KR101228756B1 - Ultraviolet illumination apparatus and lighting control method for the same - Google Patents

Abstract

It is to provide an ultraviolet irradiation device and a control method of the device, which can be turned on at an appropriate initial lighting power according to the total lighting time of the lamp.

In addition to the IC tag 1a provided in the excimer lamp 1, in addition to information such as integrated lighting time, lighting history information, etc., which are integrated values of the lighting time of the lamp, an initial voltage regulation value, an initial frequency regulation value, and a steady state Record the electrical characteristic values inherent to the lamp, such as the voltage regulation value and the normal frequency regulation value. When starting the device, the control unit 4 reads the information from the IC tag 1a and applies the lamp to the lamp at the time of initial lighting based on the total lighting time of the lamp and the electrical characteristic values inherent to the lamp. The lamp is initially turned on by setting the voltage and frequency. After initial stage lighting, it shifts to normal lighting, and the constant power control of the electric power applied to the lamp 1 is performed.

Description

Lighting control method of ultraviolet irradiation device and ultraviolet irradiation device {ULTRAVIOLET ILLUMINATION APPARATUS AND LIGHTING CONTROL METHOD FOR THE SAME}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultraviolet irradiation device of an excimer lamp used for cleaning a substrate in a manufacturing process of a semiconductor substrate or a liquid crystal substrate, and a lighting control method of the device, and in particular, based on information of an IC tag provided in an excimer lamp. An ultraviolet irradiation device which controls a lighting device, and a lighting control method of the device.

Conventionally, the ultraviolet irradiation device provided with the excimer lamp which irradiates a vacuum ultraviolet-ray for the purpose of washing these board | substrates for the manufacturing process of a semiconductor substrate or a liquid crystal substrate is used.

The excimer lamp emits vacuum ultraviolet light having a wavelength of 172 nm using, for example, xenon gas as a light emitting material, and is superior to a low pressure mercury lamp in terms of cleaning ability.

As for the excimer lamp mentioned above, the radiation intensity of a vacuum ultraviolet-ray will fall with deterioration, such as quartz glass which comprises a light emitting tube, at the end of service life. For this reason, although it is necessary to replace with a new one, it is usually difficult to judge whether the end of the service life has been reached from the appearance of the excimer lamp.

Therefore, an apparatus has been proposed in which an IC tag is provided in each excimer lamp, and the integrated lighting time information of the excimer lamp is stored in the IC tag to manage the integrated lighting time (see, for example, Patent Document 1).

12 and 13 show cross-sectional views of an ultraviolet irradiation device equipped with an excimer lamp. 12 is a cross-sectional view taken in a plane parallel to the tube axis of the excimer lamp, and FIG. 13 is a cross-sectional view cut in a plane perpendicular to the tube axis of the excimer lamp.

As shown in the figure, the ultraviolet irradiation device has a metal case 101 for circulating an inert gas therein. A light irradiation window 101a is provided below the case 101, and a gas inlet 101b for introducing an inert gas and a gas outlet 101c for discharging the inert gas are provided on the side of the case 101. It is.

Inside the case 101, a plurality of excimer lamps 100 arranged in parallel are arranged such that the tube axes are parallel to each other. Along the excimer lamp 100, a groove-shaped reflector 102 for reflecting the ultraviolet rays emitted from the excimer lamp 100 in the direction of the object to be processed is provided corresponding to each excimer lamp 100. Each excimer lamp 100 provided with the reflecting mirror 102 is fixed to a cooling block 103 made of aluminum through which the water cooling pipe 104 circulates, for example.

In the excimer lamp 100, seal portions 100f in which metal foils 100e are embedded are formed at both ends of the light emitting tube 100a made of a dielectric material that transmits vacuum ultraviolet light, and the inside of the light emitting tube 100a is formed. The coil-shaped internal electrode 100b is disposed on the tube axis of the light emitting tube 100a, and the periphery of the internal electrode 100b is covered with the insulator 100d. Moreover, the mesh-shaped external electrode 100c is arrange | positioned at the outer surface of the light emitting tube 100a.

An outer lead 100g protruding outward of the light emitting tube 100a is connected to each metal foil 100e, and a high voltage feed cable 120c is connected to the outer lead 100g, and a high voltage feed terminal ( 120) is installed.

The case 101 is equipped with a connector 110 made of resin, and an antenna 140 is provided in the connector 110. Moreover, the high voltage feed terminal 120 is attached to the edge part of the high voltage feed cable 120c, and the IC tag 13 is provided in the insulation holder of the high voltage feed terminal 120. As shown in FIG.

By inserting the plug of the high voltage power supply terminal 120 into the connector 110, the internal electrode 100b and the high frequency lighting power supply (not shown) become conductive. Although not shown, the external electrode 100c is electrically connected to a high frequency lighting power supply.

In addition to the structures shown in Figs. 12 and 13, the excimer lamp is, for example, a rectangular parallelepiped type as shown in Patent Document 3, or a double tube type as shown in Patent Document 4, and the like. Type excimer lamps may be used.

FIG. 14: is a figure which shows an example of the system structure of the ultraviolet irradiation device 10 which lights an excimer lamp provided with the above-mentioned IC tag.

The excimer lamp 100 includes an IC tag 130. When the excimer lamp 100 is mounted, the IC tag R / W unit 21b of the control unit 21 passes through the antenna 21c to the IC tag 130. ), The total lighting time is read as the information of the IC tag 130, for example. The CPU 21a stores the information in the storage unit 21d.

And while lighting up the excimer lamp 100 with the high frequency lighting power supply 22, the latest lighting time information is added to the total lighting time memorize | stored in the memory | storage part 21d at any time.

When the total lighting time reaches the service life time, the CPU 21a transmits a lighting stop signal to the high frequency lighting power supply 22 and turns off the excimer lamp 100 (paragraphs 0021 and 0022 of Patent Document 1). Reference).

Patent Document 1 also describes controlling the excimer lamp 100 using illuminance characteristic information stored in the IC tag 130 (see paragraph 0023 of Patent Document 1).

In addition, as a light source device using an IC tag, an apparatus has been proposed in which an individual lamp can be supplied with information such as a lamp lighting time and the number of lightings, so that accurate lamp information can be supplied (see Patent Document 2).

Since the xenon light sources are different in brightness, in the patent document 2, the shipment standard value is recorded in the IC tag in advance, and the device side reads the shipment standard value to set the optimum lamp current value, and thus the lamp power supply. To control the xenon light source (paragraphs 0030, 0031, 0032 of Patent Document 2)

Patent document 1: Unexamined-Japanese-Patent No. 2007-123069

Patent document 2: Unexamined-Japanese-Patent No. 2003-068478

Patent Document 3: Japanese Unexamined Patent Publication No. 2004-111326

Patent Document 4: Japanese Unexamined Patent Publication No. 2000-08772

In order to start lighting an excimer lamp, electric power larger than normal lighting is required at the time of initial lighting. The electric power to be input at this initial lighting time depends on the manufacturing deviation of the excimer lamp.

For example, the excimer lamp uses a glass member having the same dielectric properties as quartz glass, the thickness of which varies depending on manufacturing variation, and the input power required at the time of initial lighting varies according to the variation of the inner thickness. For this reason, in order to make sure that an excimer lamp is lit, the input power at the time of initial lighting of an excimer lamp is matched with what needs the most input power in manufacturing deviation, and when the input power in manufacturing deviation is small, it is excessive One input power resulted in a short lamp life.

In other words, the excimer lamp is poor in lightability in the cold state, and the lightness is large in variation with the lamp. For this reason, when the lamp was initially turned on, it was necessary to put excessive input power and forcibly turn on the lamp so that all the lamps could be turned on. For this reason, as shown to Fig.15 (a), excessive light will emit light at the time of initial lighting.

Therefore, as described in Patent Literature 2, it is conceivable to record the shipment standard value in advance in the IC tag, and the device side reads the shipment standard value and set the optimal value.

However, an excimer lamp uses a high voltage and a high frequency for lamp lighting, and does not turn on a current like a xenon lamp described in patent document 2. Moreover, it was revealed by the effort of the inventor of the present invention, and it turned out that the excimer lamp differs in power required for the initial stage lighting with passage of lamp lighting time (combined lighting time).

That is, it is understood that the power required for initial lighting of the excimer lamp of 200 hours differs from the power required for initial lighting of the excimer lamp of 1000 hours, for example. Could.

For this reason, only by setting the electric power for initial lighting to the IC tag with which an excimer lamp is equipped, it cannot make it initially light with the appropriate electric power according to the excimer lamp in which the total lighting time differs.

It is also conceivable that an excimer lamp which cannot use the data of the IC tag is mounted on the device, or a lamp used in another device is mounted. Also in this case, it is required to make it initially light by appropriate electric power, without making it initially light by excessive input power.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object of the present invention is to light at a suitable initial lighting power even when the total lighting time of the lamp is different, and the data of the IC tag cannot be used, or another device. It is to provide an ultraviolet irradiation device and a control method of the device that can be initially turned on at a suitable power even if the lamp used in the present invention is mounted.

