DE69828453T2 - Mit PVD-Al2O3 beschichtetes Schneidwerkzeug - Google Patents
Mit PVD-Al2O3 beschichtetes Schneidwerkzeug Download PDFInfo
- Publication number
- DE69828453T2 DE69828453T2 DE69828453T DE69828453T DE69828453T2 DE 69828453 T2 DE69828453 T2 DE 69828453T2 DE 69828453 T DE69828453 T DE 69828453T DE 69828453 T DE69828453 T DE 69828453T DE 69828453 T2 DE69828453 T2 DE 69828453T2
- Authority
- DE
- Germany
- Prior art keywords
- layer
- cutting tool
- coated
- al2o3
- phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005520 cutting process Methods 0.000 title claims abstract description 55
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 title claims abstract description 12
- 229910052593 corundum Inorganic materials 0.000 title abstract 4
- 229910001845 yogo sapphire Inorganic materials 0.000 title abstract 4
- 238000000576 coating method Methods 0.000 claims abstract description 42
- 238000000034 method Methods 0.000 claims abstract description 40
- 239000011248 coating agent Substances 0.000 claims abstract description 29
- 239000000758 substrate Substances 0.000 claims abstract description 19
- 229910052751 metal Inorganic materials 0.000 claims abstract description 15
- 238000001755 magnetron sputter deposition Methods 0.000 claims abstract description 11
- 239000002184 metal Substances 0.000 claims abstract description 10
- 239000012535 impurity Substances 0.000 claims abstract description 8
- 239000000463 material Substances 0.000 claims abstract description 8
- 238000002441 X-ray diffraction Methods 0.000 claims abstract description 5
- 150000001875 compounds Chemical class 0.000 claims abstract description 4
- 229910052736 halogen Inorganic materials 0.000 claims abstract description 4
- 150000002367 halogens Chemical class 0.000 claims abstract description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 112
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 17
- 239000000919 ceramic Substances 0.000 claims description 7
- 150000001247 metal acetylides Chemical class 0.000 claims description 7
- 150000004767 nitrides Chemical class 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- 229910000997 High-speed steel Inorganic materials 0.000 claims description 5
- 229910052735 hafnium Inorganic materials 0.000 claims description 5
- 229910052750 molybdenum Inorganic materials 0.000 claims description 5
- 229910052758 niobium Inorganic materials 0.000 claims description 5
- 229910052715 tantalum Inorganic materials 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- 229910052721 tungsten Inorganic materials 0.000 claims description 5
- 229910052720 vanadium Inorganic materials 0.000 claims description 5
- 239000011195 cermet Substances 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- 229910010037 TiAlN Inorganic materials 0.000 claims description 3
- 238000004364 calculation method Methods 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims description 2
- 239000000843 powder Substances 0.000 claims description 2
- 230000006835 compression Effects 0.000 claims 1
- 238000007906 compression Methods 0.000 claims 1
- 238000002447 crystallographic data Methods 0.000 claims 1
- 229910000831 Steel Inorganic materials 0.000 abstract description 6
- 238000003754 machining Methods 0.000 abstract description 6
- 239000010959 steel Substances 0.000 abstract description 6
- 230000006872 improvement Effects 0.000 abstract description 5
- 229910001018 Cast iron Inorganic materials 0.000 abstract description 4
- 230000009977 dual effect Effects 0.000 abstract description 4
- 230000005855 radiation Effects 0.000 abstract description 2
- 230000011514 reflex Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 85
