KR100539009B1 - 에너지선경화형친수성점착제조성물및그이용방법 - Google Patents
에너지선경화형친수성점착제조성물및그이용방법 Download PDFInfo
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- KR100539009B1 KR100539009B1 KR1019980034896A KR19980034896A KR100539009B1 KR 100539009 B1 KR100539009 B1 KR 100539009B1 KR 1019980034896 A KR1019980034896 A KR 1019980034896A KR 19980034896 A KR19980034896 A KR 19980034896A KR 100539009 B1 KR100539009 B1 KR 100539009B1
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- sensitive adhesive
- pressure
- adhesive
- adhesive composition
- energy ray
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/10—Esters
- C08F220/26—Esters containing oxygen in addition to the carboxy oxygen
- C08F220/28—Esters containing oxygen in addition to the carboxy oxygen containing no aromatic rings in the alcohol moiety
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/10—Esters
- C08F220/26—Esters containing oxygen in addition to the carboxy oxygen
- C08F220/28—Esters containing oxygen in addition to the carboxy oxygen containing no aromatic rings in the alcohol moiety
- C08F220/281—Esters containing oxygen in addition to the carboxy oxygen containing no aromatic rings in the alcohol moiety and containing only one oxygen, e.g. furfuryl (meth)acrylate or 2-methoxyethyl (meth)acrylate
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J11/00—Features of adhesives not provided for in group C09J9/00, e.g. additives
- C09J11/02—Non-macromolecular additives
- C09J11/06—Non-macromolecular additives organic
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
- C09J133/04—Homopolymers or copolymers of esters
- C09J133/14—Homopolymers or copolymers of esters of esters containing halogen, nitrogen, sulfur or oxygen atoms in addition to the carboxy oxygen
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J4/00—Adhesives based on organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond ; adhesives, based on monomers of macromolecular compounds of groups C09J183/00 - C09J183/16
- C09J4/06—Organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond in combination with a macromolecular compound other than an unsaturated polymer of groups C09J159/00 - C09J187/00
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
- C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
- Y10T428/2809—Web or sheet containing structurally defined element or component and having an adhesive outermost layer including irradiated or wave energy treated component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
- Y10T428/2852—Adhesive compositions
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
- Y10T428/2852—Adhesive compositions
- Y10T428/2878—Adhesive compositions including addition polymer from unsaturated monomer
- Y10T428/2891—Adhesive compositions including addition polymer from unsaturated monomer including addition polymer from alpha-beta unsaturated carboxylic acid [e.g., acrylic acid, methacrylic acid, etc.] Or derivative thereof
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Polymers & Plastics (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Medicinal Chemistry (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Adhesive Tapes (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Macromonomer-Based Addition Polymer (AREA)
Abstract
Description
Claims (7)
- 카르복실기 함유 중합성 모노머(A1)와 카르복실기 함유 중합성 모노머와 공중합 가능한 다른 모노머(A2)를 용액 중합에 따라서 중합하여 얻어지는 카르복실기 함유 공중합체와,중화제(A3), 및가교제(A4)로부터 형성된 점착제 조성물로 구성되는 친수성 점착제(A) 및 에너지선 중합성 화합물(B)을 포함하는 에너지선 경화형 친수성 점착제 조성물.
- 제1항에 있어서, 카르복실기 함유 중합성 모노머와 공중합가능한 다른 모노머(A2)가 하기 화학식 1로 나타내어지는 화합물인 에너지선 경화형 친수성 점착제 조성물.(식중, X1, X2 및 X3는 각각 독립적으로 수소 또는 메틸기를 나타내고; R1은 탄소수 2~12의 2가 탄화수소기를 나타내며; R2는 탄소수 1~10의 탄화수소기를 나타내고, n은 1~10이다.)
- 제1항 또는 제2항에 있어서, 에너지선 중합성 화합물(B)이 분자 내에 적어도 1개의 에너지선 중합성 탄소-탄소 2중 결합을 가지며, 100~50,000의 중량평균분자량을 갖는 화합물인 에너지선 경화형 친수성 점착제 조성물.
- 제1항 또는 제2항에 있어서, 광중합개시제(C)를 더 포함하는 에너지선 경화형 친수성 점착제 조성물.
- 제1항 또는 제2항의 에너지선 경화형 친수성 점착제 조성물로 도포된 기재를 포함하는 점착시트.
