KR100673399B1 - 진공배기계용 다이어프램 밸브 - Google Patents

진공배기계용 다이어프램 밸브 Download PDF

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Publication number
KR100673399B1
KR100673399B1 KR1020057013029A KR20057013029A KR100673399B1 KR 100673399 B1 KR100673399 B1 KR 100673399B1 KR 1020057013029 A KR1020057013029 A KR 1020057013029A KR 20057013029 A KR20057013029 A KR 20057013029A KR 100673399 B1 KR100673399 B1 KR 100673399B1
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KR
South Korea
Prior art keywords
diaphragm
valve seat
vacuum exhaust
valve
exhaust machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR1020057013029A
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English (en)
Korean (ko)
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KR20050095611A (ko
Inventor
다다히로 오미
노부카즈 이케다
미치오 야마지
마사후미 키타노
아키히로 모리모토
Original Assignee
가부시키가이샤 후지킨
다다히로 오미
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Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=32905174&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=KR100673399(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by 가부시키가이샤 후지킨, 다다히로 오미 filed Critical 가부시키가이샤 후지킨
Publication of KR20050095611A publication Critical patent/KR20050095611A/ko
Application granted granted Critical
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Expired - Fee Related legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K25/00—Details relating to contact between valve members and seats
    • F16K25/005—Particular materials for seats or closure elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K25/00—Details relating to contact between valve members and seats
    • F16K25/04—Arrangements for preventing erosion, not otherwise provided for
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Valves (AREA)
  • Reciprocating Pumps (AREA)
  • Fluid-Driven Valves (AREA)
  • Valve Housings (AREA)
KR1020057013029A 2003-02-18 2004-02-09 진공배기계용 다이어프램 밸브 Expired - Fee Related KR100673399B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2003-00039541 2003-02-18
JP2003039541A JP4119275B2 (ja) 2003-02-18 2003-02-18 真空排気系用のダイヤフラム弁

Publications (2)

Publication Number Publication Date
KR20050095611A KR20050095611A (ko) 2005-09-29
KR100673399B1 true KR100673399B1 (ko) 2007-01-24

Family

ID=32905174

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020057013029A Expired - Fee Related KR100673399B1 (ko) 2003-02-18 2004-02-09 진공배기계용 다이어프램 밸브

Country Status (9)

Country Link
US (1) US7416165B2 (enExample)
EP (1) EP1596107B1 (enExample)
JP (1) JP4119275B2 (enExample)
KR (1) KR100673399B1 (enExample)
CN (1) CN100376829C (enExample)
DE (1) DE602004015250D1 (enExample)
IL (1) IL169383A (enExample)
TW (1) TWI285716B (enExample)
WO (1) WO2004074722A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101088679B1 (ko) 2010-05-10 2011-12-01 주식회사 원익아이피에스 기판 처리장치 및 기판 처리방법
KR101727624B1 (ko) 2015-05-14 2017-04-17 한국과학기술원 미세유체 밸브