- 239000012071 phase Substances 0.000 description 26
- 238000000151 deposition Methods 0.000 description 17
- 238000005240 physical vapour deposition Methods 0.000 description 17
- 238000005229 chemical vapour deposition Methods 0.000 description 15
- 230000008569 process Effects 0.000 description 15
- 230000008021 deposition Effects 0.000 description 14
- 239000000203 mixture Substances 0.000 description 11
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- 230000035882 stress Effects 0.000 description 6
- 239000002826 coolant Substances 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 239000000460 chlorine Substances 0.000 description 4
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 4
- 238000007733 ion plating Methods 0.000 description 4
- 238000005555 metalworking Methods 0.000 description 4
- 238000007514 turning Methods 0.000 description 4
- KJPRLNWUNMBNBZ-QPJJXVBHSA-N (E)-cinnamaldehyde Chemical compound O=C\C=C\C1=CC=CC=C1 KJPRLNWUNMBNBZ-QPJJXVBHSA-N 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 238000005553 drilling Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000010079 rubber tapping Methods 0.000 description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- MXRIRQGCELJRSN-UHFFFAOYSA-N O.O.O.[Al] Chemical compound O.O.O.[Al] MXRIRQGCELJRSN-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000007735 ion beam assisted deposition Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 125000004430 oxygen atom Chemical group O* 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910000760 Hardened steel Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- -1 cermets Substances 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 238000002524 electron diffraction data Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000010705 motor oil Substances 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/354—Introduction of auxiliary energy into the plasma
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
- B23B2228/10—Coatings
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T407/00—Cutters, for shaping
- Y10T407/27—Cutters, for shaping comprising tool of specific chemical composition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
- Y10T428/24975—No layer or component greater than 5 mils thick
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
- Y10T428/252—Glass or ceramic [i.e., fired or glazed clay, cement, etc.] [porcelain, quartz, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Physical Vapour Deposition (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Chemical Vapour Deposition (AREA)
- Drilling Tools (AREA)
- Chemically Coating (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE9704066 | 1997-11-06 | ||
| SE9704066A SE520802C2 (sv) | 1997-11-06 | 1997-11-06 | Skärverktyg belagt med aluminiumoxid och process för dess tillverkning |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69828453D1 DE69828453D1 (de) | 2005-02-03 |
| DE69828453T2 true DE69828453T2 (de) | 2005-06-02 |
Family
ID=20408890
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69828453T Expired - Lifetime DE69828453T2 (de) | 1997-11-06 | 1998-11-06 | Mit PVD-Al2O3 beschichtetes Schneidwerkzeug |
| DE69821516T Expired - Lifetime DE69821516T2 (de) | 1997-11-06 | 1998-11-06 | PVD Al2O3 BESCHICHTETES SCHNEIDWERKZEUG |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69821516T Expired - Lifetime DE69821516T2 (de) | 1997-11-06 | 1998-11-06 | PVD Al2O3 BESCHICHTETES SCHNEIDWERKZEUG |
Country Status (12)
| Country | Link |
|---|---|
| US (3) | US6210726B1 (https=) |
| EP (2) | EP1253215B1 (https=) |
| JP (1) | JP2001522725A (https=) |
| KR (1) | KR100614961B1 (https=) |
| CN (1) | CN1278307A (https=) |
| AT (2) | ATE259003T1 (https=) |
