KR100665138B1 - 편광 패턴을 제공하기 위한 장치 - Google Patents

편광 패턴을 제공하기 위한 장치 Download PDF

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Publication number
KR100665138B1
KR100665138B1 KR1020050043984A KR20050043984A KR100665138B1 KR 100665138 B1 KR100665138 B1 KR 100665138B1 KR 1020050043984 A KR1020050043984 A KR 1020050043984A KR 20050043984 A KR20050043984 A KR 20050043984A KR 100665138 B1 KR100665138 B1 KR 100665138B1
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South Korea
Prior art keywords
polarization
pattern
frame
pupil
polarization pattern
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Expired - Fee Related
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KR1020050043984A
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English (en)
Korean (ko)
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KR20060046175A (ko
Inventor
마이클 엠. 알버트
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에이에스엠엘 홀딩 엔.브이.
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/06—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of fluids in transparent cells
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/08—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of polarising materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/286—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • G03F7/70566—Polarisation control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Polarising Elements (AREA)
KR1020050043984A 2004-05-25 2005-05-25 편광 패턴을 제공하기 위한 장치 Expired - Fee Related KR100665138B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/852,099 US7324280B2 (en) 2004-05-25 2004-05-25 Apparatus for providing a pattern of polarization
US10/852,099 2004-05-25

Publications (2)

Publication Number Publication Date
KR20060046175A KR20060046175A (ko) 2006-05-17
KR100665138B1 true KR100665138B1 (ko) 2007-01-09

Family

ID=34936768

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020050043984A Expired - Fee Related KR100665138B1 (ko) 2004-05-25 2005-05-25 편광 패턴을 제공하기 위한 장치

Country Status (9)

Country Link
US (3) US7324280B2 (enExample)
EP (2) EP1749241A1 (enExample)
JP (2) JP4361513B2 (enExample)
KR (1) KR100665138B1 (enExample)
CN (1) CN100487520C (enExample)
DE (1) DE602005008666D1 (enExample)
SG (1) SG117600A1 (enExample)
TW (1) TWI280460B (enExample)
WO (1) WO2005116772A1 (enExample)

