KR20100010901A - Light source apparatus and lighting control method for the same - Google Patents

Abstract

PURPOSE: A light control method of an optical device and the optical device are provided to maintain the illuminance of the light emitted from a lamp by correcting the illuminance data from an optical sensor. CONSTITUTION: An optical source(1) includes a lamp and an IC tag(1a). The IC tag is attached to the lamp. The IC tag stores the intrinsic illuminance data and the total lighting time of the lamp. A lighting source(2) supplies a high frequency with a high voltage into the lamp. A transformer(3) is installed on the output side of the light power. A controller(4) controls the lighting of the lamp and includes an optical sensor(15). The optical sensor detects the illuminance of the light from the lamp.

Description

LIGHT SOURCE APPARATUS AND LIGHTING CONTROL METHOD FOR THE SAME

The present invention relates to a lighting control method and a light source device of a light source device that emits light such as ultraviolet rays. In particular, the power to be supplied to the light source can be controlled in response to changes in the light output of the light source over time. A lighting control method and a light source device of a light source device capable of correcting data output from a detection means for detecting illuminance of a light source using data stored in an IC tag provided in a light source.

The UV / 0 ₃ cleaning method is widely used as a cleaning method combining ultraviolet rays and ozone (0 ₃ ), which is an active oxygen species, and is applied to the surface of such a substrate by irradiating ultraviolet rays to the surface of an LCD substrate or a semiconductor substrate, for example. It is an object to remove impurities such as organic compounds attached to the surface of the substrate by cutting molecular bonds such as organic compounds.

In recent years, as a light source used by such a UV / 0 ₃ cleaning method, instead of the low pressure mercury lamp which emits the ultraviolet-ray of wavelength 185nm and 254nm conventionally used, for example, xenon gas etc. are used as a light emitting material, for example, wavelength 172nm. The excimer lamp which is excellent in the washing | cleaning ability which emits the ultraviolet-ray of vacuum is used. Such an excimer lamp is disclosed in Patent Document 1 and the like, for example.

In the light source device using such an excimer lamp, in order to perform highly reliable ultraviolet light irradiation processing, it is necessary to confirm the lighting state of an excimer lamp. However, since the mainly emitted light is vacuum ultraviolet light, the lighting state of the excimer lamp cannot be visually confirmed. Therefore, various methods for confirming the lighting state of the excimer lamp and confirming the light output emitted from the excimer lamp at the time of lighting have been proposed.

As a method of confirming the lighting state of an excimer lamp, for example, as shown in patent document 1, the method of detecting the vacuum ultraviolet light radiate | emitted from an excimer lamp with a vacuum ultraviolet light sensor is known.

The excimer lamp device that checks the lighting state of the excimer lamp by the method of detecting the vacuum ultraviolet light is, for example, as shown in FIG. 11, to the cooling block 81 constituting the ceiling surface of the casing 80. Four excimer lamps 90 in a mounted state are provided. In the cooling block 81, a light introduction hole 81A serving as a through hole is formed in an area immediately above each excimer lamp 90. The vacuum ultraviolet light sensor 89 is provided in the one end side of 81 A of light introduction holes. In the figure, 83 is a light extraction window portion for irradiating the target object with light emitted from the excimer lamp 90.

However, since the sensitivity of the vacuum ultraviolet light decreases over time, the optical sensor for detecting the vacuum ultraviolet light obtains accurate illuminance data of the vacuum ultraviolet light emitted from the excimer lamp to be detected as the use time becomes longer. It turns out that I can't.

For example, when 6000 hours are used in total through the optical sensor which detects a vacuum ultraviolet light, the detection amount of the said optical sensor will fall about 10%. Therefore, when the electric power supplied to an excimer lamp is adjusted based on the illumination data of the vacuum ultraviolet light output from an optical sensor, it is judged that the illumination intensity of the vacuum ultraviolet light radiate | emitted from an excimer lamp is low, and the excess power with respect to an excimer lamp Since this was supplied, there was a fear that the excimer lamp would have a short lifespan.

On the other hand, when the excimer lamp is lit for 3000 hours in total, for example, illuminance of vacuum ultraviolet light emitted with deterioration of quartz glass or the like constituting the light emitting tube is lowered by about 70% than when the initial lighting is performed. For this reason, it is necessary to replace with new ones regularly.

In addition, since the optical sensor for detecting the vacuum ultraviolet light is expensive, it cannot be frequently replaced with a new one, and it is practically impossible to replace it with an excimer lamp at the same time.

In addition, it is generally difficult to determine whether or not the lamp has reached the end of its useful life in appearance, and in particular, the excimer lamp has a low illuminance of vacuum ultraviolet light emitted with deterioration of quartz glass or the like constituting the light emitting tube. Therefore, it is difficult to determine whether the product has reached the end of its useful life.

Therefore, an apparatus has been proposed in which an IC tag is provided in each lamp, and the IC tag stores the total lighting time information of the lamp and manages the total lighting time (see Patent Document 2, for example).

12 is a sectional view of an ultraviolet irradiation device equipped with a lamp provided with an IC tag. The figure is sectional drawing cut in the plane parallel to the tube axis of a lamp. In addition, the same figure shows the case where an excimer lamp was used as a lamp.

As shown in the figure, the ultraviolet irradiation device has a metal housing 101 for circulating an inert gas therein. Inside the housing 101, a plurality of excimer lamps 100 arranged in parallel so that the tube axes are parallel are arranged. Along the excimer lamp 100, a cylindrical reflector 102 that reflects the ultraviolet rays emitted from the excimer lamp in the direction of the object to be processed is provided corresponding to each excimer lamp 1. Each excimer lamp 100 provided with the reflector 102 is fixed to, for example, a cooling block 103 made of aluminum through which a water cooling pipe circulates.

In the excimer lamp 100, encapsulation portions 100f in which metal foils 100e are embedded are formed at both ends of the light emitting tube 100a made of a dielectric material that transmits vacuum ultraviolet light, and the inside of the light emitting tube 100a is formed. The coil-shaped internal electrode 100b is disposed on the tube axis of the light emitting tube 100a, and the periphery of the internal electrode 100b is covered with the insulator 100d. Moreover, the mesh-shaped external electrode 100c is arrange | positioned at the outer surface of the light emitting tube 100a.

An outer lead 100g protruding to the outside of the light emitting tube 100a is connected to each metal foil 100e, a high voltage feed cable 120c is connected to the outer lead 100g, and a high voltage feed terminal ( 120) is installed.

The housing 101 is equipped with a connector 110 made of resin, and an antenna 140 is provided in the connector 110. In addition, the high voltage feed terminal 120 is mounted at the end of the high voltage feed cable 120c, and the IC tag 130 is provided in the insulating holder of the high voltage feed terminal 120.

The high voltage feed terminal 120 plugs into the connector 110, so that the internal electrode 100b and the high frequency lighting power are turned on. Although not shown, the external electrode 100c is electrically connected to a high frequency lighting power supply.

Fig. 13 is a conceptual diagram showing an example of the configuration of a control system for turning on an excimer lamp having the above-described IC tag.

The high voltage feed terminal 120 of the high voltage feed cable connected to the electrode of the excimer lamp 1 is connected to the high frequency lit power source 200 through the connector 110 described above, and is connected to the high frequency lit power source 200 from the high frequency lit power source 200. The excimer lamp 100 is turned on by supplying a voltage.