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EP1794581A2 (en) 2004-09-15 2007-06-13 Microchip Biotechnologies, Inc. Microfluidic devices
JP2006153230A (ja) * 2004-12-01 2006-06-15 Neriki:Kk 流体制御器用ダイヤフラム及びこれを用いたバルブ装置
WO2006083783A1 (en) * 2005-01-31 2006-08-10 Swagelok Company Flow control device
EP1979079A4 (en) 2006-02-03 2012-11-28 Integenx Inc MICROFLUIDIC DEVICES
CN101715483A (zh) 2007-02-05 2010-05-26 微芯片生物工艺学股份有限公司 微流体和纳米流体装置、系统和应用
US8434793B2 (en) * 2007-07-19 2013-05-07 Swagelok Company Coated seals
US20090114873A1 (en) * 2007-11-05 2009-05-07 Richard Anagnos Diaphragm for use with control valves
WO2009108260A2 (en) 2008-01-22 2009-09-03 Microchip Biotechnologies, Inc. Universal sample preparation system and use in an integrated analysis system
JP5319942B2 (ja) * 2008-03-18 2013-10-16 大日本スクリーン製造株式会社 ダイヤフラムバルブおよびこれを備えた基板処理装置
US8672532B2 (en) 2008-12-31 2014-03-18 Integenx Inc. Microfluidic methods
CN102459565A (zh) 2009-06-02 2012-05-16 尹特根埃克斯有限公司 具有隔膜阀的流控设备
CA2766218A1 (en) * 2009-07-27 2011-02-03 Merck Sharp & Dohme Corp. Diaphragm valve with improved sealing performance and leak detection
US8584703B2 (en) * 2009-12-01 2013-11-19 Integenx Inc. Device with diaphragm valve
US8512538B2 (en) 2010-05-28 2013-08-20 Integenx Inc. Capillary electrophoresis device
WO2012024658A2 (en) 2010-08-20 2012-02-23 IntegenX, Inc. Integrated analysis system
EP2606242A4 (en) 2010-08-20 2016-07-20 Integenx Inc MICROFLUIDIC DEVICES WITH MECHANICALLY SEALED MEMBRANE VALVES
JP5331180B2 (ja) * 2011-09-22 2013-10-30 株式会社フジキン ダイレクトタッチ型メタルダイヤフラム弁のバルブストローク調整方法
JP5802532B2 (ja) * 2011-12-05 2015-10-28 株式会社フジキン ダイヤフラム弁およびダイヤフラム弁用シートホルダユニット
JP2013119877A (ja) * 2011-12-06 2013-06-17 Fujikin Inc ダイヤフラム弁
JP5964139B2 (ja) * 2012-05-30 2016-08-03 株式会社フジキン ダイヤフラム及びダイヤフラム弁
JP5999252B2 (ja) * 2013-03-11 2016-09-28 株式会社島津製作所 流路切換バルブ
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP6072648B2 (ja) * 2013-08-12 2017-02-01 株式会社フジキン ダイヤフラム弁
JP6530929B2 (ja) * 2015-02-27 2019-06-12 株式会社フジキン 流体制御器
JP6516696B2 (ja) * 2016-03-01 2019-05-22 株式会社鷺宮製作所 容量調整弁
JP6307557B2 (ja) * 2016-06-17 2018-04-04 Ckd株式会社 流体制御弁
FR3054609A1 (fr) * 2016-07-29 2018-02-02 Plastic Omnium Advanced Innovation & Res Regulateur de debit de ventilation pour un reservoir pressurise de vehicule.
JP6914044B2 (ja) * 2017-01-31 2021-08-04 株式会社キッツエスシーティー ダイヤフラムバルブ
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
KR101905104B1 (ko) * 2017-03-09 2018-10-11 (주)씨에스이 비금속 다이어프램을 구비한 에어 펌프
JP6929098B2 (ja) * 2017-03-30 2021-09-01 株式会社キッツエスシーティー メタルダイヤフラムバルブ
JP7045839B2 (ja) * 2017-12-08 2022-04-01 株式会社キッツエスシーティー 流体制御バルブ
JP6945859B2 (ja) * 2018-06-04 2021-10-06 株式会社不二工機 流路切換弁
CN109667955B (zh) * 2018-12-13 2024-03-29 江西增鑫科技股份有限公司 一种隔膜阀及采用该隔膜阀输送流体的方法
WO2020250316A1 (ja) * 2019-06-11 2020-12-17 株式会社島津製作所 背圧制御弁
US11976748B2 (en) * 2019-08-30 2024-05-07 Fujikin Incorporated Diaphragm valve
JP2021071129A (ja) * 2019-10-29 2021-05-06 株式会社フジキン シートおよびバルブ
JP7401896B2 (ja) * 2019-10-29 2023-12-20 株式会社フジキン バルブ
WO2021192753A1 (ja) * 2020-03-26 2021-09-30 株式会社フジキン バルブ装置
JP7761379B2 (ja) * 2020-09-14 2025-10-28 株式会社堀場エステック 流体制御弁及び流体制御装置
US12398819B2 (en) * 2021-04-01 2025-08-26 Fujikin Incorporated Controller and vaporization supply device

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JPS62107216A (ja) * 1985-11-05 1987-05-18 Ngk Insulators Ltd バルブシートインサート及びその製造法並びにそれを使用してなるシリンダーヘッド
DE3546117C1 (en) * 1985-12-24 1987-02-12 Resistoflex Gmbh Two-layer diaphragm for a diaphragm valve
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101088679B1 (ko) 2010-05-10 2011-12-01 주식회사 원익아이피에스 기판 처리장치 및 기판 처리방법
KR101727624B1 (ko) 2015-05-14 2017-04-17 한국과학기술원 미세유체 밸브

Also Published As

Publication number Publication date
IL169383A (en) 2008-03-20
DE602004015250D1 (enExample) 2008-09-04
US7416165B2 (en) 2008-08-26
WO2004074722A1 (ja) 2004-09-02
JP2004263576A (ja) 2004-09-24
EP1596107A4 (en) 2006-05-17
EP1596107A1 (en) 2005-11-16
US20060175573A1 (en) 2006-08-10
KR20050095611A (ko) 2005-09-29
TW200422547A (en) 2004-11-01
JP4119275B2 (ja) 2008-07-16
CN100376829C (zh) 2008-03-26
TWI285716B (en) 2007-08-21
EP1596107B1 (en) 2008-07-23
CN1751196A (zh) 2006-03-22

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