- 제5항에 있어서, 웨이퍼 가공용 점착시트로서 사용되는 점착시트.
- 제5항에 있어서, 웨이퍼 표면 보호용 점착시트로서 사용되는 점착시트.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1997-232238 | 1997-08-28 | ||
JP23223897A JP4072927B2 (ja) | 1997-08-28 | 1997-08-28 | エネルギー線硬化型親水性粘着剤組成物およびその利用方法 |
Publications (2)
Publication Number | Publication Date |
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KR19990023936A KR19990023936A (ko) | 1999-03-25 |
KR100539009B1 true KR100539009B1 (ko) | 2006-03-20 |
Family
ID=16936147
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019980034896A KR100539009B1 (ko) | 1997-08-28 | 1998-08-27 | 에너지선경화형친수성점착제조성물및그이용방법 |
Country Status (9)
Country | Link |
---|---|
US (1) | US6040048A (ko) |
EP (1) | EP0899316B1 (ko) |
JP (1) | JP4072927B2 (ko) |
KR (1) | KR100539009B1 (ko) |
CN (1) | CN1136283C (ko) |
DE (1) | DE69824502T2 (ko) |
HK (1) | HK1017372A1 (ko) |
SG (1) | SG70118A1 (ko) |
TW (1) | TW509715B (ko) |
Families Citing this family (24)
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US6235387B1 (en) * | 1998-03-30 | 2001-05-22 | 3M Innovative Properties Company | Semiconductor wafer processing tapes |
JP4053656B2 (ja) | 1998-05-22 | 2008-02-27 | リンテック株式会社 | エネルギー線硬化型親水性粘着剤組成物およびその利用方法 |
JP4149583B2 (ja) * | 1998-09-10 | 2008-09-10 | 株式会社ディスコ | 研削装置 |
JP2000328023A (ja) * | 1999-05-21 | 2000-11-28 | Lintec Corp | 粘着シート |
US7476533B2 (en) | 2002-04-19 | 2009-01-13 | Adhesives Research, Inc. | Diagnostic devices for use in the assaying of biological fluids |
JP4812963B2 (ja) * | 2001-05-18 | 2011-11-09 | リンテック株式会社 | 半導体ウエハ加工用粘着シートおよび半導体ウエハの加工方法 |
JP2005179496A (ja) * | 2003-12-19 | 2005-07-07 | Nitto Denko Corp | 加熱剥離型粘着シート |
KR100686772B1 (ko) * | 2004-10-06 | 2007-02-23 | 엘지전자 주식회사 | 전기오븐레인지 |
JP2006165004A (ja) * | 2004-12-02 | 2006-06-22 | Sumitomo Bakelite Co Ltd | 半導体ウエハ加工用粘着テープ |
SG160396A1 (en) * | 2005-03-18 | 2010-04-29 | Denki Kagaku Kogyo Kk | Adhesive composition and temporary fixation method of member using it |
TWI333672B (en) * | 2005-03-29 | 2010-11-21 | Furukawa Electric Co Ltd | Wafer-dicing adhesive tape and method of producing chips using the same |
KR101447298B1 (ko) * | 2006-01-13 | 2014-10-06 | 덴끼 가가꾸 고교 가부시키가이샤 | 경화성 수지 조성물, 표면 보호 방법, 가고정 방법 및 박리방법 |
JP4931519B2 (ja) * | 2006-09-01 | 2012-05-16 | 日東電工株式会社 | 活性面貼付ダイシング用粘着テープ又はシートおよび被加工物の切断片のピックアップ方法 |
EP2349566B1 (en) | 2008-10-03 | 2016-01-06 | Micronics, Inc. | Microfluidic apparatus and methods for performing blood typing and crossmatching |
KR101006526B1 (ko) * | 2008-10-22 | 2011-01-07 | 주식회사 하이닉스반도체 | 웨이퍼 마운트 테이프, 이를 이용한 웨이퍼 가공 장치 및 방법 |
KR101832735B1 (ko) | 2011-09-27 | 2018-02-28 | 율촌화학 주식회사 | 웨이퍼 다이싱용 점착 테이프 |
JP5376345B2 (ja) * | 2011-10-11 | 2013-12-25 | 綜研化学株式会社 | 光重合性粘着剤組成物及びこれを使用した粘着シート |
JP5376346B2 (ja) * | 2011-10-18 | 2013-12-25 | 綜研化学株式会社 | 光重合性粘着剤組成物及びこれを利用した粘着シート |
