200913001 九、發明說明： I：發明戶斤屬之技術領域】 發明領域 本發明係有關於一種低壓水銀燈或準分子燈等的放電 5燈，特別是有關於一種作為產業用紫外線光源使用之球狀 放電部之介電體障壁放電燈或容量結合型高頻放電燈。 發明背景 以往，於直管狀之放電容器兩端具有電極之低壓放電 10燈或雙層管結構之準分子燈係作為產業用之紫外線燈常用 於紫外線洗淨、硬化及圖案曝光等。密封有氣(Xe)氣體之 準分子燈常用於液晶面板用基板之乾洗。該等燈皆係發光 部於軸方向上呈長管狀。以往係將被照射物體配置成與燈 平行，並朝與燈之軸垂直的方向照射紫外線，並且一 4 15射被照射物體之細長領域。由於基板以一定速度移動於與 燈垂直之方向，因此可遍及基板全體進行比較均等的處 理。然而，在半導體製程之各工程中，係使用紫外線進行 半導體晶片之加工等，並且將多根管狀燈排列成平行，而 進行圓型半導體晶片之照射。以下，舉出幾個與其相關之 2〇習知技術之例。 專利文獻1所揭示之「螢光光源」係以高頻低壓電源透 過各里性咼頻放電而點燈，並具有大致等方性的放射圖案 的無电極放電榮先燈。如第11(a)圖所示，呈西洋梨形且具 透光性之外殼的外側表面設有外側導體，且内殼之内侧表 200913001 面設有内側導體。又，内側導體與外側導體之間施加有 10MHz〜10GHz之高頻電壓，以形成電漿並產生254nm波長 的紫外線。外殼之内側表面塗布有用以吸收紫外線並放射 可見光之螢光物質。當作為紫外光源時，則沒有螢光物質之 覆膜，而是以對於紫外線為透明之熔化矽般的物質為外殼。 10 15 20 專利文獻2所揭示之「微波放電燈」係以微波放電之精 緻且穩定性高的無電極放電燈。如第_圖所示，該燈係 -體形成封人有有助於放電、發光之封人物與稀有氣體之 第1燈泡及封入有稀有氣體之第2燈泡。第i燈泡可減少於 定點燈時氣壓對於管壁溫度之變動，並可減少因來自放: =發光而產生的輪出變動。因此可將冷繼精= =錄3·示之「無電極放紐」係財 先，且冷卻效率佳之燈。如 2 之球形容器體具有開放空間與密閉燈 ::放空間連結於放電燈支撐體與送風引;;二: 工間之密閉空間密封有放^圍開放 稀有氣體等。藉由通過送 ，即’金屬齒化物與 開放空間，可從_ 導讀冷卻送顺入内侧之 不阻斷無電減電燈所發^ ^冷卻容器體。因此可在 電極放電燈。 光的情況下有效率地冷卻無 專利文獻4所揭示之「外立 改變管軸方向之配光特性的:電極型螢光燈」係可自由地 圖所示’電極端部之開。率p電極型螢光燈。如第11(d) /、中央部相同，而開口數較中 200913001 央部多。藉此可增加燈兩端部之光量多於燈中央部。相同 地’亦可使每單位面積之開口數一致而改變開口率’或— 同改變開口數、開口率而改變管軸方甸之配光特性。200913001 IX. INSTRUCTIONS: I: TECHNICAL FIELD OF THE INVENTION The present invention relates to a discharge 5 lamp of a low-pressure mercury lamp or an excimer lamp, and more particularly to a spherical shape used as an industrial ultraviolet light source. A dielectric barrier discharge lamp or a capacity-coupled high-frequency discharge lamp in the discharge portion. Background of the Invention Conventionally, a low-voltage discharge electrode having electrodes at both ends of a straight tubular discharge vessel has been used as an industrial ultraviolet lamp for ultraviolet cleaning, hardening, pattern exposure, and the like. An excimer lamp sealed with a gas (Xe) gas is often used for dry cleaning of a substrate for a liquid crystal panel. The lamps are all elongated in the axial direction of the light-emitting portion. In the past, the object to be illuminated was placed in parallel with the lamp, and the ultraviolet rays were irradiated in a direction perpendicular to the axis of the lamp, and the elongated region of the object to be irradiated was irradiated. Since the substrate is moved at a constant speed in the direction perpendicular to the lamp, it is possible to perform equal processing throughout the entire substrate. However, in various processes of the semiconductor manufacturing process, processing of a semiconductor wafer or the like is performed using ultraviolet rays, and a plurality of tubular lamps are arranged in parallel to perform irradiation of a circular semiconductor wafer. In the following, several examples of conventional techniques related thereto will be cited. The "fluorescent light source" disclosed in Patent Document 1 is an electrodeless discharge lamp which has a substantially uniform isotropic radiation pattern by a high-frequency low-voltage power source that is lit by a neutral frequency discharge. As shown in Fig. 11(a), the outer surface of the outer shell of the pear-shaped and translucent outer shell is provided with an outer conductor, and the inner side of the inner casing is provided with an inner conductor on the surface of the 200913001. Further, a high-frequency voltage of 10 MHz to 10 GHz is applied between the inner conductor and the outer conductor to form a plasma and generate ultraviolet rays having a wavelength of 254 nm. The inner surface of the outer casing is coated with a fluorescent substance that absorbs ultraviolet rays and emits visible light. When it is used as an ultraviolet light source, there is no coating of a fluorescent substance, but a substance which is transparent to ultraviolet rays is used as a shell. 10 15 20 The "microwave discharge lamp" disclosed in Patent Document 2 is an electrodeless discharge lamp which is excellent in microwave discharge and high in stability. As shown in the figure, the lamp body is formed of a first bulb that encloses a person and a rare gas that contributes to discharge and light emission, and a second bulb that encloses a rare gas. The ith bulb can reduce the variation of the air pressure on the wall temperature when the lamp is set, and can reduce the wheel rotation change caused by the illuminating: = illuminating. Therefore, it is possible to use the cold relaying == recording 3 to show that the "electrodeless discharge" is a pre-existing light with good cooling efficiency. For example, the spherical container body of 2 has an open space and a sealed lamp: the space is connected to the discharge lamp support body and the air supply guide; and the second: the sealed space of the work space is sealed with a rare gas and the like. By sending, ie, the metal toothing and the open space, the cooling can be sent from the inside to the inside without blocking the discharge of the heat-reducing lamp. Therefore, the electrode discharge lamp can be used. In the case of light, it is possible to efficiently cool the "electrode type fluorescent lamp" which is disclosed in Patent Document 4, "External change of the light distribution characteristic in the tube axis direction". Rate p-electrode type fluorescent lamp. As in the 11th (d) /, the central part is the same, and the number of openings is more than the central part of the 200913001. Thereby, the amount of light at both ends of the lamp can be increased more than the central portion of the lamp. Similarly, the number of openings per unit area may be made uniform to change the aperture ratio' or - the number of openings and the aperture ratio may be changed to change the light distribution characteristics of the tube axis.
專利文獻5所揭示之「介電體障璧放電燈」係改良外側 5電極之結構以提升發光效率者。如第p(a)圖所示，發光管 之本體部的結構為雙層管，且該本體部係以石英為主成 分。又，該内部封入有藉由介電體障璧放電形成準分子之 稀有氣體。用以放電之不鏽鋼製的内側電極具有用以固定 外側電極之結構。又，該燈係以端子連接於外部電極，並 10以圓笱狀之金屬棒固定外側電極，並且以按壓螺检按壓外 側電極固定用之金屬棒。外侧電極係因金屬棒所壓入之力 而沿著發光管之圓周密接於外側電極固定用V槽部。燈框體 係由樹脂等絕緣材料所形成。又，該燈具有作為空氣冷卻 部之散熱片。又，反射鏡面係浮雕加工成浮雕狀態，而用 U以漫反射。外側電極係由蒙納合金、不細或銘等金屬 薄板所作成。 專利文獻6所揭示之「介電體障壁放電燈裝置」係以反 射鏡有效率地收集從所有的側面與前端面放射之紫外線 20 者。如第12刚所示，介電體障壁故電燈之放電容器的側 面與前端面為光取出部。