DE69824502D1 - Durch Energiestrahl härtbare, hydrophile und druckempfindliche Klebstoffzusammensetzung und deren Verwendung - Google Patents

Durch Energiestrahl härtbare, hydrophile und druckempfindliche Klebstoffzusammensetzung und deren Verwendung

Info

Publication number
DE69824502D1
DE69824502D1 DE69824502T DE69824502T DE69824502D1 DE 69824502 D1 DE69824502 D1 DE 69824502D1 DE 69824502 T DE69824502 T DE 69824502T DE 69824502 T DE69824502 T DE 69824502T DE 69824502 D1 DE69824502 D1 DE 69824502D1
Authority
DE
Germany
Prior art keywords
curable
hydrophilic
energy
pressure
sensitive adhesive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69824502T
Other languages
English (en)
Other versions
DE69824502T2 (de
Inventor
Kiichiro Kato
Takeshi Kondoh
Katsuhisa Taguchi
Kazuhiro Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lintec Corp
Original Assignee
Lintec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lintec Corp filed Critical Lintec Corp
Publication of DE69824502D1 publication Critical patent/DE69824502D1/de
Application granted granted Critical
Publication of DE69824502T2 publication Critical patent/DE69824502T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/10—Esters
    • C08F220/26—Esters containing oxygen in addition to the carboxy oxygen
    • C08F220/28—Esters containing oxygen in addition to the carboxy oxygen containing no aromatic rings in the alcohol moiety
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/10—Esters
    • C08F220/26—Esters containing oxygen in addition to the carboxy oxygen
    • C08F220/28—Esters containing oxygen in addition to the carboxy oxygen containing no aromatic rings in the alcohol moiety
    • C08F220/281—Esters containing oxygen in addition to the carboxy oxygen containing no aromatic rings in the alcohol moiety and containing only one oxygen, e.g. furfuryl (meth)acrylate or 2-methoxyethyl (meth)acrylate
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J11/00—Features of adhesives not provided for in group C09J9/00, e.g. additives
    • C09J11/02—Non-macromolecular additives
    • C09J11/06—Non-macromolecular additives organic
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
    • C09J133/04—Homopolymers or copolymers of esters
    • C09J133/14—Homopolymers or copolymers of esters of esters containing halogen, nitrogen, sulfur or oxygen atoms in addition to the carboxy oxygen
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J4/00—Adhesives based on organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond ; adhesives, based on monomers of macromolecular compounds of groups C09J183/00 - C09J183/16
    • C09J4/06—Organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond in combination with a macromolecular compound other than an unsaturated polymer of groups C09J159/00 - C09J187/00
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
    • C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
    • Y10T428/2809—Web or sheet containing structurally defined element or component and having an adhesive outermost layer including irradiated or wave energy treated component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
    • Y10T428/2852—Adhesive compositions
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
    • Y10T428/2852—Adhesive compositions
    • Y10T428/2878—Adhesive compositions including addition polymer from unsaturated monomer
    • Y10T428/2891—Adhesive compositions including addition polymer from unsaturated monomer including addition polymer from alpha-beta unsaturated carboxylic acid [e.g., acrylic acid, methacrylic acid, etc.] Or derivative thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Polymers & Plastics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Medicinal Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Adhesive Tapes (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
DE69824502T 1997-08-28 1998-08-27 Durch Energiestrahl härtbare, hydrophile und druckempfindliche Klebstoffzusammensetzung und deren Verwendung Expired - Lifetime DE69824502T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP23223897 1997-08-28
JP23223897A JP4072927B2 (ja) 1997-08-28 1997-08-28 エネルギー線硬化型親水性粘着剤組成物およびその利用方法

Publications (2)

Publication Number Publication Date
DE69824502D1 true DE69824502D1 (de) 2004-07-22
DE69824502T2 DE69824502T2 (de) 2004-11-04

Family

ID=16936147

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69824502T Expired - Lifetime DE69824502T2 (de) 1997-08-28 1998-08-27 Durch Energiestrahl härtbare, hydrophile und druckempfindliche Klebstoffzusammensetzung und deren Verwendung

Country Status (9)

Country Link
US (1) US6040048A (de)
EP (1) EP0899316B1 (de)
JP (1) JP4072927B2 (de)
KR (1) KR100539009B1 (de)
CN (1) CN1136283C (de)
DE (1) DE69824502T2 (de)
HK (1) HK1017372A1 (de)
SG (1) SG70118A1 (de)
TW (1) TW509715B (de)