| BR (1) | BR9813186A (https=) |
| DE (2) | DE69828453T2 (https=) |
| PL (1) | PL340602A1 (https=) |
| RU (1) | RU2206432C2 (https=) |
| SE (1) | SE520802C2 (https=) |
| WO (1) | WO1999024634A1 (https=) |
Families Citing this family (55)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE520802C2 (sv) | 1997-11-06 | 2003-08-26 | Sandvik Ab | Skärverktyg belagt med aluminiumoxid och process för dess tillverkning |
| SE518134C2 (sv) * | 1997-12-10 | 2002-09-03 | Sandvik Ab | Multiskiktbelagt skärverktyg |
| SE520795C2 (sv) | 1999-05-06 | 2003-08-26 | Sandvik Ab | Skärverktyg belagt med aluminiumoxid och process för dess tillverkning |
| SE519921C2 (sv) | 1999-05-06 | 2003-04-29 | Sandvik Ab | PVD-belagt skärverktyg och metod för dess framställning |
| SE521284C2 (sv) * | 1999-05-19 | 2003-10-21 | Sandvik Ab | Aluminiumoxidbelagt skärverktyg för metallbearbetning |
| US6572991B1 (en) | 2000-02-04 | 2003-06-03 | Seco Tools Ab | Deposition of γ-Al2O3 by means of CVD |
| AT5008U1 (de) * | 2001-02-09 | 2002-02-25 | Plansee Tizit Ag | Hartmetallverschleissteil mit mischoxidschicht |
| US6689450B2 (en) * | 2001-03-27 | 2004-02-10 | Seco Tools Ab | Enhanced Al2O3-Ti(C,N) multi-coating deposited at low temperature |
| EP1323847A3 (en) * | 2001-12-28 | 2005-09-14 | Seco Tools Ab | Coated cemented carbide body and method for use |
| DE10314929B9 (de) * | 2002-04-17 | 2010-12-23 | Cemecon Ag | Körper mit einer Beschichtung in R-3c Struktur, Verfahren und Vorrichtung zur PVD-Beschichtung |
| JP2003340602A (ja) * | 2002-05-29 | 2003-12-02 | Kyocera Corp | 回路付き切削工具およびその製造方法 |
| JP2004060741A (ja) * | 2002-07-26 | 2004-02-26 | Motoyama Eng Works Ltd | ダイアフラム及びダイアフラム弁並びに成膜装置 |
| CN100413998C (zh) * | 2002-08-08 | 2008-08-27 | 株式会社神户制钢所 | α型晶体结构为主体的氧化铝被膜相关技术 |
| JP4205546B2 (ja) * | 2003-09-16 | 2009-01-07 | 株式会社神戸製鋼所 | 耐摩耗性、耐熱性および基材との密着性に優れた積層皮膜の製造方法 |
| US7693855B2 (en) * | 2003-10-28 | 2010-04-06 | Media Cybernetics, Inc. | Method, system, and computer program product for managing data associated with a document stored in an electronic form |
| US20060008676A1 (en) * | 2004-07-07 | 2006-01-12 | General Electric Company | Protective coating on a substrate and method of making thereof |
| JP2006028600A (ja) * | 2004-07-16 | 2006-02-02 | Kobe Steel Ltd | 耐摩耗性と耐熱性に優れた積層皮膜 |
| JP4593994B2 (ja) * | 2004-07-23 | 2010-12-08 | 住友電工ハードメタル株式会社 | 表面被覆切削工具 |
| DE102004044240A1 (de) | 2004-09-14 | 2006-03-30 | Walter Ag | Schneidwerkzeug mit oxidischer Beschichtung |
| US20070116631A1 (en) * | 2004-10-18 | 2007-05-24 | The Regents Of The University Of California | Arrays of long carbon nanotubes for fiber spinning |
| SE529015C2 (sv) * | 2005-09-09 | 2007-04-10 | Sandvik Intellectual Property | PVD-belagt skärverktygsskär tillverkat av hårdmetall |
| US7670674B2 (en) * | 2005-09-09 | 2010-03-02 | Sandvik Intellectual Property Ab | PVD coated cutting tool |
| US20070078521A1 (en) * | 2005-09-30 | 2007-04-05 | Depuy Products, Inc. | Aluminum oxide coated implants and components |
| RU2316613C1 (ru) * | 2006-04-19 | 2008-02-10 | Институт сильноточной электроники СО РАН | Способ получения пленок оксида цинка |
| MX2009003288A (es) * | 2006-09-26 | 2009-06-30 | Oerlikon Trading Ag | Pieza de trabajo con revestimiento duro. |
| ATE435039T1 (de) * | 2006-10-18 | 2009-07-15 | Depuy Products Inc | Aluminiumoxid-beschichtete implantate und komponente |
| WO2008082020A1 (en) * | 2007-01-02 | 2008-07-10 | Taegutec Ltd. | Surface treating method for cutting tools |
| RU2418882C2 (ru) * | 2007-01-02 | 2011-05-20 | Таегутек Лтд. | Способ поверхностной обработки режущего инструмента |
| IL182741A (en) | 2007-04-23 | 2012-03-29 | Iscar Ltd | Coatings |