As described above, the antenna 110 is provided in the connector 110, and the antenna 140 is connected to a reader / writer 230 for writing data to or reading data from an IC tag. The CPU 210 controls the reader / writer 230, writes data to or reads data from the IC tag, and controls the high frequency lighting power supply 200 to control the high frequency lighting power supply 200. Control lighting.

13, lighting control is performed as follows.

Before starting the lighting of the excimer lamp 100, the integrated lighting time information until the last use time stored in the IC tag 130 is read by the reader / writer 230 through the antenna 140, and the CPU 210 is read. This information is stored in the memory 220 connected to the.

The IC tag 130 also stores the service life time information unique to the individual excimer lamps 100, and the CPU 210 determines whether or not the integrated lighting time read out from the IC tag 130 is less than the service life time. When it is irradiated and the cumulative lighting time is less than the service life time, a lighting signal is transmitted from the CPU 210 to the high frequency lighting power supply 200. Thereby, the high frequency lighting power supply 200 supplies a high voltage high frequency voltage to the excimer lamp 100, and the excimer lamp 100 lights.

During the lighting of the excimer lamp 100, the latest lighting time information is added to the total lighting time stored in the memory 220 at any time.

When the total lighting time reaches the service life time, the CPU 210 transmits a lighting stop signal to the high frequency lighting power supply 200 to turn off the excimer lamp 100.

In addition, when the excimer lamp is turned off before the cumulative lighting time reaches the service life time, the latest lighting time is added to the cumulative lighting time stored in the memory 220 after the excimer lamp is turned off, and the reader / writer ( 230 stores the latest integrated lighting time in the IC tag 130 via the antenna.

By performing the above control, it becomes possible to efficiently manage excimer lamp integration lighting time information about each excimer lamp.

[Patent Document 1: Patent No. 2789557]

[Patent Document 2: Patent Publication 2007-123069)

As described above, when the excimer lamp is lit for 3000 hours in total, for example, the illuminance of the emitted vacuum ultraviolet light is about 70% lower than that at the time of initial lighting.

On the other hand, as mentioned above as a method of confirming the lighting state of an excimer lamp, the method of detecting vacuum ultraviolet light with an optical sensor is known, but the sensitivity of this kind of optical sensor decreases with time. For this reason, as the usage time becomes longer, accurate illuminance data of light emitted from the lamp cannot be obtained, and illuminance cannot be maintained even if the power supplied to the lamp is adjusted based on illuminance data output from the optical sensor. .

That is, a light sensor having a deterioration in detection sensitivity over time, such as a light source device for turning on an excimer lamp using an optical sensor for detecting vacuum ultraviolet light, and the like, in which the illuminance decreases with time by the light sensor In a light source device that detects light and controls illumination, the illumination intensity of the lamp decreases over time in addition to deterioration of the detection sensitivity of the optical sensor, so that the illumination intensity of the light emitted from the lamp can be accurately and accurately for a long time. It is extremely difficult to control.

Moreover, when using the optical sensor whose sensitivity falls with time as mentioned above, it is desirable to be able to automatically correct the detection sensitivity of an optical sensor as soon as the optical sensor is attached to a light source device, but it has such a function. One light source device is unknown.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a light source device in which a lamp whose illumination intensity decreases with time is used, and the sensitivity of the optical sensor for checking the lighting state of the lamp deteriorates over time. The illumination intensity of the light emitted from the lamp can be precisely controlled so that the illumination intensity can be kept constant, and the detection sensitivity of the light sensor whose sensitivity is degraded can be automatically corrected as soon as the light sensor is equipped with the light source device.

In this invention, the said subject is solved as follows.

A. Stabilization control of the light emitted from the lamp

The present invention controls the illuminance of the light emitted from the lamp to coincide with the target value, thereby keeping the illuminance constant.

In the excimer lamp, the illuminance of the emitted light decreases with time due to various factors. As described above, in order to maintain the illuminance of the lamp whose illuminance decreases over time, it is necessary to control so as to increase the power supplied to the lamp when the illuminance falls below a predetermined ratio with respect to the target illuminance.

In the present invention as a means for controlling the power supplied to such a lamp, the power supplied to the lamp is controlled based on the total lighting time of the lamp recorded in the IC tag using the IC tag attached to the lamp.

That is, in the present invention, the detection means detects whether or not the lowering of the illuminance exceeds a predetermined ratio, and corrects (increases) the power supplied to the lamp when the lowering of the illuminance exceeds the predetermined ratio.

The correction of this power uses, for example, a correction table that defines the relationship between the total lighting time of the lamp and the data of the correction power. Then, the correction power corresponding to the total lighting time is obtained and the power supplied to the lamp is controlled.

That is, by using the IC tag, the total lighting time of the lamp can be recorded, and data of corrected power can be obtained based on the total lighting time recorded in the IC tag.

B. Calibration of the Light Sensor

In the present invention, the illuminance data output from the vacuum ultraviolet light sensor provided in the apparatus is corrected in order to cope with deterioration of the detection sensitivity of the light due to deterioration of the sensor provided in the light source apparatus.

This calibration is performed using the value measured by the new optical sensor different from the optical sensor provided in the light source device.

For example, using a new sensor installed in a factory or the like, accurate illumination data of light for each lamp is obtained by the new sensor, and recorded in an IC tag provided in each lamp.

For example, the latter value is upwardly corrected so that the latter value coincides with the former value, in contrast to the illuminance data output from the sensor installed in the excimer lamp device and this illuminance upon lamp replacement.

Based on the above, this invention solves the said subject as follows.

(1) In the IC tag provided in the light source, at least the intrinsic illuminance data related to the illuminance of the light emitted from the light source when the light source is turned on at a predetermined reference power and the total lighting time of the light source are recorded.

The light source device includes reading / writing means for reading information from the IC tag, detection means for detecting illuminance of light emitted from the light source, and a control unit for controlling the lighting of the light source. Based on the intrinsic illuminance data read from the tag and the set target illuminance data, the target power data required for obtaining the target illuminance data is obtained, and the light source is turned on based on the target power data, and the target light data is turned on from the light source at that time. The illuminance of the emitted light is detected by the detecting means, and the detected illuminance is recorded as reference illuminance data.

Based on the target power data, illuminance of the light source when the light source is continuously turned on is detected by the detecting means, and the illuminance data of the light source detected by the detecting means includes the recorded reference illuminance. It is determined whether the data falls below a predetermined ratio. When the illuminance data of the light source falls below a predetermined ratio with respect to the recorded reference illuminance data, the correction power data corresponding to the total lighting time of the light source is obtained based on the total lighting time of the light source read from the IC tag. The target power data is corrected based on the corrected power data, and the corrected target power data is supplied to the light source.

(2) In (1), when the target power data is corrected and the light source is turned on based on the corrected target power data, the illuminance of the light emitted from the light source measured by the detection means is used as new reference illuminance data. It is recorded and it is determined whether the illuminance data of the said light source detected by the said detection means fell below the predetermined ratio with respect to the said new reference illuminance data.

(3) In (1) and (2), the IC tag emits light from the light source when it is turned on at the predetermined reference power as intrinsic illuminance data related to the illuminance of the light emitted from the light source provided with the IC tag. The illuminance of the light to be measured is measured and recorded by the calibrated detection means.

And when the new light source is attached to a light source device, the control part of the said light source device will light this light source with the said reference electric power, and measure the illumination intensity of the light emitted from the light source by the detection means provided in the light source device.