JP5909460B2 (ja) * | 2012-09-28 | 2016-04-26 | 富士フイルム株式会社 | 半導体装置製造用仮接着剤、並びに、それを用いた接着性支持体、及び、半導体装置の製造方法。 |
WO2014182844A1 (en) | 2013-05-07 | 2014-11-13 | Micronics, Inc. | Microfluidic devices and methods for performing serum separation and blood cross-matching |
JP6368718B2 (ja) * | 2013-09-27 | 2018-08-01 | リンテック株式会社 | 電気剥離性粘着剤組成物、及び電気剥離性粘着シート、並びに電気剥離性粘着シートの使用方法 |
US10526511B2 (en) | 2016-12-22 | 2020-01-07 | Avery Dennison Corporation | Convertible pressure sensitive adhesives comprising urethane (meth)acrylate oligomers |
CN107446516B (zh) * | 2017-09-01 | 2020-10-23 | 安徽明讯新材料科技股份有限公司 | 一种基材可回收的保护膜及其制备方法 |
JP7201529B2 (ja) * | 2019-04-26 | 2023-01-10 | 藤森工業株式会社 | 光学用粘着剤組成物、及びそれを用いた粘着フィルム、粘着シート |
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JP2984549B2 (ja) * | 1994-07-12 | 1999-11-29 | リンテック株式会社 | エネルギー線硬化型感圧粘着剤組成物およびその利用方法 |
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1997
- 1997-08-28 JP JP23223897A patent/JP4072927B2/ja not_active Expired - Lifetime
-
1998
- 1998-08-25 TW TW087113958A patent/TW509715B/zh not_active IP Right Cessation
- 1998-08-27 US US09/141,385 patent/US6040048A/en not_active Expired - Lifetime
- 1998-08-27 EP EP98306877A patent/EP0899316B1/en not_active Expired - Lifetime
- 1998-08-27 KR KR1019980034896A patent/KR100539009B1/ko not_active IP Right Cessation
- 1998-08-27 DE DE69824502T patent/DE69824502T2/de not_active Expired - Lifetime
- 1998-08-28 CN CNB981185231A patent/CN1136283C/zh not_active Expired - Fee Related
- 1998-08-28 SG SG1998003344A patent/SG70118A1/en unknown
-
1999
- 1999-06-17 HK HK99102605A patent/HK1017372A1/xx not_active IP Right Cessation
Patent Citations (8)
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JPS62205180A (ja) * | 1986-03-03 | 1987-09-09 | F S K Kk | 粘着シ−ト |
JPH05214298A (ja) * | 1992-02-07 | 1993-08-24 | Nippon Carbide Ind Co Inc | 活性エネルギー線硬化型感圧接着剤組成物 |
JPH0616524A (ja) * | 1992-07-03 | 1994-01-25 | Kao Corp | クレンジング用組成物 |
JPH06287260A (ja) * | 1993-03-30 | 1994-10-11 | Arakawa Chem Ind Co Ltd | 活性エネルギー線硬化性含水樹脂組成物 |
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JPH08253736A (ja) * | 1995-01-20 | 1996-10-01 | Kansai Paint Co Ltd | 活性エネルギー線硬化型接着剤組成物、該組成物を用いるラミネートフィルムの形成方法およびラミネートフィルム |
JPH08302309A (ja) * | 1995-04-27 | 1996-11-19 | Nitto Denko Corp | レジスト剥離用接着シ―ト類と剥離方法 |
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Also Published As
Publication number | Publication date |
---|---|
CN1136283C (zh) | 2004-01-28 |
SG70118A1 (en) | 2000-01-25 |
KR19990023936A (ko) | 1999-03-25 |
JPH1161090A (ja) | 1999-03-05 |
EP0899316B1 (en) | 2004-06-16 |
JP4072927B2 (ja) | 2008-04-09 |
DE69824502T2 (de) | 2004-11-04 |
HK1017372A1 (en) | 1999-11-19 |
TW509715B (en) | 2002-11-11 |
CN1210126A (zh) | 1999-03-10 |
DE69824502D1 (de) | 2004-07-22 |
EP0899316A1 (en) | 1999-03-03 |
US6040048A (en) | 2000-03-21 |
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