| US8129040B2 (en) * | 2007-05-16 | 2012-03-06 | Oerlikon Trading Ag, Truebbach | Cutting tool |
| CN101368260A (zh) * | 2007-09-14 | 2009-02-18 | 山特维克知识产权股份有限公司 | 用于在基底上沉积涂层的方法和设备 |
| DE102008013965A1 (de) * | 2008-03-12 | 2009-09-17 | Kennametal Inc. | Hartstoffbeschichteter Körper |
| ES2658849T3 (es) * | 2008-07-09 | 2018-03-12 | Oerlikon Surface Solutions Ltd., Pfäffikon | Sistema de recubrimiento, pieza de trabajo recubierta y método de fabricación de la misma |
| DE102009001675A1 (de) | 2009-03-19 | 2010-09-23 | Eberhard-Karls-Universität Tübingen | Schneidwerkzeug |
| CZ305038B6 (cs) | 2009-07-28 | 2015-04-08 | Shm, S. R. O. | Způsob vytváření ochranných a funkčních vrstev metodou PVD z katody se sníženou povrchovou elektrickou vodivostí |
| DE102009028577B4 (de) | 2009-08-17 | 2012-02-16 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Beschichtete Körper aus Metall, Hartmetall, Cermet, Keramik oder Halbleiterwerkstoff sowie Verfahren zur Beschichtung derartiger Körper |
| DE102009028579B4 (de) | 2009-08-17 | 2013-08-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Beschichtete Körper aus Metall, Hartmetall, Cermet oder Keramik sowie Verfahren zur Beschichtung derartiger Körper |
| JP5190971B2 (ja) * | 2009-12-16 | 2013-04-24 | 住友電気工業株式会社 | 被膜、切削工具および被膜の製造方法 |
| DE102011053372A1 (de) | 2011-09-07 | 2013-03-07 | Walter Ag | Werkzeug mit chromhaltiger Funktionsschicht |
| TWI521090B (zh) * | 2012-04-16 | 2016-02-11 | 財團法人工業技術研究院 | 複合刀具 |
| WO2014101517A1 (zh) * | 2012-12-26 | 2014-07-03 | Wu Shanghua | 一种采用物理气相沉积工艺在氮化硅切削刀具表面制备Al2O3涂层及其复合涂层的方法 |
| EP2818573B1 (en) * | 2013-06-27 | 2016-02-03 | Sandvik Intellectual Property AB | Coated cutting tool |
| JP6037155B2 (ja) | 2014-09-03 | 2016-11-30 | 三菱マテリアル株式会社 | 表面被覆切削工具およびその製造方法 |
| RU2704949C2 (ru) * | 2014-12-19 | 2019-10-31 | Сандвик Интеллекчуал Проперти Аб | Режущий инструмент с хогф-покрытием |
| CN105088163A (zh) * | 2015-09-22 | 2015-11-25 | 苏州格科特真空镀膜技术有限公司 | 一种在硬质合金刀片表面制备晶态Al2O3涂层的方法 |
| WO2017220536A1 (en) * | 2016-06-21 | 2017-12-28 | Sandvik Intellectual Property Ab | Cvd coated cutting tool |
| EP3263743A1 (en) * | 2016-06-29 | 2018-01-03 | Sandvik Intellectual Property AB | Cvd coated cutting tool |
| RU2760426C2 (ru) * | 2017-04-07 | 2021-11-25 | Сандвик Интеллекчуал Проперти Аб | Снабженный покрытием режущий инструмент |
| EP3461928B1 (en) * | 2017-09-29 | 2020-11-11 | Walter Ag | Tacno coatings and production process |
| KR102652515B1 (ko) * | 2017-11-07 | 2024-03-28 | 발터 악티엔게젤샤프트 | Al2O3 증착을 위한 PVD 프로세스 및 적어도 하나의 Al2O3 층으로 코팅된 절삭 공구 |
| CN111886095B (zh) * | 2018-01-26 | 2023-05-16 | 京瓷株式会社 | 涂层刀具和具备它的切削刀具 |
| RU2676719C1 (ru) * | 2018-02-14 | 2019-01-10 | Федеральное государственное бюджетное учреждение науки Институт электрофизики Уральского отделения Российской академии наук | Способ низкотемпературного нанесения нанокристаллического покрытия из альфа-оксида алюминия |
| KR102112084B1 (ko) * | 2018-11-30 | 2020-05-18 | 한국야금 주식회사 | 절삭공구용 경질피막 |
| WO2021260775A1 (ja) * | 2020-06-22 | 2021-12-30 | 住友電工ハードメタル株式会社 | 切削工具 |
| JP2025017994A (ja) * | 2023-07-26 | 2025-02-06 | 日本特殊陶業株式会社 | 被覆基材、及び被覆基材の製造方法 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE252205C (https=) | ||||
| CH540991A (fr) | 1971-07-07 | 1973-08-31 | Battelle Memorial Institute | Procédé pour augmenter la résistance à l'usure de la surface d'une pièce en "métal dur" |
| SE464818B (sv) * | 1989-06-16 | 1991-06-17 | Sandvik Ab | Belagt skaer foer skaerande bearbetning |
| US5516588A (en) * | 1991-03-27 | 1996-05-14 | Widia Gmbh | Composite body, its use and a process for its production |
| SE9101953D0 (sv) * | 1991-06-25 | 1991-06-25 | Sandvik Ab | A1203 coated sintered body |
| DE4209975A1 (de) | 1992-03-27 | 1993-09-30 | Krupp Widia Gmbh | Verbundkörper und dessen Verwendung |
