JP2013249872A - ダイヤフラム弁 - Google Patents
ダイヤフラム弁 Download PDFInfo
- Publication number
- JP2013249872A JP2013249872A JP2012123871A JP2012123871A JP2013249872A JP 2013249872 A JP2013249872 A JP 2013249872A JP 2012123871 A JP2012123871 A JP 2012123871A JP 2012123871 A JP2012123871 A JP 2012123871A JP 2013249872 A JP2013249872 A JP 2013249872A
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- cylindrical
- valve
- valve stem
- closing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
- F16K17/02—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side
- F16K17/14—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side with fracturing member
- F16K17/16—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side with fracturing member with fracturing diaphragm ; Rupture discs
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K41/00—Spindle sealings
- F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
- F16K41/103—Spindle sealings with diaphragm, e.g. shaped as bellows or tube the diaphragm and the closure member being integrated in one member
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Fluid-Driven Valves (AREA)
- Safety Valves (AREA)
- Control Of Fluid Pressure (AREA)
Abstract
【解決手段】 ダイヤフラム5は、合成樹脂製とされて、弁棒4に嵌め止められた円筒状部21、円筒状部21の下端開口を閉鎖している底壁部22、円筒状部21の上端部に設けられたフランジ部23、および底壁部22中央部に設けられて流体流入通路2a上端開口に臨まされた凸部24からなる。円筒状部21の軸方向中間部分33が、縦断面形状が径方向外方に凸の略円弧状とされている。
【選択図】 図1
Description
Claims (3)
- 流体通路が設けられたボディと、ボディの上方に設けられたケーシングと、流体通路を開閉するダイヤフラムと、上昇または下降することによりダイヤフラムを閉または開の方向に移動させる弁棒とを備えているダイヤフラム弁において、
ダイヤフラムは、合成樹脂製とされて、弁棒に嵌め止められた円筒状部、円筒状部の下端開口を閉鎖している底壁部、円筒状部の上端部に設けられたフランジ部、および底壁部中央部に設けられて流体通路上端開口に臨まされた凸部からなり、円筒状部の軸方向中間部分の縦断面形状が径方向外方に凸の略円弧状とされていることを特徴とするダイヤフラム弁。 - ダイヤフラムの円筒状部の下部内周にめねじ部が設けられて、該めねじ部が弁棒の外周に設けられたおねじ部にねじ合わされることにより、ダイヤフラムが弁棒に取り付けられており、円筒状部の軸方向中間部分が、円筒状部の下部に比べて薄肉とされていることを特徴とする請求項1のダイヤフラム弁。
- ケーシングに、弁棒を案内しかつ上方に移動したダイヤフラムのフランジ部を受ける円筒状案内部が設けられており、円筒状案内部の下端面とダイヤフラムのフランジ部の上面との間に、弾性部材が介在させられていることを特徴とする請求項1または請求項2のダイヤフラム弁。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012123871A JP6002448B2 (ja) | 2012-05-31 | 2012-05-31 | ダイヤフラム弁 |
KR1020147031209A KR20150000500A (ko) | 2012-05-31 | 2013-05-29 | 다이어프램 밸브 |
DE201311002744 DE112013002744T5 (de) | 2012-05-31 | 2013-05-29 | Membranventil |
CN201380026148.6A CN105008777A (zh) | 2012-05-31 | 2013-05-29 | 隔膜阀 |
US14/399,660 US9404592B2 (en) | 2012-05-31 | 2013-05-29 | Diaphragm valve |
PCT/JP2013/064841 WO2013180150A2 (ja) | 2012-05-31 | 2013-05-29 | ダイヤフラム弁 |
TW102119108A TWI591282B (zh) | 2012-05-31 | 2013-05-30 | 隔膜閥 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012123871A JP6002448B2 (ja) | 2012-05-31 | 2012-05-31 | ダイヤフラム弁 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013249872A true JP2013249872A (ja) | 2013-12-12 |
JP6002448B2 JP6002448B2 (ja) | 2016-10-05 |
Family
ID=49673998
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012123871A Active JP6002448B2 (ja) | 2012-05-31 | 2012-05-31 | ダイヤフラム弁 |
Country Status (7)
Country | Link |
---|---|
US (1) | US9404592B2 (ja) |
JP (1) | JP6002448B2 (ja) |
KR (1) | KR20150000500A (ja) |
CN (1) | CN105008777A (ja) |
DE (1) | DE112013002744T5 (ja) |
TW (1) | TWI591282B (ja) |