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US6235387B1 (en) * 1998-03-30 2001-05-22 3M Innovative Properties Company Semiconductor wafer processing tapes
JP4053656B2 (ja) * 1998-05-22 2008-02-27 リンテック株式会社 エネルギー線硬化型親水性粘着剤組成物およびその利用方法
JP4149583B2 (ja) * 1998-09-10 2008-09-10 株式会社ディスコ 研削装置
JP2000328023A (ja) * 1999-05-21 2000-11-28 Lintec Corp 粘着シート
US7476533B2 (en) * 2002-04-19 2009-01-13 Adhesives Research, Inc. Diagnostic devices for use in the assaying of biological fluids
JP4812963B2 (ja) * 2001-05-18 2011-11-09 リンテック株式会社 半導体ウエハ加工用粘着シートおよび半導体ウエハの加工方法
JP2005179496A (ja) * 2003-12-19 2005-07-07 Nitto Denko Corp 加熱剥離型粘着シート
KR100686772B1 (ko) * 2004-10-06 2007-02-23 엘지전자 주식회사 전기오븐레인지
JP2006165004A (ja) * 2004-12-02 2006-06-22 Sumitomo Bakelite Co Ltd 半導体ウエハ加工用粘着テープ
KR101146964B1 (ko) * 2005-03-18 2012-05-23 덴끼 가가꾸 고교 가부시키가이샤 접착성 조성물 및 그것을 이용하는 부재의 가고정 방법
TWI333672B (en) * 2005-03-29 2010-11-21 Furukawa Electric Co Ltd Wafer-dicing adhesive tape and method of producing chips using the same
WO2007080936A1 (ja) * 2006-01-13 2007-07-19 Denki Kagaku Kogyo Kabushiki Kaisha 硬化性樹脂組成物、表面保護方法、仮固定方法、及び剥離方法
JP4931519B2 (ja) * 2006-09-01 2012-05-16 日東電工株式会社 活性面貼付ダイシング用粘着テープ又はシートおよび被加工物の切断片のピックアップ方法
WO2010040103A1 (en) 2008-10-03 2010-04-08 Micronics, Inc. Microfluidic apparatus and methods for performing blood typing and crossmatching
KR101006526B1 (ko) * 2008-10-22 2011-01-07 주식회사 하이닉스반도체 웨이퍼 마운트 테이프, 이를 이용한 웨이퍼 가공 장치 및 방법
KR101832735B1 (ko) 2011-09-27 2018-02-28 율촌화학 주식회사 웨이퍼 다이싱용 점착 테이프
JP5376345B2 (ja) * 2011-10-11 2013-12-25 綜研化学株式会社 光重合性粘着剤組成物及びこれを使用した粘着シート
JP5376346B2 (ja) * 2011-10-18 2013-12-25 綜研化学株式会社 光重合性粘着剤組成物及びこれを利用した粘着シート
JP5909460B2 (ja) * 2012-09-28 2016-04-26 富士フイルム株式会社 半導体装置製造用仮接着剤、並びに、それを用いた接着性支持体、及び、半導体装置の製造方法。
US10386377B2 (en) 2013-05-07 2019-08-20 Micronics, Inc. Microfluidic devices and methods for performing serum separation and blood cross-matching
US10703941B2 (en) * 2013-09-27 2020-07-07 Lintec Corporation Electrically peelable adhesive composition and electrically peelable pressure sensitive adhesive sheet, and method for using electrically peelable pressure sensitive adhesive sheet
US10526511B2 (en) 2016-12-22 2020-01-07 Avery Dennison Corporation Convertible pressure sensitive adhesives comprising urethane (meth)acrylate oligomers
CN107446516B (zh) * 2017-09-01 2020-10-23 安徽明讯新材料科技股份有限公司 一种基材可回收的保护膜及其制备方法
JP7201529B2 (ja) * 2019-04-26 2023-01-10 藤森工業株式会社 光学用粘着剤組成物、及びそれを用いた粘着フィルム、粘着シート

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JP3014203B2 (ja) * 1992-02-07 2000-02-28 日本カーバイド工業株式会社 活性エネルギー線硬化型感圧接着剤組成物
US5302629A (en) * 1992-05-15 1994-04-12 Berejka Anthony J Hydrophilic acrylic pressure sensitive adhesives
JP3208501B2 (ja) * 1992-06-02 2001-09-17 日東電工株式会社 半導体ウエハの保護部材
JP2736486B2 (ja) * 1992-07-03 1998-04-02 花王株式会社 クレンジング用組成物
JP3260845B2 (ja) * 1992-09-07 2002-02-25 株式会社リコー 記録装置
JP2590682B2 (ja) * 1993-03-30 1997-03-12 荒川化学工業株式会社 活性エネルギー線硬化性含水樹脂組成物
JPH0766102A (ja) * 1993-08-24 1995-03-10 Nitto Denko Corp レジスト剥離用の吸水性シート類、及びこれを用いたレジストの剥離方法
JP2984549B2 (ja) * 1994-07-12 1999-11-29 リンテック株式会社 エネルギー線硬化型感圧粘着剤組成物およびその利用方法
JPH08253736A (ja) * 1995-01-20 1996-10-01 Kansai Paint Co Ltd 活性エネルギー線硬化型接着剤組成物、該組成物を用いるラミネートフィルムの形成方法およびラミネートフィルム
JPH08302309A (ja) * 1995-04-27 1996-11-19 Nitto Denko Corp レジスト剥離用接着シ―ト類と剥離方法
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Also Published As

Publication number Publication date
KR19990023936A (ko) 1999-03-25
JP4072927B2 (ja) 2008-04-09
EP0899316A1 (de) 1999-03-03
TW509715B (en) 2002-11-11
EP0899316B1 (de) 2004-06-16
JPH1161090A (ja) 1999-03-05
SG70118A1 (en) 2000-01-25
US6040048A (en) 2000-03-21
CN1136283C (zh) 2004-01-28
KR100539009B1 (ko) 2006-03-20
DE69824502T2 (de) 2004-11-04
HK1017372A1 (en) 1999-11-19
CN1210126A (zh) 1999-03-10

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