In the present invention, the initial voltage regulation value, the initial frequency regulation value, the steady voltage regulation value, and the normal frequency are added to the IC tag provided in the lamp in addition to information such as integrated lighting time, lighting history information, etc. which are integrated values of the lighting time of the lamp. The electrical characteristic values inherent to the lamp, such as specified values, are recorded.

When starting the device, the information is read from the IC tag, and the voltage, frequency, etc. to be applied to the lamp at the time of initial lighting are set based on the total lighting time of the lamp and the electrical characteristic values inherent to the lamp. Turn on the lamp.

Thus, the initial lighting operation suitable for each lamp can be performed in consideration of the deviation of the lamp and the elapsed use state. For this reason, as shown in FIG.15 (b), excessive light can be suppressed and excessive light does not emit light at the time of initial lighting as shown in FIG.15 (a).

That is, in this invention, the said subject is solved as follows.

(1) IC tag reading / writing means for reading information from the IC tag provided in the excimer lamp and recording the information into the IC tag, a lighting power supply for feeding the excimer lamp, and a control unit for controlling the lighting of the excimer lamp. In the ultraviolet irradiation device provided with an excimer lamp provided with an IC tag, the IC tag has at least the total lighting time of the excimer lamp provided with the IC tag, and the inherent electrical characteristics of the excimer lamp. The information and the information indicating the presence or absence of lighting results in the ultraviolet irradiation device are recorded.

When the excimer lamp is mounted on the ultraviolet irradiation device, the control unit of the ultraviolet irradiation device executes access to the IC tag by the IC tag reading / writing means, thereby recording information from the IC tag to the reading IC tag. Determination means for determining whether or not information can be read, whether information can be read, and whether there is a history of lighting in the ultraviolet irradiation device, and a first setting for setting an initial lighting condition based on the information stored in the IC tag. Means, second setting means for setting the normal lighting condition based on the information stored in the IC tag, updating means for updating the initial lighting condition and the normal lighting condition according to the total lighting time of the excimer lamp; And storage means for storing the updated initial lighting condition and the normal lighting condition.

Moreover, when the determination result of the said determination means can read the information from an IC tag in the control part of the said ultraviolet irradiation apparatus, and there is no lighting history in the ultraviolet irradiation apparatus, the initial stage lighting set by the said 1st setting means Based on the conditions, the excimer lamp is initially turned on, and after the initial lighting, the excimer lamp is shifted to normal lighting using the normal lighting condition set by the second setting means,

When the determination result of the determination means can read the information from the IC tag and there is a lighting history in the ultraviolet irradiation device, the excimer lamp is initially turned on based on the initial lighting condition stored in the storage means. After the initial lighting, the excimer lamp is transferred to the normal lighting using the normal lighting condition stored in the storage means.

When the determination result of the determination means cannot read the information from the IC tag, the excimer lamp is initially turned on by the initial lighting condition which is a predetermined safety value, and after the initial lighting, the normal lighting which is a predetermined safety value is turned on. Using the conditions, lighting control means for shifting the excimer lamp to normal lighting is provided.

(2) In the above (1), the first setting means includes, as the initial lighting condition, an initial voltage target value and an initial lighting frequency target value based on the initial voltage regulation value and the initial frequency regulation value stored in the IC tag. And the second setting means sets, as the normal lighting condition, a steady voltage target value and a steady frequency target value based on the steady voltage regulation value and the steady frequency regulation value stored in the IC tag.

The updating means updates the initial voltage target value, the initial lighting frequency target value, the normal voltage target value, and the normal frequency target value according to the total lighting time of the excimer lamp.

The storage means stores the updated initial voltage target value, initial lighting frequency target value, steady voltage target value and steady frequency target value.

The lighting control means may be configured such that the initial voltage target value set by the first setting means is determined when the determination result of the determination means is capable of reading information from an IC tag and there is no lighting history in the ultraviolet irradiation device. And based on the initial lighting frequency target value, the excimer lamp is initially turned on, and after the initial lighting, the excimer lamp is normally turned on using the normal voltage target value and the normal frequency target value set by the second setting means. Transition to,

On the basis of the initial voltage target value and the initial lighting frequency target value stored in the storage means when the determination result of the determination means is capable of reading information from the IC tag and has a history of lighting in the ultraviolet irradiation device, The excimer lamp is initially turned on, and after the initial lighting, the excimer lamp is shifted to normal lighting using the normal voltage target value and the normal frequency target value stored in the storage means, and the determination result of the determination means is IC tag. When the information cannot be read from, the excimer lamp is initially turned on by the initial voltage safety value and the initial frequency safety value which are predetermined safety values, and after the initial lighting, the normal voltage safety value which is the predetermined safety value and normal Using the frequency safety value, the excimer lamp is shifted to normal lighting.

(3) In the lighting control method of the ultraviolet irradiation device having a read / write means for reading information from an IC tag installed in the excimer lamp and a control unit for controlling the lighting of the excimer lamp,

When the excimer lamp is mounted on the ultraviolet irradiation device, the control unit of the ultraviolet irradiation device determines whether the excimer lamp has an IC tag, and whether or not information can be read / written from the IC tag, When information can be read / recorded from the IC tag, the information stored in the IC tag is acquired, and the presence or absence of lighting performance of the excimer lamp in the ultraviolet irradiation device of the excimer lamp is determined based on the information obtained from the IC tag. According to the result, the following steps (a) to (c) are performed.

(A) When information can be read from the IC tag and there is no history such as a point in the ultraviolet irradiation device, an initial lighting condition is set based on the information stored in the IC tag, and based on the set initial lighting condition. The initial light of the excimer lamp,

Based on the information stored in the IC tag, the normal lighting condition is set, and after the initial lighting, the excimer lamp is shifted to the normal lighting using the set normal lighting condition.

(B) When information can be read from the IC tag and there is a history of lighting in the ultraviolet irradiation device, based on the information about the excimer lamp stored in the ultraviolet irradiation device and / or the information stored in the IC tag, Setting the initial lighting condition, and initializing the excimer lamp on the basis of the set initial lighting condition,

Based on the information about the excimer lamp stored in the ultraviolet irradiation device and / or the information stored in the IC tag, the normal lighting condition is set, and after the initial lighting, the excimer lamp is normally turned on using the set normal lighting condition. To the

(C) When the information cannot be read from the IC tag, an initial lighting condition which is a predetermined safety value is set, and the excimer lamp is initially turned on by the initial lighting condition which is the safety value.

A normal lighting condition which is a predetermined safety value is set, and after the initial lighting, the excimer lamp is shifted to normal lighting using the normal lighting condition which is a safety value.

(4) In the step (a) of the above (3), when information can be read from the IC tag, and there is no lighting history in the ultraviolet irradiation device, and there is lighting history in another device, it is stored in the IC tag. The initial lighting condition is set while the normal lighting condition is set using information indicating the cumulative lighting time and the intrinsic electrical characteristics of the excimer lamp.

(5) In the steps (a) and (b) of (3) and (4), as the initial lighting condition, an initial voltage regulation value, an initial frequency regulation value stored in the IC tag, and / or stored in the ultraviolet irradiation device. Based on the information about the excimer lamp, an initial voltage target value and an initial lighting frequency target value are set, and as the normal lighting condition, the normal voltage regulation value, the normal frequency regulation value and / or the ultraviolet irradiation thereof stored in the IC tag. Based on the information about the excimer lamp stored in the device, the normal voltage target value and the normal frequency target value are set, and in the step (c), as the initial lighting condition, the initial voltage safety value and the initial frequency, which are safety values, are set. A safety value is set, and a normal voltage safety value and a normal frequency safety value, which are predetermined safety values, are set as the normal lighting condition.

(6) In the steps (a) and (b) of the above (5), the initial voltage target value and the initial lighting frequency target value are stored in the IC tag and / or the excimer lamp stored in the ultraviolet irradiation device. Based on the information on

(a) obtaining an initial voltage correction value corresponding to the total lighting time of the excimer lamp;

(b) calculate an initial voltage correction value and an initial voltage regulation value to obtain an initial voltage target value;

(c) Obtain the initial lighting frequency correction value corresponding to the initial voltage target value obtained,

The initial lighting frequency correction value and the initial frequency regulation value are calculated to obtain an initial lighting frequency target value.

(7) In the steps (a) and (b) of the above (5), the normal voltage target value and the normal frequency target value are stored in the information stored in the IC tag and / or the excimer lamp stored in the ultraviolet irradiation device. Based on the related information, it is obtained as follows.

(a) obtaining a normal lighting voltage correction value corresponding to the total lighting time of the excimer lamp;

(b) Calculate the normal voltage target value by calculating the normal lighting voltage correction value and the normal voltage regulation value.

(c) Obtaining the normal lighting frequency correction value corresponding to the obtained normal voltage target value,

The normal lighting frequency correction value and the normal frequency prescribed value are calculated to obtain a normal frequency target value.

(8) In the above (3) to (7), when reading information from the IC tag and recording of the information into the IC tag is possible, the control unit, when extinguishing the excimer lamp, turns off the IC tag installed on the excimer lamp. While updating total lighting time, the thing which has been used by the ultraviolet irradiation device is recorded, the information for identifying the said excimer lamp to the ultraviolet irradiation device, and the initial voltage target at the time of next lighting. The value, initial lighting frequency target value, steady voltage target value and steady frequency target value are stored.