Based on the illuminance data measured by the detecting means provided in the light source device and the intrinsic illuminance data read out from the IC tag, a calibration parameter for correcting the measured value of the detecting means provided in the light source device is obtained. Based on this, the output of the detection means is corrected.

(4) The intrinsic illuminance data relating to the illuminance of the light emitted from the light source and the total lighting time of the light source are recorded in the IC tag provided in the light source, at least when the light source is turned on at a predetermined reference power.

The light source device includes reading / writing means for reading information from an IC tag, detecting means for detecting illuminance of light emitted from the light source, and a control unit for controlling the lighting of the light source, and the control unit reads from the IC tag of the light source. Target power data calculating means for obtaining target power data necessary for obtaining the target illuminance data based on the generated unique illuminance data and the set target illuminance data, and turning on the light source based on the target power data, Reference illuminance data acquiring means for recording illuminance data of the light emitted from the light source detected by the detecting means as reference illuminance data to the storage unit, and when the light source is continuously turned on based on the target power data, The illuminance of the light source detected by the sensor is small with respect to the reference illuminance data. The light source determined on the basis of the total lighting time of the light source read from the IC tag when it is determined whether or not the ratio is lowered or less and the illuminance data of the light source is lowered or lower than a predetermined ratio with respect to the recorded reference illuminance data. And correction means for obtaining corrected power data corresponding to the integrated lighting time, and correcting the target power data based on the corrected power data, and lighting control means for controlling the target power to be supplied to a light source.

(5) In (4), the IC tag includes intrinsic illuminance data relating to illuminance of light emitted from a light source provided with the IC tag, and illuminance of light emitted from the light source when lit at the predetermined reference power. The value measured by the calibrated detection means is recorded.

The control part of the said light source apparatus is equipped with the correction means of the said detection means which a sensitivity deteriorates with time, The correction means makes a light source light with the said reference electric power when a new light source is attached to the said light source apparatus, A calibration parameter for calibrating the measured value of the detection means provided in the light source device based on the illuminance of the light emitted from the light source detected by the detection means provided in the light source device and the intrinsic illuminance data read from the IC tag. And the output of the detection means is corrected based on the calibration parameter.

(6) In a light source equipped with an IC tag, the IC tag has a predetermined reference electric power as intrinsic illuminance data relating to the integrated lighting time of the light source and the illuminance of light emitted from the light source provided with the IC tag. The illuminance of the light emitted from the light source measured by the calibrated detection means at the time of lighting is recorded.

In the present invention, the following effects can be obtained.

(1) In the present invention, the light source is turned on by the target power data necessary for obtaining the target illuminance data, the illuminance at that time is detected by the detection means, recorded as reference illuminance data, and the light source detected by the detection means. When the illuminance is lowered below a predetermined ratio with respect to the recorded reference illuminance data, correction power data is obtained on the basis of the total lighting time of the light source read from the IC tag, and the target power data is obtained by the correction power data. Since correction | amendment was made to supply to a light source, even when the illumination intensity of the vacuum ultraviolet light of a lamp falls with time, it can maintain the illumination intensity of a light source uniformly.

In addition, according to the light source device of the present invention, whenever the illuminance of the light detected by the detecting means falls beyond a predetermined range, the latest reference illuminance data considering the deterioration of the illuminance of the lamp and the deterioration of the sensitivity of the detecting means is considered. Since the correction power data is obtained and the light source is controlled based on this, the illuminance can be maintained substantially constant with high accuracy.

(2) The illuminance of the light emitted from the light source when the IC tag is turned on at a predetermined reference power is measured by the calibrated detection means, recorded as intrinsic illuminance data, and when a new light source is attached to the light source device, the light source Is turned on at the reference power, and the detection means provided in the light source device measures the illuminance of the light emitted from the light source, and based on the illuminance data and the intrinsic illuminance data read from the IC tag, Since the detection means has been calibrated, the illuminance data output from the sensor can be corrected every time the excimer lamp which has reached the end of its service life is replaced with a new one, and even if the light sensor installed in the light source device is degraded by prolonged use, Accurate illuminance can be obtained.

For this reason, the illumination intensity of the light emitted from the lamp can be precisely controlled, and the illumination intensity of the light irradiated to the target object greatly exceeds the target illumination intensity by supplying excess power to the excimer lamp, which has conventionally been a problem. Overshoots or shortening of lamp life can be eliminated.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows the system structure of the light source device which is one Embodiment of this invention.

As shown in the figure, the light source device of the present invention includes a light source (hereinafter referred to as a lamp) 1 having an IC tag 1a capable of inputting record information in a non-contact manner, and a high frequency high voltage lamp 1. It is provided with the lighting power supply 2 for supplying to the transformer, the transformer 3 provided in the output side of the lighting power supply 2, the control part 4 which controls the lighting of the lamp 1, and the input part 5. As shown in FIG.

The control part 4 detects light, such as vacuum ultraviolet light emitted from the lamp 1, and outputs an illuminance signal, and the lamp is based on the illuminance data of the light sensor 15 and the like. Between the arithmetic processing unit (CPU) 11, the storage unit 13, and the IC tag la, which controls lighting of (1) and performs arithmetic processing for calibrating the optical sensor 15, Antenna 14 for transmitting and receiving data, IC tag R / W unit 12 for controlling the transmission and reception of data between IC tag 1a, A / D converters 16a and 16b, and D / A. It consists of a transducer 17. The A / D converters 16a and 16b convert the signal from the optical sensor 15 and the signal from the lighting power supply 2 into digital signals for transmission to the CPU 11, and the D / A converter 17 The digital signal from the CPU 11 is converted into an analog signal and sent to the lit power supply 2.

The storage section 13 includes a volatile memory (RAM 13a) capable of reading and writing, a read-only nonvolatile memory (ROM 13b), and a rewritable nonvolatile memory (EEPROM 13c). Remember your program or data.

The ROM 13b of the storage unit 13 includes a correction table Tab for correcting the power supplied to the lamp 1 according to the total lighting time, the standard illuminance data X ₀ of the excimer lamp, the reference power data Z _0, and the like. Information is recorded, and information necessary for stably maintaining the illuminance of the vacuum ultraviolet light emitted from the excimer lamp is recorded in the EEPROM 13c.

The light source 1 is, for example, an excimer lamp in which discharge gas such as xenon gas is sealed, and emits vacuum ultraviolet light having a wavelength of 172 nm. In addition, below, the case where the lamp 1 is an excimer lamp is demonstrated.

The IC tag 1a is provided for each lamp and is a percentage Y [= (unique illuminance data X ₁ / standard illuminance data X ₀ ) × 100] according to the intrinsic illuminance data X ₁ related to the illuminance peculiar to each excimer lamp. The total lighting time Ts is recorded.

When the lamp is an excimer lamp, the optical sensor 15 is a vacuum ultraviolet light sensor, and is composed of, for example, a semiconductor photosensor such as ALGN (allium gallium nitride), a phosphor for converting ultraviolet light into visible light, or the like. have.

As shown in FIG. 11, the optical sensor 15 is disposed at one end of the light introduction hole formed in the cooling block, and the vacuum ultraviolet light from the lamp 1 passes through the light introduction hole. Incident on the light incident surface of

As described above, the sensitivity in the vacuum ultraviolet light sensor decreases as the use time becomes longer.

For example, as shown in FIG. 3C, the sensitivity of the vacuum ultraviolet light decreases by about 30% after 3000 hours from the start of use.

