KR100549103B1 - 탄소나노튜브 어레이의 제작방법 - Google Patents

탄소나노튜브 어레이의 제작방법 Download PDF

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Publication number
KR100549103B1
KR100549103B1 KR1020030036530A KR20030036530A KR100549103B1 KR 100549103 B1 KR100549103 B1 KR 100549103B1 KR 1020030036530 A KR1020030036530 A KR 1020030036530A KR 20030036530 A KR20030036530 A KR 20030036530A KR 100549103 B1 KR100549103 B1 KR 100549103B1
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South Korea
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organic
biomaterial
substrate
bioreceptor
nanopattern
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KR1020030036530A
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English (en)
Korean (ko)
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KR20040105319A (ko
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정희태
정대환
권기영
이수림
최도환
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한국과학기술원
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Priority to KR1020030036530A priority Critical patent/KR100549103B1/ko
Priority to US10/859,530 priority patent/US20040245209A1/en
Priority to JP2004165293A priority patent/JP3951141B2/ja
Priority to CNB2004100462863A priority patent/CN1332270C/zh
Publication of KR20040105319A publication Critical patent/KR20040105319A/ko
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Publication of KR100549103B1 publication Critical patent/KR100549103B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/16—Preparation
    • C01B32/162—Preparation characterised by catalysts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y5/00—Nanobiotechnology or nanomedicine, e.g. protein engineering or drug delivery
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00—Structure or properties of carbon nanotubes
    • C01B2202/08—Aligned nanotubes

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Composite Materials (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
KR1020030036530A 2003-06-05 2003-06-05 탄소나노튜브 어레이의 제작방법 KR100549103B1 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020030036530A KR100549103B1 (ko) 2003-06-05 2003-06-05 탄소나노튜브 어레이의 제작방법
US10/859,530 US20040245209A1 (en) 2003-06-05 2004-06-02 Method for fabricating a carbon nanotube array and a biochip using the self-assembly of supramolecules and staining of metal compound
JP2004165293A JP3951141B2 (ja) 2003-06-05 2004-06-03 有機超分子の自己集合及び金属化合物のステイニングを用いたカーボンナノチューブアレイ及びバイオチップの製作方法
CNB2004100462863A CN1332270C (zh) 2003-06-05 2004-06-04 利用超分子的自组装和金属化合物着色制备碳纳米管芯片和生物芯片的方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020030036530A KR100549103B1 (ko) 2003-06-05 2003-06-05 탄소나노튜브 어레이의 제작방법

Publications (2)

Publication Number Publication Date
KR20040105319A KR20040105319A (ko) 2004-12-16
KR100549103B1 true KR100549103B1 (ko) 2006-02-06

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KR1020030036530A KR100549103B1 (ko) 2003-06-05 2003-06-05 탄소나노튜브 어레이의 제작방법

Country Status (4)