In the present invention, the following effects can be obtained.

(1) Since the lamp is turned on, based on the cumulative lighting time of the lamp thus far stored in the IC tag installed in the lamp and the electrical characteristic values inherent to the lamp, excessive power is supplied to the lamp at the time of initial lighting. By suppressing the input, the lamp life can be prevented from being shortened.

If a safe electrical characteristic value such as excessive power is not input to the lamp is set in advance, and the information cannot be read from the IC tag, the lamp is turned on based on the safe electrical characteristic value. Even in a lamp not having an IC tag, the lamp can be turned on by limiting the input power, thereby preventing the lamp life from being shortened.

(2) By recording data indicating the presence or absence of lighting performance in the device in the IC tag, and storing the electrical characteristic value of the lamp attached to the device in the storage device, From the recorded data, it is determined whether or not the lamp has a lighting history in the apparatus, and when there is a lighting history, data at the time of initially lighting the lamp can be obtained from the storage of the apparatus.

For this reason, the processing time at the time of initial lighting for each lamp can be shortened, and even if the number of lamps attached to the said apparatus is large, the apparatus can be started quickly.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows the system structure of the ultraviolet irradiation device which is one Embodiment of this invention.

The ultraviolet irradiation device 10 of the present invention supplies an excimer lamp (hereinafter referred to as a lamp) 1 having an IC tag 1a capable of inputting record information in a non-contact manner, and a high frequency high voltage to the lamp 1. A high frequency lighting power supply 2, a transformer 3 provided on the output side of the high frequency lighting power supply 2, and a control unit 4 for controlling the lighting of the lamp 1 are provided.

The control unit 4 transmits and receives data between the arithmetic processing unit (CPU) 11, the storage unit 13, and the IC tag 1a that executes arithmetic processing for controlling the lighting of the lamp 1. And an antenna 14, an IC tag R / W unit 12 that controls transmission and reception of data between the IC tags 1a, an A / D converter 16, and a D / A converter 17. The A / D converter 16 converts the signal from the high frequency lighting power supply 2 into a digital signal and sends it to the CPU 11, and the D / A converter 17 converts the digital signal from the CPU 11 into an analog signal. Is converted to and sent to the high frequency lighting power supply 2. .

The storage unit 13 includes a volatile memory (RAM 13a) that can be read and written, a read-only nonvolatile memory (ROM 13b), and a nonvolatile memory (EEPROM 13c) that can be rewritten. To store the program or data.

In the ROM 13b of the storage unit 13, a voltage correction table Tv or a frequency is set in order to set a voltage target value at initial lighting, an initial frequency target value, and the like supplied to the lamp 1 in accordance with the total lighting time. The correction table Tf and the like are recorded, and information such as a voltage target value and initial frequency target value at the time of initial lighting is recorded in the EEPROM 13c.

The excimer lamp 1 is filled with a discharge gas such as xenon gas, for example, and emits vacuum ultraviolet light having a wavelength of 172 nm. The IC tag 1a is provided for each lamp, and data specific to the lamp, such as the total lighting time Ts, is recorded.

As will be described later, the CPU 11 of the control unit 4, when the excimer lamp is mounted on the ultraviolet irradiation device 10, is it possible to read or write information from the IC tag 1a and to read the information? It is possible to determine whether or not there is a lighting history in the ultraviolet irradiation device, and when the reading / writing of information from the IC tag is possible, the initial lighting condition based on the information recorded in the IC tag 1a. And a normal lighting condition, and based on this, the excimer lamp 1 is initially turned on and then shifts to normal lighting. When the information cannot be read from the IC tag 1a, the excimer lamp 1 is initially turned on by an initial lighting condition and a normal lighting condition, which are predetermined safety values, and then shifts to normal lighting.

Here, various data used in this embodiment are collectively shown. These data are stored in, for example, a read-only nonvolatile memory (ROM 13b), a rewritable nonvolatile memory (EEPROM 13c), and, if necessary, a read-write memory (RAM 13a). .

In addition, the storage location of these data can be changed appropriately. For example, all data may be stored in the EEPROM without installing a ROM, or stored in other nonvolatile memory or magnetic disk, and stored in a RAM at runtime. It may be expanded and saved to a nonvolatile memory or a storage medium at the end.

-Total lighting time (Ts): The accumulated value of the lamp lighting time stored in the IC tag.

Unique number (serial number): Each individually set number of manufactured excimer lamps.

Lighting history information: information on the presence or absence of lighting results.

Device information: information of a device that is mounted and turned on.

Initial voltage regulation value (Vfk): The initial lamp | ramp application voltage value inherent to the said lamp predetermined before shipment of the lamp and stored in the IC tag.

Initial frequency prescribed value (Ffk): The initial lamp applying frequency inherent to the lamp, which is predetermined before the lamp is shipped and stored in the IC tag.

Initial voltage target value Vfm: Based on the correction value of the voltage correction table and the lighting initial lamp voltage value actually applied to the lamp calculated from the initial voltage regulation value Vfk, or the initial voltage safety value Vfs. Determined lamp applied voltage value.

Initial frequency target value Ffm: Determined by the correction value of the frequency correction table and the lighting initial lamp frequency or initial frequency safety value Ffs actually applied to the lamp calculated from the initial frequency specification value Ffk. Ramp applied frequency.

Normal voltage regulation value (Vtk): The lamp application voltage value at the time of normal lighting inherent to the lamp, which is predetermined before the lamp is shipped and stored in the IC tag.

Normal frequency prescribed value (Ftk): The frequency of lamp application at the time of normal lighting inherent to the lamp, which is determined before shipment of the lamp and stored in the IC tag.

Normal voltage target value (Vtm): Lamp applied voltage value at normal lighting actually applied to the lamp calculated from normal voltage regulation value (Vtk) and normal voltage safety value (Vts) The lamp applied voltage value determined by. Hereinafter, it is also called lighting voltage.

Normal frequency target value Ftm: The ramp application frequency determined by the correction value of the frequency correction table, the ramp application frequency determined by the steady-state voltage target value Vtm, or the normal frequency safety value Fts. Hereinafter, it is also called lighting frequency.

Initial voltage safety value (Vfs): Initially applied lamp voltage value considering the safety of the lamp (lowest value among the voltages applied at the beginning of lamp lighting in consideration of manufacturing deviation)

Initial frequency safety value (Ffs): Initially lit lamp frequency considering the safety of the lamp (lowest value among the frequencies applied at the initial stage of lamp lighting in consideration of manufacturing deviation)

Normal voltage safety value (Vts): The applied voltage value during normal lighting considering the safety of the lamp (the lowest value among the voltages applied during normal lighting of the lamp considering the manufacturing deviation)

Normal frequency safety value (Fts): Frequency at normal lighting in consideration of lamp safety (lowest value among frequencies applied at normal lighting of lamp in consideration of manufacturing deviation)

Voltage correction table (Tv): Correspondence table of total lighting time and correction value.

Frequency correction table Tf: Correspondence table between the ramp applied voltage value and the correction value.

Fig. 2 is a functional block diagram of the light source device of one embodiment of the present invention, and shows, as a block diagram, a function realized by a process executed by the CPU 11 of the control unit 4.

In the IC tag 1a provided in the lamp 1, as described above, the integrated lighting time Ts, the unique number (serial number), the lighting history information, the device information, the initial voltage regulation value Vfk, and the initial frequency regulation The value Ffk, the steady voltage regulation value Vtk, and the steady frequency regulation value Ftk are recorded, and the IC tag R / W unit 12 passes through the antenna 14 as described above with the IC tag ( The data recorded in 1a) is read out and stored in the storage unit 13 as IC tag data.

The judging means 4a of the control part 4 determines whether reading / writing from the IC tag by the IC tag R / W part 12 is possible when the lamp 1 is attached to the ultraviolet irradiation device, and reading the information. It is possible to determine whether or not there is a lighting history in the ultraviolet irradiation device.

Here, the case of the following (a)-(d) can be considered to the lamp 1 attached to an ultraviolet irradiation device, and the determination means 4a is what kind of lamp is the lamp 1 attached to the apparatus. The acknowledgment is determined, and the determination result is passed to the lighting control means 4e.

(a) Lamps that cannot be read / written from IC tag 1a

In this case, the data of the IC tag 1a cannot be used, and the data of the IC tag 1a cannot be used.

In addition, when reading / writing from an IC tag is possible, there are the following cases.

(b) new lamps that have never been used;

In this case, it is a case where lighting history information shows that there is no lighting history, and total lighting time Ts is zero. Data such as the initial voltage regulation value Vfk and the initial frequency regulation value Ffk stored in the IC tag 1a are available.

(c) Lamp which is not used in the said ultraviolet irradiation device, but has a lighting result

In this case, it is a case where lighting history information shows the lighting history, and the device information shows that it is not used by the said ultraviolet irradiation device, and total lighting time Ts is zero or more.

(d) Lamps used in the ultraviolet irradiation device

In this case, it is a case where lighting history information shows the lighting history, and device information shows that it was used by the said ultraviolet irradiation device, and total lighting time Ts is 0 or more. In this case, the data when the lamp was used last time is stored in the storage unit 13 in the ultraviolet irradiation device, and can be read out by the unique number of the lamp.

