JP4119275B2 - 真空排気系用のダイヤフラム弁 - Google Patents

真空排気系用のダイヤフラム弁 Download PDF

Info

Publication number
JP4119275B2
JP4119275B2 JP2003039541A JP2003039541A JP4119275B2 JP 4119275 B2 JP4119275 B2 JP 4119275B2 JP 2003039541 A JP2003039541 A JP 2003039541A JP 2003039541 A JP2003039541 A JP 2003039541A JP 4119275 B2 JP4119275 B2 JP 4119275B2
Authority
JP
Japan
Prior art keywords
valve seat
diaphragm
valve
holding body
vacuum exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2003039541A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004263576A (ja
Inventor
忠弘 大見
信一 池田
道雄 山路
真史 北野
明弘 森本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=32905174&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP4119275(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Fujikin Inc filed Critical Fujikin Inc
Priority to JP2003039541A priority Critical patent/JP4119275B2/ja
Priority to CNB2004800044663A priority patent/CN100376829C/zh
Priority to US10/546,032 priority patent/US7416165B2/en
Priority to KR1020057013029A priority patent/KR100673399B1/ko
Priority to EP04709325A priority patent/EP1596107B1/en
Priority to PCT/JP2004/001346 priority patent/WO2004074722A1/ja
Priority to DE602004015250T priority patent/DE602004015250D1/de
Priority to TW093103762A priority patent/TWI285716B/zh
Publication of JP2004263576A publication Critical patent/JP2004263576A/ja
Priority to IL169383A priority patent/IL169383A/en
Publication of JP4119275B2 publication Critical patent/JP4119275B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K25/00—Details relating to contact between valve members and seats
    • F16K25/005—Particular materials for seats or closure elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K25/00—Details relating to contact between valve members and seats
    • F16K25/04—Arrangements for preventing erosion, not otherwise provided for
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Valves (AREA)
  • Reciprocating Pumps (AREA)
  • Fluid-Driven Valves (AREA)
  • Valve Housings (AREA)
JP2003039541A 2003-02-18 2003-02-18 真空排気系用のダイヤフラム弁 Expired - Lifetime JP4119275B2 (ja)

Priority Applications (9)

Application Number Priority Date Filing Date Title
JP2003039541A JP4119275B2 (ja) 2003-02-18 2003-02-18 真空排気系用のダイヤフラム弁
DE602004015250T DE602004015250D1 (enExample) 2003-02-18 2004-02-09
US10/546,032 US7416165B2 (en) 2003-02-18 2004-02-09 Diaphragm valve for the vacuum exhaustion system
KR1020057013029A KR100673399B1 (ko) 2003-02-18 2004-02-09 진공배기계용 다이어프램 밸브
EP04709325A EP1596107B1 (en) 2003-02-18 2004-02-09 Diaphragm valve for vacuum evacuation system
PCT/JP2004/001346 WO2004074722A1 (ja) 2003-02-18 2004-02-09 真空排気系用のダイヤフラム弁
CNB2004800044663A CN100376829C (zh) 2003-02-18 2004-02-09 真空排气系统用的隔膜阀
TW093103762A TWI285716B (en) 2003-02-18 2004-02-17 Diaphragm valve for vacuum evacuation system
IL169383A IL169383A (en) 2003-02-18 2005-06-23 Diaphragm valve for vacuum evacuation system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003039541A JP4119275B2 (ja) 2003-02-18 2003-02-18 真空排気系用のダイヤフラム弁

Publications (2)

Publication Number Publication Date
JP2004263576A JP2004263576A (ja) 2004-09-24
JP4119275B2 true JP4119275B2 (ja) 2008-07-16

Family

ID=32905174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003039541A Expired - Lifetime JP4119275B2 (ja) 2003-02-18 2003-02-18 真空排気系用のダイヤフラム弁

Country Status (9)

