ATE259003T1 - Pvd al2o3 beschichtetes schneidwerkzeug - Google Patents

Pvd al2o3 beschichtetes schneidwerkzeug

Info

Publication number
ATE259003T1
ATE259003T1 AT98954899T AT98954899T ATE259003T1 AT E259003 T1 ATE259003 T1 AT E259003T1 AT 98954899 T AT98954899 T AT 98954899T AT 98954899 T AT98954899 T AT 98954899T AT E259003 T1 ATE259003 T1 AT E259003T1
Authority
AT
Austria
Prior art keywords
al2o3
layer
coated
gamma
prior
Prior art date
Application number
AT98954899T
Other languages
German (de)
English (en)
Inventor
Siegfried Schiller
Klaus Goedicke
Fred Fietzke
Olaf Zywitzki
Mats Sjoestrand
Bjoern Ljungberg
Viveka Alfredsson
Thomas Hilding
Original Assignee
Sandvik Ab
Fraunhofer Ges Forschung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sandvik Ab, Fraunhofer Ges Forschung filed Critical Sandvik Ab
Application granted granted Critical
Publication of ATE259003T1 publication Critical patent/ATE259003T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/354—Introduction of auxiliary energy into the plasma
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23B2228/10—Coatings
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T407/00—Cutters, for shaping
    • Y10T407/27—Cutters, for shaping comprising tool of specific chemical composition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • Y10T428/252—Glass or ceramic [i.e., fired or glazed clay, cement, etc.] [porcelain, quartz, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drilling Tools (AREA)
  • Chemically Coating (AREA)
AT98954899T 1997-11-06 1998-11-06 Pvd al2o3 beschichtetes schneidwerkzeug ATE259003T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE9704066A SE520802C2 (sv) 1997-11-06 1997-11-06 Skärverktyg belagt med aluminiumoxid och process för dess tillverkning
PCT/SE1998/002009 WO1999024634A1 (en) 1997-11-06 1998-11-06 PVD Al2O3 COATED CUTTING TOOL

Publications (1)

Publication Number Publication Date
ATE259003T1 true ATE259003T1 (de) 2004-02-15

Family

ID=20408890

Family Applications (2)

Application Number Title Priority Date Filing Date
AT98954899T ATE259003T1 (de) 1997-11-06 1998-11-06 Pvd al2o3 beschichtetes schneidwerkzeug
AT02013750T ATE286155T1 (de) 1997-11-06 1998-11-06 Mit pvd-al2o3 beschichtetes schneidwerkzeug

Family Applications After (1)

Application Number Title Priority Date Filing Date
AT02013750T ATE286155T1 (de) 1997-11-06 1998-11-06 Mit pvd-al2o3 beschichtetes schneidwerkzeug

Country Status (12)

Country Link
US (3) US6210726B1 (https=)
EP (2) EP1253215B1 (https=)
JP (1) JP2001522725A (https=)
KR (1) KR100614961B1 (https=)
CN (1) CN1278307A (https=)
AT (2) ATE259003T1 (https=)
BR (1) BR9813186A (https=)
DE (2) DE69828453T2 (https=)
PL (1) PL340602A1 (https=)
RU (1) RU2206432C2 (https=)
SE (1) SE520802C2 (https=)
WO (1) WO1999024634A1 (https=)

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RU2760426C2 (ru) * 2017-04-07 2021-11-25 Сандвик Интеллекчуал Проперти Аб Снабженный покрытием режущий инструмент
EP3461928B1 (en) * 2017-09-29 2020-11-11 Walter Ag Tacno coatings and production process
KR102652515B1 (ko) * 2017-11-07 2024-03-28 발터 악티엔게젤샤프트 Al2O3 증착을 위한 PVD 프로세스 및 적어도 하나의 Al2O3 층으로 코팅된 절삭 공구
CN111886095B (zh) * 2018-01-26 2023-05-16 京瓷株式会社 涂层刀具和具备它的切削刀具
RU2676719C1 (ru) * 2018-02-14 2019-01-10 Федеральное государственное бюджетное учреждение науки Институт электрофизики Уральского отделения Российской академии наук Способ низкотемпературного нанесения нанокристаллического покрытия из альфа-оксида алюминия
KR102112084B1 (ko) * 2018-11-30 2020-05-18 한국야금 주식회사 절삭공구용 경질피막
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JP2025017994A (ja) * 2023-07-26 2025-02-06 日本特殊陶業株式会社 被覆基材、及び被覆基材の製造方法

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Also Published As

Publication number Publication date
EP1029105A1 (en) 2000-08-23
RU2206432C2 (ru) 2003-06-20
BR9813186A (pt) 2000-08-22
US6423403B2 (en) 2002-07-23
US20010049011A1 (en) 2001-12-06
SE9704066L (sv) 1999-05-07
EP1253215B1 (en) 2004-12-29
CN1278307A (zh) 2000-12-27
SE520802C2 (sv) 2003-08-26
US6210726B1 (en) 2001-04-03
DE69828453T2 (de) 2005-06-02
EP1253215A2 (en) 2002-10-30
ATE286155T1 (de) 2005-01-15
EP1253215A3 (en) 2003-01-02
US20030027015A1 (en) 2003-02-06
WO1999024634A1 (en) 1999-05-20
JP2001522725A (ja) 2001-11-20
DE69821516T2 (de) 2004-07-01
KR20010072535A (ko) 2001-07-31
EP1029105B1 (en) 2004-02-04
KR100614961B1 (ko) 2006-08-25
DE69821516D1 (de) 2004-03-11
PL340602A1 (en) 2001-02-12
DE69828453D1 (de) 2005-02-03
SE9704066D0 (sv) 1997-11-06
US6673430B2 (en) 2004-01-06

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