KR100614961B1 - ＰＶＤ Ａｌ₂Ｏ₃으로 코팅된 절삭 공구 - Google Patents

ＰＶＤ Ａｌ₂Ｏ₃으로 코팅된 절삭 공구 Download PDF

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Publication number
KR100614961B1
KR100614961B1 KR1020007003870A KR20007003870A KR100614961B1 KR 100614961 B1 KR100614961 B1 KR 100614961B1 KR 1020007003870 A KR1020007003870 A KR 1020007003870A KR 20007003870 A KR20007003870 A KR 20007003870A KR 100614961 B1 KR100614961 B1 KR 100614961B1
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KR
South Korea
Prior art keywords
layer
cutting tool
deposited
coated
coating
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR1020007003870A
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English (en)
Korean (ko)
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KR20010072535A (ko
Inventor
쉴러지그프리드
괴디케클라우스
피에쯔케프레트
지비쯔키올라프
스요스트란트마츠
륭베르그뵈른
알프레드손비베카
힐딩토마스
Original Assignee
산드빅 인터렉츄얼 프로퍼티 에이치비
프라운호퍼-게젤샤프트 츄어 푀르더룽 데어 안게반텐 포르슝에.파우.
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Application filed by 산드빅 인터렉츄얼 프로퍼티 에이치비, 프라운호퍼-게젤샤프트 츄어 푀르더룽 데어 안게반텐 포르슝에.파우. filed Critical 산드빅 인터렉츄얼 프로퍼티 에이치비
Publication of KR20010072535A publication Critical patent/KR20010072535A/ko
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Publication of KR100614961B1 publication Critical patent/KR100614961B1/ko
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/354—Introduction of auxiliary energy into the plasma
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23B2228/10—Coatings
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T407/00—Cutters, for shaping
    • Y10T407/27—Cutters, for shaping comprising tool of specific chemical composition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • Y10T428/252—Glass or ceramic [i.e., fired or glazed clay, cement, etc.] [porcelain, quartz, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drilling Tools (AREA)
  • Chemically Coating (AREA)
KR1020007003870A 1997-11-06 1998-11-06 ＰＶＤ Ａｌ₂Ｏ₃으로 코팅된 절삭 공구 Expired - Fee Related KR100614961B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
SE9704066-1 1997-11-06
SE9704066A SE520802C2 (sv) 1997-11-06 1997-11-06 Skärverktyg belagt med aluminiumoxid och process för dess tillverkning
PCT/SE1998/002009 WO1999024634A1 (en) 1997-11-06 1998-11-06 PVD Al2O3 COATED CUTTING TOOL

Publications (2)

Publication Number Publication Date
KR20010072535A KR20010072535A (ko) 2001-07-31
KR100614961B1 true KR100614961B1 (ko) 2006-08-25

Family

ID=20408890

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020007003870A Expired - Fee Related KR100614961B1 (ko) 1997-11-06 1998-11-06 ＰＶＤ Ａｌ₂Ｏ₃으로 코팅된 절삭 공구

Country Status (12)

Country Link
US (3) US6210726B1 (https=)
EP (2) EP1253215B1 (https=)
JP (1) JP2001522725A (https=)
KR (1) KR100614961B1 (https=)
CN (1) CN1278307A (https=)
AT (2) ATE259003T1 (https=)
BR (1) BR9813186A (https=)
DE (2) DE69828453T2 (https=)
PL (1) PL340602A1 (https=)
RU (1) RU2206432C2 (https=)
SE (1) SE520802C2 (https=)
WO (1) WO1999024634A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140059193A (ko) * 2011-09-07 2014-05-15 발터 악티엔게젤샤프트 크롬 함유 기능성층을 갖는 공구
KR20200085806A (ko) * 2017-11-07 2020-07-15 발터 악티엔게젤샤프트 Al2O3 증착을 위한 PVD 프로세스 및 적어도 하나의 Al2O3 층으로 코팅된 절삭 공구