Country Link
US (1) US20040245209A1 (zh)
JP (1) JP3951141B2 (zh)
KR (1) KR100549103B1 (zh)
CN (1) CN1332270C (zh)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7454295B2 (en) 1998-12-17 2008-11-18 The Watereye Corporation Anti-terrorism water quality monitoring system
US8958917B2 (en) 1998-12-17 2015-02-17 Hach Company Method and system for remote monitoring of fluid quality and treatment
US9056783B2 (en) 1998-12-17 2015-06-16 Hach Company System for monitoring discharges into a waste water collection system
KR100812854B1 (ko) * 2002-10-02 2008-03-11 더 마이터 코포레이션 패턴화된 과립 운동을 이용하는 로봇식 조작 시스템
US8920619B2 (en) 2003-03-19 2014-12-30 Hach Company Carbon nanotube sensor
JP4927319B2 (ja) * 2003-07-24 2012-05-09 韓国科学技術園 高密度カーボンナノチューブフィルムまたはパターンを用いたバイオチップの製造方法
JP3935479B2 (ja) * 2004-06-23 2007-06-20 キヤノン株式会社 カーボンファイバーの製造方法及びそれを使用した電子放出素子の製造方法、電子デバイスの製造方法、画像表示装置の製造方法および、該画像表示装置を用いた情報表示再生装置
US20060240492A1 (en) * 2004-11-12 2006-10-26 Rusling James F Carbon nanotube based immunosensors and methods of making and using
KR100657221B1 (ko) * 2004-12-24 2006-12-14 한국기계연구원 콜로이드 자기조립에 의한 다공성 마스크의 제조방법 및그 용도
KR20060091521A (ko) * 2005-02-15 2006-08-21 삼성에스디아이 주식회사 탄소나노튜브의 형성방법 및 이를 이용한 전계방출소자의제조방법
JP5041680B2 (ja) * 2005-06-17 2012-10-03 株式会社ハイペップ研究所 バイオチップ用基板及びバイオチップ
KR100704234B1 (ko) * 2005-08-18 2007-04-10 재단법인서울대학교산학협력재단 다공성 알루미나 나노틀을 이용한 규칙적으로 배열된 분자소자 어레이의 제조방법
EP1917557A4 (en) 2005-08-24 2015-07-22 Trustees Boston College APPARATUS AND METHODS FOR SOLAR ENERGY CONVERSION IMPLEMENTING COMPOSITE METAL STRUCTURES OF NANOMETRIC SCALE
US7649665B2 (en) 2005-08-24 2010-01-19 The Trustees Of Boston College Apparatus and methods for optical switching using nanoscale optics
US7754964B2 (en) 2005-08-24 2010-07-13 The Trustees Of Boston College Apparatus and methods for solar energy conversion using nanocoax structures
US7959974B2 (en) * 2005-12-02 2011-06-14 Northwestern University Nanotube assembly
US8679630B2 (en) * 2006-05-17 2014-03-25 Purdue Research Foundation Vertical carbon nanotube device in nanoporous templates
KR100856577B1 (ko) 2006-05-22 2008-09-04 주식회사 에스티앤아이 탄소나노튜브 센서 및 그 제조방법
WO2008000045A1 (en) * 2006-06-30 2008-01-03 University Of Wollongong Nanostructured composites
US20100055459A1 (en) * 2006-08-30 2010-03-04 Liquidia Technologies, Inc. Nanoparticles Having Functional Additives for Self and Directed Assembly and Methods of Fabricating Same
KR100811266B1 (ko) 2006-09-01 2008-03-07 주식회사 하이닉스반도체 하드 마스크를 이용한 선택적 식각 방법 및 이를 이용한메모리 소자의 소자분리 형성 방법
US9110055B2 (en) 2006-11-17 2015-08-18 The Trustees Of Boston College Nanoscale sensors
US20100173228A1 (en) * 2006-12-14 2010-07-08 University Of Wollongong Nanotube and Carbon Layer Nanostructured Composites
US7869030B2 (en) * 2007-01-03 2011-01-11 Research Foundation Of State University Of New York Aggregates of plural transition metal nanoparticles and plural cyanine dye molecules
US8343627B2 (en) 2007-02-20 2013-01-01 Research Foundation Of State University Of New York Core-shell nanoparticles with multiple cores and a method for fabricating them
US8546027B2 (en) * 2007-06-20 2013-10-01 New Jersey Institute Of Technology System and method for directed self-assembly technique for the creation of carbon nanotube sensors and bio-fuel cells on single plane
KR100923092B1 (ko) * 2007-11-30 2009-10-22 연세대학교 산학협력단 자기조립법을 이용한 상온 전도성 또는 반도체성 나노튜브의 제조방법
US8715981B2 (en) * 2009-01-27 2014-05-06 Purdue Research Foundation Electrochemical biosensor
US20100297435A1 (en) * 2009-01-28 2010-11-25 Kaul Anupama B Nanotubes and related manufacturing processes
US8872154B2 (en) * 2009-04-06 2014-10-28 Purdue Research Foundation Field effect transistor fabrication from carbon nanotubes