That is, the illuminance data output from the optical sensor 15 becomes a value lower than the illuminance of the vacuum ultraviolet light emitted from the actual lamp 1. Therefore, when trying to control the electric power supplied to the lamp 1 based on the illumination data from the optical sensor 15 so that the illumination intensity of the vacuum ultraviolet light radiate | emitted from the lamp 1 may be kept constant, The excess power supply will be performed.

Therefore, as shown in A of FIG. 3, the illuminance of the excimer lamp becomes higher than the target illuminance of B of FIG. 3, causing overshoot. In order to avoid such overshooting, it is necessary to correct the sensitivity deterioration of the vacuum ultraviolet light generated with deterioration of the optical sensor 15.

As described later, the CPU 11 of the control unit 4 emits the vacuum ultraviolet light emitted from the lamp 1 based on the target illuminance data provided from the input unit 5 and the illuminance data detected by the optical sensor 15. The electric power supplied to the lamp 1 is controlled by sending a command to the lighting power supply 2 so that the illuminance corresponds to the target illuminance. Moreover, the illuminance data output from the optical sensor 15 is based on the illuminance data detected by the optical sensor 15 and the intrinsic illuminance data read from the IC tag 1a included in the lamp 1. To match the data, the output of the optical sensor 15 is calibrated.

The input unit 5 is, for example, a touch panel type having a liquid crystal display screen or the like, and inputs the target illuminance data related to the illuminance of the vacuum ultraviolet light required for each target object by the user of the light source device to the CPU 11. Used to

Here, the various data used in this embodiment are shown collectively. These data are stored in an IC tag, a read-only nonvolatile memory (ROM 13b), a rewritable nonvolatile memory (EEPROM 13c), and the like, for example, as shown below. Is transferred to and stored in a read-write memory (RAM 13a).

In addition, the storage location of such data can be appropriately changed, for example, all data may be stored in the EEPROM without installing a ROM, and stored in a so-called memory medium (for example, a nonvolatile memory or a magnetic disk). It may be expanded to the RAM 13a at runtime and saved to the nonvolatile memory or the storage medium at the end.

In addition, in the following description, in order to make understanding easy, even when data is transferred to RAM, the storage location of data may be specified at the place where it was stored at the time of apparatus start as needed.

Standard illuminance X ₀ : Illuminance of vacuum ultraviolet light irradiated from a standard excimer lamp (stored in ROM)

Unique illuminance X ₁ : Intrinsic illuminance of the lamp recorded on the IC tag (stored in the IC tag and EEPROM)

Actual illuminance X ₂ : Illumination data obtained from an optical sensor installed in the apparatus

Target illuminance X ₃ : Target illuminance (stored in EEPROM) set from an input part

Standard illuminance X ₄ : Illumination data obtained from the optical sensor installed in the device (stored in EEPROM) when the lamp is turned on in the target power data Z ₁ or the corrected power data Z ₂ after initial or power correction.

Reference power Z ₀ : Power required for standard excimer lamp to output standard illuminance X ₀ (stored in ROM)

Target power Z ₁ : Power required to store target illuminance (stored in EEPROM)

Correction power Z ₂ : Target power corrected by correction power factor (stored in EEPROM)

Correction factor K: Intrinsic roughness X ₁ / actual roughness X ₂

Percentage Y = (Unique Roughness X ₁ / Norm Roughness X ₀ ) × 100

(I store it in an IC tag, EEPROM)

Total lighting time Ts: Integrated value of lamp lighting time (stored in IC tags and EEPROM)

Correction table Tab: Table (stored in ROM) that records the amount of power increase (correction power factor) for the total lighting time.

2 is a functional block diagram of a light source device of one embodiment of the present invention, and shows, as a block diagram, a function realized by a process executed by the CPU 11 of the controller 4.

In the IC tag 1a provided in the lamp 1, as described above, the percentage Y = (unique illuminance X ₁ / standard illuminance X ₀ ) × 100 and the total lighting time Ts of the lamp 1 are recorded.

The intrinsic illuminance X ₁ is a calibrated light that outputs correct illuminance data such as a new optical sensor, for example, the illuminance of light emitted from the lamp 1 when the lamp 1 is turned on at the reference power. Data measured by the sensor.

The IC tag R / W unit 12 reads the data recorded in the IC tag 1a through the antenna 14 as described above, and stores the data in the storage unit 13 as IC tag data.

The calibrating means 4f of the control part 4 uses the lighting control means 4e by the lighting control means 4e when the new lamp 1 (the lamp whose total lighting time Ts is 0) is attached to the light source device. Is turned on at the reference power Z ₀ , and based on the illuminance of the light emitted from the lamp 1 detected by the optical sensor 15 and the intrinsic illuminance X ₁ read out from the IC tag 1a, The calibration parameter which corrects the measured value of the detection means provided in the light source device is calculated | required. And based on the calibration parameter, the output of the optical sensor 15 is correct | amended.

Thereby, whenever the lamp 1 is replaced with a new lamp, the optical sensor 15 can be calibrated to output the correct measured value.

The integration timer 4g of the control unit 4 counts the integration time for which the lamp 1 lights up, and the integrated lighting time update means 4a is stored in the storage unit 13 each time the predetermined integration time comes. Update the cumulative lighting time. The updated total lighting time Ts is recorded in the IC tag 1a provided in the lamp 1 when the operation of the light source device is stopped.

As described above, the target illuminance X ₃ is input to the CPU 11 from the input unit 5, and this data is stored in the storage unit 13.

The target power calculating means 4b of the control unit 4 uses the target illuminance X ₁ , the reference power Z ₀ , and the target illuminance X ₃ calculated based on the percentage Y read from the IC tag 1a. Calculate the target power Z ₁ needed to obtain illuminance X ₃ . The calculated target power Z ₁ is stored in the storage unit 13.

The reference illuminance data acquisition means 4d causes the lamp 1 to be turned on by the lighting control means 4e based on the target power Z ₁ or the correction power Z ₂ at the time of starting the device or during power correction described later. The illuminance data of the light detected by the optical sensor 15 at that time is obtained. This value is stored in the storage unit 13 as the reference illuminance data X ₄ .

The lighting control means 4e turns on the lighting power supply 2 so that the power supplied to the lamp 1 matches the target power Z ₁ (after correction, the correction power Z ₂ ) calculated by the target power calculating means 4b. To control.

That is, the voltage applied to the lamp 1 and the lamp current are detected and sent from the lighting power supply 2 to the lighting control means 4e of the control section 4. The voltage and current detected by the lighting power supply 2 are analog signals, which are converted into digital signals by the A / D converter and sent to the CPU of the controller 4 as described above.

The lighting control means 4e calculates the power supplied to the lamp from the voltage and the current, and compares the calculated power with the target power Z ₁ (correction power Z ₂ after correction). The calculated power calculates a ramp voltage and a frequency corresponding to the target power Z ₁ (after correction, the correction power Z ₂ ). This lamp voltage and frequency are sent to the lighting power supply 2 as a voltage command and a frequency command.

The lighting power supply 2 controls the drive voltage and frequency of the lamp 1 according to this voltage command and the frequency command. With this, the target power the power supplied to lamp (1) Z ₁ (after correction is correction power Z ₂₎ is controlled to correspond to the lamp (1) is (are corrected power Z ₂ the corrected) target power Z ₁ Lights up with the illuminance according to

Here, in the excimer lamp, the illuminance of the light emitted as described above decreases with the passage of time. Therefore, in the initial stage of lighting, the lamp 1 lights up at the illuminance corresponding to the target illuminance by supplying electric power according to the target power data to the lamp 1, but as the lighting time elapses, the illuminance of the lamp 1 Falls.