介電體放 %咬燈之一端側插入於反 射鏡之頂部開口，而另一端側朝向s 、，The "dielectric barrier discharge lamp" disclosed in Patent Document 5 is a structure in which the outer 5 electrodes are modified to improve luminous efficiency. As shown in the figure p(a), the structure of the body portion of the arc tube is a double tube, and the body portion is mainly composed of quartz. Further, the inside is sealed with a rare gas which forms an excimer by dielectric barrier discharge. The inner electrode made of stainless steel for discharging has a structure for fixing the outer electrode. Further, the lamp is connected to the external electrode by a terminal, and the outer electrode is fixed by a round metal rod, and the metal rod for fixing the outer electrode is pressed by a screw. The outer electrode is closely adhered to the outer electrode fixing V groove portion along the circumference of the arc tube by the force of the metal rod being pressed. The lamp frame body is formed of an insulating material such as resin. Further, the lamp has a heat sink as an air cooling portion. Moreover, the mirror surface is embossed into a embossed state, and U is used for diffuse reflection. The outer electrode is made of a thin metal plate such as a Mona alloy or a non-fine or inscription. The "dielectric barrier discharge lamp device" disclosed in Patent Document 6 efficiently collects ultraviolet rays 20 emitted from all the side faces and the front end face by a mirror. As shown in the twelfth, the dielectric barrier is such that the side surface and the front end surface of the discharge vessel of the electric lamp are light extraction portions. One end side of the dielectric body % biting lamp is inserted into the top opening of the mirror, and the other end side faces s ,
久射鏡之前方開口。又 該裝置沿著反射鏡之光軸配置有敬I Μ容器。反射鏡之光轴 方向連續設有多數反射面。 係放電穩定、亮 專利文獻7所揭示之「燈泡形鸯先_ 7 200913001 度的閃爍少且精緻的螢光燈。如第12(c)圖所示，筒狀之外 侧包圍部具有密閉之頂部與周圍側面部。筒狀之内側包圍 部具有密閉之頂部與周圍側面部，並收納於外侧包圍部之 内部。又，各個頂部及周圍側面部之間形成有空間。環狀 5部密閉地連結外側包圍部與内側包圍部，並形成帽狀的放 電空間於内部。透光性放電容器係由外侧包圍部、内側包 圍部與環狀部所構成。又，一對電極配設於透光性放電容 器之頂部與周圍側面部之外面。形成準分子之放電導體密 封於透光性放電容器内。藉由經介電體障壁放電放射之紫 10 外線可激勵螢光體。 專利文獻8所揭示之「準分子燈」係可在不使用用以收 集紫外線之透鏡的情況下以高亮度之準分子光照射狹小領 域者。如第12(d)圖所示，由介電體所構成之放電容器包含 有碗狀及窗部。碗狀部外周面具有一電極。又，該燈具 15有貫通碗狀部且突出至放電容器内之另一電極。放電容器 内饴封有準分子光產生氣體。藉由施加高頻電壓於兩電極 間’可從窗部放射準分子光。 【專利文獻1】特開昭56-128567號公報 【專利文獻2】特開平08-148128號公報 2〇 【專利文獻3】特開平10-172520號公報 【專利文獻4】特開平10-284008號公報 【專利文獻5】特開2001-084965號公報 【專利文獻6】特開2001-319510號公報 【專利文獻7】特開2003-100258號公報 200913001 【專利文獻8】特開2006-059636號公報 C 明内容】 發明揭示 發明欲解決之問題 5 然而’習知之介電體障壁放電燈具有以下問題。在放 電領域朝轴方向延伸之放電燈中，轴方向之照度分布不一 樣’且放電領域之轴方向的溫度差大，並且放射光譜不均。 在如第12(b)圖所示之組合有多數圓筒之放電燈中，無法均 等的放電’且角落部分的發光較弱。照度分布不均之放電 10燈必須具有形狀複雜之反射鏡，以均等的照射紫外線於被 照射物’因此光源襄置會變貴。再者，由於靠近反射鏡之 上4與罪近照射面之下部的溫度差變大，因此難以於燈之 轴方向均等的放電。 本發月之目的在於解決前述習知之問題，並使放電燈 15精緻化並且可放射等方性的紫外線。 用以欲解決問題之手段 為了解決前述問題，本發明之結構包含有：由旋轉擴 圓體之球狀部與管狀部所構成之介電體的放電容器；只設 於球狀部外表面之外側電極；只設於球狀部内部之内側電 20極，封入球狀部内部之放電空間的發光物質；供電至内側 電極之内部供㈣；及供電至相f極之外雜電體。又， 球狀部係由外側球與内側球所構成，且内側球與外側球為 同圓心，而放電空間係形成於外側球與内側球之間的球殼 狀空間，且發光物質封入放電空間。又，管狀部包含有結 200913001 σ於外侧球之外營及結合於内側球之内管。 又&狀部係貯存發光物質之貯器。或者，本發明包 3有將與球4空間隔離之管狀m形成於外管與内管 之間的隔離裝置，為與發光物質不同之發光物質且封入管 5狀工間之第2發光物質；設於外管之外表面的啟動用外側電 極；及設於内管之内表面的啟動用内側電極。又，球狀部 係求g狀4呈直技朝球狀部擴展κ狀，並以最大徑 部分連結於球狀部。而管狀部係内部有内部供電體通過， 並連結於球狀部。再者，外側電極係網狀之網電極，且網 H)電極之開口率與開口數之其中—者或兩者於球狀部之底部 與圓周部不同。又’光源裝置包含有：固持並點亮放電燈 之裝置；及使冷卻媒體於放電燈之球狀部與管狀部之内面 流通而進行冷卻之裝置。 發明效果 15 藉由4述結構，可形成精緻的放電燈，並可放射等方 性的紫外線，並且可有效率且均等的照射圓形的被照射領 域。藉由與放電空間連通之貯器，可延長放電燈之壽命。 藉由啟動補助用放電空間，可在即使使用難以開始放電之 發光物質的情況下輕易的開始放電。 20 【實施方式】 用以實施發明之最佳形態 以下，一面參照第1圖〜第1〇圖，一面詳細地說明實施 本發明之最佳形態。 實施例1 200913001 10 ί發!:!二1係於直接結合於管狀部 之球狀部進 行放電’並從管狀部之貯器供給放 第1圖係本發明實施例i之放電 中，放電燈1係由球狀部與管 、截面圖。在第1圖 内部封入有發光物質之容器 ^構成者。放電容器2係 形成氧化減紐表面亦可適當地 脆化及防止玻璃與封入氣體之反應…當封1 = 亦可形絲化_4。球狀部3魏電容H之球狀的部分。 管狀部4係放電容器之直管部。内側球5係構成放電料之 球狀部内壁的球殼狀介電體。外側球6係構成放電容器;球 狀部外壁的球殼狀介電體。 電氣體 之放電燈 内管7係構成放電容器之管狀部内壁的直管狀介電 體。外管8係構成放電容器之管狀部外壁的直管狀介電體。 端部9係連接放電容器之管狀部之内管7與外管8的環狀 5 °卩。球设狀空間43係由内側球5之外面、外側球6之内面及 内管7之外面所包圍之球殼狀空間。管狀空間44係由内管？ 之外面、外管8之内面及端部9之内面所包圍之直管狀空 間。内側電極35係配設於球狀部内側之電極。外側電極％ 係配設於球狀部外側之金屬網製的電極。又’外側球之外 20側電極即使不是金屬製之電極，亦可為將各種導電性膜烙 印於球表面並形成網狀之結構。供電線30係將電力供給至 内側電極之具導電性的線。又，使用圓筒、圓柱、膜或板 代替線亦可進行供電。 介電體之放電容器2的内部係由球狀部3及連結於球狀 200913001 部3之e狀44所構成。球狀部3係由外側球6及與外側球6為 同圓心之内側球5所構成的雙層管。球狀部3之外表面設有 外側電極3 6。與外側電極3 6相對之内側電極3 $設於内側球$ 之内側。域於外側球6與内側球5間之球殼狀空間们封入 5有發光物質。管狀部4係由結合於外側球6之外管8與結合於 内側球5之内管7所構成。管狀部4未設有外側電極與内側電 極’而疋使供電朗側電極35之供電線3G貫穿内部。管狀 部4係用以貯藏發光物質之貯器。 第2圖係顯示放電燈之冷卻方法的概念圖。在第2圖 10中，冷卻管61係將冷卻介質導入内側球之内側以冷卻放電 燈之管。第3圖係顯示附有反射鏡之光源裝置安裝有放電燈 之狀態的概念圖。在第3圖中，反射鏡1〇1係以軸對稱的反射 面同樣地反射照射光之旋轉拋物面凹面鏡。被照射物1〇2係半 導體晶圓等之照射物體。台103係用以放置被照射物之台。 15 接者針對具有如述結構之本發明實施例1之放電燈的 功能與動作進行說明。首先，一面參照第1圖一面說明放電 容器之形成方法。當内側球5之外徑較外管8之内徑小時， 即’内側球5可貫穿外管8内時，便利用將前端形成有内側 球5之内管7插入前端形成有外側球6之外管8的内部，並密 20封内管7與外管8而形成端部9之方法來形成放電容器。 當内側球5之外徑較外管8之内徑大時，即，内側球5 無法貫穿外管8内時，便於外側球6之最大外徑部分附近依 外營轴方向分成上下而形成外側球。具體而言，在此係將 刖端形成有内側球5之内管7插入前端形成有外側球之半球 12 200913001 部分的外管8内部，並密封内管7與外管8而形成端部9。之 後’再利用玻璃加工密封外側球剩下的半球部分。在該方 法的情況下，可縮短内側球與外側球之間隔，即，放電間 隙，即使封入氣體之壓力上升，仍較容易啟動，並可得到 5 強勁的放射輸出。 内側球5之内侧表面設有内側電極％。内側電極％可藉 由，例如，澆注、塗布導電性塗料後再燒結而形成。内側電 極35係透過供電線3〇電連接於外部。外側球6之外側設置有 與内側電極35相對之金屬網製的外側電極36。第丨圖中係省 1〇略掉供電至外側電極％之供電線。放電容器封入有氙氣體。 接者，說明放電燈之動作。藉由供給電力至外側電極 36與内側電極35之間，可透過球狀部3進行放電。在球殼狀 空間43中，係透過介電體之内側球5與外侧球6於内側電極 35與外侧電極36間進行放電，並藉由發光物質放射光。放 15電燈之點燈動作如下所述。首先，施加20kHz左右的高頻電 壓於内側電極35與外側電極36之間，以產生介電體障壁放 電。此時所產生之氙準分子光（波長172nm)會透過金屬網之 外側電極36 ’而可有效率地取出。又，在完全相同之結構 中’亦可封入氙氣體，益將施加之電壓視為數MHz的高頻。 20 在該結構中亦可放出氙準分子光（波長172nm)。又，若將封 入物視為水銀與啟動用之氬氣體的話，亦可進行低壓水銀 之高頻放電，並可得到波長254nm或185nm之水銀特有的紫 外線。此時，係冷卻最冷部並將其控制成最適當的溫度， 以將點燈中之水銀蒸氣壓保持於最適當的狀態。 13 200913001 管狀空間44具有冷卻發光管與發光物質之功能，更具 有作為發光物質之貯器的功能。例如，在使用溴為發光物 質之燈中，則有封入量因封入之溴與放電容器產生反應或 受放電容器吸附而減少的情況。前述現象之對策係將溴視 5 為固體並以化合物之樣態貯存於貯器内。亦可根據需要透 過從外部之加熱使其氣體化。藉此，即使封入量減少，亦 可補充溴於放電空間。藉由具有貯器可延長燈之壽命。 接著，一面參照第2圖一面針對放電燈之冷卻方法進行 說明。内管7之内側設置有冷卻管61，以進行燈之冷卻。在 10 此，係利用冷卻管61將冷卻用之氮與氬等冷卻介質導入内 侧球5之内側。導入内側球内部之冷卻介質係通過内管7與 冷卻管之間再流出至外部。又，亦可根據需要同時從放電 容器外側進行冷卻。其它結構與前述例相同。又，流至内 側球5之内側的冷卻媒體亦可為水等液體。再者，當以冷卻 15 管61為金屬管，並以冷卻介質為水時，由於該等具有導電 性，因此可作為内側電極之代用。在該情況下，不必特別 設置電極於内側球5之内面。若具有前述結構的話，燈之溫 度則不易上升，且放電氣體之溫度也不會變高。因此，可 增加輸入電力，並可得到強勁的放射輸出。 20 接著，一面參照第3圖一面說明對於光源裝置之安裝方 法進行說明。第3圖係顯示放電燈之使用狀態的截面。在第 3圖中，放電燈1係裝配於軸對稱之反射鏡101的中心。放電 燈1係透過介電體障壁放電或容量結合型高頻放電而亮 燈，並放射等方性的紫外線。從放電燈1放出之紫外線的一 14 200913001 部分直接照射於放置於台103上之半導體晶圓等的被照射 物102。又，另一部分經反射鏡101反射而照射於被照射物 102。藉此，直接光會與反射光重疊，並均等地照射於被照 射物102。例如，當欲照射波長172nm之氙準分子光時，由 5 於目前為止沒有用以進行介電體障壁放電之球型的燈，因 此無法構成具有前述結構之照射裝置。藉由本發明，可進 行適合如半導體晶圓之圓形照射面的照射。 如前所述，由於本發明實施例1之放電燈的結構係於直 接結合於管狀部之球狀部進行放電，並從管狀部之貯器供 10 給放電氣體，因此可以精緻且壽命長之放電燈放射等方性 的光，並可有效率且均等的照射圓形的被照射領域。 實施例2 本發明之實施例2係將作為内側電極之鋼絲絨放入直接 結合於直管部之球狀部的内側球内部以進行放電之放電燈。 15 第4圖係本發明實施例2之放電燈的截面圖。在第4圖 中，内側電極45係將銅等細金屬線聚集成綿狀之鋼絲絨。 其它結構與實施例1相同。本實施例係在藉由玻璃加工形成 放電容器2之後，從放電容器2内管7之内側將鋼絲絨插入内 側球5之内部。由於鋼絲絨之空孔率較高且變形較自由，因 20 此按壓後可擴展至内側球5之内側全體。鋼絲絨係先電連接 於供電線30，以作為内側電極45。内侧電極45係透過供電 線3〇電連接於外部。外側球6之外側設置有與内侧電極45相 對之金屬網製的外側電極36。外側球6與内側球5間之球續 狀空間43封入有氙氣體。該放電燈之動作與實施例丨相同。 15 200913001 實施例3 本發明之實施例3係管狀部的内管與直接結合於管狀 部= 求狀部的内側球為金屬製，並於球狀部進行放電，並 且k s狀部之貯器供給放電氣體之放電燈。 第5圖係本發明實施例3之放電燈的截面圖。在第5圖 中:内官17係構成放電容器之管狀部内壁的金屬製直管。 内^17不為管狀亦可為棒狀。外管18係構成放電容器之管 狀外壁的直管狀介電體。端部B係連接放電容器之管狀 #之内& 17與外官18的環狀部。球狀部13係由外側球16及 10與外側球16為同圓心之内側球伽構成之雙層球。外側球 16係構成放電容器之球狀部外壁的球殼狀介電體。内側球 I5係構成放電容器之球狀㈣壁的金屬製球體。外側電極 46係配設於球㈣之金屬網製之電極。 内侧球15細管Π為金屬製 。連接放電空間，即，球 15 a狀工P^43之内側球15具有電極之作用。其係隔著外側球 16於外侧電極46之間進行放電。内管17可支撐内側球15， 並具有供電線之功能。外管18之端部19炫接於内管π。在 將玻璃’溶接於内管17時係先溶接熱脹係數接近内管η之 玻璃再+接熱脹係數稍微靠近石英玻璃之玻璃。藉由此 20方法可將外fl8之端部贿接於内管17。又其他結構 與實施例1相同。 金屬製之内側球15的溫度上升較玻璃強，且内部通過 有金屬製之内苔17 ’因此可輕易放熱。由於内側球15為金 屬製且與外側電極46間隔有外側球16,因此藉由放電容 16 200913001 易擴展之介電體障壁放電的性質，可產生均等的放電。又， 由於坡鴇部分僅為外側球部分之一半，因此不論是介電體 障壁放電或是高頻放電，施加於電極間之電壓中施加於放 電空間之電壓會變大，而可實現效率佳之燈。 5實施例4 本發明之實施例4係於直接結合於管狀部之旋轉橢圓 體之球狀部進行放電，並從管狀部之貯器供給放電氣體之 放電燈。 第6圖係本發明實施例4之放電燈的截面圖。在第6圖 中球狀部13係放電容器之旋轉橢圓體之部分。管狀部14 係放電容器之直管部。内側球25係構成放電容器之旋轉糖 體内壁之介電體。外側球26係構成放電容器之旋轉檐圓 立卜壁之介電體。