The first setting means 4b sets the initial lighting condition based on the information stored in the IC tag 1a, and the second setting means 4c is normal based on the information stored in the IC tag 1a. Set the lighting condition.

That is, the first setting means 4b is a correction value of the voltage correction table and the frequency correction table determined by the total lighting time and the like as the initial lighting condition, and the initial voltage regulation value Vfk recorded in the IC 1a tag. ), The initial voltage target value Vfm and the initial frequency target value Ffm are set based on the initial frequency prescribed value Ffk.

In addition, the second setting means 4c is configured as the normal lighting condition, and the correction value of the voltage correction table and the frequency correction table determined by the total lighting time and the like and the normal voltage regulation value Vtk recorded in the IC tag 1a. ) And the normal frequency target value Vtm and the normal frequency target value Ftm are set based on the constant frequency specification value Ftk.

Moreover, it has the updating means 4d which updates the said initial lighting condition and a normal lighting condition according to the cumulative lighting time of the excimer lamp, The updated initial lighting condition and the normal lighting condition are memorize | stored in the memory | storage means 13. .

That is, the updating means 4d adds the initial voltage target value Vfm, the initial frequency target value Ffm, the normal lighting voltage target value Vtm and the normal frequency target value Ftm to the lamp 1. Update according to the lighting time Ts.

In addition, the integration timer 4f counts the integration time of the lamp 1 lighting up, and the update means 4d calculates the total lighting time stored in the storage unit 13 each time the predetermined integration time is reached. Update The updated total lighting time Ts is recorded in the IC tag 1a provided in the lamp 1 when the operation of the apparatus is stopped.

When the determination result of the determination means 4a is capable of reading information from the IC tag 1a, and the lighting control means 4e has no track record in the ultraviolet irradiation device (the above (b) (c)). Case), the excimer lamp is initially turned on based on the initial lighting condition set by the first setting means 4b, that is, the initial voltage target value Vfm and the initial lighting frequency target value Ffm. After the lighting, the lamp 1 is transferred to the normal lighting using the normal lighting condition set by the second setting means 4c, that is, the normal voltage target value Vtm and the normal frequency target value Ftm.

In addition, when the determination result of the determination means 4a can read the information from the IC tag 1a, and there is a lighting history in the ultraviolet irradiation device (case (d) above), the storage means 13 The lamp 1 is initially turned on based on the initial lighting condition stored in the memory, that is, the initial voltage target value Vfm and the initial lighting frequency target value Ffm, and after the initial lighting, the normal memory stored in the storage means 13 is stored. The lamp 1 is shifted to normal lighting using the lighting condition, that is, the normal voltage target value Vtm and the normal frequency target value Ftm.

In addition, when the determination result of the determination means 4a is unable to read information from the IC tag 1a (case of (a) above), an initial lighting condition that is a predetermined safety value, that is, an initial voltage safety value ( Vfs) and the initial frequency safety value Ffs as the initial voltage target value Vfm and the initial lighting frequency target value Ffm, the lamp 1 is initially turned on, and after the initial lighting, a normal safety condition which is a predetermined safety value. That is, the lamp 1 is turned on normally by setting the normal voltage safety value Vts and the normal frequency safety value Fts, which are predetermined safety values, as the normal voltage target value Vtm and the normal frequency target value Ftm. To fulfill.

The lighting control means 4e controls the high frequency lighting power supply 2 and controls the voltage and frequency supplied to the lamp 1. That is, the voltage applied to the lamp 1 and the lamp current are detected and sent from the lighting power supply 2 to the lighting control means 4e of the control section 4. The voltage and current detected by the lighting power supply 2 are analog signals, which are converted into digital signals by the A / D converter and sent to the CPU 11 of the control unit 4 as described above.

When the lighting control means 4e of the control part 4 makes an initial lighting of the lighting lamp 1, the frequency is the initial lighting frequency target value Ffm, and the voltage is a voltage whose said initial voltage target value Vfm. It applies to the lamp 1, and makes the lamp 1 initial lighting operation | movement for the period set by the initial lighting timer 4g. The initial lighting frequency target value Ffm is about 70 kHz higher than the frequency at the normal lighting.

After the initial lighting of the lamp 1, the lighting control means 4e has an initial value, the frequency of which is the normal frequency target value Ftm and the voltage whose voltage is the normal voltage target value Vtm, to the lamp 1. Is applied to shift to normal lighting. In addition, the frequency at the time of normal lighting start is about 50 kHz in the frequency target value Ftm.

In normal lighting, power constant control is performed. At that time, first, the voltage and frequency are set as the initial values, and the frequency is controlled so that the power supplied to the lamp becomes constant.

That is, the lighting control means 4e calculates the electric power supplied to the lamp from the voltage and current sent from the high frequency lighting power supply 2, and the calculated electric power corresponds to the lamp voltage and frequency which seem to match the preset target power. Calculate This lamp voltage and frequency are sent to the lighting power supply 2 as a voltage command and a frequency command.

The lighting power supply 2 controls the drive voltage and frequency of the lamp 1 according to this voltage command and the frequency command.

As a result, the power supplied to the lamp 1 is controlled to match the target power, and the lamp 1 is turned on with the illuminance corresponding to the target power.

In addition, the illuminance of the vacuum ultraviolet light emitted by the excimer lamp 1 decreases over time due to various factors. In order to correct this fall of illuminance, as will be described later, the normal lighting voltage of the lamp may be increased in accordance with the total lighting time of the lamp as necessary.

At the time of extinction, the extinguishing timer 4h is operated, and the extinguishing operation is performed as described later in the period until the extinguishing timer 4h is timed up.

In the ultraviolet irradiation device of the present embodiment, the lamp is turned on by setting the initial lighting condition and the normal lighting condition of the lamp based on the electrical characteristic value and the integration time stored in the IC tag as described above. Excessive power supply to the power supply can be suppressed and the lamp life can be shortened.

For example, in a lamp that does not have an IC tag or a lamp that is inconvenient for reading an IC tag, an initial lighting condition and a normal lighting condition in which the input power, which is a predetermined safety value, is limited so as to prevent excessive power input. Therefore, since the lamp is turned on, even if the lamp is not equipped with an IC tag, the lamp life is not shortened.

In addition, since the lighting results of the ultraviolet irradiation device are determined and there is a lighting history, initial lighting and normal lighting are performed using the data stored in the apparatus, so that it is not necessary to calculate again at the time of starting the apparatus. For this reason, initial lighting can be performed quickly.

Next, the operation | movement of the light source device of this embodiment is demonstrated in detail with a flowchart.

FIG. 3 is a flowchart showing an outline of the processing of the control unit in the ultraviolet irradiation device shown in FIGS. 1 and 2. 4-8 is the flowchart which showed the detail of each step S1-S6 of FIG.

First, the outline of the control process in the ultraviolet irradiation device shown to FIG. 1, FIG. 2 is demonstrated with FIG.

When the ultraviolet irradiation device is activated, initial data is acquired (step S1). That is, the data is read from the IC tag 1a of the lamp 1, and the data is transferred to the RAM 13a from the ROM 13b, the EEPROM 13c, or the like of the storage unit 13 as necessary.

Subsequently, based on the data read from the IC tag 1a and the like, as described above, the lamp 1 is initially turned on and then shifted to normal lighting (step S2).

When the lamp 1 transitions to normal lighting, the lamp is kept lit until the lamp unlit signal is turned on. At that time, the storage unit 13 depends on the integrated lighting time of the lamp 1. ), The internal data stored in the table is updated (step S3).

When the lamp unlit signal is turned on, the lamp unlit operation is performed (steps S4, S5), the data of the IC tag at the time of unlit is updated, and the data stored in the RAM 13a of the storage unit 13 is stored. Saving to the EEPROM 13c or the like is performed (step S6), and the processing is finished.

4-8, the process by the control part of the ultraviolet irradiation device of this embodiment is demonstrated.

4 and 5 show processing from the start of the apparatus to the transition from the normal lighting operation of the lamp.

In FIG. 4, the high frequency lighting power supply 2 is started (step S11), and each part constituting the control part 4 (CPU 11, IC tag R / W part 12, control part 4, antenna ( 14), the storage unit 13 is energized to a standby state. At this time, the data stored in the ROM 13b, the EEPROM 13c, and the like of the storage unit 13 are transferred to the RAM 13a as necessary, and the device is initialized (step S1). As a result, the control unit 4 can perform the processing using the data stored in the RAM 13a.

In addition, in the following description, even if data is transferred to RAM 13a, the storage location of data may be specified at the place stored at the time of device start-up as needed.

In step S12, the control unit 4 communicates the antenna 14 and the IC tag 1a included in the excimer lamp 1 via the IC tag R / W unit 12 to the IC tag 1a. The recorded information is controlled to be read, and the read information is stored in the storage unit 13 (RAM 13a).

Here, as the information read from the IC tag 1a, as described above, the integrated lighting time Ts, the unique number (serial number), the lighting history information, the device information, the initial voltage regulation value (Vfk), the initial stage Frequency prescribed value Ffk, normal voltage specified value Vtk, normal frequency specified value Ftk, and the like.