| EP0592986B1 (en) | 1992-10-12 | 1998-07-08 | Sumitomo Electric Industries, Limited | Ultra-thin film laminate |
| SE501527C2 (sv) | 1992-12-18 | 1995-03-06 | Sandvik Ab | Sätt och alster vid beläggning av ett skärande verktyg med ett aluminiumoxidskikt |
| SE509201C2 (sv) | 1994-07-20 | 1998-12-14 | Sandvik Ab | Aluminiumoxidbelagt verktyg |
| US5700551A (en) | 1994-09-16 | 1997-12-23 | Sumitomo Electric Industries, Ltd. | Layered film made of ultrafine particles and a hard composite material for tools possessing the film |
| US5693417A (en) * | 1995-05-22 | 1997-12-02 | Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Vacuum-coated compound body and process for its production |
| DE19518779C1 (de) | 1995-05-22 | 1996-07-18 | Fraunhofer Ges Forschung | Verbundkörper aus vakuumbeschichtetem Sinterwerkstoff und Verfahren zu seiner Herstellung |
| US5879823A (en) * | 1995-12-12 | 1999-03-09 | Kennametal Inc. | Coated cutting tool |
| SE520802C2 (sv) | 1997-11-06 | 2003-08-26 | Sandvik Ab | Skärverktyg belagt med aluminiumoxid och process för dess tillverkning |
-
1997
- 1997-11-06 SE SE9704066A patent/SE520802C2/sv unknown
-
1998
- 1998-11-06 CN CN98810834A patent/CN1278307A/zh active Pending
- 1998-11-06 US US09/187,006 patent/US6210726B1/en not_active Expired - Lifetime
- 1998-11-06 EP EP02013750A patent/EP1253215B1/en not_active Expired - Lifetime
- 1998-11-06 BR BR9813186-9A patent/BR9813186A/pt not_active IP Right Cessation
- 1998-11-06 EP EP98954899A patent/EP1029105B1/en not_active Expired - Lifetime
- 1998-11-06 JP JP2000519623A patent/JP2001522725A/ja active Pending
- 1998-11-06 DE DE69828453T patent/DE69828453T2/de not_active Expired - Lifetime
- 1998-11-06 KR KR1020007003870A patent/KR100614961B1/ko not_active Expired - Fee Related
- 1998-11-06 WO PCT/SE1998/002009 patent/WO1999024634A1/en not_active Ceased
- 1998-11-06 RU RU2000114171/02A patent/RU2206432C2/ru not_active IP Right Cessation
- 1998-11-06 AT AT98954899T patent/ATE259003T1/de active
- 1998-11-06 DE DE69821516T patent/DE69821516T2/de not_active Expired - Lifetime
- 1998-11-06 PL PL98340602A patent/PL340602A1/xx unknown
- 1998-11-06 AT AT02013750T patent/ATE286155T1/de active
-
2001
- 2001-02-14 US US09/782,226 patent/US6423403B2/en not_active Expired - Lifetime
-
2002
- 2002-05-22 US US10/151,821 patent/US6673430B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP1029105A1 (en) | 2000-08-23 |
| RU2206432C2 (ru) | 2003-06-20 |
| BR9813186A (pt) | 2000-08-22 |
| US6423403B2 (en) | 2002-07-23 |
| ATE259003T1 (de) | 2004-02-15 |
| US20010049011A1 (en) | 2001-12-06 |
| SE9704066L (sv) | 1999-05-07 |
| EP1253215B1 (en) | 2004-12-29 |
| CN1278307A (zh) | 2000-12-27 |
| SE520802C2 (sv) | 2003-08-26 |
| US6210726B1 (en) | 2001-04-03 |
| EP1253215A2 (en) | 2002-10-30 |
| ATE286155T1 (de) | 2005-01-15 |
| EP1253215A3 (en) | 2003-01-02 |
| US20030027015A1 (en) | 2003-02-06 |
| WO1999024634A1 (en) | 1999-05-20 |
| JP2001522725A (ja) | 2001-11-20 |
| DE69821516T2 (de) | 2004-07-01 |
| KR20010072535A (ko) | 2001-07-31 |
| EP1029105B1 (en) | 2004-02-04 |
| KR100614961B1 (ko) | 2006-08-25 |
| DE69821516D1 (de) | 2004-03-11 |
| PL340602A1 (en) | 2001-02-12 |
| DE69828453D1 (de) | 2005-02-03 |
| SE9704066D0 (sv) | 1997-11-06 |
| US6673430B2 (en) | 2004-01-06 |
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| 8327 | Change in the person/name/address of the patent owner |
Owner name: SANDVIK INTELLECTUAL PROPERTY HB, SANDVIKEN, SE |
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| 8364 | No opposition during term of opposition | ||
| 8327 | Change in the person/name/address of the patent owner |
Owner name: SANDVIK INTELLECTUAL PROPERTY AB, SANDVIKEN, SE |