WO2013180150A2 - ダイヤフラム弁 - Google Patents
ダイヤフラム弁 Download PDFInfo
- Publication number
- WO2013180150A2 WO2013180150A2 PCT/JP2013/064841 JP2013064841W WO2013180150A2 WO 2013180150 A2 WO2013180150 A2 WO 2013180150A2 JP 2013064841 W JP2013064841 W JP 2013064841W WO 2013180150 A2 WO2013180150 A2 WO 2013180150A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- diaphragm
- cylindrical
- valve
- valve stem
- fluid passage
- Prior art date
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
- F16K17/02—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side
- F16K17/14—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side with fracturing member
- F16K17/16—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side with fracturing member with fracturing diaphragm ; Rupture discs
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K41/00—Spindle sealings
- F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
- F16K41/103—Spindle sealings with diaphragm, e.g. shaped as bellows or tube the diaphragm and the closure member being integrated in one member
Definitions
- This invention relates to a diaphragm valve, and more particularly to a diaphragm valve using a diaphragm made of synthetic resin such as PTFE.
- a diaphragm valve As a diaphragm valve, a body provided with a fluid passage, a seat detachably disposed on the periphery of the fluid passage formed in the body, and a disk-shaped diaphragm that opens and closes the fluid passage by being pressed and separated from the seat And a vertically moving means for vertically moving a diaphragm presser that presses the central portion of the diaphragm is known (Patent Document 1, etc.).
- Such a diaphragm has its outer peripheral edge fixed to the body to seal the opening of the upward recess provided in the body, and its central part can be elastically deformed with respect to the outer peripheral edge (moving up and down) It can be elastically deformed as the valve stem moves up and down and contributes to the opening and closing of the fluid passage.
- the diaphragm is made of, for example, a nickel alloy thin plate, and is formed in an inverted dish shape that is cut out in a circular shape and has a central portion bulged upward.
- the diaphragm may be made of a stainless steel thin plate or a laminate of a stainless steel thin plate and a nickel / cobalt alloy thin plate.
- a PTFE diaphragm is also known.
- the object of the present invention is the problem of the disk-shaped diaphragm, that is, the problem of large deformation and easy dust generation, the problem of large volume change of the fluid passage accompanying opening and closing, and the pressure receiving area of the diaphragm when the passage is closed is large
- An object of the present invention is to provide a diaphragm valve that can solve the above problem.
- the diaphragm valve according to the present invention has a body provided with a fluid passage, a casing provided above the body, a diaphragm that opens and closes the fluid passage, and moves the diaphragm in a closing or opening direction by moving up or down.
- the diaphragm is made of synthetic resin, a cylindrical portion that is fixed to the valve stem, a bottom wall portion that closes a lower end opening of the cylindrical portion, and a cylindrical portion
- the vertical cross-sectional shape of the axially intermediate portion of the cylindrical portion is radially outward, consisting of a flange portion provided at the upper end portion of the cylinder and a convex portion provided at the center portion of the bottom wall portion and facing the upper opening of the fluid passage. It is characterized by having a substantially arcuate shape.
- the diaphragm is not shaped like a disk as in the prior art, but has a substantially cylindrical shape with a bottom composed of a cylindrical portion with a flange portion and a bottom wall portion provided with a convex portion. Since the longitudinal cross-sectional shape of the axially intermediate portion of the cylindrical portion is a substantially arc shape protruding radially outward, the axially intermediate portion of the cylindrical portion can be easily elastically deformed (compressed) in the axial direction. Deformation).
- the deformation of the cylindrical portion is a deformation in a state in which the cylindrical shape is maintained, and the convex portion that closes the opening of the fluid passage does not deform, so compared to the disk-shaped diaphragm in which the central portion is deformed, Deformation can be reduced.
- the diaphragm can be obtained as a synthetic resin molded product using a mold or a processed product by machining.
- the synthetic resin is not particularly limited, and a fluororesin such as tetrafluoroethylene resin (PTFE) having high chemical resistance and high corrosion resistance is suitable.
- PTFE tetrafluoroethylene resin
- fluororesins other than PTFE tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA), tetrafluoroethylene-hexafluoropropylene copolymer (FEP), ethylene-tetrafluoroethylene copolymer ( ETFE) and vinylidene fluoride resin (PVDF).
