KR100702726B1 - 플라즈마 에칭방법 및 플라즈마 처리장치 - Google Patents

플라즈마 에칭방법 및 플라즈마 처리장치 Download PDF

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Publication number
KR100702726B1
KR100702726B1 KR1020040057249A KR20040057249A KR100702726B1 KR 100702726 B1 KR100702726 B1 KR 100702726B1 KR 1020040057249 A KR1020040057249 A KR 1020040057249A KR 20040057249 A KR20040057249 A KR 20040057249A KR 100702726 B1 KR100702726 B1 KR 100702726B1
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KR
South Korea
Prior art keywords
high frequency
plasma
mhz
lower electrode
etching
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Expired - Lifetime
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KR1020040057249A
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English (en)
Korean (ko)
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KR20050016012A (ko
Inventor
사토요시츠토무
Original Assignee
동경 엘렉트론 주식회사
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Application filed by 동경 엘렉트론 주식회사 filed Critical 동경 엘렉트론 주식회사
Publication of KR20050016012A publication Critical patent/KR20050016012A/ko
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/26—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials
    • H10P50/264—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials by chemical means
    • H10P50/266—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials by chemical means by vapour etching only
    • H10P50/267—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials by chemical means by vapour etching only using plasmas
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
    • H01J37/32155—Frequency modulation
    • H01J37/32165—Plural frequencies
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
  • ing And Chemical Polishing (AREA)
KR1020040057249A 2003-08-01 2004-07-22 플라즈마 에칭방법 및 플라즈마 처리장치 Expired - Lifetime KR100702726B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2003-00285125 2003-08-01
JP2003285125A JP3905870B2 (ja) 2003-08-01 2003-08-01 プラズマ処理装置

Publications (2)

Publication Number Publication Date
KR20050016012A KR20050016012A (ko) 2005-02-21
KR100702726B1 true KR100702726B1 (ko) 2007-04-03

Family

ID=34364864

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020040057249A Expired - Lifetime KR100702726B1 (ko) 2003-08-01 2004-07-22 플라즈마 에칭방법 및 플라즈마 처리장치

Country Status (4)

Country Link
JP (1) JP3905870B2 (https=)
KR (1) KR100702726B1 (https=)
CN (1) CN100477104C (https=)
TW (1) TW200507104A (https=)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7879185B2 (en) * 2003-12-18 2011-02-01 Applied Materials, Inc. Dual frequency RF match
JP4550507B2 (ja) * 2004-07-26 2010-09-22 株式会社日立ハイテクノロジーズ プラズマ処理装置
JP4515950B2 (ja) * 2005-03-31 2010-08-04 東京エレクトロン株式会社 プラズマ処理装置、プラズマ処理方法およびコンピュータ記憶媒体
CN100367829C (zh) * 2005-12-08 2008-02-06 北京北方微电子基地设备工艺研究中心有限责任公司 一种等离子体激励方法
JP5031252B2 (ja) * 2006-03-30 2012-09-19 東京エレクトロン株式会社 プラズマ処理装置
CN101207034B (zh) * 2006-12-20 2010-05-19 北京北方微电子基地设备工艺研究中心有限责任公司 腔室上盖及包含该上盖的反应腔室
US20080197015A1 (en) * 2007-02-16 2008-08-21 Terry Bluck Multiple-magnetron sputtering source with plasma confinement
US9536711B2 (en) * 2007-03-30 2017-01-03 Lam Research Corporation Method and apparatus for DC voltage control on RF-powered electrode
US8450635B2 (en) * 2007-03-30 2013-05-28 Lam Research Corporation Method and apparatus for inducing DC voltage on wafer-facing electrode
JP4905304B2 (ja) * 2007-09-10 2012-03-28 東京エレクトロン株式会社 プラズマ処理装置、プラズマ処理方法及び記憶媒体
JP5474291B2 (ja) 2007-11-05 2014-04-16 株式会社アルバック アッシング装置
JP5319150B2 (ja) * 2008-03-31 2013-10-16 東京エレクトロン株式会社 プラズマ処理装置及びプラズマ処理方法及びコンピュータ読み取り可能な記憶媒体
CN102438389B (zh) 2010-09-29 2013-06-05 中微半导体设备(上海)有限公司 单一匹配网络、其构建方法和该匹配网络射频功率源系统
CN102694525B (zh) * 2011-03-23 2015-12-02 北京北方微电子基地设备工艺研究中心有限责任公司 双频滤波装置及其处理方法和半导体设备
US8420545B2 (en) * 2011-05-23 2013-04-16 Nanya Technology Corporation Plasma etching method and plasma etching apparatus for preparing high-aspect-ratio structures
CN103187943B (zh) * 2011-12-28 2017-02-08 中微半导体设备(上海)有限公司 一种用于静电吸盘的射频滤波器
JP6785101B2 (ja) * 2016-09-09 2020-11-18 東京エレクトロン株式会社 プラズマエッチング方法
US10410836B2 (en) * 2017-02-22 2019-09-10 Lam Research Corporation Systems and methods for tuning to reduce reflected power in multiple states
US10991591B2 (en) * 2018-01-29 2021-04-27 Ulvac, Inc. Reactive ion etching apparatus
KR102223875B1 (ko) * 2019-10-30 2021-03-05 주식회사 뉴파워 프라즈마 다중 주파수를 사용하는 건식 식각 장비를 위한 고주파 전원 장치

Also Published As

Publication number Publication date
TW200507104A (en) 2005-02-16
TWI311782B (https=) 2009-07-01
JP3905870B2 (ja) 2007-04-18
KR20050016012A (ko) 2005-02-21
CN1581445A (zh) 2005-02-16
JP2005056997A (ja) 2005-03-03
CN100477104C (zh) 2009-04-08

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