JP6530929B2 - 流体制御器 - Google Patents
流体制御器 Download PDFInfo
- Publication number
- JP6530929B2 JP6530929B2 JP2015039181A JP2015039181A JP6530929B2 JP 6530929 B2 JP6530929 B2 JP 6530929B2 JP 2015039181 A JP2015039181 A JP 2015039181A JP 2015039181 A JP2015039181 A JP 2015039181A JP 6530929 B2 JP6530929 B2 JP 6530929B2
- Authority
- JP
- Japan
- Prior art keywords
- stem
- diaphragm
- amount
- piston
- gap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000012530 fluid Substances 0.000 title claims description 37
- 230000002093 peripheral effect Effects 0.000 claims description 27
- 230000006835 compression Effects 0.000 description 6
- 238000007906 compression Methods 0.000 description 6
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- QXZUUHYBWMWJHK-UHFFFAOYSA-N [Co].[Ni] Chemical compound [Co].[Ni] QXZUUHYBWMWJHK-UHFFFAOYSA-N 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 229920002493 poly(chlorotrifluoroethylene) Polymers 0.000 description 1
- 239000005023 polychlorotrifluoroethylene (PCTFE) polymer Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
- F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K25/00—Details relating to contact between valve members and seats
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
- F16K27/0236—Diaphragm cut-off apparatus
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1225—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston with a plurality of pistons
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Fluid-Driven Valves (AREA)
- Lift Valve (AREA)
Description
(2):ボディ
(2a):流体流入通路
(2b):流体流出通路
(4):ケーシング
(6):ダイヤフラム
(7):ダイヤフラム押さえ
(8):ステム
(9)(10):ピストン
(13):駆動手段
(14):設定手段
(15):押えアダプタ
(28):フランジ部
Claims (2)
- 流体通路が設けられたボディと、ボディの上方に設けられたケーシングと、流体通路を開閉するダイヤフラムと、上昇または下降することによりダイヤフラムを開または閉方向に移動させるステムと、ステムの下端部に固定されたダイヤフラム押さえと、ダイヤフラム押さえの径方向外側に配されてボディに固定されてダイヤフラムの外周縁部を保持する押さえアダプターと、ステムと一体で上下移動するピストンと、ピストンを上下移動させる駆動手段とを備えている流体制御器において、
ダイヤフラム押さえの外周縁部の上面と押さえアダプターの内周縁部の下面との間を第1の隙間とし、前記第1の隙間によってダイヤフラム押さえの上方への移動量が設定されており、
ステムの下端部に設けられたフランジ部の下面と押さえアダプターの上面との間に、ステムの下方への移動量を設定するための第2の隙間が形成されている流体制御器。 - ステムとピストンとは互いにねじ合わされることで一体とされており、ステムとピストンとのねじ合わせ量を調整することによって、第1の隙間によって設定されるステムの上方への移動量よりも小さいステムの上方への移動量が設定可能である請求項1の流体制御器。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015039181A JP6530929B2 (ja) | 2015-02-27 | 2015-02-27 | 流体制御器 |
US15/300,401 US10371271B2 (en) | 2015-02-27 | 2016-02-05 | Fluid controller with diaphragm |
CN201680000963.9A CN106164549B (zh) | 2015-02-27 | 2016-02-05 | 流体控制器 |
PCT/JP2016/053478 WO2016136427A1 (ja) | 2015-02-27 | 2016-02-05 | 流体制御器 |
KR1020167027096A KR101907283B1 (ko) | 2015-02-27 | 2016-02-05 | 유체 제어기 |
SG11201607988SA SG11201607988SA (en) | 2015-02-27 | 2016-02-05 | Fluid controller |
TW105105779A TWI684721B (zh) | 2015-02-27 | 2016-02-26 | 流體控制器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015039181A JP6530929B2 (ja) | 2015-02-27 | 2015-02-27 | 流体制御器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016161022A JP2016161022A (ja) | 2016-09-05 |
JP6530929B2 true JP6530929B2 (ja) | 2019-06-12 |
Family
ID=56788561