内側電極55係配設於旋轉橢圓體之球狀 15貝，、側的電極。外側電極％係配設於旋轉橢圓體之球狀部外 内的包極。球殼狀空間53係由内侧球25之外面、外側球％之 面及内官7之外面所圍起之旋轉橢隨的球殼狀空間。 球狀部13係扁平的旋轉橢圓體。又，該旋轉橢圓體係 =的糾重疊於纽部14之軸，並以姉為_轴而旋 20呈古。即使不為旋轉擔圓體，只要軸對稱容器之前端部分 也。么光部’且發光部之軸對稱的話’亦可為其他形狀， 了為與軸垂直之戴面為橢圓形者。旋轉橢圓體之内側球 且:内側具有内側電極55。旋轉橢圓體之外側絲的外側 卜侧電極56。内侧電極55與外側電極％的間隔，即， -間隙不論在的場所皆大致—定。由於球狀部較球形 17 200913001 的情/兄可廣範圍地照射，因此炉垃、& 根據破照射物之形狀與照射 範圍，疑轉橢圓體較球形者適合。 逋口碡由組合適合旋轉橢圓 體之發先部之形狀的反射鏡， 合反射鏡並㈣㈣射狹㈣均4㈣射。在組 …士 的情況下，亦有於管狀部 之軸方向較長之旋轉橢圓體較佳的情況。 實施例5 ^ ' 本發明之實施例5係以球狀部之直接結合於管狀部的 部分支撐”，並树狀部猜_，並且從錄部之貯 器供給放電氣體之放電燈。 1〇 f 7圖係本發明實施例5之放電燈的截面圖。在第頂 中，管狀部14係放電容器之直管部。管狀空間M係由内” 之外面、外管8之内面及端部9之内面所圍起之直管狀空 間。支推構件62係支撲内管之構件。貫穿細係供發光物 質貫通之孔。又，由於其它結構與實施例㈣示之放電燈相 15 同’因此省略大略相同部位的說明。 管狀空間54與球殼狀空間43之邊界設有支撐構件& 在貫施例1所示之放電容器的情況下，由内側球5與内管7所 構成之内壁和由外側球6與外管8所構成之外壁係只透過端 部9連接。故，應力便集中於端部9，放電容器則有損壞的 20可能。因此，本實施例設有支撐構件62。由於内管7經外管 8支撐’因此可防止放電容器之損壞。又，本實施例設有貫 穿孔63，以具有貯器之功能。用以設置支撐構件62之位置 不是球殼狀空間43與管狀空間54之邊界亦可，也可將支撐 構件62設於靠近端部9之管狀空間54内。即使不將支樓構件 18 200913001 Z接於时7^f 8，只要切構件&不射狀㈣之 軸方向移動，且充分地支樓时7即可。切構件& :要是不與放電燈之封入物產生反應者，即使非為石英製 ，、可。又’本實施例之其他功能與動作與實施例！相同。 實施例6 本發明之實施例6係於與直接結合於管狀部之球狀部 之球殼狀空間隔離並封入有啟動用發光物質之管狀空間開 始放電，並約求狀部進行正式的放電之放電燈。 第8圖係顯示本發明實施例6之放電燈的截面圖。在第8 ⑺圖中’啟動用内側電極37係用以於管狀放電空間開始放電 的内側電極。啟動用外側電極38係用以於管狀放電空間開 始放電的外側電極。管狀放電空_係用以進行啟動用之 放電的空間。啟動輔助窗64係用以利用管狀放電空間41之 紫外線照射球殼狀空間之窗。又，由於其它結構與實施例工 15之放電燈相同，因此省略大略相同部位的說明。 放電空間經圓盤狀之啟動輔助窗64分為管狀放電空間 41與球殼狀放f空間43。内管7之内侧設有啟動用内側電極 37。外管8之外側設有啟動用外側電極38。管狀放電空間“ 與球殼狀空間43可個別點亮。球殼狀空間43内封入有高壓 2〇力的氙氣體，以產生原本必須之波長172nm之氙準分子光。 另一方面，管狀放電空間41封入有數百Pa之氖與氬的 混合氣體，而使放電容易啟動。當開始點燈時，管狀部之 啟動用内側電極37與啟動用外侧電極38之電極對施加有高 頻電壓，而於管狀放電空間41產生高頻放電，並產生紫外 19 200913001 線。接著，球殼狀空間43之内側電極35與外側電極36之電 極對施加有高頻電壓。由於從管狀放電空間41產生之紫外 線係透過啟動輔助窗64照射球殼狀空間43，因此不論球殼 狀空間43之封入壓力高，亦可輕易地開始放電。又，本實 施例之其他功能與動作與實施例1相同。 實施例7 本發明之實施例7係於直接結合於管狀部之球狀部進 行放電，且無貯器之放電燈。 第9圖係本發明實施例7之放電燈的截面圖。在第9圖 10中’内管27係構成放電容器之管狀部的直管狀介電體。由 於除了不具有外管此點之外，其它結構皆與實施例1所示之 放電燈相同，因此省略大略相同部位的説明。 實施例8 15 20 本發明之實施例8係於連接有喇„八狀之管狀部，並具有 外側電極的旋轉橢圓體之球狀部進行放電之放電燈，而該外 侧電極係開口率或開σ數於底部與圓周部不同之網狀者。 第10(a)圖係本發明實施例8之放電燈的截面圖。第1〇(b) 圖係第lG(a)®之燈下方面之照射面側的底視圖。在第關 中，球狀部13係放電容器之旋轉橢圓體的部分。管狀部14 系放電谷之直g 。内側球25係、構成放電容器之旋轉擴 圓體内壁的介電體 r侧球26係構成放電容器之旋轉橢圓 體外壁的介電體。内側電極65係配設於旋轉橢圓體之球狀 部内侧的電極。外側電極66係配設於旋轉橢圓體之球狀部 外側的電極。球殼狀空間53係由内側球25之外面、外側球 20 200913001 26之内面及内管7之外面所圍起之旋轉_體的球殼狀空間。 球狀部U係爲平的旋轉橢圓體。又，該旋_=係 橢圓的短軸重4於管狀部14棉，並叫__轴而旋 轉者。即使不為旋轉橢圓體，只要軸對稂 _ 啊各裔之前端部分 10 具有發光部，且發光部之軸對稱的話，亦可為其他形狀， 也可為與軸垂直之截面為橢圓形者。管狀部14呈朝球狀部 13開啟之喇叭狀。管狀部14係以喇叭狀之開啟最大的咅/ 連接球狀部13。將管狀部14形成喇d八狀之理由如下所述 若管狀部與球狀部之邊界為直角的話，應力便集中於邊界 部分’放電容n财損壞的可能。若管狀部開啟呈敎狀 的話，管狀部與球狀部便由邊界部分平滑地連接，而可防 止應力集_於邊界部分。故，可防止因長期使用产而產生 之放電容器的損壞。Open before the long-range lens. Further, the device is provided with a II Μ container along the optical axis of the mirror. A plurality of reflecting surfaces are continuously arranged in the optical axis direction of the mirror. The discharge is stable, and the "bulb-shaped first _ 7 200913001 degree low-blinking and delicate fluorescent lamp disclosed in Patent Document 7 is disclosed. As shown in Fig. 12(c), the cylindrical outer side surrounding portion has a closed top. The inner side portion of the tubular shape has a sealed top portion and a peripheral side portion, and is housed inside the outer surrounding portion. Further, a space is formed between each of the top portion and the peripheral side portion. The annular portion 5 is hermetically connected. The outer side enclosing portion and the inner side enclosing portion form a cap-shaped discharge space inside. The translucent discharge vessel is composed of an outer surrounding portion, an inner surrounding portion, and an annular portion. Further, the pair of electrodes are disposed in the light transmissive portion. The top of the discharge vessel and the outer surface of the peripheral portion are formed. The discharge conductor forming the excimer is sealed in the light-transmitting discharge vessel, and the phosphor can be excited by the ultraviolet 10 external line discharged through the dielectric barrier discharge. Patent Document 8 discloses The "excimer lamp" is capable of illuminating a narrow field with high-brightness excimer light without using a lens for collecting ultraviolet rays. As shown in Fig. 12(d), the discharge vessel composed of a dielectric body includes a bowl shape and a window portion. The outer peripheral mask of the bowl has an electrode. Further, the lamp 15 has another electrode that penetrates the bowl and protrudes into the discharge vessel. The discharge capacitor is internally sealed with excimer light generating gas. Excimer light can be emitted from the window by applying a high frequency voltage between the electrodes. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. [Patent Document 5] Japanese Laid-Open Patent Publication No. JP-A No. 2001- 019 516. C. The invention discloses the problem to be solved by the invention. However, the conventional dielectric barrier discharge lamp has the following problems. In the discharge lamp extending in the axial direction in the discharge region, the illuminance distribution in the axial direction is different, and the temperature difference in the axial direction of the discharge region is large, and the emission spectrum is uneven. In the discharge lamp in which a plurality of cylinders are combined as shown in Fig. 12(b), the discharge is not uniform and the light emission in the corner portion is weak. Discharge with uneven illuminance distribution The lamp must have a mirror with a complicated shape to uniformly illuminate the irradiated object with ultraviolet rays. Therefore, the arrangement of the light source becomes expensive. Further, since the temperature difference between the upper portion 4 close to the mirror and the lower portion of the near-illuminated surface becomes larger, it is difficult to discharge uniformly in the axial direction of the lamp. The purpose of this month is to solve the aforementioned problems and to refine the discharge lamp 15 and to emit an isotropic ultraviolet light. Means for Solving the Problems In order to solve the above problems, the structure of the present invention includes: a discharge vessel of a dielectric body composed of a spherical portion and a tubular portion of a rotary expander; only provided on an outer surface of the spherical portion The outer electrode; only the inner side of the inner portion of the spherical portion is 20 poles, and the luminescent substance in the discharge space inside the spherical portion is sealed; the inner portion of the inner electrode is supplied with electricity (4); and the electric power is supplied to the outside of the f-pole. Further, the spherical portion is composed of the outer ball and the inner ball, and the inner ball and the outer ball are the same center, and the discharge space is formed in a spherical shell space between the outer ball and the inner ball, and the luminescent material is sealed in the discharge space. . Further, the tubular portion includes a knot 