In addition, since a plurality of excimer lamps may be provided in the same apparatus as shown in Fig. 13, the above "device information" refers to the "channel information" indicating the position where the excimer lamp is mounted in the apparatus in addition to the information of the apparatus. It includes. In the apparatus of FIG. 13, for example, "channel information" is provided with four excimer lamps, and the position where each excimer lamp is arranged is called "channel", and this channel is called "channel 1" and "channel 2" from the right side. As described hereinbefore, this is information for distinguishing each channel.

The control part 4 confirms in step S13 whether the information recorded in the IC tag 1a was read in the said step S12. If the information recorded in the IC tag 1a has been read, the process proceeds to step S14, and if not, the process proceeds to step S191.

In step S14, it is determined from the "lighting history information" recorded in the IC tag 1a whether the excimer lamp has been lit or not (check the new / old lamp bit).

In step S14, when it is determined that there is no lighting result of the excimer lamp, it progresses to step S15. When it is determined that there is the lighting result of an excimer lamp, it progresses to step S16.

In step S16, it is determined whether there is a lighting history in the same apparatus, and when there is no lighting history in the same apparatus, the flow proceeds to step S17.

In addition, although the presence or absence of lighting performance was judged from "lighting history information" here, it can also be judged from "accumulation time" and "device information", for example. For example, when judging by "accumulation time", there is no lighting result when "accumulation time" is 0 hours, and it is a lighting result when "accumulation time" is other than 0 hours. In addition, when it judges with "device information", when there is no memory of "device information", there is no lighting result, and when there is memory of "device information", there is a lighting result.

In other words, the control unit 4 includes the "unique number (serial number)" read from the IC tag 1a and the "unique number (serial number) of the excimer lamp 1 with the lighting result stored in the storage unit 13. ) ", The presence or absence of the lighting result in the ultraviolet irradiation device provided with the control part is judged about the excimer lamp 1 provided with the IC tag 1a.

Moreover, the control part 4 determines whether "device information" read out from the IC tag 1a is the information of the ultraviolet irradiation device attached to the excimer lamp 1.

In step S16, when it is determined that the "apparatus information" coincides with the lighting history of the ultraviolet irradiation device including the control unit 4, the flow proceeds to step S18, and when otherwise, the flow advances to step S17.

Hereinafter, it divides into the case of said (a)-(d), and demonstrates the process in the case of each case.

(a) When a lamp is mounted in which reading / writing from the IC tag 1a is not possible.

In this case, the process proceeds from step S13 to step S191. In step S191, the initial voltage safety value Vfs, the initial frequency safety value Ffs, the steady voltage safety value Vts, and the normal frequency safety value Fts from the storage unit 13 (for example, the ROM 13b). Read

In addition, the excimer lamp 1 has a risk of deterioration when excessive power is input to the lamp during initial lighting and normal lighting, so that the initial voltage safety value (Vfs), the initial frequency safety value (Ffs), and the normal voltage in consideration of safety are deteriorated. The safety value Vts and the normal frequency safety value Fts are stored in the storage unit 13 (for example, ROM 13b).

In step S19, the initial voltage safety value Vfs and the initial frequency safety value Ffs are set as the initial voltage target value Vfm and the initial frequency target value Ffm, respectively.

Next, in step S192, the normal voltage safety value Vts and the normal frequency safety value Fts are set as the normal voltage target value Vtm and the normal frequency target value Ftm.

The initial voltage target value Vfm and the initial frequency target value Ffm are stored in the storage unit 13 (for example, the RAM 13a) in the normal voltage target value Vtm and the normal frequency target value Ftm. do.

After the process of step S192, it progresses to FIG.

(b) A new lamp that has never been used is fitted.

In this case, it progresses from step S13 to step S14 and step S15. In step S15, the initial voltage regulation value Vfk and the initial frequency regulation value Ffk read out from IC tag 1a are set as initial voltage target value Vfm and initial frequency target value Ffm, respectively.

Next, in step S151, the normal voltage regulation value Vtk and the normal frequency regulation value Ftk read out from the IC tag 1a are set as the normal voltage target value Vtm and the steady frequency target value Ftm.

The initial voltage target value Vfm, the initial frequency target value Ffm, the normal voltage target value Vtm, and the normal frequency target value Ftm are stored in the storage unit 13 (for example, the RAM 13a). .

(c) When it is not used by the said ultraviolet irradiation device, but the lamp which has the lighting result is attached. In this case, the process proceeds from step S14 to step S16 and step S17.

The excimer lamp 1 can be separated from the ultraviolet irradiation device 10. For this reason, according to a user's usage, the excimer lamp 1 used by the ultraviolet irradiation device A may be isolate | separated, and the excimer lamp 1 may be used by the ultraviolet irradiation device B.

In this case, although the IC tag 1a of the excimer lamp 1 has the lighting results, it is the lighting results of the apparatus of A, and is not the lighting results of the apparatus of B. In FIG.

In order to determine this point, only the "device information" of the device with the previous lighting result is stored in the "device information" of the IC tag 1a of the excimer lamp 1.

That is, in the IC tag 1a of the excimer lamp 1 used in the ultraviolet irradiation device called A, "device information" of the A device is stored when it is turned on in the A device, and then "device information" when it is turned on in the B device. The information of device A in " " is rewritten to the information of device B.

In step S16, in the ultraviolet irradiation device in which the excimer lamp 1 with the lighting result is attached, whether or not there is lighting on the same device immediately before is used by using the "device information" stored in the IC tag 1a. To judge. If there is no lighting in the same device, the flow proceeds to step S17.

In step S17, a process is performed as follows.

The 1st setting means 4b and the 2nd setting means 4c of the control part 4 shown in the said FIG. 2 correct | amend the voltage value corresponding to the integrated lighting time Ts read from the IC tag 1a. The value is read from the voltage correction table stored in the storage unit 13 (ROM 13b) in advance. 9 shows an example of the configuration of the voltage correction table Tv.

As shown in the figure, the voltage correction table Tv is a table in which a voltage correction value for the total lighting time h of the lamp is registered, and according to the total lighting time, the initial voltage regulation value and normal Correct the voltage regulation value.

That is, the first setting means 4b obtains the voltage correction value by referring to the voltage correction table Tv, and calculates the voltage correction value and the initial voltage regulation value Vfk read out from the IC tag 1a. The initial voltage target value Vfm is obtained.

Subsequently, the first setting means 4c stores the correction value of the frequency corresponding to the calculated " voltage value " in the storage unit 13 (ROM 13b) in advance in the frequency correction table Tf. Read from 10 shows an example of the configuration of the frequency correction table Tf.

The frequency table Tf is a table in which the frequency correction value with respect to the voltage value KV is registered, as shown in the figure, and the initial frequency regulation value Ffk and the normal frequency regulation value Ftk are determined using this correction value. Correct.

That is, the first setting means 4b obtains a frequency correction value with reference to the frequency table Tf, calculates the frequency correction value and the initial frequency specification value Ffk, and then initializes the initial frequency target value Ffm. Obtain

The initial voltage target value Vfm and the initial frequency target value Ffm are set as initial lighting power of the lamp 1 and stored in the storage unit 13.

Using the numerical example, when the "computation lighting time" read out from the IC tag 1a is "300" time, and the initial voltage regulation value Vfk read out from the IC tag 1a was 8 KV, step S17. , The correction value of the voltage value corresponding to the total lighting time 300 hours is read from the voltage correction table Tv shown in FIG. 9 stored in the storage unit 13 in advance, and the read "1.010" is read from the initial voltage regulation value. Calculate with (Vfk). That is, the initial voltage prescribed value "8" KV x "1.010" = "8.08" KV is calculated and calculated as the initial voltage target value Vfm.

Subsequently, the correction value of the frequency corresponding to "8.08" KV of the initial voltage target value Vfmk calculated and calculated is read out from the frequency correction table Tf shown in FIG. 10 stored in the storage unit 13 in advance, "50" KHz, which is the read frequency correction value "1.05" and the initial frequency prescribed value (Ffk) read out from the IC tag 1a, is calculated as 50 KHz x "1.05" = "52.5" KHz, and "initial lighting." Frequency target value Ffm " The storage unit 13 stores the obtained "initial voltage target value Vfmk", "8.08" KV, and "52.5" KHz.

Next, the normal voltage target value Vtm and the normal frequency target value Ftm for turning on the normal power after the initial lighting are obtained.

In step S171, the 2nd setting means 4c of the control part 4 obtains the voltage correction value corresponding to the integrated lighting time Ts read from the IC tag 1a from the said voltage correction table Tv. This voltage correction value and the normal voltage regulation value Vtk read out from the IC tag 1a are calculated to obtain a steady voltage target value Vtm. Following the steady voltage target value Vtm, the second setting means 4c reads from the frequency correction table Tf a correction value of a frequency corresponding to the steady voltage target value Vtm calculated and calculated. The normal frequency target value Ftm is obtained by calculating the frequency correction value and the normal frequency specified value Ftk read from the IC tag 1a. The storage unit 13 stores the obtained steady voltage target value Vtm and the steady frequency target value Ftm.

(d) When the lamp used by the said ultraviolet irradiation device is attached as it is. In this case, the process proceeds from step S14 to step S16 and step S18.