The correction power calculation means 4c calculates correction power Z _{2 in} which the target power Z ₁ is corrected so that the drop in the illuminance of the lamp 1 is corrected.

That is, the correction power calculating means 4c is the illuminance detected by the optical sensor 15 when the lamp 1 is continuously turned on based on the target power Z ₁ (after the correction power Z ₂ ). Measured illuminance X ₂ ) is obtained, and it is determined whether the measured illuminance X ₂ falls below a predetermined ratio with respect to the reference illuminance X ₄ .

Then, the correction power calculating means (4c) is a lamp (1) If the measured roughness X ₂ is, reduced by a predetermined ratio or less for the reference illuminance X _4, of the lamp (1) stored in the storage section 13 The total lighting time Ts is read out, the correction table Tab stored in the storage unit 13 is referred to, and correction power data Z ₂ corresponding to the total lighting time Ts is obtained and stored in the storage unit 13.

The illuminance of the vacuum ultraviolet light emitted by the excimer lamp decreases over time due to various factors. In order to correct this decrease in illuminance, it is necessary to increase the power supplied to the excimer lamp. In the correction table Tab, the relationship between the total lighting time of the excimer lamp and the power correction coefficient is defined. .

In other words, the relationship between the total lighting time and the illuminance deterioration rate of the vacuum ultraviolet light is determined in advance for each excimer lamp, and the electric power increase rate required to maintain the illuminance of the vacuum ultraviolet light constant based on this relationship is obtained. Register the relationship between the total lighting time and the power correction coefficient. Therefore, the correction power data Z ₂ can be obtained by reading the power correction coefficient of this correction table and multiplying it by the target power Z ₁ .

When the correction power data Z ₂ is calculated, the lighting control means 4e calculates a lamp voltage and a frequency at which the power supplied to the lamp becomes the corrected correction power data Z ₂ as described above to the lighting power supply 2. Send it out. The lighting power supply 2 turns on the lamp 1 by this lamp voltage and frequency.

In addition, when the correction power data Z ₂ is calculated and the lamp 1 is turned on based on the correction power data Z ₂ , the reference illuminance data acquisition means 4d is a lamp (measured by the optical sensor 15). The illuminance of the light emitted from 1) is stored in the storage unit 13 as a new reference illuminance X ₄ .

Turning now, for the reference illuminance X _4, and determines whether the illuminance detected by the optical sensor 15 decreases below a predetermined ratio, falls below the predetermined ratio as described above, the career lighting time as the The corresponding corrected power data Z ₂ is obtained.

In this way, the lamp 1 is basically turned on at a constant power, and whenever the illuminance of the lamp 1 falls below a predetermined ratio with respect to the standard illuminance after the latest correction, the lamp is in accordance with the total lighting time of the lamp. Since the illuminance of the lamp 1 is increased upward by increasing the electric power supplied to (1), even if the illuminance of the lamp 1 falls with time, the illuminance of the lamp 1 can be kept substantially constant. In addition, since the detection value by the optical sensor 15 is used to determine whether the illuminance of the lamp 1 fell below a predetermined ratio with respect to a reference illuminance, the detection sensitivity of the optical sensor 15 will be over time. Even if it reduces, it will not be influenced greatly.

Next, the operation | movement of the light source device of this embodiment is demonstrated in detail with a flowchart.

1. Write data to IC tag and calibrate optical sensor

(1) Recording of data into IC tags

First, the process of recording the percentage Y corresponding to the intrinsic illuminance data X ₁ in the IC tag will be described with reference to FIG. 5.

The lamp 1 is applied to a light source device using a new optical sensor or a calibrated optical sensor that is different from the optical sensor 15 that may have a deteriorated sensitivity of the light source device shown in FIG. And the above data is recorded in the IC tag 1a of the lamp 1. The light source device may have a configuration as shown in FIG. 1 except that the optical sensor is new or calibrated, for example. Hereinafter, the IC tag 1a is used using the light source device shown in FIG. Although data is recorded in the following description, a dedicated device for recording IC tags may be used. That is, the illuminance of the lamp is measured by a new optical sensor or a calibrated optical sensor using a dedicated device, the percentage Y corresponding to the intrinsic illuminance data X ₁ is calculated, and the IC tag is recorded using the IC tag recording device. The data may be recorded in (1a).

In the following flowchart, the recording of the percentage Y corresponding to the intrinsic illuminance data X ₁ will be described, but the integrated lighting time as described above is recorded in the IC tag in addition to this data, 0 is recorded as the lighting time

(Step S101)

First, the reference power Z ₀ recorded in the read-only memory (ROM 13b) is read out, and the lamp 1 is turned on at the reference power Z ₀ .

(Step S102)

It is checked whether illuminance of the vacuum ultraviolet light emitted from the lamp 1 is stable. This confirmation judges whether or not the illuminance change is 1% or less in 5 minutes, for example. If the illuminance is stable, the process proceeds to step S104.

(Step S103)

If the illuminance does not stabilize, check if the timeout has occurred. If illuminance is stable within 30 minutes, the flow returns to step S101. If the illuminance is not stable as described above even after 30 minutes, the lamp 1 determines that it is a defective product and ends the process.

(Step S104)

The intrinsic illuminance data X ₁ when the illuminance is stabilized is obtained. The analog signal from the optical sensor 15 is converted into a digital signal by the A / D converter 16b, and the digital signal is input to the CPU 11 as intrinsic illuminance data X ₁ .

(Step S105)

The value corresponding to the unique illuminance data X ₁ input to the CPU is recorded in the IC tag 1a. Here, the intrinsic illuminance data X ₁ is the IC as a percentage Y of the intrinsic illuminance data X ₁ to the standard illuminance data X ₀ stored in the read-only memory (ROM 13b), as shown in the following formula (1). The tag 12 is recorded.

Y = (X ₁ / X ₀ ) x 100... (One)

(2) calibration of the light sensor

Next, a flowchart describes the calibration operation of the optical sensor. This operation also corresponds to the operation realized by the calibration means 4f in FIG.

6 is a flow of calibrating the optical sensor 15 based on the data recorded in the IC tag. The calibration is performed before the light irradiation process to the target object is performed each time the lamp which has reached the end of life is replaced with a new one. Until the end of the service life of the lamp, the correction of the optical sensor 15 is not performed.

(Step S201)

First, the IC tag R / W unit 12 is accessed from the CPU 11, a command is transmitted to the IC tag 1a at a carrier frequency of 135 kHz via the antenna 14, and the IC is connected by bidirectional communication. The information is read from the tag 1a and received by the CPU 11 via the IC tag R / W unit 12.

The CPU 11 confirms whether or not the lamp 1 is new from the cumulative lighting time recorded in the IC tag 1a. When the cumulative lighting time Ts = 0, it is determined that the lamp 1 is new and the flow proceeds to step S202. On the other hand, when the cumulative lighting time Ts is not 0, the optical sensor 15 is not calibrated, and the processing ends.

(Step S202)

The CPU 11 acquires the percentage Y of the unique illuminance data X ₁ recorded in the IC tag 1a. That is, the command is transmitted from the IC tag R / W unit 12 to the IC tag 1a at a carrier frequency of 135 kHz, and the percentage Y is obtained from the IC tag 1a through the antenna 14.