200913001 σ outside the outer ball and an inner tube bonded to the inner ball. Also & is a reservoir for storing luminescent substances. Alternatively, the package 3 of the present invention has a tubular device m which is spatially isolated from the ball 4 and is formed between the outer tube and the inner tube, and is a second luminescent substance which is different from the luminescent substance and is enclosed in the tube 5 chamber; An external electrode for activation provided on the outer surface of the outer tube; and an inner electrode for activation provided on the inner surface of the inner tube. Further, in the spherical portion, the g-shaped portion 4 is stretched toward the spherical portion in a straight line shape, and is connected to the spherical portion at the largest diameter portion. The inner portion of the tubular portion has an internal power supply body and is connected to the spherical portion. Further, the outer electrode is a mesh-shaped mesh electrode, and the opening ratio of the electrode of the mesh H) and the number of the openings or both are different from the bottom portion of the spherical portion. Further, the light source device includes means for holding and lighting the discharge lamp, and means for cooling the cooling medium to flow through the inner surface of the spherical portion of the discharge lamp and the tubular portion. Advantageous Effects of Invention According to the configuration described above, a delicate discharge lamp can be formed, and an ultraviolet ray such as an isotropic radiation can be radiated, and a circularly irradiated field can be efficiently and uniformly illuminated. The life of the discharge lamp can be extended by a reservoir connected to the discharge space. By starting the auxiliary discharge space, it is possible to easily start discharging even when a luminescent material which is difficult to start discharging is used. [Embodiment] Best Mode for Carrying Out the Invention Hereinafter, the best mode for carrying out the invention will be described in detail with reference to Figs. 1 to 1 . Embodiment 1 200913001 10 发发!:! Two 1 is discharged directly to the spherical portion of the tubular portion and supplied from the reservoir of the tubular portion. FIG. 1 is a discharge of the discharge of the embodiment i of the present invention, the discharge lamp 1 is a spherical portion and a tube, and a cross-sectional view. In the first figure, the container of the luminescent substance is enclosed inside. The surface of the discharge vessel 2, which forms the oxidation reduction, can also be appropriately embrittled and prevent the reaction of the glass with the enclosed gas. When the seal 1 = can also be filamentized _4. The spherical portion 3 has a spherical portion of the capacitance H. The tubular portion 4 is a straight tube portion of the discharge vessel. The inner ball 5 constitutes a spherical shell-shaped dielectric body which constitutes the inner wall of the spherical portion of the discharge material. The outer ball 6 constitutes a discharge vessel; a spherical shell dielectric of the outer wall of the spherical portion. The discharge lamp of the electric gas The inner tube 7 is a straight tubular dielectric constituting the inner wall of the tubular portion of the discharge vessel. The outer tube 8 is a straight tubular dielectric body constituting the outer wall of the tubular portion of the discharge vessel. The end portion 9 is connected to the annular portion 5 of the inner tube 7 and the outer tube 8 of the tubular portion of the discharge vessel. The ball-shaped space 43 is a spherical shell-shaped space surrounded by the outer surface of the inner ball 5, the inner surface of the outer ball 6, and the outer surface of the inner tube 7. The tubular space 44 is made up of an inner tube? The outer surface, the inner surface of the outer tube 8 and the inner surface of the end portion 9 are surrounded by a straight tubular space. The inner electrode 35 is disposed on the inner side of the spherical portion. The outer electrode % is a metal mesh electrode disposed outside the spherical portion. Further, the 20-side electrode other than the outer ball may be a structure in which various conductive films are imprinted on the surface of the ball to form a mesh, even if it is not an electrode made of metal. The power supply line 30 is a wire that supplies electric power to the inner electrode. Also, power can be supplied by using a cylinder, a cylinder, a film, or a plate instead of a wire. The inside of the discharge vessel 2 of the dielectric body is composed of a spherical portion 3 and an e-shape 44 connected to the spherical portion 200913001. The spherical portion 3 is a double tube composed of the outer ball 6 and the inner ball 5 which is the same center as the outer ball 6. The outer surface of the spherical portion 3 is provided with an outer electrode 36. The inner electrode 3 $ opposite to the outer electrode 36 is disposed inside the inner ball $. The spherical shell space between the outer ball 6 and the inner ball 5 is sealed with 5 luminescent substances. The tubular portion 4 is composed of a tube 8 coupled to the outer ball 6 and an inner tube 7 coupled to the inner ball 5. The tubular portion 4 is not provided with the outer electrode and the inner electrode ', and the power supply line 3G of the power supply side electrode 35 is inserted through the inside. The tubular portion 4 is a receptacle for storing a luminescent material. Fig. 2 is a conceptual diagram showing a cooling method of a discharge lamp. In Fig. 2, the cooling pipe 61 guides the cooling medium to the inside of the inner ball to cool the tube of the discharge lamp. Fig. 3 is a conceptual diagram showing a state in which a light source device with a mirror is mounted with a discharge lamp. In Fig. 3, the mirror 1〇1 is a parabolic concave mirror that reflects the illumination light in the same manner as the axisymmetric reflection surface. The object to be irradiated is a illuminating object such as a semiconductor wafer. The stage 103 is used to place a table of irradiated objects. The function and operation of the discharge lamp of the first embodiment of the present invention having the structure described above will be described. First, a method of forming a discharge vessel will be described with reference to Fig. 1 . When the outer diameter of the inner ball 5 is smaller than the inner diameter of the outer tube 8, that is, when the inner ball 5 can penetrate the outer tube 8, it is convenient to insert the inner tube 7 having the inner ball 5 formed at the front end into the front end to form the outer ball 6. The inside of the outer tube 8 and the inner tube 7 and the outer tube 8 are sealed 20 to form the end portion 9 to form a discharge vessel. When the