Country Link
US (1) US7416165B2 (enExample)
EP (1) EP1596107B1 (enExample)
JP (1) JP4119275B2 (enExample)
KR (1) KR100673399B1 (enExample)
CN (1) CN100376829C (enExample)
DE (1) DE602004015250D1 (enExample)
IL (1) IL169383A (enExample)
TW (1) TWI285716B (enExample)
WO (1) WO2004074722A1 (enExample)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1794581A2 (en) 2004-09-15 2007-06-13 Microchip Biotechnologies, Inc. Microfluidic devices
JP2006153230A (ja) * 2004-12-01 2006-06-15 Neriki:Kk 流体制御器用ダイヤフラム及びこれを用いたバルブ装置
WO2006083783A1 (en) * 2005-01-31 2006-08-10 Swagelok Company Flow control device
EP1979079A4 (en) 2006-02-03 2012-11-28 Integenx Inc MICROFLUIDIC DEVICES
CN101715483A (zh) 2007-02-05 2010-05-26 微芯片生物工艺学股份有限公司 微流体和纳米流体装置、系统和应用
US8434793B2 (en) * 2007-07-19 2013-05-07 Swagelok Company Coated seals
US20090114873A1 (en) * 2007-11-05 2009-05-07 Richard Anagnos Diaphragm for use with control valves
WO2009108260A2 (en) 2008-01-22 2009-09-03 Microchip Biotechnologies, Inc. Universal sample preparation system and use in an integrated analysis system
JP5319942B2 (ja) * 2008-03-18 2013-10-16 大日本スクリーン製造株式会社 ダイヤフラムバルブおよびこれを備えた基板処理装置
US8672532B2 (en) 2008-12-31 2014-03-18 Integenx Inc. Microfluidic methods
CN102459565A (zh) 2009-06-02 2012-05-16 尹特根埃克斯有限公司 具有隔膜阀的流控设备
CA2766218A1 (en) * 2009-07-27 2011-02-03 Merck Sharp & Dohme Corp. Diaphragm valve with improved sealing performance and leak detection
US8584703B2 (en) * 2009-12-01 2013-11-19 Integenx Inc. Device with diaphragm valve
KR101088679B1 (ko) 2010-05-10 2011-12-01 주식회사 원익아이피에스 기판 처리장치 및 기판 처리방법
US8512538B2 (en) 2010-05-28 2013-08-20 Integenx Inc. Capillary electrophoresis device
WO2012024658A2 (en) 2010-08-20 2012-02-23 IntegenX, Inc. Integrated analysis system
EP2606242A4 (en) 2010-08-20 2016-07-20 Integenx Inc MICROFLUIDIC DEVICES WITH MECHANICALLY SEALED MEMBRANE VALVES
JP5331180B2 (ja) * 2011-09-22 2013-10-30 株式会社フジキン ダイレクトタッチ型メタルダイヤフラム弁のバルブストローク調整方法
JP5802532B2 (ja) * 2011-12-05 2015-10-28 株式会社フジキン ダイヤフラム弁およびダイヤフラム弁用シートホルダユニット
JP2013119877A (ja) * 2011-12-06 2013-06-17 Fujikin Inc ダイヤフラム弁
JP5964139B2 (ja) * 2012-05-30 2016-08-03 株式会社フジキン ダイヤフラム及びダイヤフラム弁
JP5999252B2 (ja) * 2013-03-11 2016-09-28 株式会社島津製作所 流路切換バルブ
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP6072648B2 (ja) * 2013-08-12 2017-02-01 株式会社フジキン ダイヤフラム弁
JP6530929B2 (ja) * 2015-02-27 2019-06-12 株式会社フジキン 流体制御器
KR101727624B1 (ko) 2015-05-14 2017-04-17 한국과학기술원 미세유체 밸브
JP6516696B2 (ja) * 2016-03-01 2019-05-22 株式会社鷺宮製作所 容量調整弁
JP6307557B2 (ja) * 2016-06-17 2018-04-04 Ckd株式会社 流体制御弁
FR3054609A1 (fr) * 2016-07-29 2018-02-02 Plastic Omnium Advanced Innovation & Res Regulateur de debit de ventilation pour un reservoir pressurise de vehicule.
JP6914044B2 (ja) * 2017-01-31 2021-08-04 株式会社キッツエスシーティー ダイヤフラムバルブ
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
KR101905104B1 (ko) * 2017-03-09 2018-10-11 (주)씨에스이 비금속 다이어프램을 구비한 에어 펌프
JP6929098B2 (ja) * 2017-03-30 2021-09-01 株式会社キッツエスシーティー メタルダイヤフラムバルブ
JP7045839B2 (ja) * 2017-12-08 2022-04-01 株式会社キッツエスシーティー 流体制御バルブ
JP6945859B2 (ja) * 2018-06-04 2021-10-06 株式会社不二工機 流路切換弁
CN109667955B (zh) * 2018-12-13 2024-03-29 江西增鑫科技股份有限公司 一种隔膜阀及采用该隔膜阀输送流体的方法
WO2020250316A1 (ja) * 2019-06-11 2020-12-17 株式会社島津製作所 背圧制御弁
US11976748B2 (en) * 2019-08-30 2024-05-07 Fujikin Incorporated Diaphragm valve
JP2021071129A (ja) * 2019-10-29 2021-05-06 株式会社フジキン シートおよびバルブ
JP7401896B2 (ja) * 2019-10-29 2023-12-20 株式会社フジキン バルブ
WO2021192753A1 (ja) * 2020-03-26 2021-09-30 株式会社フジキン バルブ装置
JP7761379B2 (ja) * 2020-09-14 2025-10-28 株式会社堀場エステック 流体制御弁及び流体制御装置
US12398819B2 (en) * 2021-04-01 2025-08-26 Fujikin Incorporated Controller and vaporization supply device