(Step S203)

Next, the lamp 1 is turned on with the reference power Z ₀ recorded in the read-only memory (ROM 13b) of the storage unit 13.

(Step S204)

Check that the illuminance of the light emitted from the lamp 1 is stable. This confirmation judges whether or not the illuminance change is 1% or less in 5 minutes, for example. If the illuminance is stable, the flow advances to step S206.

(Step S205)

If the illuminance does not stabilize, check if the timeout has occurred. If illuminance is stabilized within 30 minutes, the flow returns to step S201 to execute the processes of steps S201 to S204. If the illuminance is not stabilized as described above even after 30 minutes, the lamp 1 is judged to be defective and the process is terminated.

(Step S206)

Then, the illuminance of the light emitted from the lamp 1 is detected by the optical sensor 15. The analog signal from the optical sensor 15 is converted into a digital signal by the A / D converter 16b, and the digital signal is input to the CPU 11 as actual illuminance data X ₂ .

(Step S207)

Finally, the illuminance data output from the optical sensor 15 is corrected based on the intrinsic illuminance data X ₁ acquired in step S202 and the measured illuminance data X ₂ acquired in step S206. Correction of step S207 is performed as follows.

(i) The value of the unique illuminance data X ₁ is calculated based on the standard illuminance data X ₀ read out from the read-only memory (ROM 13b) of the storage unit 13 and the percentage Y read out from the IC tag 1a. do.

As it is shown in Fig. 2 below, calculates the ratio of the correction coefficients K of specific illumination data X ₁ to X ₂ the measured illumination data.

Correction coefficient K = (unique illuminance data X ₁ ) / (actual illuminance data X ₂ )... (2)

(Ii) The measured illuminance data X ₂ is multiplied by the correction coefficient K obtained from the expression (2).

As described above, the light in pre-installed on new optical sensor or by using a calibrated light sensor records the percentage Y represents the specific illumination data X ₁ in the IC tag, obtained from its own illumination data X ₁ and a light source device, etc. Plant The measured illuminance data output from the vacuum ultraviolet light sensor can be corrected by the correction coefficient K obtained based on the measured illuminance data X ₂ obtained from the sensor.

Therefore, each time the excimer lamp at the end of its service life is replaced with a new one, the correction factor K is obtained and stored, and the illuminance data output from the sensor is corrected by the correction factor K, so that the vacuum ultraviolet light sensor installed in the excimer lamp is used for a long time. Even if deteriorated by the use of, the illuminance of the accurate vacuum ultraviolet light can be obtained.

Therefore, according to the present invention, an overshoot in which the illuminance of the vacuum ultraviolet light irradiated to the target object greatly exceeds the target illuminance occurs due to the supply of excess power to the excimer lamp, which has conventionally been a problem, or the life of the excimer lamp This shortening obstacle can be eliminated.

2. Optical stabilization control

(1) the flow of the whole processing

First, the flow of the whole process of the light source device of this embodiment is demonstrated.

7 is a flowchart showing the flow of the entire processing of the light source device of the present embodiment.

As shown in Fig. 7, the light source device operates as follows.

(Step S1)

The device is started.

(Steps S2, S3)

Data is acquired from the IC tag installed in the lamp. From the total lighting time data obtained from the IC tag, it is determined whether the lamp is a new lamp (the total lighting time is 0).

(Step S4)

If the lamp is a new lamp, the lamp 1 is turned on with the reference power Z _O , and illuminance is measured by the optical sensor 15. Based on the measured illuminance measured as described above and the intrinsic illuminance X ₁ obtained from the percentage Y read out from the IC tag, a calibration parameter for calibrating the output of the optical sensor 15 is obtained and based on the calibration parameter, The output of the optical sensor 15 is corrected.

(Step S5)

If the lamp is not a new lamp, the target power Z ₁ is calculated based on the intrinsic illuminance X ₁ read from the IC tag and the set target illuminance X ₃ as described above, and the lamp power is controlled to match the target power Z ₁ . .

When herein, and detecting the light intensity at the time on the basis of the target power Z ₁ as described above sikyeoteul lighting the lamp 1 to the light sensor 15, the illuminance is decreased by a predetermined ratio or less for the reference illuminance X _4, The target power Z ₁ is corrected by obtaining the correction power Z ₂ obtained based on the total lighting time Ts.

(Steps S6, S7)

The above operation is continued until the lamp is extinguished, and when the lamp is extinguished, the lamp is extinguished, and the required data is saved to the nonvolatile memory (EEPROM) capable of rewriting the storage unit 13 and the total lighting time of the IC tag. Run the rewrite.

(2) light stabilization control

The illuminance of the light emitted from the lamp decreases with the passage of time. In order to maintain a constant illuminance, it is necessary to control to increase the power supplied to the lamp when the illuminance of the lamp falls below a predetermined ratio with respect to the target illuminance.

In the light source device of the present embodiment, as described in the flow of FIG. 8 below, in order to control the power supplied to the lamp, the total lighting time of the lamp recorded in the IC tag is used, and based on this, the amount of power correction Obtain (correction power).

8 is a flowchart showing a control process for keeping the illuminance of the light emitted from the lamp constant.

(Step S301)

The IC tag R / W unit 12 is accessed from the CPU 11, the command is transmitted to the IC tag 1a at a carrier frequency of 135 kHz via the antenna 14, and the IC tag ( The information is read from 1a) and received by the CPU 11 via the IC tag R / W unit 12. Thereby, the percentage Y corresponding to the intrinsic illuminance data X ₁ recorded in the IC tag and the cumulative lighting time Ts can be obtained.

(Step S302)

Based on the total lighting time Ts obtained in step S301, it is checked whether the lamp 1 is new. When the cumulative lighting time Ts = 0, it is determined that the lamp 1 is new and the flow proceeds to step S304. On the other hand, when the total lighting time Ts = 0 is not reached, the process proceeds to step S303.

(Step S303)

If the cumulative lighting time Ts is not 0, the target power data Z ₁ when the lamp is first turned on is stored in the storage unit 13 (EEPROM 13c), and the stored target power data Z ₁ is obtained. do.

(Step S304)

The target illuminance data X ₃ input by the input unit 5 and stored in the storage unit 13 is acquired.

(Step S305)

Based on the target illuminance data X ₃ obtained in step S304, the percentage Y read from the IC tag 1a and the standard illuminance data X ₀ and the reference power data Z ₀ read out from the storage unit 13 (ROM 13b), The target power data Z ₁ necessary for obtaining the target illuminance is acquired.

The target power data Z ₁ is obtained as follows.

Intrinsic illuminance X ₁ : Target illuminance X ₃ = Reference power Z ₀ : Target power Z ₁

Target power Z ₁ = reference power Z ₀ × target illuminance X ₃ / intrinsic illuminance X ₁

The target power data Z ₁ obtained as described above is recorded in the storage unit 13 (EEPROM 13c).

(Step S306)

The integration timer (4g in Fig. 2) is turned on and measurement of the lighting time added to the total lighting time is started.

(Step S307)

The lamp _{1 is turned} on based on the target power data Z ₁ obtained in step S303 or step S305.

FIG. 9 is an explanatory diagram conceptually illustrating a change in illuminance with respect to the lighting time and a change in power supplied to the lamp in order to easily understand the processes of the following steps S308 to S313. The vertical axis of the figure indicates the illuminance of the lamp light (the value of illuminance measured by the light sensor and the target illuminance as the sensitivity deteriorates), and the horizontal axis of the figure indicates the lighting time of the lamp.