As will be described later, the storage unit 13 has a unique number (serial number) of the excimer lamp 1 when it was turned on last time, and an initial voltage target value (when the initial light of the excimer lamp 1 was turned on last time). Vfm) and the initial frequency target value Ffm are stored. In addition, after the normal lighting is started with the normal voltage target value Vtm and the normal frequency target value Ftm, the transition to the normal lighting is performed, the lighting voltage value and the lighting frequency value at the end of the normal lighting are stored.

In step S18, the initial voltage target value Vfm and the initial frequency target value Ffm stored in the storage unit 13 (EEPROM 13c) are read out, and the storage unit 13 (RAM 13a) is read. Remember).

In step S181, the control unit 4 reads the lighting voltage value and the lighting frequency value, which are data stored in the storage unit 13 (EEPROM 13c), and the normal voltage target value Vtm and the normal frequency. The storage unit RAM 13a is stored as a target value Ftm.

The present invention also relates to the control of the excimer lamp 1 including the IC tag 1a, which distinguishes between whether data can be read from the IC tag in step S13 or not, and data is read out. This feature is characterized by controlling what is possible based on the data.

As described above, the initial voltage target value Vfm and the initial frequency target value Ffm of the excimer lamp 1 attached to the ultraviolet irradiation device were set in each of steps S15, S17, S18, and S19.

5, the excimer lamp 1 is initially turned on using the initial voltage target value Vfm, the initial frequency target value Ffm, and the integrated lighting time read from the IC tag 1a. After that, a process of turning on normally will be described.

In step S21 and S22, the lighting control means 4e of the control part 4 sets the excimer lamp 1 to the said initial voltage target value Vfm and the initial frequency target value Ffm which were memorize | stored in the memory | storage part 13. Set as a target value for initial lighting.

In step S23, the lighting control means 4e sets the initial lighting time T0 to the initial lighting timer 4g.

Next, in step S24, a lighting signal is output to the high frequency lighting power supply 2, and at the same time, the high frequency lighting is performed on the initial voltage target value Vfm and the initial frequency target value Ffm set as target values in step S25. It outputs to the power supply 2, and the high frequency lighting power supply 2 starts initial lighting of the excimer lamp 1 based on the said voltage and frequency.

At the same time as step S24, the countdown (subtraction) of the initial lighting timer 4g set in step S23 is started in step S26. In addition, in step S2, the count of the lighting integration timer 4f is started in order to integrate the lighting time of the lamp.

In step S28, it waits for the initial lighting timer 4g to time up. In the meantime, the initial voltage target value Vfm set as the target value and the initial frequency target value Ffm are output to the high frequency lighting power supply 2, and the high frequency lighting power supply 2 is an excimer lamp by this voltage and frequency. Keep (1) on. When the initial lighting time T0 elapses, the process proceeds to step S29.

In steps S29 and S291, the lighting control means 4e of the control unit 4 stores the normal voltage target value Vtm and the normal frequency target value Ftm stored in the storage unit 13 of the excimer lamp 1. Set as the target value at the start of normal lighting.

In step S292, the normal voltage target value Vtm and the normal frequency target value Ftm are output to the high frequency lighting power supply 2, and the high frequency lighting power supply 2 starts power control of the excimer lamp 1. do.

The lighting control means 4e calculates the power supplied to the lamp from the voltage and current sent from the high frequency lighting power supply 2 after the normal lighting starts, and calculates the power (COSφ to the sum of the calculated voltage and current). The multiplied value) obtains a frequency that matches the target power set in advance, and sends it to the lighting power supply 2 as a frequency command.

In addition, at the start of normal lighting, the voltage corresponding to the normal voltage target value Vtm is controlled to be applied to the lamp 1. As will be described later, as the total lighting time of the lamp increases, the voltage is applied to the lamp. Increase the voltage

The lighting power supply 2 controls the drive voltage and frequency of the lamp 1 according to this voltage command and the frequency command. As a result, the power supplied to the lamp 1 is controlled so as to match the target power, and the lamp 1 is turned on with the illuminance corresponding to the target power.

In addition, below, the voltage and frequency applied to a lamp in normal lighting are called "lighting voltage" and a "lighting frequency", respectively.

Fig. 6 is a flowchart showing the process of updating the internal data from lighting up until turning off.

After the lighting, during normal lighting until the light is turned off, the updating means 4d shown in FIG. 2 updates the cumulative lighting time Ts of the lamp in accordance with the count value of the lighting integration timer 4f. As described above, the lighting voltage applied to the lamp at the time of normal lighting is updated to increase the lighting voltage of the lamp according to the total lighting time Ts.

In addition, the initial voltage target value Vfm, the initial frequency target value Ffm, and the stationary voltage target value Vtm stored in the storage unit 13 are stored in accordance with the total lighting time Ts of the lamp during the lamp is turned on. (Lighting voltage) and the steady frequency target value Ftm are updated, and the lamp is initially lit and normally lit at this updated voltage and frequency at the next start of lighting.

Hereinafter, the process in the flowchart of FIG. 6 is demonstrated.

In Fig. 6, in step S31, it is checked by the photosensor (not shown) whether the lamp 1 is normally lit, and if it is lit, the flow advances to step S311, and if it is not lit, the processing ends. In step S311, it is checked whether the time counted by the lighting integration timer 4f (see FIG. 2) has elapsed for a predetermined time, and when the predetermined time has elapsed, the process proceeds to step S32.

In step S32, the elapsed predetermined time is added to the total lighting time stored in the storage unit 13 and updated. For example, when the numerical value is used, the "predetermined time" is 1 hour, and the total lighting time stored in the storage unit 13 is 199 hours. When it is confirmed in step S311 that 1 hour has passed by the integration timer 4f, the total lighting time is set to 200 hours by adding 1 hour to 199 hours in step S32.

When the cumulative lighting time Ts is updated, there is a possibility that the correction value of the voltage correction value table Tv shown in FIG. 9 is updated.

Therefore, in step S33, it is checked whether the lighting voltage needs to be updated as the total lighting time Ts is increased.

For example, referring to the voltage correction value table Tv, the voltage correction value when the updated total lighting time is referred to the voltage correction value table Tv first (for example, in FIG. 4). It is checked whether or not it differs from the voltage correction value referred to in step S17 (or S171) or S18 (or S181).

For example, using a numerical value, when the total lighting time is 199 hours and the predetermined time is 1 hour, the predetermined time is added to the total lighting time 199 hours and 1 hour is 200 hours. In this case, in the table shown in FIG. 9, since the correction value of the cumulative lighting time of 199 hours and the correction value of the cumulative lighting time of 200 hours are the same "1.005", there is no update of the correction value. Further, when the time elapses and the total lighting time reaches 201 hours, the correction value becomes "1.010", so that the correction value is updated and the lighting voltage needs to be updated.

As a result of the cumulative lighting time being added, if the correction value of the voltage value is not updated, the process proceeds to step S41, and if so, the process proceeds to step S331.

If there is no update of the lighting voltage, the flow advances to step S41 to confirm the unlit signal and returns to step 311 when the unlit signal is off.

If there is an update of the lighting voltage, the flow proceeds to step S331.

In step S331, it calculates with the updated correction value and the initial voltage regulation value Vfk of the said lamp memorize | stored in the memory | storage part 13, and the initial voltage target stored in the memory | storage part 13 according to the calculation result. Update the value Vfm.

This initial voltage regulation value Vfk is read out from the storage unit 13 when the lamp is turned on next, and is set as the initial voltage target value Vfm (step S18 in FIG. 4).

Similarly, in step S331, the updated voltage correction value and the normal voltage regulation value Vtk of the lamp stored in the storage unit 13 are calculated to obtain a lighting voltage corresponding to the total lighting time at that time. Turn on the lighting voltage.

Using the numerical example, the normal voltage regulation value Vfk is 7KV, the corresponding correction value "1.010" when the "added integration time" is "201 hours", and 7KV x 1.010 = 7.07KV is calculated. Is obtained and stored in the storage unit 13 as the updated lighting voltage.

In step S34, the voltage value stored in the storage unit 13 in step S331 is set as the target lighting value as a new lighting voltage value, and is changed from the lighting voltage value before the integration time is added to the new lighting voltage value, Outputs a new lighting voltage value to the power supply.

For example, when the above-mentioned 7.07 KV is set as the updated lighting voltage, the lighting voltage value is changed to 7.07 KV ("voltage regulation value" 7KV x "calibration value" 1.010), and is changed to the high frequency lighting power supply 2. 7.07 KV is output as a lighting voltage value.

When the lighting voltage value is updated, there is a possibility that the frequency correction value of the frequency correction table Tf shown in FIG. 10 is updated.

For this reason, in step S36, the frequency correction value corresponding to the updated lighting voltage value was read out from the frequency correction table Tf shown in FIG. 10, and this frequency correction value first referred to the frequency correction table Tf. It is checked whether or not the frequency correction value (for example, the frequency correction value when referenced in step S17 (or S171) or S18 (or S181) in FIG. 4) is different.

As a result of the updating of the lighting voltage value, if the correction value of the frequency value is not updated, the process proceeds to step S41, and if so, the process proceeds to step S37.