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KR101547077B1 (ko) 2003-04-09 2015-08-25 가부시키가이샤 니콘 노광 방법 및 장치, 그리고 디바이스 제조 방법
TWI569308B (zh) 2003-10-28 2017-02-01 尼康股份有限公司 照明光學裝置、曝光裝置、曝光方法以及元件製造 方法
TWI385414B (zh) 2003-11-20 2013-02-11 尼康股份有限公司 光學照明裝置、照明方法、曝光裝置、曝光方法以及元件製造方法
CN101793993B (zh) 2004-01-16 2013-04-03 卡尔蔡司Smt有限责任公司 光学元件、光学布置及系统
US20070019179A1 (en) 2004-01-16 2007-01-25 Damian Fiolka Polarization-modulating optical element
US8270077B2 (en) 2004-01-16 2012-09-18 Carl Zeiss Smt Gmbh Polarization-modulating optical element
TWI395068B (zh) 2004-01-27 2013-05-01 尼康股份有限公司 光學系統、曝光裝置以及曝光方法
TWI379344B (en) 2004-02-06 2012-12-11 Nikon Corp Polarization changing device, optical illumination apparatus, light-exposure apparatus and light-exposure method
US7324280B2 (en) * 2004-05-25 2008-01-29 Asml Holding N.V. Apparatus for providing a pattern of polarization
US7548370B2 (en) * 2004-06-29 2009-06-16 Asml Holding N.V. Layered structure for a tile wave plate assembly
KR100614651B1 (ko) * 2004-10-11 2006-08-22 삼성전자주식회사 회로 패턴의 노광을 위한 장치 및 방법, 사용되는포토마스크 및 그 설계 방법, 그리고 조명계 및 그 구현방법
US7345740B2 (en) * 2004-12-28 2008-03-18 Asml Netherlands B.V. Polarized radiation in lithographic apparatus and device manufacturing method
US7312852B2 (en) * 2004-12-28 2007-12-25 Asml Netherlands B.V. Polarized radiation in lithographic apparatus and device manufacturing method
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US7525642B2 (en) * 2006-02-23 2009-04-28 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
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DE102006032810A1 (de) 2006-07-14 2008-01-17 Carl Zeiss Smt Ag Beleuchtungsoptik für eine Mikrolithografie-Projektionsbelichtungsanlage, Beleuchtungssystem mit einer derartigen Beleuchtungsoptik, mikrolithografie-Projektionsbelichtungsanlage mit einem derartigen Beleuchtungssystem, mikrolithografisches Herstellungsverfahren für Bauelemente sowie mit diesem Verfahren hergestelltes Bauelement
DE102006032878A1 (de) * 2006-07-15 2008-01-17 Carl Zeiss Smt Ag Beleuchtungssystem einer mikrolithographischen Projektionsbelichtungsanlage
DE102006038643B4 (de) 2006-08-17 2009-06-10 Carl Zeiss Smt Ag Mikrolithographische Projektionsbelichtungsanlage sowie mikrolithographisches Belichtungsverfahren
US8035803B2 (en) * 2006-09-06 2011-10-11 Carl Zeiss Smt Gmbh Subsystem of an illumination system of a microlithographic projection exposure apparatus
CN100476509C (zh) * 2006-09-15 2009-04-08 广达电脑股份有限公司 结构配合偏振光的偏振片装置
KR20080073196A (ko) * 2007-02-05 2008-08-08 엘지전자 주식회사 Ｍｉｍｏ 시스템에서 효율적인 채널 품질 정보 전송 방법
DE102008013567A1 (de) 2007-05-08 2008-11-13 Carl Zeiss Smt Ag Beleuchtungseinrichtung einer mikrolithographischen Projektionsbelichtungsanlage
US20080285000A1 (en) * 2007-05-17 2008-11-20 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
JP4971932B2 (ja) * 2007-10-01 2012-07-11 キヤノン株式会社 照明光学系、露光装置、デバイス製造方法および偏光制御ユニット
DE102007055567A1 (de) 2007-11-20 2009-05-28 Carl Zeiss Smt Ag Optisches System
US8045161B2 (en) * 2008-03-18 2011-10-25 The Board Of Trustees Of The University Of Illinois Robust determination of the anisotropic polarizability of nanoparticles using coherent confocal microscopy
US8334976B2 (en) 2008-03-18 2012-12-18 The Board Of Trustees Of The University Of Illinois Second-order nonlinear susceptibility of a nanoparticle using coherent confocal microscopy
NL1036786A1 (nl) * 2008-05-08 2009-11-11 Asml Netherlands Bv Lithographic apparatus and method.
JP5319766B2 (ja) * 2008-06-20 2013-10-16 カール・ツァイス・エスエムティー・ゲーエムベーハー マイクロリソグラフィ投影露光装置の光学系及びマイクロリソグラフィ露光方法
JP2010197352A (ja) * 2009-02-27 2010-09-09 Hitachi High-Technologies Corp 欠陥検査方法及び欠陥検査装置
US8553204B2 (en) * 2009-05-20 2013-10-08 Nikon Corporation Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method
DE102011003035A1 (de) * 2010-02-08 2011-08-11 Carl Zeiss SMT GmbH, 73447 Polarisationsbeeinflussende optische Anordnung, sowie optisches System einer mikrolithographischen Projektionsbelichtungsanlage
EP2369413B1 (en) 2010-03-22 2021-04-07 ASML Netherlands BV Illumination system and lithographic apparatus
JP2014059507A (ja) * 2012-09-19 2014-04-03 Fuji Xerox Co Ltd 画像形成装置
US20140111849A1 (en) * 2012-10-18 2014-04-24 Polarization Solutions, Llc Apparatus and method for mosaic gratings-based polarizer
KR102102020B1 (ko) 2013-08-09 2020-04-17 케이엘에이 코포레이션 향상된 검출 감도를 위한 멀티 스팟 조명
CN107991728B (zh) 2013-08-23 2020-06-16 科磊股份有限公司 宽带及宽视场角补偿器
GB2521443B (en) * 2013-12-20 2016-06-29 Vizeye Ltd Apparatus and method for inducing polarization perception in an observer
JP6619619B2 (ja) * 2015-11-04 2019-12-11 日東電工株式会社 偏光子、偏光板および偏光子の製造方法
CN105785581B (zh) * 2016-05-09 2018-06-22 湖州中科光电技术有限公司 一种用于产生旋转对称偏振光的微结构器件的设计方法
CN110160002B (zh) * 2018-02-12 2022-02-25 深圳市绎立锐光科技开发有限公司 一种照明系统

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