WO2013180150A3 - ダイヤフラム弁 - Google Patents

ダイヤフラム弁 Download PDF

Info

Publication number
WO2013180150A3
WO2013180150A3 PCT/JP2013/064841 JP2013064841W WO2013180150A3 WO 2013180150 A3 WO2013180150 A3 WO 2013180150A3 JP 2013064841 W JP2013064841 W JP 2013064841W WO 2013180150 A3 WO2013180150 A3 WO 2013180150A3
Authority
WO
WIPO (PCT)
Prior art keywords
diaphragm
cylindrical part
passage
bottom wall
cylindrical
Prior art date
Application number
PCT/JP2013/064841
Other languages
English (en)
French (fr)
Other versions
WO2013180150A2 (ja
Inventor
赤本　久敏
阿部　誠
邦生 植田
Original Assignee
株式会社フジキン
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社フジキン filed Critical 株式会社フジキン
Priority to DE201311002744 priority Critical patent/DE112013002744T5/de
Priority to US14/399,660 priority patent/US9404592B2/en
Priority to KR1020147031209A priority patent/KR20150000500A/ko
Priority to CN201380026148.6A priority patent/CN105008777A/zh
Publication of WO2013180150A2 publication Critical patent/WO2013180150A2/ja
Publication of WO2013180150A3 publication Critical patent/WO2013180150A3/ja

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F16K41/103—Spindle sealings with diaphragm, e.g. shaped as bellows or tube the diaphragm and the closure member being integrated in one member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
    • F16K17/02—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side
    • F16K17/14—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side with fracturing member
    • F16K17/16—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side with fracturing member with fracturing diaphragm ; Rupture discs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Fluid-Driven Valves (AREA)
  • Safety Valves (AREA)
  • Control Of Fluid Pressure (AREA)

Abstract

　円盤状ダイヤフラムの問題点、すなわち、変形量が大きく発塵しやすいという問題、開閉に伴う流体通路の容積変化が大きいという問題、および通路閉鎖時のダイヤフラムの受圧面積が大きいという問題を解消することができるダイヤフラム弁を提供する。　ダイヤフラム5は、合成樹脂製とされて、弁棒4に嵌め止められた円筒状部21、円筒状部21の下端開口を閉鎖している底壁部22、円筒状部21の上端部に設けられたフランジ部23、および底壁部22中央部に設けられて流体流入通路2a上端開口に臨まされた凸部24からなる。円筒状部21の軸方向中間部分33が、縦断面形状が径方向外方に凸の略円弧状とされている。
PCT/JP2013/064841 2012-05-31 2013-05-29 ダイヤフラム弁 WO2013180150A2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE201311002744 DE112013002744T5 (de) 2012-05-31 2013-05-29 Membranventil
US14/399,660 US9404592B2 (en) 2012-05-31 2013-05-29 Diaphragm valve
KR1020147031209A KR20150000500A (ko) 2012-05-31 2013-05-29 다이어프램 밸브
CN201380026148.6A CN105008777A (zh) 2012-05-31 2013-05-29 隔膜阀

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012-123871 2012-05-31
JP2012123871A JP6002448B2 (ja) 2012-05-31 2012-05-31 ダイヤフラム弁

Publications (2)

Publication Number Publication Date
WO2013180150A2 WO2013180150A2 (ja) 2013-12-05
WO2013180150A3 true WO2013180150A3 (ja) 2014-02-06

Family

ID=49673998

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2013/064841 WO2013180150A2 (ja) 2012-05-31 2013-05-29 ダイヤフラム弁

Country Status (7)

Country Link
US (1) US9404592B2 (ja)
JP (1) JP6002448B2 (ja)
KR (1) KR20150000500A (ja)
CN (1) CN105008777A (ja)
DE (1) DE112013002744T5 (ja)
TW (1) TWI591282B (ja)
WO (1) WO2013180150A2 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110730869B (zh) * 2017-07-04 2021-08-06 株式会社富士金 致动器、阀、流体供给系统、以及半导体制造装置
KR101901285B1 (ko) * 2018-05-08 2018-11-05 (주)인터오션 고압가스용 개폐밸브
CN110735930A (zh) * 2018-07-18 2020-01-31 北京七星华创流量计有限公司 气体流量调节装置及质量流量控制器
DE102018128187A1 (de) * 2018-11-12 2020-05-14 Apson Lackiertechnik Gmbh Druckluftbetätigtes Membranventil
DE102019102445A1 (de) * 2019-01-31 2020-08-06 Gemü Gebr. Müller Apparatebau Gmbh & Co. Kommanditgesellschaft Absperrmittel