In addition, the solid line of the figure shows the target illuminance, and the thick solid line shows the value of the illuminance measured with the degraded sensor. Moreover, the dashed-dotted line of the same figure shows the illuminance of the vacuum ultraviolet light radiate | emitted from a lamp over time by various factors, and the broken line of the figure shows the illuminance output from a sensor with the fall of the sensitivity of an optical sensor. The data shows a deterioration with time.

9, the outline | summary of the process performed by the following step S308-S313 is demonstrated.

At the time of lamp replacement, correction of the optical sensor 15 shown in the flowchart of FIG. 6 described above is executed, and correction of the optical sensor 15 shown in the same flow is not performed while the lamp is turned on.

The illuminance P ₁ at the time of T ₀ in FIG. 9 is the initial reference illuminance X ₄ when the excimer lamp is turned on in accordance with the target power data Z ₁ in step S307.

As shown in FIG. 9, the lamp is turned on with constant power (target power), and the power supplied to the lamp at the time T ₁ at which the lamp illuminance falls to P ₂ below a predetermined ratio with respect to the initial reference illuminance P ₁ . The lamp illuminance is corrected upward from P ₂ to P ₃ .

This correction is performed as follows, as will be described later.

With reference to the correction table Tab shown in FIG. 4, the correction power coefficient corresponding to the total lighting time Ts at that time stored in the storage unit 13 is read out, and the correction power coefficient is stored in the storage unit 13. The correction power Z ₂ is obtained by multiplying by the target power at that point, and this power is supplied to the lamp 1. Then, by detecting the illuminance of the lamp (1) at this time of a light sensor 15, and based on roughness ₃ P (X = ₄₎ after the correction.

This upward corrected illuminance P ₃ is referred to as the reference illuminance after correction. The reference illuminance P ₃ after the correction corresponds to a decrease in the illuminance of the light over time and a decrease in the sensitivity of the light in the optical sensor over time, and is therefore set to a value on the dashed-dotted line in the same degree.

Thereafter, the lamp is continuously turned on with constant power, and at the time of T ₂ at which the illuminance of the lamp is lowered to P ₄ below a predetermined ratio with respect to the reference illuminance P ₃ after correction, the electric power to be supplied to the lamp as described above is supplied. By correcting, the illuminance of the lamp is corrected upward from P ₄ to P ₅ . This upward corrected illuminance P ₅ is referred to as the corrected reference illuminance X ₄ .

The reference illuminance P ₅ (= X ₄ ) after the correction corresponds to the decrease in the illuminance of the light of the lamp with time as in the above P _3, and the deterioration of the sensitivity of the vacuum ultraviolet light in the optical sensor with time. Therefore, it is set to the value on the dashed-dotted line of the same figure.

In this way, basically, the lamp is turned on with constant power, and whenever the lamp illuminance falls below a predetermined ratio with respect to the standard illuminance after the latest correction, the lamp illuminance is upwardly corrected by increasing the power supplied to the lamp. . Therefore, each time power correction is performed, the old corrected reference illuminance data X ₄ is sequentially updated with the new corrected reference illuminance data X ₄ in time series, and only the latest post-correction reference illuminance data is stored in the storage unit 13. (EEPROM 13c).

Returning to the flow of FIG. 8, the process after step S308 is demonstrated.

(Step S308)

The light sensor detects the illuminance of the light emitted from the lamp. The analog signal from the optical sensor 15 is converted into a digital signal by the A / D converter 16b shown in FIG. ₁ and input to the CPU as initial reference illuminance data X ₄ (corresponding to illuminance P ₁ in FIG. 9). do. The initial reference illuminance data X ₄ is recorded in the storage unit 13 (EEPROM 13c).

(Step S309)

It is confirmed whether the illuminance data of the light detected by the optical sensor has fallen below a predetermined ratio with respect to the reference illuminance data X ₄ obtained in step S308. The predetermined ratio varies depending on the type of object to be subjected to the light irradiation process, for example, 10%.

For example, referring to FIG. 9, when the illuminance data P ₂ at the time point of T ₁ decreases by 10% or more with respect to the illuminance data P ₁ , the flow proceeds to step S310. When the lowering of the light intensity data of the light intensity P ₁ P ₂ data does not exceed 10%, the flow proceeds to step S313.

(Step S310)

The correction table Tab (refer to FIG. 4) recorded in the storage unit 13 (ROM 13b) is read out, and the integrated lighting time Ts stored in the storage unit 13 is applied to the correction table Tab, and the lighting is integrated. The correction power factor corresponding to the time Ts is obtained.

As described above, the correction power factor is set so that the power supplied to the lamp is at a level necessary to upwardly correct the illuminance data P ₂ in FIG. 9 to P ₃ .

Further, FIG. 9 P ₃ is set with reference to the correction table Tab of FIG. 4 in correspondence with the temporal decrease in the sensitivity of the optical sensor. For example, when the total lighting time of the excimer lamp is 2000 hours, the correction power factor is determined to be 1.1. The correction power data Z ₂ determined based on this correction power coefficient is recorded in the storage unit 13.

(Step S311, Step S312)

The CPU 11 sends a command to the lighting power supply ₂ based on the correction power data Z ₂ obtained in step S310, and increases the power supplied to the lamp 1 through the lighting power supply 2.

When the lamp 1 is turned on based on the correction power data Z ₂ , the light sensor 15 detects the illuminance of the light emitted from the lamp 1. The analog signal from the optical sensor 15 is converted into a digital signal by the A / D converter 16b (see FIG. 1), input to the CPU 11 as the reference illuminance data X ₄ after correction, and the storage unit ( 13). The reference illuminance data X ₄ after the correction corresponds to the illuminance P ₃ in FIG. 9.

(Step S313)

The CPU 11 checks whether the lamp off signal is input. When the lamp off signal is input, the power supply to the lamp 1 is stopped and the lamp is turned off.

When no excimer lamp extinction signal is input in step S313, the process returns to step S309 and the processes of steps S309 to S312 are repeatedly executed.

As described above, the processing at the time of returning from step S313 to step S309 is as described above. For example, the illuminance data detected by the optical sensor 15 is corrected in step S312 to the reference illuminance data X ₄ obtained in step S312. For example, it is confirmed whether or not it is lowered by 10% or more, and when it is lowered by 10% or more, the flow proceeds to step S310. If the decrease in illuminance does not exceed 10%, the flow proceeds to step S313.

As described above, with reference to the correction table Tab, a correction power factor corresponding to the integrated lighting time Ts is obtained, and correction power data Z ₂ determined based on the correction power factor is recorded in the storage unit 13. .

As described above, the CPU 11 sends a command to the lighting power supply 2 based on the correction power data Z ₂ to increase the power supplied to the lamp 1.

In addition, the illuminance when the lamp 1 is turned on based on the correction power data Z ₂ is detected by the optical sensor, and stored as the reference illuminance data X ₄ after the correction.

In this way, the EEPROM 13c is updated while the reference illuminance data and the correction power data, which are old in time series, are sequentially updated to the latest reference illuminance data and the correction power data until the lamp turn-off signal is input to the CPU 11. ) Is recorded. Only the latest reference illuminance data and corrected power data are stored in the storage unit 13 (EEPROM 13c).

10 is a flowchart showing processing at the time of extinguishing.

In the same figure, the following processing is performed when the lights are turned off.

(Step S11)

The lamp is turned off. When the lamp is an excimer lamp, for example, when the lamp is off, a high frequency voltage is applied at a low voltage, thereby suppressing polarization of the discharge vessel and turning off the lamp.