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015039181A Active JP6530929B2 (ja) | 2015-02-27 | 2015-02-27 | 流体制御器 |
Country Status (7)
Country | Link |
---|---|
US (1) | US10371271B2 (ja) |
JP (1) | JP6530929B2 (ja) |
KR (1) | KR101907283B1 (ja) |
CN (1) | CN106164549B (ja) |
SG (1) | SG11201607988SA (ja) |
TW (1) | TWI684721B (ja) |
WO (1) | WO2016136427A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020044827A1 (ja) * | 2018-08-30 | 2020-03-05 | 株式会社フジキン | 流体制御機器 |
CN111936775A (zh) * | 2018-09-26 | 2020-11-13 | 株式会社富士金 | 隔膜阀 |
KR20220011700A (ko) * | 2019-06-27 | 2022-01-28 | 가부시키가이샤 후지킨 | 다이어프램 밸브 |
JP7348628B2 (ja) * | 2019-07-31 | 2023-09-21 | 株式会社フジキン | アクチュエータ及びそれを備えたエアオペレートバルブ |
WO2021019922A1 (ja) * | 2019-07-31 | 2021-02-04 | 株式会社フジキン | バルブ装置、流体制御装置及びバルブ装置の製造方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5112027A (en) * | 1989-06-21 | 1992-05-12 | Benkan Corporation | Metal diaphragm valve |
JPH0627551B2 (ja) * | 1989-08-19 | 1994-04-13 | 株式会社ベンカン | メタル‐メタル接触形ダイヤフラム弁 |
JP3287663B2 (ja) * | 1993-09-17 | 2002-06-04 | 清原 まさ子 | 制御器 |
US5413311A (en) * | 1994-03-01 | 1995-05-09 | Tescom Corporation | Gas valve |
JP2001021052A (ja) * | 1999-07-09 | 2001-01-26 | Tokyo Electron Ltd | ダイヤフラムバルブ |
JP2001317654A (ja) * | 2000-05-08 | 2001-11-16 | Smc Corp | シリンダー操作形切換弁 |
JP3502597B2 (ja) * | 2000-07-07 | 2004-03-02 | Smc株式会社 | 二方弁 |
JP4587419B2 (ja) * | 2000-11-16 | 2010-11-24 | 株式会社フジキン | メタルダイヤフラム弁 |
JP3553526B2 (ja) | 2001-06-27 | 2004-08-11 | 株式会社キッツエスシーティー | 可変流量バルブ |
JP4300345B2 (ja) * | 2002-09-02 | 2009-07-22 | 株式会社フジキン | 制御器 |
JP4119275B2 (ja) * | 2003-02-18 | 2008-07-16 | 忠弘 大見 | 真空排気系用のダイヤフラム弁 |
TWI324664B (en) * | 2004-02-10 | 2010-05-11 | Fujikin Kk | Fluid controller |
JP5138863B2 (ja) * | 2004-12-10 | 2013-02-06 | Ckd株式会社 | ダイアフラム弁 |
WO2006083783A1 (en) * | 2005-01-31 | 2006-08-10 | Swagelok Company | Flow control device |
JP5054904B2 (ja) * | 2005-08-30 | 2012-10-24 | 株式会社フジキン | ダイレクトタッチ型メタルダイヤフラム弁 |
US20090283160A1 (en) * | 2008-05-02 | 2009-11-19 | James Fishwick | Fluid flow control device and control circuit |
-
2015
- 2015-02-27 JP JP2015039181A patent/JP6530929B2/ja active Active
-
2016
- 2016-02-05 CN CN201680000963.9A patent/CN106164549B/zh not_active Expired - Fee Related
- 2016-02-05 KR KR1020167027096A patent/KR101907283B1/ko active IP Right Grant
- 2016-02-05 WO PCT/JP2016/053478 patent/WO2016136427A1/ja active Application Filing
- 2016-02-05 US US15/300,401 patent/US10371271B2/en active Active
- 2016-02-05 SG SG11201607988SA patent/SG11201607988SA/en unknown
- 2016-02-26 TW TW105105779A patent/TWI684721B/zh active
Also Published As
Publication number | Publication date |
---|---|
SG11201607988SA (en) | 2016-11-29 |
JP2016161022A (ja) | 2016-09-05 |
US10371271B2 (en) | 2019-08-06 |
WO2016136427A1 (ja) | 2016-09-01 |
US20170184206A1 (en) | 2017-06-29 |
KR101907283B1 (ko) | 2018-10-11 |
CN106164549A (zh) | 2016-11-23 |
TWI684721B (zh) | 2020-02-11 |
CN106164549B (zh) | 2018-09-14 |
TW201638513A (zh) | 2016-11-01 |
KR20160128392A (ko) | 2016-11-07 |
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