outer diameter of the inner ball 5 is larger than the inner diameter of the outer tube 8, that is, when the inner ball 5 cannot penetrate the outer tube 8, the outer diameter of the outer ball 6 is easily divided into upper and lower sides to form an outer side. ball. Specifically, the inner tube 7 in which the inner side ball 5 is formed at the end is inserted into the outer tube 8 of the hemisphere 12 200913001 portion where the outer side ball is formed, and the inner tube 7 and the outer tube 8 are sealed to form the end portion 9. . Thereafter, the remaining hemispherical portion of the outer ball is sealed by glass processing. In the case of this method, the interval between the inner ball and the outer ball, that is, the discharge gap can be shortened, and even if the pressure of the enclosed gas rises, it is easier to start, and 5 strong radiation output can be obtained. The inner side surface of the inner ball 5 is provided with an inner electrode %. The inner electrode % can be formed, for example, by casting, applying a conductive paint, and then sintering. The inner electrode 35 is electrically connected to the outside through the power supply line 3〇. On the outer side of the outer ball 6, an outer electrode 36 made of a metal mesh opposed to the inner electrode 35 is provided. In the figure, the power supply line that supplies power to the outer electrode % is omitted. The discharge vessel is sealed with helium gas. Receiver, explain the action of the discharge lamp. By supplying electric power between the outer electrode 36 and the inner electrode 35, discharge can be performed through the spherical portion 3. In the spherical shell space 43, the inner ball 5 and the outer side ball 6 of the dielectric body are discharged between the inner electrode 35 and the outer electrode 36, and light is emitted by the luminescent material. The lighting action of the 15 lights is as follows. First, a high frequency voltage of about 20 kHz is applied between the inner electrode 35 and the outer electrode 36 to generate a dielectric barrier discharge. The excimer light (wavelength 172 nm) generated at this time is efficiently taken out through the outer electrode 36' of the metal mesh. Further, in the same structure, the helium gas may be enclosed, and the applied voltage is regarded as a high frequency of several MHz. 20 In this structure, excimer light (wavelength 172 nm) can also be emitted. Further, when the encapsulated material is regarded as mercury and argon gas for starting, high-frequency discharge of low-pressure mercury can be performed, and ultraviolet rays unique to mercury having a wavelength of 254 nm or 185 nm can be obtained. At this time, the coldest portion is cooled and controlled to the most appropriate temperature to maintain the mercury vapor pressure in the lighting in the most appropriate state. 13 200913001 The tubular space 44 has the function of cooling the light-emitting tube and the luminescent substance, and has a function as a reservoir of the luminescent substance. For example, in a lamp using bromine as a luminescent material, the amount of encapsulation may be reduced by the reaction of the enclosed bromine with the discharge vessel or by the adsorption of the discharge vessel. The countermeasure against the above phenomenon is to treat bromine as a solid and store it in a reservoir in the form of a compound. It can also be gasified by heating from the outside as needed. Thereby, even if the amount of encapsulation is reduced, bromine can be supplemented in the discharge space. The life of the lamp can be extended by having a reservoir. Next, the cooling method of the discharge lamp will be described with reference to Fig. 2 . A cooling pipe 61 is disposed inside the inner pipe 7 to perform cooling of the lamp. In this case, a cooling medium such as nitrogen and argon for cooling is introduced into the inner side of the inner side ball 5 by the cooling pipe 61. The cooling medium introduced into the inside of the inner ball flows out between the inner tube 7 and the cooling pipe to the outside. Further, it is also possible to simultaneously cool from the outside of the discharge vessel as needed. The other structure is the same as the foregoing example. Further, the cooling medium flowing to the inside of the inner ball 5 may be a liquid such as water. Further, when the cooling pipe 15 is a metal pipe and the cooling medium is water, since it has electrical conductivity, it can be used as a substitute for the inner electrode. In this case, it is not necessary to particularly provide an electrode on the inner surface of the inner ball 5. According to the above configuration, the temperature of the lamp does not easily rise, and the temperature of the discharge gas does not become high. Therefore, the input power can be increased and a strong radiation output can be obtained. 20 Next, a description will be given of a method of mounting the light source device with reference to Fig. 3. Fig. 3 is a cross section showing the state of use of the discharge lamp. In Fig. 3, the discharge lamp 1 is mounted at the center of the axisymmetric mirror 101. The discharge lamp 1 is illuminated by a dielectric barrier discharge or a capacity-coupled high-frequency discharge, and emits an isotropic ultraviolet light. The portion of the ultraviolet ray emitted from the discharge lamp 1 is directly irradiated onto the irradiated object 102 such as a semiconductor wafer placed on the stage 103. Further, the other portion is reflected by the mirror 101 and irradiated onto the object 102 to be irradiated. Thereby, the direct light is superimposed on the reflected light and uniformly irradiated onto the irradiated object 102. For example, when it is desired to irradiate xenon excimer light having a wavelength of 172 nm, there is no spherical type lamp for performing dielectric barrier discharge, and thus an irradiation apparatus having the above configuration cannot be constructed. With the present invention, illumination suitable for a circular illumination surface such as a semiconductor wafer can be performed. As described above, since the discharge lamp of the first embodiment of the present invention is configured to discharge directly to the spherical portion of the tubular portion and supply 10 discharge gas from the reservoir of the tubular portion, it is exquisite and long-lived. The discharge lamp emits an isotropic light and can illuminate the circularly illuminated area efficiently and equally. [Embodiment 2] In the second embodiment of the present invention, the steel wool as the inner electrode is placed in a discharge lamp which is directly coupled to the inside of the inner ball of the spherical portion of the straight pipe portion for discharging. 