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6280078U (ja) * 1985-11-11 1987-05-22
JPH03130474U (ja) * 1990-04-10 1991-12-27
JPH062776A (ja) * 1992-06-18 1994-01-11 Asahi Organic Chem Ind Co Ltd ダイヤフラムバルブ
JPH08326915A (ja) * 1995-05-26 1996-12-10 Nippondenso Co Ltd ベローズおよびその製造方法
JPH10122415A (ja) * 1996-10-14 1998-05-15 Sanmei Denki Kk 小型電磁弁
JPH1151239A (ja) * 1997-08-01 1999-02-26 Ckd Corp 手動機構付エアオペレイト弁
JP2001153239A (ja) * 1999-11-26 2001-06-08 Asahi Organic Chem Ind Co Ltd ダイヤフラムバルブ
JP2004176828A (ja) * 2002-11-27 2004-06-24 Smc Corp 流量調整弁

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN86209129U (zh) * 1986-11-13 1987-09-23 李国蓉 隔膜阀
JP4700234B2 (ja) 2001-07-31 2011-06-15 株式会社フジキン ダイヤフラム弁
DE102005016387B3 (de) * 2005-04-09 2006-09-07 Apv Rosista Gmbh Membranventil
US20100140528A1 (en) * 2006-07-05 2010-06-10 Mclennan William Ross Valve construction
JP5753352B2 (ja) * 2010-07-20 2015-07-22 株式会社Ｓｃｒｅｅｎホールディングス ダイヤフラムバルブおよびこれを備えた基板処理装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6280078U (ja) * 1985-11-11 1987-05-22
JPH03130474U (ja) * 1990-04-10 1991-12-27
JPH062776A (ja) * 1992-06-18 1994-01-11 Asahi Organic Chem Ind Co Ltd ダイヤフラムバルブ
JPH08326915A (ja) * 1995-05-26 1996-12-10 Nippondenso Co Ltd ベローズおよびその製造方法
JPH10122415A (ja) * 1996-10-14 1998-05-15 Sanmei Denki Kk 小型電磁弁
JPH1151239A (ja) * 1997-08-01 1999-02-26 Ckd Corp 手動機構付エアオペレイト弁
JP2001153239A (ja) * 1999-11-26 2001-06-08 Asahi Organic Chem Ind Co Ltd ダイヤフラムバルブ
JP2004176828A (ja) * 2002-11-27 2004-06-24 Smc Corp 流量調整弁

Also Published As

Publication number Publication date
TW201408919A (zh) 2014-03-01
DE112013002744T5 (de) 2015-03-19
JP2013249872A (ja) 2013-12-12
WO2013180150A2 (ja) 2013-12-05
JP6002448B2 (ja) 2016-10-05
US20150115191A1 (en) 2015-04-30
US9404592B2 (en) 2016-08-02
TWI591282B (zh) 2017-07-11
CN105008777A (zh) 2015-10-28
KR20150000500A (ko) 2015-01-02

Similar Documents

Publication Publication Date Title
WO2013180150A3 (ja) ダイヤフラム弁
RU2014105935A (ru) Крышка
MX366877B (es) Recipiente de aerosol.
TWD170098S (zh) 流量控制閥之部分
PL2203357T3 (pl) Zamknięcie z tworzywa sztucznego
JP2011519402A5 (ja)
WO2014047371A3 (en) Balanced regulator with inlet pressure sensing tube
US20120187157A1 (en) Liquid distributor and container provided with the liquid distributor
CN201531661U (zh) 恒流阀
MX357047B (es) Perfil de percepción equilibrado para desempeño mejorado de capacidad.
AR092721A1 (es) Sensor corriente arriba para puerto equilibrado
CN203568119U (zh) 外置弹簧乳液泵
WO2015171876A8 (en) Plastic container with flexible base portion
CN204828830U (zh) 一种多级式泄压阀
RU2016137948A (ru) Устройство для раздачи жидкости с выпускным клапаном предварительного сжатия
JP2019163896A5 (ja)
CN105015923A (zh) 一种密封塑料桶
CN205244403U (zh) 一种双向密封控制阀
CN104132169B (zh) 低温气瓶稳压阀
WO2019148863A9 (zh) 储水盒组件及设置有该储水盒组件的冰箱
CN102032371A (zh) 恒流阀
US10214887B2 (en) Diaphragm disk
JP6277030B2 (ja) ポンプ
WO2015102667A8 (en) Container lid and valve
WO2012157860A3 (ko) 가스보일러용 기수분리기

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 13797184

Country of ref document: EP

Kind code of ref document: A2

ENP Entry into the national phase

Ref document number: 20147031209

Country of ref document: KR

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 14399660

Country of ref document: US

WWE Wipo information: entry into national phase

Ref document number: 1120130027445

Country of ref document: DE

Ref document number: 112013002744

Country of ref document: DE

122 Ep: pct application non-entry in european phase

Ref document number: 13797184

Country of ref document: EP

Kind code of ref document: A2