In step S37, the corrected value of the updated frequency and the normal frequency specified value Ftk of the ramp stored in the storage unit 13 are calculated, and the normal frequency target value Ftm calculated and calculated is calculated in step S371. In the storage unit 13.

This steady frequency target value Ftm is read out from the storage unit 13 the next time the lamp is turned on and is set as the steady frequency target value Ftm (step S18 in FIG. 4).

In step S41, the lamp extinction signal is checked, and when the lamp extinction signal is not output (when ON), the lamp is on. When the unlit signal is output (OFF = Yes), the process ends and the unlit process described next is performed.

Next, the lamp extinction process will be described. First, the reason why the extinction step is required will be described.

An excimer lamp performs excimer light emission between a pair of electrodes by exciting the light emission gas inside the discharge container through the discharge container which has dielectric properties like quartz glass, for example.

When the excimer lamp is unused, a high voltage such as, for example, 8 KV is applied to the discharge vessel through the electrode at the initial lighting of the excimer light emission.

As shown in Fig. 11 (a), since the discharge vessel 1b to which a high voltage is applied has a dielectric property, it is polarized, electric charges appear on the surface thereof, and excimer light emission is performed using this electric charge.

In the excimer lamp, since a high frequency is also input, the polarization of the discharge container 1b changes according to the input high frequency. Specifically, polarization is eliminated or polarization is reversed.

As shown in Fig. 11 (b), one electrode of the excimer lamp has a high potential when it is a peak portion of high frequency, but when it is a valley portion of high frequency, it is grounded (0KV) like the other electrode. The polarization of the discharge vessel is eliminated.

In addition, in the case of the other lighting method, since the height of the voltage applied to one electrode and the other electrode is reversed, for example, the polarization of the discharge vessel when one electrode side is high potential is the other electrode. It is reversed from the polarization of the discharge vessel when the side is at a high potential. Polarization of the discharge vessel occurs even during normal lighting.

When we turn off such excimer lamp, we can immediately set high potential that we input to 0KV immediately, and high frequency that we input at the same time is 0KHz immediately, but next lamp turns on when we turn high voltage and high frequency into 0 immediately In the city, the lamp may turn on or the lamp input may be excessive.

This problem is considered to be the cause of polarization of the discharge vessel even after the lamp is turned off. The guess of the cause is shown below.

After the lamp is turned on, if the high voltage and the high frequency input immediately become zero, the charge on the surface of the discharge vessel is canceled. However, when the high voltage and the high frequency were just 6 KV, the polarization of the discharge vessel itself was maintained at 6 KV.

The high voltage and the high frequency input to the excimer lamp do not consider the state in which the discharge vessel is polarized. For this reason, when high voltage and high frequency are input to an excimer lamp in the state in which the discharge container was polarized, the polarization state of the discharge container was affected, and lamp input was excessive or inadequate, and the lamp lighting | emission and over input were thought to have occurred. do.

Therefore, the inventors suppress the polarization state of the discharge vessel when a voltage lower than the voltage value at the time of constant power control and a frequency value higher than the frequency value at the time of constant power control are input when the lamp is turned off. We were able to do it and got knowledge that could eliminate fire rain at the time of the next lamp lighting.

The extinguishing process using such an extinguishing process is demonstrated by the flowchart of FIG.

In step S501, when an unlit signal is input, the lighting control means 4e of the control part 4 reads the subtracted value (alpha) from the lighting voltage value memorize | stored in the memory | storage part 13 previously. Then, the lighting voltage stored in the storage unit 13 and the subtracted value α are calculated, and the result of the calculation is stored in the storage unit 13 as an unlit voltage value, and the unlit voltage value is set as a target value. do.

In step S502, the lighting control means 4e reads the addition value β of the lighting frequency value stored in the storage unit 13 in advance, and the lighting frequency value and the addition value stored in the storage unit 13. (+ β) is calculated, and the result of the calculation is stored in the storage unit 13 as an unlit frequency value, and the unlit frequency value is set as a target value.

In step S503, the lighting control means 4e reads out the extinction time T1 stored in the storage unit 13 in advance, and sets this extinction time T1 to the extinguishing timer 4h (see Fig. 2).

In step S52, the lighting control means 4e outputs the "lighting voltage value -α" set as the target value to the high frequency lighting power supply 2, and simultaneously, in step S53, "lighting frequency + β" is turned on at high frequency. Output to power supply 2.

The high frequency power supply 2 starts the light-off operation of the excimer lamp 1 based on "lighting voltage value-alpha" which is an unlit voltage, and "lighting frequency + beta" which is an unlit frequency.

Simultaneously with step S52 and step S53, the countdown (subtraction) of the extinction timer 4h is started in step S54.

The extinction voltage input to the excimer lamp 1 is an extinction voltage lower by α than the lighting voltage, and the excimer lamp 1 stops excimer light emission.

In step S55, during the "light off time T1", the unlit voltage value and the unlit frequency set as target values are output to the high frequency lighting power supply 2, and the excimer lamp 1 is continuously lit, and the unlit time T1 is performed. Elapsed), and if the light-off timer 4h times up, it progresses to step S56. At the same time as the time-up, the operation of the unlit timer 4h is terminated.

In step S56, the lighting control means 4e of the control part 4 terminates the output from the high frequency lighting power supply 2 to the excimer lamp 1, and turns off the high frequency lighting power supply.

8 is a flowchart showing a data update process at the time of extinguishing, where the data of the IC tag is updated and the data of the storage unit 13 of the device is updated.

In step S62, the updating means 4d of the control part 4 records the integrated lighting time Ts memorize | stored in the memory | storage part 13 in IC tag 1a. In addition, "device information" equipped with an excimer lamp and device information provided with a plurality of excimer lamps as the device information are recorded in the IC tag 1a.

If necessary, the new / old flag bit of the " lighting history information "

In step S67, the excimer lamp updated according to the "unique number (serial number)" of the excimer lamp 1 stored in the RAM 13a of the storage unit 13 and the cumulative lighting time of the excimer lamp 1. "Initial voltage target value (Vfm)" and "initial frequency target value (Ffm)" at the time of initially lighting (1), and the last "lighting voltage value when the excimer lamp 1 was electrostatically controlled. "," Lighting frequency "(" lighting voltage value "and" lighting frequency value "immediately before the lighting is turned off) and" computation lighting time "are stored in the EEPROM 13c of the storage unit 13, Turn off the power.

In the above description, although the "voltage value" and the "frequency value" were used as control parameters for turning on the lamp, controlling the "frequency value" can also be referred to as controlling the "current value". Instead of controlling the frequency value, the current value may be controlled.

In addition, in order to perform power control, in addition to controlling a frequency value, you may control the duty ratio of the voltage applied to a lamp. That is, in addition to "voltage value" and "frequency value", the "current value", "duty ratio of voltage", etc. may be controlled as a parameter of the control of lamp lighting in this invention.

In the above-described embodiment, although the "calibration parameter" of the voltage value (FIG. 9) and the "calibration parameter" of the frequency value (FIG. 10) used a common thing at the time of initial lighting and normal lighting, various corrections are carried out. You can also use parameters. That is, you may divide into "calibration parameter A" at the time of initial lighting, and "calibration parameter B" at the time of normal lighting.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows the system structure of the ultraviolet irradiation device which is embodiment of this invention.

2 is a functional block diagram of a light source device according to an embodiment of the present invention.

It is a flowchart which shows the outline of the process of the control part in the ultraviolet irradiation device which is embodiment of this invention.

4 is a flowchart 1 of the process from the start of the apparatus to the transition from the normal lighting operation of the lamp.

5 is a flowchart 2 of the process from the start of the apparatus to the transition from the normal lighting operation of the lamp.

Fig. 6 is a flowchart showing the process of updating the internal data after the lighting is turned off.

7 is a flowchart showing an unlit process.

8 is a flowchart showing a process of updating data at the time of extinction.

9 is a diagram illustrating an example of a voltage correction value table.

10 is a diagram illustrating an example of a frequency correction table.

It is a figure explaining the state of polarization of an excimer lamp.

It is a figure (sectional drawing cut in the plane parallel to a tube axis) which shows the structure of the ultraviolet irradiation device in which the excimer lamp was mounted.

It is a figure (sectional drawing cut to the plane perpendicular to a tube axis) which shows the structure of the ultraviolet irradiation device in which the excimer lamp was mounted.

It is a figure which shows the system structure of the ultraviolet irradiation device which lights an excimer lamp provided with an IC tag.

Fig. 15 is a diagram showing a change in illuminance at the time of initial lighting.