15 Fig. 4 is a cross-sectional view showing a discharge lamp of Embodiment 2 of the present invention. In Fig. 4, the inner electrode 45 is formed by collecting fine metal wires such as copper into a wool-like steel wool. The other structure is the same as that of the first embodiment. In the present embodiment, after the discharge vessel 2 is formed by glass processing, the steel wool is inserted into the inside of the inner side ball 5 from the inner side of the inner tube 7 of the discharge vessel 2. Since the steel wool has a high porosity and a relatively free deformation, it can be extended to the inner side of the inner ball 5 after the pressing. The steel wool is first electrically connected to the power supply line 30 as the inner electrode 45. The inner electrode 45 is electrically connected to the outside through the power supply line 3''. On the outer side of the outer ball 6, an outer electrode 36 made of a metal mesh opposite to the inner electrode 45 is provided. The ball-shaped continuous space 43 between the outer ball 6 and the inner ball 5 is sealed with helium gas. The operation of the discharge lamp is the same as that of the embodiment. 15 200913001 Embodiment 3 In the third embodiment of the present invention, the inner tube of the tubular portion and the inner ball directly coupled to the tubular portion = the request portion are made of metal, and are discharged at the spherical portion, and the reservoir of the ks portion is supplied. Discharge lamp for discharge gas. Figure 5 is a cross-sectional view showing a discharge lamp of Embodiment 3 of the present invention. In Fig. 5, the inner officer 17 is a metal straight pipe constituting the inner wall of the tubular portion of the discharge vessel. The inner portion 17 is not tubular but also rod-shaped. The outer tube 18 is a straight tubular dielectric body constituting the tubular outer wall of the discharge vessel. The end B is connected to the tubular portion of the discharge vessel and the annular portion of the outer officer 18. The spherical portion 13 is a double-layered ball composed of the outer balls 16 and 10 and the outer ball 16 being inner balls of the same center. The outer ball 16 constitutes a spherical shell dielectric of the outer wall of the spherical portion of the discharge vessel. The inner ball I5 is a metal ball that constitutes a spherical (four) wall of the discharge vessel. The outer electrode 46 is disposed on an electrode made of a metal mesh of the ball (four). The inner ball 15 is made of metal. The inner discharge ball 15 is connected to the discharge space, i.e., the inner ball 15 of the ball 15 a. This discharges between the outer electrodes 46 via the outer balls 16. The inner tube 17 can support the inner ball 15 and has the function of a power supply line. The end portion 19 of the outer tube 18 is dazzled to the inner tube π. When the glass ' is dissolved in the inner tube 17, the glass having a thermal expansion coefficient close to that of the inner tube η is first melted and the coefficient of thermal expansion is slightly closer to the glass of the quartz glass. By this 20 method, the end of the outer fl8 can be bribed to the inner tube 17. Still other configurations are the same as those in the first embodiment. The metal inner side ball 15 has a higher temperature rise than the glass, and the inside thereof passes through the metal inner moss 17' so that heat can be easily released. Since the inner ball 15 is made of metal and is spaced apart from the outer electrode 46 by the outer ball 16, an equal discharge can be generated by the property of the dielectric barrier discharge which is easily expanded by the discharge capacitor 16 200913001. Moreover, since the slope portion is only one half of the outer spherical portion, the voltage applied to the discharge space in the voltage applied between the electrodes becomes large regardless of the dielectric barrier discharge or the high-frequency discharge, and the efficiency can be improved. light. (5th embodiment) The fourth embodiment of the present invention is a discharge lamp which discharges directly to the spherical portion of the spheroid of the tubular portion and supplies the discharge gas from the reservoir of the tubular portion. Figure 6 is a cross-sectional view showing a discharge lamp of Embodiment 4 of the present invention. In Fig. 6, the spherical portion 13 is a portion of the ellipsoid of the discharge vessel. The tubular portion 14 is a straight tube portion of the capacitor. The inner ball 25 constitutes a dielectric body of the inner body of the rotating sugar of the discharge vessel. The outer ball 26 constitutes a dielectric body of a rotating capacitor of a discharge vessel. The inner electrode 55 is disposed on the spherical electrode of the spheroid of the spheroid, and the electrode on the side. The outer electrode % is disposed on the outer periphery of the spherical portion of the spheroid. The spherical shell space 53 is a spherical shell-like space surrounded by the outer surface of the inner side ball 25, the outer side ball %, and the inner side of the inner side. The spherical portion 13 is a flat spheroid. Further, the correction of the rotation ellipse system = overlaps the axis of the button portion 14, and the rotation is 20 as the _ axis. Even if it is not for the rotation of the round body, as long as the front end portion of the axisymmetric container. The light portion "and the axis of the light-emitting portion" may have other shapes, and the wear surface perpendicular to the axis may be elliptical. The inner ball of the ellipsoid is rotated and the inner side has an inner electrode 55. The outer side of the outer side of the ellipsoid is rotated by the side electrode 56. The interval between the inner electrode 55 and the outer electrode %, that is, the gap is substantially constant regardless of the location. Since the spherical portion is more spherical than the spherical shape, the furnace and the light are suitable for the shape of the broken object and the irradiation range. The 碡 碡 is composed of a mirror that combines the shape of the apex of the rotating ellipsoid, and the mirror is combined with (4) (4) and the narrow (four) is 4 (four) shots. In the case of a group, it is also preferable to have a spheroid which is long in the axial direction of the tubular portion. Embodiment 5 ^ 'The embodiment 5 of the present invention is a portion of the spherical portion directly coupled to the tubular portion, and the tree portion is guessed, and the discharge lamp of the discharge gas is supplied from the reservoir of the recording portion. Figure 7 is a cross-sectional view of a discharge lamp according to Embodiment 5 of the present invention. In the top portion, the tubular portion 14 is a straight tube portion of a discharge vessel. The tubular space M is composed of an inner