(Step S12)

The power supply 2 is turned off, and the integration timer is turned off.

(Step S13)

The data of the storage unit 13 is recorded in the IC tag of the lamp, and the contents of the RAM, which is the read memory read out as necessary, are saved to a nonvolatile memory such as an EEPROM.

(Step S14)

Turn off the power of the controller.

As described above, the light source system of the present embodiment obtains the correction power data based on the total lighting time recorded in the correction table and the IC tag when the illuminance of the lamp light exceeds the predetermined range, and calculates the correction power data. Based on this, the power supplied to the excimer lamp is controlled.

Therefore, even when the illumination intensity of the vacuum ultraviolet light of the lamp decreases with time, the illumination intensity of the lamp can be kept constant.

Moreover, whenever the illuminance of the light of the lamp falls beyond the predetermined range, the latest reference illuminance data corresponding to the deterioration of the illuminance of the lamp and the deterioration of the sensitivity of the light sensor are recorded, so that even if the sensitivity of the light sensor is lowered, The illuminance of can be kept constant with high precision.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows the system structure of the light source device which is one Embodiment of this invention.

2 is a functional block diagram of a light source device of one embodiment of the present invention.

It is a figure explaining the sensitivity fall of an optical sensor.

4 is a correction table that records the relationship between total lighting time and power correction coefficient (power increase amount).

Fig. 5 is a flowchart showing a process of recording the percentage Y corresponding to the intrinsic illuminance data X ₁ in the IC tag.

FIG. 6 is a flowchart showing a process of calibrating the optical sensor 15 based on the data recorded in the IC tag.

7 is a flowchart showing the flow of the entire processing of the light source device of the present embodiment.

8 is a flowchart showing a control process for keeping the illuminance of the light emitted from the lamp constant.

It is explanatory drawing which shows the change of illumination intensity and the change of the electric power supplied to a lamp with respect to lighting time.

10 is a flowchart showing processing at the time of extinguishing.

It is a figure which shows the structural example of an excimer lamp apparatus which confirms a lighting state.

12 is a cross-sectional view taken along a plane parallel to the tube axis of a lamp of an ultraviolet irradiation device equipped with a lamp provided with an IC tag.

It is a conceptual diagram which shows the structural example of the ultraviolet irradiation device shown in FIG.

[Description of Symbols for Main Parts of Drawing]

1 lamp (excimer lamp) 1a IC tag

2 lighting power supply 3 transformer

4 control part 5 input part

4a total lighting time update means 4b target power calculation means

4c correction power calculation means 4d reference illuminance acquisition means

4e lighting control means 4f calibration means

4g integration timer 10 light source device

11 CPU 12 IC tag R / W section

13 Memory 13a Memory (RAM)

13b memory (ROM) 13c memory (EEPROM)

14 antennas and 15 light sensors

16a, 16b A / D Converter 17 D / A Converter

Claims (6)

A lighting control method of a light source device comprising a reading / writing means for reading information from an IC tag provided in a light source, a detecting means for detecting illuminance of light emitted from the light source, and a control unit for controlling the lighting of the light source. At least the intrinsic illuminance data related to the illuminance of the light emitted from the light source and the total lighting time of the light source are recorded in the IC tag. The control unit of the light source device, Based on the intrinsic illuminance data read from the IC tag of the light source and the set target illuminance data, target power data necessary for obtaining the target illuminance data is obtained, The light source is turned on based on target power data, the illuminance of light emitted from the light source at that time is detected by the detecting means, and the detected illuminance is recorded as reference illuminance data, The illuminance of the light source when the light source is continuously turned on based on the target power data is detected by the detecting means, and the illuminance data of the light source detected by the detecting means is added to the recorded reference illuminance data. Determine whether or not the When the illuminance data of the light source falls below a predetermined ratio with respect to the recorded reference illuminance data, the correction power data corresponding to the total lighting time of the light source obtained based on the total lighting time of the light source read from the IC tag is obtained. Finding, And controlling the target power data on the basis of the corrected power data, and turning on the light source on the basis of the corrected target power data. The method according to claim 1, When the target power data is corrected and the light source is turned on based on the corrected target power data, the illuminance of the light emitted from the light source measured by the detection means is recorded as new reference illuminance data, And determining whether illuminance data of the light source detected by the detecting means has fallen below a predetermined ratio with respect to the new reference illuminance data. The method according to claim 1 or 2, The IC tag includes intrinsic illuminance data related to illuminance of light emitted from a light source provided with the IC tag, and measures illuminance of the light emitted from the light source when it is turned on at the predetermined reference power. The value is recorded, The detection means provided in the light source device is deteriorated in sensitivity over time, The control unit of the light source device, When a new light source is mounted on the light source device, the light source is turned on with the reference power, and the illuminance of the light emitted from the light source is measured by the detection means provided in the light source device, Based on the illuminance data measured by the detecting means provided in the light source device and the intrinsic illuminance data read from the IC tag, a calibration parameter for correcting the measured value of the detecting means provided in the light source device is obtained, and the calibration parameter is obtained. The lighting control method of the light source device characterized by correct | amending the output of a detection means based on it. A light source device comprising: reading / writing means for reading information from an IC tag provided in a light source, detecting means for detecting illuminance of light emitted from the light source, and a control unit for controlling lighting of the light source, At least the intrinsic illuminance data related to the illuminance of the light emitted from the light source and the total lighting time of the light source are recorded in the IC tag. The control unit of the light source device, Target power data calculating means for obtaining target power data necessary for obtaining the target illuminance data based on the intrinsic illuminance data read from the IC tag of the light source and the set target illuminance data; Reference illuminance data acquisition means for turning on the light source based on the target power data and recording illuminance data of the light emitted from the light source detected by the detection means at the time point as reference illuminance data to the storage unit; When the light source is continuously turned on based on the target power data, it is determined whether the illuminance of the light source detected by the detection means has dropped below a predetermined ratio with respect to the reference illuminance data, and the illuminance data of the light source is When it is determined that the recorded reference illuminance data falls below a predetermined ratio, correction power data corresponding to the total lighting time of the light source obtained based on the total lighting time of the light source read out from the IC tag is obtained, and the corrected power is obtained. Correction power calculation means for correcting the target power data based on data; And lighting control means for controlling the corrected target power to be supplied to the light source. The method according to claim 4, The IC tag has intrinsic illuminance data related to illuminance of light emitted from a light source provided with the IC tag, and is a value obtained by measuring the illuminance of the light emitted from the light source when it is turned on at the predetermined reference power by a calibrated detecting means. Is being recorded, The detection means provided in the light source device is deteriorated with time. The control part of the said light source apparatus is equipped with the correction means of the said detection means, When the new light source is attached to the light source device, the correction means turns on the light source with the reference power, and the illuminance of the light emitted from the light source detected by the detection means installed in the light source device is determined from the IC tag. And a calibration parameter for calibrating the measured value of the detection means installed in the light source device based on the read intrinsic illuminance data, and correcting the output of the detection means based on the calibration parameter. As a light source equipped with an IC tag, The IC tag includes intrinsic illuminance data relating to the total lighting time of the light source and the illuminance of the light emitted from the light source provided with the IC tag, and is used as a corrected detection means when the light source is turned on at a predetermined reference power. The illuminance of the light emitted from the measured light source is recorded, The light source with IC tag characterized by the above-mentioned.

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