- PFA tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer
- FEP tetrafluoroethylene-hexafluoropropylene copolymer
- ETFE ethylene-tetrafluoroethylene copolymer
- PVDF vinylidene fluoride resin
- a diaphragm is attached to the valve stem by providing a female threaded portion on the inner periphery of the lower part of the cylindrical portion of the diaphragm and screwing the female threaded portion to a male threaded portion provided on the outer periphery of the valve stem.
- the intermediate part in the axial direction of the cylindrical part is preferably thinner than the lower part of the cylindrical part.
- the diaphragm can be reliably moved along with the movement of the valve stem, and the amount of elastic deformation at the intermediate portion in the axial direction of the cylindrical portion of the diaphragm can be increased.
- the casing is provided with a cylindrical guide portion that guides the valve stem and receives the flange portion of the diaphragm that has moved upward, and an elastic member is provided between the lower end surface of the cylindrical guide portion and the upper surface of the flange portion of the diaphragm. Is preferably interposed.
- the cylindrical guide part that guides the valve stem also has a function of receiving the flange part of the diaphragm, so that the structure is simplified, and the lower end surface of the cylindrical guide part and the flange part of the diaphragm are simplified.
- the elastic member is interposed between the upper surface and the diaphragm made of synthetic resin is prevented from being damaged.
- the diaphragm valve may be a manual valve such as an open / close handle as the vertical movement means, or an automatic valve in which the vertical movement means is an appropriate actuator.
- the actuator is a fluid (air) It may be by pressure or by electromagnetic force.
- the movement direction of the valve stem (diaphragm axial direction) is referred to as the vertical direction, but this direction is for convenience. In actual mounting, the vertical direction is the vertical direction. It may be horizontal as well.
- the diaphragm valve of the present invention there is a problem with the disk-shaped diaphragm that the amount of deformation is large and dust is easily generated, the volume change of the fluid passage accompanying opening and closing is large, and the pressure receiving area of the diaphragm when the passage is closed is large. Can be eliminated.
- FIG. 1 is a longitudinal sectional view showing an embodiment of a diaphragm valve according to the present invention.
- FIG. 2 is an enlarged view of the outer peripheral surface of the diaphragm, showing a state in which the fluid passage is closed.
- FIG. 3 is an enlarged view of the outer peripheral surface of the diaphragm, showing a state in which the fluid passage is open.
- Diaphragm valve (2): Body, (2a): Fluid inflow passage, (2b): Fluid outflow passage, (4): Valve stem, (5): Diaphragm, (10): Disc spring (elastic) Member), (21): cylindrical part, (22): bottom wall part, (23): flange part, (24): convex part, (31): upper part, (32): lower part, (32a): female Threaded part, (33): Intermediate part (axially intermediate part), (34a): Male threaded part, (37): Cylindrical guide part
- FIG. 1 shows an embodiment of a diaphragm valve according to the present invention.
- a diaphragm valve (1) includes a body (2), a casing (3) mounted above the body (2), and a casing (3 ), The valve stem (4), which can be moved up and down, the diaphragm (5) fixed to the bottom of the valve stem (4), and the valve stem (4) at the upper end of the valve stem (4).
- a piston (6) provided in the cylinder (7), a cylinder chamber (7) provided in the upper part of the casing (3) for accommodating the piston (6) so as to move up and down, and a cap for closing the upper end opening of the casing (3) ( 8) and an adjuster (9) penetrating the central portion of the cap (8).
- the body (2) has a recess (11) that opens upward.
- the upper end opening of the fluid inflow passage (2a) that opens to the lower end is connected to the bottom surface of the recess (11), and the left end of the fluid outflow passage (2b) that opens to the right end is connected to the right side of the recess (11).
- the recess (11) of the body (2) includes an upper large-diameter portion (11a) and a lower small-diameter portion (11b) connected to the large-diameter portion (11a) via a step surface (11c).
- the diaphragm (5) is made of synthetic resin, and as shown in FIGS. 2 and 3, the cylindrical part (21) secured to the valve stem (4) and the lower end of the cylindrical part (21)
- the cylindrical part (21) of the diaphragm (5) includes a cylindrical upper part (31) connected to the lower side of the outward flange part (23) and a cylindrical lower part (32) connected to the upper side of the bottom wall part (22). ) And an intermediate part (33) between the upper part (31) and the lower part (32).
- the intermediate portion (33) has a vertical arc shape in a convex arc shape.