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SE520802C2 (sv) 1997-11-06 2003-08-26 Sandvik Ab Skärverktyg belagt med aluminiumoxid och process för dess tillverkning
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SE520795C2 (sv) 1999-05-06 2003-08-26 Sandvik Ab Skärverktyg belagt med aluminiumoxid och process för dess tillverkning
SE519921C2 (sv) 1999-05-06 2003-04-29 Sandvik Ab PVD-belagt skärverktyg och metod för dess framställning
SE521284C2 (sv) * 1999-05-19 2003-10-21 Sandvik Ab Aluminiumoxidbelagt skärverktyg för metallbearbetning
US6572991B1 (en) 2000-02-04 2003-06-03 Seco Tools Ab Deposition of γ-Al2O3 by means of CVD
AT5008U1 (de) * 2001-02-09 2002-02-25 Plansee Tizit Ag Hartmetallverschleissteil mit mischoxidschicht
US6689450B2 (en) * 2001-03-27 2004-02-10 Seco Tools Ab Enhanced Al2O3-Ti(C,N) multi-coating deposited at low temperature
EP1323847A3 (en) * 2001-12-28 2005-09-14 Seco Tools Ab Coated cemented carbide body and method for use
DE10314929B9 (de) * 2002-04-17 2010-12-23 Cemecon Ag Körper mit einer Beschichtung in R-3c Struktur, Verfahren und Vorrichtung zur PVD-Beschichtung
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CN105088163A (zh) * 2015-09-22 2015-11-25 苏州格科特真空镀膜技术有限公司 一种在硬质合金刀片表面制备晶态Al2O3涂层的方法
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RU2760426C2 (ru) * 2017-04-07 2021-11-25 Сандвик Интеллекчуал Проперти Аб Снабженный покрытием режущий инструмент
EP3461928B1 (en) * 2017-09-29 2020-11-11 Walter Ag Tacno coatings and production process
CN111886095B (zh) * 2018-01-26 2023-05-16 京瓷株式会社 涂层刀具和具备它的切削刀具
RU2676719C1 (ru) * 2018-02-14 2019-01-10 Федеральное государственное бюджетное учреждение науки Институт электрофизики Уральского отделения Российской академии наук Способ низкотемпературного нанесения нанокристаллического покрытия из альфа-оксида алюминия
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SE520802C2 (sv) 1997-11-06 2003-08-26 Sandvik Ab Skärverktyg belagt med aluminiumoxid och process för dess tillverkning

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140059193A (ko) * 2011-09-07 2014-05-15 발터 악티엔게젤샤프트 크롬 함유 기능성층을 갖는 공구
KR102033186B1 (ko) 2011-09-07 2019-10-16 발터 악티엔게젤샤프트 크롬 함유 기능성층을 갖는 공구
KR20200085806A (ko) * 2017-11-07 2020-07-15 발터 악티엔게젤샤프트 Al2O3 증착을 위한 PVD 프로세스 및 적어도 하나의 Al2O3 층으로 코팅된 절삭 공구
KR102652515B1 (ko) * 2017-11-07 2024-03-28 발터 악티엔게젤샤프트 Al2O3 증착을 위한 PVD 프로세스 및 적어도 하나의 Al2O3 층으로 코팅된 절삭 공구

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EP1029105A1 (en) 2000-08-23
RU2206432C2 (ru) 2003-06-20
BR9813186A (pt) 2000-08-22
US6423403B2 (en) 2002-07-23
ATE259003T1 (de) 2004-02-15
US20010049011A1 (en) 2001-12-06
SE9704066L (sv) 1999-05-07
EP1253215B1 (en) 2004-12-29
CN1278307A (zh) 2000-12-27
SE520802C2 (sv) 2003-08-26
US6210726B1 (en) 2001-04-03
DE69828453T2 (de) 2005-06-02
EP1253215A2 (en) 2002-10-30
ATE286155T1 (de) 2005-01-15
EP1253215A3 (en) 2003-01-02
US20030027015A1 (en) 2003-02-06
WO1999024634A1 (en) 1999-05-20
JP2001522725A (ja) 2001-11-20
DE69821516T2 (de) 2004-07-01
KR20010072535A (ko) 2001-07-31
EP1029105B1 (en) 2004-02-04
DE69821516D1 (de) 2004-03-11
PL340602A1 (en) 2001-02-12
DE69828453D1 (de) 2005-02-03
SE9704066D0 (sv) 1997-11-06
US6673430B2 (en) 2004-01-06

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