<Code description>

1: Lamp (excimer lamp) 1a: IC tag

2: lighting power supply 3: trance

4: control part 4a: determination means

4b: first setting means 4c: second setting means

4d: update means 4e: lighting control means

4f: Integration timer 4g: Initial lighting timer

4h: light off timer 10: ultraviolet irradiation device

11: CPU 12: IC tag R / W section

13: Memory 13a: Memory (RAM)

13b: memory (ROM) 13c: memory (EEPROM)

14: Antenna 16: A / D Converter

17: D / A Converter

Claims (8)

IC tag reading / writing means for reading information from the IC tag provided in the excimer lamp and recording the information into the IC tag; An ultraviolet irradiation device having a lighting power supply for supplying an excimer lamp and a control unit for controlling the lighting of the excimer lamp, and equipped with an excimer lamp having an IC tag, In the IC tag, at least, the total lighting time of the excimer lamp including the IC tag, information indicating the intrinsic electrical characteristics of the excimer lamp, and information indicating the presence or absence of lighting results in the ultraviolet irradiation device are recorded. , The control unit of the ultraviolet irradiation device, When the excimer lamp is mounted on the ultraviolet irradiation device, by accessing the IC tag by the IC tag reading / writing means, it is possible to read information from the IC tag, write to the IC tag, and read the information. Determination means for determining whether or not there is a lighting history in the ultraviolet irradiation device; First setting means for setting an initial lighting condition based on the information stored in the IC tag; Second setting means for setting a steady lighting condition based on the information stored in the IC tag; Updating means for updating the initial lighting condition and the normal lighting condition according to the total lighting time of the excimer lamp, storage means for storing the updated initial lighting condition and the normal lighting condition; When the determination result of the determination means can read the information from the IC tag and there is no lighting history in the ultraviolet irradiation device, the excimer lamp is set on the basis of the initial lighting condition set by the first setting means. Initial lighting, and after the initial lighting, the excimer lamp is transferred to normal lighting using the normal lighting condition set by the second setting means, When the determination result of the determination means can read the information from the IC tag and there is a lighting history in the ultraviolet irradiation device, the excimer lamp is initially turned on based on the initial lighting condition stored in the storage means. After the initial lighting, the excimer lamp is transferred to the normal lighting using the normal lighting condition stored in the storage means. When the determination result of the determination means cannot read the information from the IC tag, the excimer lamp is initially turned on by the initial lighting condition which is a predetermined safety value, and after the initial lighting, the normal lighting which is a predetermined safety value is turned on. And a lighting control means for shifting the excimer lamp to normal lighting using the conditions. The method according to claim 1, The information representing the intrinsic electrical characteristics of the excimer lamp stored in the IC tag includes at least an initial voltage regulation value, an initial frequency regulation value, a steady voltage regulation value, and a normal frequency regulation value for turning on the excimer lamp. The first setting means sets, as the initial lighting condition, an initial voltage target value and an initial lighting frequency target value based on an initial voltage regulation value and an initial frequency regulation value stored in the IC tag. The second setting means sets, as the normal lighting condition, a normal voltage target value and a normal frequency target value based on the normal voltage regulation value and the normal frequency regulation value stored in the IC tag, The updating means updates the initial voltage target value, the initial lighting frequency target value, the normal voltage target value, and the normal frequency target value according to the total lighting time of the excimer lamp, The storage means stores the updated initial voltage target value, initial lighting frequency target value, normal voltage target value and normal frequency target value, The lighting control means, When the determination result of the determination means is capable of reading information from the IC tag and there is no lighting history in the ultraviolet irradiation device, the determination is made to the initial voltage target value and the initial lighting frequency target value set by the first setting means. On the basis of this, the excimer lamp is initially turned on, and after the initial lighting, the excimer lamp is shifted to the normal lighting by using the normal voltage target value and the normal frequency target value set by the second setting means, On the basis of the initial voltage target value and the initial lighting frequency target value stored in the storage means when the determination result of the determination means is capable of reading information from the IC tag and has a history of lighting in the ultraviolet irradiation device, The excimer lamp is initially turned on, and after the initial lighting, the excimer lamp is shifted to normal lighting by using the normal voltage target value and the normal frequency target value stored in the storage means. When the determination result of the determination means cannot read information from the IC tag, the excimer lamp is initially turned on by the initial voltage safety value and the initial frequency safety value, which are predetermined safety values, and after the initial lighting, An ultraviolet irradiation device characterized by shifting the excimer lamp to normal lighting by using a normal voltage safety value and a normal frequency safety value which are defined safety values. As a lighting control method of the ultraviolet irradiation device provided with the reading / writing means of the information from the IC tag provided in the excimer lamp, and the control part which controls lighting of an excimer lamp, In the IC tag, at least, the total lighting time of the excimer lamp including the IC tag, information indicating the intrinsic electrical characteristics of the excimer lamp, and the presence or absence of lighting results in the ultraviolet irradiation device are recorded. The control unit of the ultraviolet irradiation device, When the excimer lamp is mounted on the ultraviolet irradiation device, the excimer lamp has an IC tag, and it is determined whether information can be read / written from the IC tag, When information can be read / written from the IC tag of the excimer lamp, the information stored in the IC tag is acquired. On the basis of the information obtained from the IC tag, the presence or absence of lighting results of the excimer lamp in the ultraviolet irradiation device is determined, According to the determination result, the following steps (a) to (c), (A) When information can be read from the IC tag and there is no history of lighting in the ultraviolet irradiation device, an initial lighting condition is set based on the information stored in the IC tag, and based on the set initial lighting condition. The initial light of the excimer lamp, Setting the normal lighting condition based on the information stored in the IC tag, and after the initial lighting, shifting the excimer lamp to the normal lighting using the set normal lighting condition, (B) When information can be read from the IC tag and there is a history of lighting in the ultraviolet irradiation device, based on at least one of information about the excimer lamp stored in the ultraviolet irradiation device and information stored in the IC tag. The initial lighting condition is set, and the excimer lamp is initially turned on based on the set initial lighting condition, The normal lighting condition is set based on at least one of the information on the excimer lamp stored in the ultraviolet irradiation device and the information stored in the IC tag, and after the initial lighting, the excimer lamp is normalized using the set normal lighting condition. Process to transition to lighting, (C) When the information cannot be read from the IC tag, an initial lighting condition which is a predetermined safety value is set, and the excimer lamp is initially turned on by the initial lighting condition which is the safety value. Setting a normal lighting condition which is a predetermined safety value, and performing the process of shifting the excimer lamp to normal lighting after the initial lighting using the normal lighting condition which is a safety value. The lighting control method of the ultraviolet irradiation device characterized by the above-mentioned. The method of claim 3, In the step (a), when the information can be read from the IC tag, there is no lighting history in the ultraviolet irradiation device, and there is lighting history in another device, A lighting control method for an ultraviolet irradiation device, characterized by setting an initial lighting condition and setting a normal lighting condition using information indicating a total lighting time stored in an IC tag and information indicating an inherent electrical characteristic of the excimer lamp. The method according to claim 3 or 4, The information representing the intrinsic electrical characteristics of the excimer lamp stored in the IC tag includes at least an initial voltage regulation value, an initial frequency regulation value, a normal voltage regulation value, and a normal frequency regulation value for turning on the excimer lamp. In the steps (a) and (b), the initial lighting condition includes at least one of an initial voltage regulation value stored in the IC tag, an initial frequency regulation value, and information about the excimer lamp stored in the ultraviolet irradiation device. On the basis of the initial voltage target value and the initial lighting frequency target value, As the normal lighting condition, the normal voltage target value and the normal frequency target value are based on at least one of the normal voltage regulation value stored in the IC tag, the normal frequency regulation value, and the information on the excimer lamp stored in the ultraviolet irradiation device. Setting, In the step (c), an initial voltage safety value and an initial frequency safety value, which are safety values, are set as the initial lighting conditions. A normal voltage safety value and a normal frequency safety value which are predetermined safety values are set as said normal lighting condition, The lighting control method of the ultraviolet irradiation device characterized by the above-mentioned. The method of claim 5, In the steps (a) and (b), the initial voltage target value and the initial lighting frequency target value are based on at least one of information stored in the IC tag and information about the excimer lamp stored in the ultraviolet irradiation device. To obtain (a) obtaining an initial voltage correction value corresponding to the total lighting time of the excimer lamp; (b) calculate an initial voltage correction value and an initial voltage regulation value to obtain an initial voltage target value; (c) obtaining the initial lighting frequency correction value corresponding to the initial voltage target value obtained; The initial lighting frequency correction value and the initial frequency regulation value are calculated to obtain the initial lighting frequency target value. The lighting control method of the ultraviolet irradiation device characterized by the above-mentioned. The method of claim 5, In the steps (a) and (b), the steady-state voltage target value and the normal-frequency target value are based on at least one of information stored in the IC tag and information on the excimer lamp stored in the ultraviolet irradiation device. , To obtain (a) obtaining a normal lighting voltage correction value corresponding to the total lighting time of the excimer lamp; (b) Calculate the normal voltage target value by calculating the normal lighting voltage correction value and the normal voltage regulation value. (c) Obtaining the normal lighting frequency correction value corresponding to the obtained normal voltage target value, The normal lighting frequency correction value and the normal frequency regulation value are calculated to obtain the normal frequency target value. The lighting control method of the ultraviolet irradiation device characterized by the above-mentioned. The method according to claim 3 or 4, When reading information from the IC tag and writing information to the IC tag are possible, When the excimer lamp is turned off, the control unit updates the cumulative lighting time of the IC tag installed in the excimer lamp, and records that there is a history of use in the ultraviolet irradiation device. The ultraviolet irradiation device stores information for identifying the excimer lamp, and an initial voltage target value, an initial lighting frequency target value, a steady voltage target value, and a normal frequency target value at the next lighting time. The lighting control method of the ultraviolet irradiation device.

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