- the upper part (31) and the lower part (32) are fitted to the valve stem (4), and the inner peripheral surface of the intermediate part (33) is not in contact with the outer peripheral surface of the valve stem (4).
- the lower part (32) is formed thicker than the upper part (31) and the intermediate part (33).
- the valve stem (4) includes a small-diameter portion (34) on the distal end side, an intermediate-diameter portion (35) connected to the upper side of the small-diameter portion (34), and a large-diameter portion (36) connected to the upper side of the intermediate-diameter portion (35). And have.
- the piston (6) is integrated near the upper end of the large diameter part (36).
- the large-diameter portion (36) is inserted through a cylindrical guide portion (37) provided in the casing (3) so as to be vertically movable.
- a male screw portion (34a) is formed on the outer periphery of the small diameter portion (34).
- the lower end portion of the cylindrical guide portion (37) projects downward from the bottom surface of the bottom wall (3a) of the casing (3), and the lower end surface of the upper surface of the outward flange portion (23) of the diaphragm (5) It is made to catch.
- Two disc springs (elastic members) (10) are interposed between the lower end surface of the cylindrical guide portion (37) and the upper surface of the outward flange portion (23) of the diaphragm (5).
- the outward flange portion (23) of the diaphragm (5) and the plurality (two in this case) of the disc springs (10) are connected to the lower end surface of the cylindrical guide portion (37) and the recess (11) of the body (2). It is sandwiched between the step surface (11c) and cannot be moved in the vertical direction.
- the upper part (31) of the cylindrical part (21) of the diaphragm (5) is fitted to the intermediate diameter part (35) of the valve stem (4).
- This fitting is such that the upper part (31) of the cylindrical part (21) and the intermediate diameter part (35) of the valve stem (4) are relatively movable up and down.
- a female screw part (32a) is provided on the inner periphery of the lower part (32) of the cylindrical part (21) of the diaphragm (5), and the female screw part (32a) of the lower part (32) of the cylindrical part (21).
- the diaphragm (5) is attached to the valve stem (4) by being screwed onto the male thread portion (34a) of the small diameter portion (34) of the valve stem (4).
- the intermediate section (33) has a convex arc shape in the longitudinal section and is not in contact with the outer peripheral surface of the valve stem (4)
- the lower portion (32) of the cylindrical section (21) is a cylindrical section ( When it is moved in a direction approaching the upper part (31) of 21), it can be elastically deformed (compressed).
- an operation air introduction chamber (12) above the piston (6) and an operation air introduction chamber (13) below the piston (6) are formed in the cylinder chamber (7).
- the valve stem (4) By introducing operation air into the upper operation air introduction chamber (12), the valve stem (4) can be moved downward, and by introducing operation air into the lower operation air introduction chamber (13) The valve stem (4) can be moved upward.
- a pin (14) is provided on the bottom wall (3a) of the casing (3) to guide the vertical movement of the piston (6).
- a through hole (15) is provided at the center of the cap (8), and a female screw part (15a) is provided above the through hole (15).
- a male thread portion (9a) provided on the outer periphery of the adjuster (9) is screwed to the female thread portion (15a) of the through hole (15).
- the valve stem (4) When the valve stem (4) is moved upward, as shown in FIG. 3, the projecting portion (24) of the diaphragm (5) is disengaged from the upper end opening of the fluid inflow passage (2a). Become. In the open state, the valve stem (4) can be moved upward until it contacts the adjuster (9), and the diaphragm (5) has a female threaded portion (32a) at the lower portion (32) of the cylindrical portion (21). Since it is screwed together with the male thread part (34a) of the small diameter part (34) of the valve stem (4), it tries to move upward together with the valve stem (4).
- the outward flange portion (23) of the diaphragm (5) is sandwiched between the lower end surface of the cylindrical guide portion (37) and the step surface (11c) of the recess (11) of the body (2). Therefore, it cannot move up and down. That is, the upper part (31) of the cylindrical part (21) of the diaphragm (5) is moved upward without changing the position from the state of FIG.
- the intermediate portion (33) having a convex arc shape in the longitudinal section between the upper portion (31) and the lower portion (32) is elastically deformed.
- the deformation amount of the diaphragm (5) is very small. Since the diameter of the diaphragm (5) is smaller than that of the conventional disk-shaped diaphragm, the volume change can be made smaller than that of the disk-shaped diaphragm, even with the same stroke (axial deformation). The problem that the amount of deformation is large and dust is likely to be generated and the problem that the volume change of the fluid passage due to opening and closing is large are solved. Since the deformation amount is small, the durability of the diaphragm (5) is also improved.