portion, an inner surface and an end portion of the outer tube 8. The straight tubular space enclosed by the inside of the 9th. The pushing member 62 is a member of the inner tube. A hole through which the illuminating material passes through the fine system. Further, since the other structure is the same as that of the discharge lamp shown in the fourth embodiment, the description of the substantially same portions will be omitted. A support member & is provided at the boundary between the tubular space 54 and the spherical shell-shaped space 43. In the case of the discharge vessel shown in Embodiment 1, the inner wall composed of the inner ball 5 and the inner tube 7 and the outer ball 6 and the outer The outer wall of the tube 8 is connected only through the end portion 9. Therefore, the stress is concentrated on the end portion 9, and the discharge vessel is damaged. Therefore, the present embodiment is provided with the support member 62. Since the inner tube 7 is supported by the outer tube 8, the damage of the discharge vessel can be prevented. Further, this embodiment is provided with a through-hole 63 to have the function of a reservoir. The position at which the support member 62 is disposed may not be the boundary between the spherical shell space 43 and the tubular space 54, and the support member 62 may be provided in the tubular space 54 near the end portion 9. Even if the branch member 18 200913001 Z is not connected, it is only required to move 7 in the axial direction of the cutting member & Cutting member & : If it does not react with the seal of the discharge lamp, it may be made of quartz. Further functions and operations and embodiments of the present embodiment! the same. [Embodiment 6] In the sixth embodiment of the present invention, the discharge is started in a tubular space which is directly separated from the spherical shell space of the spherical portion of the tubular portion and sealed with the luminescent substance for activation, and the discharge is performed in a desired manner. Discharge lamp. Figure 8 is a cross-sectional view showing a discharge lamp of Embodiment 6 of the present invention. In the eighth (7) diagram, the starting inner electrode 37 is an inner electrode for starting discharge in the tubular discharge space. The starter outer electrode 38 is an outer electrode for starting discharge in the tubular discharge space. The tubular discharge space is a space for performing discharge for starting. The start assist window 64 is for illuminating the window of the spherical shell space by the ultraviolet rays of the tubular discharge space 41. Further, since the other configuration is the same as that of the discharge lamp of the embodiment 15, the description of the substantially same portions will be omitted. The discharge space is divided into a tubular discharge space 41 and a spherical shell-shaped floating space 43 via a disk-shaped start assist window 64. The inner side electrode 37 for starting is provided inside the inner tube 7. The outer side electrode 38 for activation is provided on the outer side of the outer tube 8. The tubular discharge space "can be individually illuminated with the spherical shell space 43. A helium gas having a high pressure of 2 Torr is enclosed in the spherical shell space 43 to generate a quasi-molecular light having a wavelength of 172 nm which is originally necessary. On the other hand, the tubular discharge The space 41 is filled with a mixed gas of argon and argon of several hundred Pa, and the discharge is easily started. When the lighting is started, a high-frequency voltage is applied to the electrode pair of the starting inner electrode 37 and the starting outer electrode 38 of the tubular portion. A high-frequency discharge is generated in the tubular discharge space 41, and an ultraviolet 19 200913001 line is generated. Then, a high-frequency voltage is applied to the electrode pair of the inner electrode 35 and the outer electrode 36 of the spherical shell space 43. Since it is generated from the tubular discharge space 41 Since the ultraviolet ray is irradiated to the spherical shell-shaped space 43 through the activation assist window 64, the discharge can be easily started regardless of the high sealing pressure of the spherical shell-shaped space 43. Further, the other functions and operations of the present embodiment are the same as those in the first embodiment. Example 7 Embodiment 7 of the present invention is a discharge lamp which is directly coupled to a spherical portion of a tubular portion and discharges without a reservoir. Fig. 9 is a cross section of a discharge lamp of Embodiment 7 of the present invention. Fig. 9 shows that the inner tube 27 is a straight tubular dielectric body constituting the tubular portion of the discharge vessel. The other structure is the same as that of the discharge lamp shown in the first embodiment except that the outer tube is not provided. Therefore, the description of the substantially identical portions is omitted. Embodiment 8 15 20 The eighth embodiment of the present invention is a discharge lamp that discharges a spherical portion of a rotating ellipsoid having a tubular portion and having an outer electrode. On the other hand, the outer electrode system has a ratio of opening ratio or opening σ to a mesh having a different bottom portion from the circumferential portion. Fig. 10(a) is a cross-sectional view showing a discharge lamp of Embodiment 8 of the present invention. Section 1(b) is a bottom view of the illuminated side of the underside of the lG(a)®. In the first pass, the spherical portion 13 is a portion of the ellipsoid of the discharge vessel. The tubular portion 14 is a straight g of the discharge valley. The inner ball 25 and the dielectric body side ball 26 constituting the inner wall of the rotary expansion of the discharge vessel constitute a dielectric body of the outer wall of the ellipsoid of the discharge vessel. The inner electrode 65 is disposed on the inner side of the spherical portion of the spheroid. The outer electrode 66 is disposed on the outer side of the spherical portion of the spheroid. The spherical shell space 53 is a spherical shell-like space of a rotating body surrounded by the outer surface of the inner ball 25, the inner surface of the outer ball 20 200913001 26, and the outer surface of the inner tube 7. The spherical portion U is a flat spheroid. Further, the short axis weight 4 of the _= system ellipse is cotton in the tubular portion 14, and is called the __ axis and is rotated. Even if it is not a spheroid, the front end portion 10 of each of the axes has a light-emitting portion, and the axis of the light-emitting portion is symmetrical, and may have another shape, or may have an elliptical cross section perpendicular to the axis. The tubular portion 14 has a flared shape that opens toward the spherical portion 13. The tubular portion 14 is flared to open the largest 咅/connecting spherical portion 13. The reason why the tubular portion 14 is formed into a lobed shape is as follows. If the boundary between the tubular portion and the spherical portion is a right angle, the stress concentrates on the boundary portion, and the capacitance may be damaged. If the tubular portion is opened in a meandering shape, the tubular portion and the spherical portion are smoothly connected by the boundary portion, and the stress concentration is prevented from being formed at the boundary portion. Therefore, damage to the discharge vessel due to long-term use can be prevented.