CN101899288B (zh) * 2009-05-27 2012-11-21 清华大学 热界面材料及其制备方法
US8435798B2 (en) 2010-01-13 2013-05-07 California Institute Of Technology Applications and methods of operating a three-dimensional nano-electro-mechanical resonator and related devices
CN102539777B (zh) * 2010-12-10 2014-11-05 国家纳米科学中心 一种超分子自组装生物芯片及其制备方法和应用
WO2013037951A1 (en) * 2011-09-16 2013-03-21 Danmarks Tekniske Universitet Catalyst deposition for the preparation of carbon nanotubes
KR20130032507A (ko) * 2011-09-23 2013-04-02 포항공과대학교 산학협력단 유기 금속을 포함하는 자기조립성 고분자를 포함하는 전극 및 그 제조 방법
EP2788762B1 (en) 2011-12-05 2018-08-15 The Trustees Of The University Of Pennsylvania Graphene-biomolecule bioelectronic devices
CN102816197B (zh) * 2012-08-24 2015-04-29 四川大学华西医院 一种新的嘧啶并嘧啶类核苷类似物、制备方法及其形成的超分子结构和应用
US8815729B1 (en) * 2013-03-04 2014-08-26 Globalfoundries Inc. Methods of forming structures on an integrated circuit product
US8828869B1 (en) 2013-03-28 2014-09-09 Globalfoundries Inc. Methods of forming masking layers for use in forming integrated circuit products
CN103712951B (zh) * 2013-12-31 2016-03-09 清华大学深圳研究生院 一种基于三维结构纳米阵列生物芯片的制备方法及其应用
KR102287813B1 (ko) * 2014-05-30 2021-08-10 삼성전자주식회사 하드마스크 조성물 및 이를 이용한 패턴의 형성방법
CN107105675B (zh) * 2014-10-28 2023-11-07 杨百翰大学 微生物抗性材料以及相关的装置、系统及方法
WO2017091802A1 (en) * 2015-11-27 2017-06-01 The Government Of The United States Of America, As Represented By The Secretary Of The Navy Pattern definition of nanocellulose sheets through selective ashing via lithographic masking
US10517995B2 (en) 2016-11-01 2019-12-31 Brigham Young University Super-hydrophobic materials and associated devices, systems, and methods
CN110146570A (zh) * 2019-05-09 2019-08-20 清华-伯克利深圳学院筹备办公室 酶电极及其制备方法、酶传感器、监测装置和治疗设备
CN114324568A (zh) * 2021-12-31 2022-04-12 浙江大学 鸟嘌呤肽核酸自组装纳米球基光子晶体的声场辅助制备方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5143854A (en) * 1989-06-07 1992-09-01 Affymax Technologies N.V. Large scale photolithographic solid phase synthesis of polypeptides and receptor binding screening thereof
JP3943272B2 (ja) * 1999-01-18 2007-07-11 双葉電子工業株式会社 カーボンナノチューブのフイルム化方法
JP4063451B2 (ja) * 1999-07-26 2008-03-19 双葉電子工業株式会社 カーボンナノチューブのパターン形成方法
US6401526B1 (en) * 1999-12-10 2002-06-11 The Board Of Trustees Of The Leland Stanford Junior University Carbon nanotubes and methods of fabrication thereof using a liquid phase catalyst precursor
KR20020003782A (ko) * 2000-07-04 2002-01-15 이정욱 탄소나노튜브의 제작 방법
JP3843447B2 (ja) * 2000-12-01 2006-11-08 日本電気株式会社 カーボンナノチューブのパターン形成方法
KR20020049547A (ko) * 2000-12-19 2002-06-26 류정열 차량 반자동변속기의 변속시스템
WO2003053357A2 (en) * 2001-12-19 2003-07-03 Wilk Patent Development Corporation Method and related composition employing nanostructures
US7189433B2 (en) * 2002-04-05 2007-03-13 International Business Machines Corporation Process for preparing a film having alternatively monolayers of a metal-metal bonded complex monolayer and an organic monolayer by layer-by layer growth
US20040072994A1 (en) * 2002-10-15 2004-04-15 Herr Daniel J.C. Nanostructures including controllably positioned and aligned synthetic nanotubes, and related methods
US20040077156A1 (en) * 2002-10-18 2004-04-22 Loucas Tsakalakos Methods of defect reduction in wide bandgap thin films using nanolithography
US7166161B2 (en) * 2003-01-17 2007-01-23 Nitto Denko Corporation Anisotropic film manufacturing

Also Published As

Publication number Publication date
KR20040105319A (ko) 2004-12-16
JP2005049334A (ja) 2005-02-24
JP3951141B2 (ja) 2007-08-01
CN1601383A (zh) 2005-03-30
US20040245209A1 (en) 2004-12-09
CN1332270C (zh) 2007-08-15

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