- the conical convex portion (24) of the diaphragm (5) has a function as a valve body, and since this portion may be small, the pressure receiving area when the passage is closed can be reduced, and the influence of the fluid pressure can be reduced. It can be made difficult to receive. Thereby, the output (pressure of operation air, etc.) of the actuator for making it a closed state can be made small.
- the diaphragm valve may be a manual valve that raises and lowers the valve stem by an opening / closing handle instead of such an automatic valve.
- fluid (air) pressure or electromagnetic force may be used.
- operation air it is not limited to said embodiment.
- the problem of the diaphragm valve using the conventional disk-shaped diaphragm can be solved, and a diaphragm valve with improved performance can be provided.
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Fluid-Driven Valves (AREA)
- Safety Valves (AREA)
- Control Of Fluid Pressure (AREA)
Abstract
Description
Claims (3)
- 流体通路が設けられたボディと、ボディの上方に設けられたケーシングと、流体通路を開閉するダイヤフラムと、上昇または下降することによりダイヤフラムを閉または開の方向に移動させる弁棒とを備えているダイヤフラム弁において、
ダイヤフラムは、合成樹脂製とされて、弁棒に嵌め止められた円筒状部、円筒状部の下端開口を閉鎖している底壁部、円筒状部の上端部に設けられたフランジ部、および底壁部中央部に設けられて流体通路上端開口に臨まされた凸部からなり、円筒状部の軸方向中間部分の縦断面形状が径方向外方に凸の略円弧状とされていることを特徴とするダイヤフラム弁。 - ダイヤフラムの円筒状部の下部内周にめねじ部が設けられて、該めねじ部が弁棒の外周に設けられたおねじ部にねじ合わされることにより、ダイヤフラムが弁棒に取り付けられており、円筒状部の軸方向中間部分が、円筒状部の下部に比べて薄肉とされていることを特徴とする請求項1のダイヤフラム弁。
- ケーシングに、弁棒を案内しかつ上方に移動したダイヤフラムのフランジ部を受ける円筒状案内部が設けられており、円筒状案内部の下端面とダイヤフラムのフランジ部の上面との間に、弾性部材が介在させられていることを特徴とする請求項1または請求項2のダイヤフラム弁。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020147031209A KR20150000500A (ko) | 2012-05-31 | 2013-05-29 | 다이어프램 밸브 |
US14/399,660 US9404592B2 (en) | 2012-05-31 | 2013-05-29 | Diaphragm valve |
CN201380026148.6A CN105008777A (zh) | 2012-05-31 | 2013-05-29 | 隔膜阀 |
DE201311002744 DE112013002744T5 (de) | 2012-05-31 | 2013-05-29 | Membranventil |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012123871A JP6002448B2 (ja) | 2012-05-31 | 2012-05-31 | ダイヤフラム弁 |
JP2012-123871 | 2012-05-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2013180150A2 true WO2013180150A2 (ja) | 2013-12-05 |
WO2013180150A3 WO2013180150A3 (ja) | 2014-02-06 |
Family
ID=49673998
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2013/064841 WO2013180150A2 (ja) | 2012-05-31 | 2013-05-29 | ダイヤフラム弁 |
Country Status (7)
Country | Link |
---|---|
US (1) | US9404592B2 (ja) |
JP (1) | JP6002448B2 (ja) |
KR (1) | KR20150000500A (ja) |
CN (1) | CN105008777A (ja) |
DE (1) | DE112013002744T5 (ja) |
TW (1) | TWI591282B (ja) |
WO (1) | WO2013180150A2 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102239202B1 (ko) * | 2017-07-04 | 2021-04-09 | 가부시키가이샤 후지킨 | 액추에이터, 밸브, 유체 공급 시스템 및 반도체 제조 장치 |
KR101901285B1 (ko) * | 2018-05-08 | 2018-11-05 | (주)인터오션 | 고압가스용 개폐밸브 |
CN110735930A (zh) * | 2018-07-18 | 2020-01-31 | 北京七星华创流量计有限公司 | 气体流量调节装置及质量流量控制器 |