WO (1) | WO2013180150A2 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110730869B (zh) * | 2017-07-04 | 2021-08-06 | 株式会社富士金 | 致动器、阀、流体供给系统、以及半导体制造装置 |
KR101901285B1 (ko) * | 2018-05-08 | 2018-11-05 | (주)인터오션 | 고압가스용 개폐밸브 |
CN110735930A (zh) * | 2018-07-18 | 2020-01-31 | 北京七星华创流量计有限公司 | 气体流量调节装置及质量流量控制器 |
DE102018128187A1 (de) * | 2018-11-12 | 2020-05-14 | Apson Lackiertechnik Gmbh | Druckluftbetätigtes Membranventil |
DE102019102445A1 (de) * | 2019-01-31 | 2020-08-06 | Gemü Gebr. Müller Apparatebau Gmbh & Co. Kommanditgesellschaft | Absperrmittel |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6280078U (ja) * | 1985-11-11 | 1987-05-22 | ||
JPH03130474U (ja) * | 1990-04-10 | 1991-12-27 | ||
JPH062776A (ja) * | 1992-06-18 | 1994-01-11 | Asahi Organic Chem Ind Co Ltd | ダイヤフラムバルブ |
JPH10122415A (ja) * | 1996-10-14 | 1998-05-15 | Sanmei Denki Kk | 小型電磁弁 |
JPH1151239A (ja) * | 1997-08-01 | 1999-02-26 | Ckd Corp | 手動機構付エアオペレイト弁 |
JP2001153239A (ja) * | 1999-11-26 | 2001-06-08 | Asahi Organic Chem Ind Co Ltd | ダイヤフラムバルブ |
JP2004176828A (ja) * | 2002-11-27 | 2004-06-24 | Smc Corp | 流量調整弁 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN86209129U (zh) * | 1986-11-13 | 1987-09-23 | 李国蓉 | 隔膜阀 |
JP3966914B2 (ja) * | 1995-05-26 | 2007-08-29 | 株式会社デンソー | ベローズおよびその製造方法 |
JP4700234B2 (ja) | 2001-07-31 | 2011-06-15 | 株式会社フジキン | ダイヤフラム弁 |
DE102005016387B3 (de) * | 2005-04-09 | 2006-09-07 | Apv Rosista Gmbh | Membranventil |
US20100140528A1 (en) * | 2006-07-05 | 2010-06-10 | Mclennan William Ross | Valve construction |
JP5753352B2 (ja) * | 2010-07-20 | 2015-07-22 | 株式会社Screenホールディングス | ダイヤフラムバルブおよびこれを備えた基板処理装置 |
-
2012
- 2012-05-31 JP JP2012123871A patent/JP6002448B2/ja active Active
-
2013
- 2013-05-29 KR KR1020147031209A patent/KR20150000500A/ko not_active Application Discontinuation
- 2013-05-29 CN CN201380026148.6A patent/CN105008777A/zh active Pending
- 2013-05-29 WO PCT/JP2013/064841 patent/WO2013180150A2/ja active Application Filing
- 2013-05-29 DE DE201311002744 patent/DE112013002744T5/de not_active Withdrawn
- 2013-05-29 US US14/399,660 patent/US9404592B2/en active Active
- 2013-05-30 TW TW102119108A patent/TWI591282B/zh active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6280078U (ja) * | 1985-11-11 | 1987-05-22 | ||
JPH03130474U (ja) * | 1990-04-10 | 1991-12-27 | ||
JPH062776A (ja) * | 1992-06-18 | 1994-01-11 | Asahi Organic Chem Ind Co Ltd | ダイヤフラムバルブ |
JPH10122415A (ja) * | 1996-10-14 | 1998-05-15 | Sanmei Denki Kk | 小型電磁弁 |
JPH1151239A (ja) * | 1997-08-01 | 1999-02-26 | Ckd Corp | 手動機構付エアオペレイト弁 |
JP2001153239A (ja) * | 1999-11-26 | 2001-06-08 | Asahi Organic Chem Ind Co Ltd | ダイヤフラムバルブ |
JP2004176828A (ja) * | 2002-11-27 | 2004-06-24 | Smc Corp | 流量調整弁 |
Also Published As
Publication number | Publication date |
---|---|
WO2013180150A3 (ja) | 2014-02-06 |
WO2013180150A2 (ja) | 2013-12-05 |
KR20150000500A (ko) | 2015-01-02 |
TW201408919A (zh) | 2014-03-01 |
US9404592B2 (en) | 2016-08-02 |
TWI591282B (zh) | 2017-07-11 |
JP6002448B2 (ja) | 2016-10-05 |
DE112013002744T5 (de) | 2015-03-19 |
CN105008777A (zh) | 2015-10-28 |
US20150115191A1 (en) | 2015-04-30 |
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