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2406963A (en) * 1943-08-16 1946-09-03 Thompson Prod Inc Valve seat insert assembly, and assembly method and means
GB955411A (en) * 1959-02-25 1964-04-15 Saunders Valve Co Ltd Improvements in and relating to valves for the control of fluids
US3487823A (en) * 1967-07-31 1970-01-06 Carl M Tarter Composite valve seat insert and method of overhaul
US3750698A (en) * 1970-07-16 1973-08-07 Xerox Corp Coated valving member
US4317713A (en) * 1980-05-19 1982-03-02 Atlantic Richfield Company In situ aluminum passivation process
US4337144A (en) * 1980-05-19 1982-06-29 Atlantic Richfield Company Aluminum passivation process
US4538638A (en) * 1984-03-08 1985-09-03 The Dow Chemical Company Plastic lined diaphragm valve
JPS62107216A (ja) * 1985-11-05 1987-05-18 Ngk Insulators Ltd バルブシートインサート及びその製造法並びにそれを使用してなるシリンダーヘッド
DE3546117C1 (en) * 1985-12-24 1987-02-12 Resistoflex Gmbh Two-layer diaphragm for a diaphragm valve
US5127430A (en) * 1990-02-01 1992-07-07 Industrial Ceramics Engineering Ceramic weir for valve body
DE4231343A1 (de) * 1992-09-18 1994-03-24 Mueller Apparatebau Gmbh & Co Kunststoffkörper
US5658452A (en) * 1994-01-04 1997-08-19 Chevron Chemical Company Increasing production in hydrocarbon conversion processes
US5413311A (en) * 1994-03-01 1995-05-09 Tescom Corporation Gas valve
JP3343313B2 (ja) * 1995-06-30 2002-11-11 株式会社フジキン ダイヤフラム弁
JPH102452A (ja) * 1996-06-14 1998-01-06 Smc Corp 高真空バルブ
FR2759759B1 (fr) * 1997-02-17 1999-05-21 Asm France Sa Dispositif d'obturation pour vanne a membrane
JP4146535B2 (ja) 1997-10-20 2008-09-10 忠弘 大見 定容積型流体制御器
US6505814B1 (en) * 1998-10-15 2003-01-14 Kabushiki Kaisha Fujikin Fluid controller
US6321776B1 (en) * 2000-04-24 2001-11-27 Wayne L. Pratt Double diaphragm precision throttling valve
DE60029838T2 (de) * 2000-06-05 2007-08-30 Ohmi, Tadahiro, Sendai Ventil mit integrierten öffnung
US6409149B1 (en) * 2000-06-28 2002-06-25 Mks Instruments, Inc. Dual pendulum valve assembly with valve seat cover
JP3686007B2 (ja) * 2001-04-23 2005-08-24 株式会社巴技術研究所 バタフライバルブの弁体の製造方法
JP2003166660A (ja) 2001-11-30 2003-06-13 Ckd Corp 流体制御弁
JP3995543B2 (ja) * 2002-07-03 2007-10-24 旭有機材工業株式会社 流体制御弁
US6904935B2 (en) * 2002-12-18 2005-06-14 Masco Corporation Of Indiana Valve component with multiple surface layers
US6941963B2 (en) * 2003-06-26 2005-09-13 Planar Systems, Inc. High-speed diaphragm valve for atomic layer deposition

Also Published As

Publication number Publication date
IL169383A (en) 2008-03-20
DE602004015250D1 (enExample) 2008-09-04
US7416165B2 (en) 2008-08-26
WO2004074722A1 (ja) 2004-09-02
KR100673399B1 (ko) 2007-01-24
JP2004263576A (ja) 2004-09-24
EP1596107A4 (en) 2006-05-17
EP1596107A1 (en) 2005-11-16
US20060175573A1 (en) 2006-08-10
KR20050095611A (ko) 2005-09-29
TW200422547A (en) 2004-11-01
CN100376829C (zh) 2008-03-26
TWI285716B (en) 2007-08-21
EP1596107B1 (en) 2008-07-23
CN1751196A (zh) 2006-03-22

Similar Documents

Publication Publication Date Title
JP4119275B2 (ja) 真空排気系用のダイヤフラム弁
US7988130B2 (en) Valve for vacuum exhaustion system
US8960644B2 (en) Valve seat structure of fluid control valve
US5462080A (en) Heated removable throttle valve
JP4471541B2 (ja) 定圧レギュレータ
KR20180002622A (ko) 유체 압력을 조절 또는 제어하기 위한 유닛
JP2001173811A (ja) 高性能ポペット弁体及び弁座の組立体
JPH0193674A (ja) 弁
US20070075288A1 (en) Gate valve
JP3100586U (ja) 真空ポンプ用の逆止弁
JP4237032B2 (ja) 開閉弁及びこれを用いた半導体製造設備用排気装置
JP3924867B2 (ja) 高真空バルブのボディーの均一加熱装置
JP2001108131A (ja) ピストンバルブ
JP4644242B2 (ja) 真空排気系用バルブの使用方法
CN120799118B (zh) 一种半导体工艺制程中流体密封结构和流控装置
TW202219407A (zh) 用於真空系統之單向止回閥及止回閥裝置

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20041026

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20071226

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080219

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080324

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080324

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20080416

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20080424

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

Ref document number: 4119275

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110502

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120502

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130502

Year of fee payment: 5

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313115

R371 Transfer withdrawn

Free format text: JAPANESE INTERMEDIATE CODE: R371

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313115

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term