of the light source read by the 1C tag is obtained. And correcting the target power data based on the corrected power data; and the lighting control means is controlled such that the corrected target power data is supplied from -48 to 201005790 to the light source. 5. The light source device of claim 4, wherein the 1C tag records a luminosity emitted by the light source when the predetermined reference power is turned on by the corrected sensing means. The sensing means provided in the light source device is inferior in sensitivity to the illuminance associated with the illuminance of the light source provided with the 1C tag. The control unit of the light source device includes the sensing means. The means for correcting is that when the light source device is mounted with new light, the light source is illuminated by the reference power, and the light source is sensed according to a sensing means provided in the device. The emitted light and the inherent illuminance data read by the 1C tag are used to obtain a correction 用 of the measurement 正 that is being provided by the sensing means of the light source device, and the sensing means is based on the correction parameter. The output is corrected. 6. A light source mounted with a 1C tag, characterized in that: the label is recorded with a total lighting time of the light source; and the corrected sensing means is used when the reference power of the light source is turned on. The illuminance of the light emitted by the light source is measured as the illuminance data relating to the illuminance of the light emitted by the 1C standard light source. When the above-mentioned illuminator corrects the source, the illumination of the light source is calibrated with the calibration parameter ft 1C to pre-sign the -49-
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