KR100491452B1 - 웨이퍼 표면 개질용 플루오로화합물을 포함하는 연마 용품 - Google Patents

웨이퍼 표면 개질용 플루오로화합물을 포함하는 연마 용품 Download PDF

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Publication number
KR100491452B1
KR100491452B1 KR10-2000-7002909A KR20007002909A KR100491452B1 KR 100491452 B1 KR100491452 B1 KR 100491452B1 KR 20007002909 A KR20007002909 A KR 20007002909A KR 100491452 B1 KR100491452 B1 KR 100491452B1
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KR
South Korea
Prior art keywords
abrasive
abrasive article
wafer
article
stationary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR10-2000-7002909A
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English (en)
Korean (ko)
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KR20010024145A (ko
Inventor
로버트 메스너
칼 알. 케셀
죠지 지. 무어
Original Assignee
미네소타 마이닝 앤드 매뉴팩춰링 캄파니
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of KR20010024145A publication Critical patent/KR20010024145A/ko
Application granted granted Critical
Publication of KR100491452B1 publication Critical patent/KR100491452B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • B24D3/32—Resins or natural or synthetic macromolecular compounds for porous or cellular structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • Y10T428/24372—Particulate matter
    • Y10T428/2438—Coated
    • Y10T428/24388—Silicon containing coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31—Surface property or characteristic of web, sheet or block
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31652—Of asbestos
    • Y10T428/31663—As siloxane, silicone or silane

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Moulding By Coating Moulds (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
KR10-2000-7002909A 1997-09-19 1998-01-23 웨이퍼 표면 개질용 플루오로화합물을 포함하는 연마 용품 Expired - Fee Related KR100491452B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/933,870 US6121143A (en) 1997-09-19 1997-09-19 Abrasive articles comprising a fluorochemical agent for wafer surface modification
US08/933,870 1997-09-19
PCT/US1998/001364 WO1999015311A1 (en) 1997-09-19 1998-01-23 Abrasive articles comprising a fluorochemical agent for wafer surface modification

Publications (2)

Publication Number Publication Date
KR20010024145A KR20010024145A (ko) 2001-03-26
KR100491452B1 true KR100491452B1 (ko) 2005-05-25

Family

ID=25464634

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2000-7002909A Expired - Fee Related KR100491452B1 (ko) 1997-09-19 1998-01-23 웨이퍼 표면 개질용 플루오로화합물을 포함하는 연마 용품

Country Status (10)

Country Link
US (1) US6121143A (enExample)
EP (1) EP1015175B1 (enExample)
JP (1) JP4344083B2 (enExample)
KR (1) KR100491452B1 (enExample)
CN (1) CN1158167C (enExample)
AU (1) AU6248998A (enExample)
DE (1) DE69824747T2 (enExample)
MY (1) MY126569A (enExample)
TW (1) TW480280B (enExample)
WO (1) WO1999015311A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101277827B1 (ko) 2006-04-27 2013-06-21 쓰리엠 이노베이티브 프로퍼티즈 컴파니 구조화된 연마 용품 및 이의 제조 및 사용 방법

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