DE102018128187A1 (de) * | 2018-11-12 | 2020-05-14 | Apson Lackiertechnik Gmbh | Druckluftbetätigtes Membranventil |
DE102019102445A1 (de) * | 2019-01-31 | 2020-08-06 | Gemü Gebr. Müller Apparatebau Gmbh & Co. Kommanditgesellschaft | Absperrmittel |
Citations (8)
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JPS6280078U (ja) * | 1985-11-11 | 1987-05-22 | ||
JPH03130474U (ja) * | 1990-04-10 | 1991-12-27 | ||
JPH062776A (ja) * | 1992-06-18 | 1994-01-11 | Asahi Organic Chem Ind Co Ltd | ダイヤフラムバルブ |
JPH08326915A (ja) * | 1995-05-26 | 1996-12-10 | Nippondenso Co Ltd | ベローズおよびその製造方法 |
JPH10122415A (ja) * | 1996-10-14 | 1998-05-15 | Sanmei Denki Kk | 小型電磁弁 |
JPH1151239A (ja) * | 1997-08-01 | 1999-02-26 | Ckd Corp | 手動機構付エアオペレイト弁 |
JP2001153239A (ja) * | 1999-11-26 | 2001-06-08 | Asahi Organic Chem Ind Co Ltd | ダイヤフラムバルブ |
JP2004176828A (ja) * | 2002-11-27 | 2004-06-24 | Smc Corp | 流量調整弁 |
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CN86209129U (zh) * | 1986-11-13 | 1987-09-23 | 李国蓉 | 隔膜阀 |
JP4700234B2 (ja) | 2001-07-31 | 2011-06-15 | 株式会社フジキン | ダイヤフラム弁 |
DE102005016387B3 (de) * | 2005-04-09 | 2006-09-07 | Apv Rosista Gmbh | Membranventil |
US20100140528A1 (en) * | 2006-07-05 | 2010-06-10 | Mclennan William Ross | Valve construction |
JP5753352B2 (ja) * | 2010-07-20 | 2015-07-22 | 株式会社Screenホールディングス | ダイヤフラムバルブおよびこれを備えた基板処理装置 |
-
2012
- 2012-05-31 JP JP2012123871A patent/JP6002448B2/ja active Active
-
2013
- 2013-05-29 US US14/399,660 patent/US9404592B2/en active Active
- 2013-05-29 KR KR1020147031209A patent/KR20150000500A/ko not_active Application Discontinuation
- 2013-05-29 WO PCT/JP2013/064841 patent/WO2013180150A2/ja active Application Filing
- 2013-05-29 DE DE201311002744 patent/DE112013002744T5/de not_active Withdrawn
- 2013-05-29 CN CN201380026148.6A patent/CN105008777A/zh active Pending
- 2013-05-30 TW TW102119108A patent/TWI591282B/zh active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6280078U (ja) * | 1985-11-11 | 1987-05-22 | ||
JPH03130474U (ja) * | 1990-04-10 | 1991-12-27 | ||
JPH062776A (ja) * | 1992-06-18 | 1994-01-11 | Asahi Organic Chem Ind Co Ltd | ダイヤフラムバルブ |
JPH08326915A (ja) * | 1995-05-26 | 1996-12-10 | Nippondenso Co Ltd | ベローズおよびその製造方法 |
JPH10122415A (ja) * | 1996-10-14 | 1998-05-15 | Sanmei Denki Kk | 小型電磁弁 |
JPH1151239A (ja) * | 1997-08-01 | 1999-02-26 | Ckd Corp | 手動機構付エアオペレイト弁 |
JP2001153239A (ja) * | 1999-11-26 | 2001-06-08 | Asahi Organic Chem Ind Co Ltd | ダイヤフラムバルブ |
JP2004176828A (ja) * | 2002-11-27 | 2004-06-24 | Smc Corp | 流量調整弁 |
Also Published As
Publication number | Publication date |
---|---|
US9404592B2 (en) | 2016-08-02 |
US20150115191A1 (en) | 2015-04-30 |
TW201408919A (zh) | 2014-03-01 |
CN105008777A (zh) | 2015-10-28 |
TWI591282B (zh) | 2017-07-11 |
KR20150000500A (ko) | 2015-01-02 |
WO2013180150A3 (ja) | 2014-02-06 |
JP2013249872A (ja) | 2013-12-12 |
JP6002448B2 (ja) | 2016-10-05 |
DE112013002744T5 (de) | 2015-03-19 |
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