旋轉橢圓體之内側球25的内側具有内側電極65。旋轉 15橢圓體之外側球26的外側具有外側電極66。内側電極65與 外側電極66的間隔，即，放電間隙不論在任何場所皆大致 一定。外側電極66係開口率隨著從燈之照射面的圓周部利 靠近底部49而變大的網狀電極。因此，相較於底部的放 電集中於圓周部側48,因此圓周部側48之放射照度變言。 20又，圓周部48較底部49距離被照射物面較遠，因此在被日尸 射物面上照度分布較接近均等。 所謂的開口率係指電極部與開口部之總面積中開口部 76面積所占之比例。若開口率越大的話，電極部與開口邛 之和令開口部76所佔之比例則越大。若開口率越小的节， 21 200913001 電極部與開口部之和中電極部86所佔之比例則越大。若開 口率過大，放電部分則會變小，照度亦會降低。又，即使 開口率過小，由於電極部會遮住放電的光，因此照度仍會 降低。故，必須求出並設定開口率之最適當的值。又，開 5 口率之最適當的值亦因開口數而不同，即，在1個大開口與 2個小開口的情況下，即使開口率相同，照度仍不同。因此， 即使使電極全體之開口率一定，藉由減少底部附近之開口 數，並少於圓周部附近，仍可提高圓周部之照度，並較底 部高。藉由此方法，可使被照射物面上之照度分布較接近 10 均等。又，藉由於底部附近與圓周部附近改變開口數與開 口率兩者，亦可使被照射物面上之照度分布均等。 產業上利用之可能性 本發明之放電燈最適合作為當作產業用之紫外線光源 的低壓水銀燈或準分子燈。 15 【圖式簡單說明】 第1圖係本發明實施例1之放電燈的截面圖。 第2圖係顯示本發明實施例1之放電燈之冷卻方法的截 面圖。 第3圖係顯示本發明實施例1之放電燈之使用狀態的截 20 面圖。 第4圖係本發明實施例2之放電燈的截面圖。 第5圖係本發明實施例3之放電燈的截面圖。 第6圖係本發明實施例4之放電燈的截面圖。 第7圖係本發明實施例5之放電燈的截面圖。 22 200913001 · 第8圖係本發明實施例6之放電燈的截面圖。 第9圖係本發明實施例7之放電燈的截面圖。 第10(a)〜(b)圖係本發明實施例8之放電燈的截面圖及 底視圖。 5 第11(a)〜(d)圖係習知放電燈之概念圖。 第12(a)〜(d)圖係習知放電燈之概念圖。 【主要元件符號說明】 1...放電燈 41...管狀放電空間 2...放電容器 43,53...球殼狀空間 3，13...球狀部 44,54…管狀空間 4,14...管狀部 48...圓周部 5,15,25...内側球 49...底部 6,16,26...外側球 61...冷卻管 7，17,27.·.内管 62...支撐構件 8，18,...外管 63…貫穿孔 9,19...端部 64...啟動輔助窗 30...供電線 76...開口部 35,45,55,65· ·.内側電極 86...電極部 36,46,56,66...外側電極 101...反射鏡 37...啟動用内側電極 102…被照射物 38...啟動用外側電極 103...台 23The inner side of the inner ball 25 of the spheroid has an inner electrode 65. The outer side of the outer side ball 26 of the spheroid 15 is rotated to have an outer electrode 66. The interval between the inner electrode 65 and the outer electrode 66, that is, the discharge gap is substantially constant at any place. The outer electrode 66 is a mesh electrode whose opening ratio becomes larger as it approaches the bottom portion 49 from the circumferential portion of the irradiation surface of the lamp. Therefore, the discharge compared to the bottom is concentrated on the circumferential side 48, so that the irradiance of the circumferential side 48 is changed. Further, the circumferential portion 48 is farther from the object surface than the bottom portion 49, so that the illuminance distribution on the corpse surface is relatively close. The aperture ratio refers to the ratio of the area of the opening 76 in the total area of the electrode portion and the opening portion. If the aperture ratio is larger, the ratio of the electrode portion to the opening 令 increases the ratio of the opening portion 76. If the aperture ratio is smaller, the ratio of the electrode portion 86 in the sum of the electrode portion and the opening portion is larger as the ratio of the electrode portion to the opening portion is larger. If the opening ratio is too large, the discharge portion will become smaller and the illumination will be lowered. Further, even if the aperture ratio is too small, the illuminance is lowered because the electrode portion blocks the discharged light. Therefore, it is necessary to determine and set the optimum value of the aperture ratio. Further, the most appropriate value for the rate of opening is also different depending on the number of openings, that is, in the case of one large opening and two small openings, the illuminance is different even if the aperture ratio is the same. Therefore, even if the aperture ratio of the entire electrode is made constant, the illuminance of the circumferential portion can be improved and the height is higher than the bottom portion by reducing the number of openings near the bottom portion and less than the vicinity of the circumferential portion. By this method, the illuminance distribution on the surface of the object to be illuminated can be made closer to 10 equal. Further, by changing both the number of openings and the opening ratio in the vicinity of the bottom portion and the vicinity of the circumferential portion, the illuminance distribution on the surface of the object to be irradiated can be made uniform. Industrial Applicability The discharge lamp of the present invention is most suitable as a low-pressure mercury lamp or an excimer lamp which is used as an ultraviolet light source for industrial use. 15 [Brief Description of the Drawings] Fig. 1 is a cross-sectional view showing a discharge lamp of Embodiment 1 of the present invention. Fig. 2 is a cross-sectional view showing a method of cooling a discharge lamp according to Embodiment 1 of the present invention. Fig. 3 is a cross-sectional view showing the state of use of the discharge lamp of the first embodiment of the present invention. Figure 4 is a cross-sectional view showing a discharge lamp of Embodiment 2 of the present invention. Figure 5 is a cross-sectional view showing a discharge lamp of Embodiment 3 of the present invention. Figure 6 is a cross-sectional view showing a discharge lamp of Embodiment 4 of the present invention. Figure 7 is a cross-sectional view showing a discharge lamp of Embodiment 5 of the present invention. 22 200913001 - Fig. 8 is a cross-sectional view showing a discharge lamp of Embodiment 6 of the present invention. Figure 9 is a cross-sectional view showing a discharge lamp of Embodiment 7 of the present invention. 10(a) to (b) are a cross-sectional view and a bottom view of a discharge lamp in accordance with a eighth embodiment of the present invention. 5 Figures 11(a) to (d) are conceptual diagrams of conventional discharge lamps. Figures 12(a) to (d) are conceptual diagrams of conventional discharge lamps. [Description of main component symbols] 1...Discharge lamp 41...Tubular discharge space 2...Discharge capacitors 43,53...Spherical shell space 3,13...Sphere portion 44,54...Tubular space 4, 14... tubular portion 48... circumferential portion 5, 15, 25... inner ball 49... bottom 6, 16, 26... outer ball 61... cooling tube 7, 17, 27 . . . inner tube 62... support member 8, 18, ... outer tube 63... through hole 9, 19... end 64... activation auxiliary window 30... power supply line 76... opening 35, 45, 55, 65 · inner electrode 86 ... electrode portion 36, 46, 56, 66 ... outer electrode 101 ... mirror 37 ... starting inner electrode 102 ... irradiated object 38...Starting outer electrode 103...table 23